CN101520040A

CN101520040A - Manufacturing method of multi-flow passage fluid conveying device

Info

Publication number: CN101520040A
Application number: CN200810082548A
Authority: CN
Inventors: 陈世昌; 张英伦; 余荣侯; 邱士哲
Original assignee: Microjet Technology Co Ltd
Current assignee: Microjet Technology Co Ltd
Priority date: 2008-02-26
Filing date: 2008-02-26
Publication date: 2009-09-02
Anticipated expiration: 2028-02-26
Also published as: CN101520040B

Abstract

The invention relates to a manufacturing method of a multi-flow passage fluid conveying device. The method comprises the following steps: a valve body layer is formed and is provided with at least one inlet channel and at least one outlet channel; a valve body cover layer is correspondingly formed on the valve body layer and is provided with a pressure chamber; a flexible film is formed and is provided with a plurality of valve (plate) structures, the valve structures have equal thickness and are made of identical material, and the rigidity of at least one valve structure is different from that of other valve structures; an actuating device is formed; the flexible film is arranged between the valve body layer and the valve body cover layer, and valve body layer, the flexible film and the valve body cover layer are mutually assembled and positioned; and the actuating device is used for sealing the pressure chamber of the valve body cover layer to form a multi-flow passage fluid conveying device.

Description

The manufacture method of multi-flow passage fluid conveying device

Technical field

The invention relates to a kind of manufacture method of fluid delivery system, refer to a kind of manufacture method that is applicable to the multi-flow passage fluid conveying device of micro-pump structure especially.

Background technique

In each field, no matter be industry such as medicine, computer technology, printing, the energy at present, product all develops towards sophistication and microminiaturization direction, wherein the fluid delivery structure that product comprised such as Micropump, sprayer, ink gun, industrial printing device are its key technology, therefore, how to break through its technical bottleneck, be the important content of development by innovation structure.

See also Fig. 1, it is the structural representation of known micro-pump structure, known micro-pump structure 10 is made up of valve block 11, valve body cover 12, valve body film 13, micro-actuator 14 and lid 15, wherein, valve body film 13 comprises inlet valve mechanism 131 and outlet valve structure 132, valve block 11 comprises inlet channel 111 and outlet passage 112,

valve body cover

12 and 14 of micro-actuators form a pressure chamber 123, and valve body film 13 is arranged between valve block 11 and the valve body cover 12.

When a voltage acts on the two poles of the earth up and down of micro-actuator 14, can produce an electric field, it is crooked to make micro-actuator 14 produce under this effect of electric field, when micro-actuator 14 is bent upwards distortion towards the direction of arrow x indication, to make the volume of pressure chamber 123 increase, thereby produce a suction, the inlet valve structure 131 of valve body film 13 is opened, make liquid be drawn from the inlet channel on the valve block 11 111, and the inlet valve structure 131 of the valve body film 13 of flowing through and the inlet valve block passage 121 on the valve body cover 12 and in the feed pressure chamber 123, otherwise, when micro-actuator 14 changes when the opposite direction of arrow x is bent downwardly distortion because of direction of an electric field, volume that then can compression pressure chamber 123, make the fluid of 123 pairs of inside of pressure chamber produce a thrust, and make the inlet valve structure 131 of valve body film 13, outlet valve structure 132 is born a downward thrust, and outlet valve structure 132 will be opened, and the outlet valve passage 122 that liquid is passed through on the valve body cover 12 by pressure chamber 123, the outlet valve structure 132 of valve body film 13, and outside the outlet passage 112 effluent fluid feedways 10 of valve block 11, thereby finish the transmission course of fluid.

Though known micro-pump structure 10 can reach the function of conveyance fluid, but it is to use single pressure chamber to cooperate single circulation duct, single import and export and the design of single right valve mechanism, if when using known micro-pump structure 10 to carry out the mixing of different proportion of two kinds of different liquids, need to draw again according to different proportion by two pumps earlier to mix, just mixed fluid is sent to the mode that micro-pump structure 10 carries out FLUID TRANSPORTATION then, or only use a pump, but must arrange in pairs or groups external flow control valve, so mode of execution will increase the complexity of entire pump system.

Therefore, how to develop a kind of manufacture method of improving the multi-flow passage fluid conveying device of above-mentioned prior art disappearance, real in pressing for the problem of solution at present.

Summary of the invention

Main purpose of the present invention is to provide a kind of manufacture method of multi-flow passage fluid conveying device, carry out the mixing of the different proportion of two kinds of different liquids to solve with known micro-pump structure, need to draw again according to different proportion by two pumps earlier to mix, or only use a pump, but must arrange in pairs or groups external flow control valve, will increase the shortcomings such as complexity of entire pump system.

For reaching above-mentioned purpose, of the present invention one implements the sample attitude for a kind of manufacture method of multi-flow passage fluid conveying device is provided than broad sense, and it comprises the following step: form the valve body layer, have at least one outlet passage and at least one inlet channel; The corresponding valve body cover layer that forms on the valve body layer, it has pressure chamber; Form the flexible film, it has a plurality of valve structures, and a plurality of valve mechanisms are stack piles and make with material, and wherein the rigidity of at least one valve mechanism is different with other valve mechanism; Form actuator; The flexible film is arranged between valve body layer and the valve body cover layer, and valve body layer, flexible film and valve body cover layer are assembled the location mutually; And with the pressure chamber of actuator closed valve cap rock, to form multi-flow passage fluid conveying device.

Description of drawings

Fig. 1 is the structural representation of known micro-pump structure.

Fig. 2 (a) is the decomposition texture schematic representation of the multi-flow passage fluid conveying device of preferred embodiment of the present invention.

Fig. 2 (b) is the structure schematic representation of the valve block shown in Fig. 2 (a).

Fig. 2 (c) is the structure schematic representation of the valve body cover shown in Fig. 2 (a).

Fig. 2 (d) is the structural representation of the valve body film shown in Fig. 2 (a).

Fig. 2 (e) is the package assembly schematic representation of Fig. 2 (a).

Fig. 3 (a) is the A-A cross-sectional view of the not actuator state of the multi-flow passage fluid conveying device shown in Fig. 2 (e).

Fig. 3 (b) is pressure chamber's swelling state schematic representation of Fig. 3 (a).

Fig. 3 (c) is pressure chamber's compressive state schematic representation of Fig. 3 (b).

Fig. 4 (a) is the B-B cross-sectional view of the not actuator state of the multi-flow passage fluid conveying device shown in Fig. 2 (e).

Fig. 4 (b) is pressure chamber's swelling state schematic representation of Fig. 4 (a).

Fig. 4 (c) is pressure chamber's compressive state schematic representation of Fig. 4 (b).

Fig. 5 (a)～Fig. 5 (e) is the structural representation of the various embodiments of the valve body film that multi-flow passage fluid conveying device of the present invention comprised.

Fig. 6 (a)～Fig. 6 (e), it is the structural representation of the valve mechanism of preferred embodiment of the present invention.

Fig. 7 (a) is to the various embodiments structural representation of Figure 18 (a) for the valve mechanism of valve body film combination different rigidity of the present invention design.

Fig. 7 (b) to Figure 18 (b) be respectively Fig. 7 (a) to the different rigidity shown in Figure 18 (a) two the outlet valve mechanisms experimental data figure.

Figure 19 is the manufacturing flow chart of the multi-flow passage fluid conveying device of preferred embodiment of the present invention.

Embodiment

Some exemplary embodiments that embody feature of the present invention and advantage will be described in detail in the explanation of back segment.Be understood that the present invention can have various variations on different aspects, its neither departing from the scope of the present invention, and explanation wherein and to be shown in be when the usefulness that explain in essence, but not in order to restriction the present invention.

Multi-flow passage fluid conveying device of the present invention mainly is the configuration concept that cooperates a plurality of circulation ducts, a plurality of import and export and a plurality of valve mechanisms thereof by single pressure chamber and actuator, can not increase under the overall dimensions, flow and lift are greatly increased, be suitable for very much flow and the higher relatively application of lift demand.

See also Fig. 2 (a), it is the decomposition texture schematic representation of the multi-flow passage fluid conveying device of preferred embodiment of the present invention, as shown in the figure, the multi-flow passage fluid conveying device 20 of present embodiment is by valve block 21, valve body cover 22, valve body film 23, actuator 24 and lid 25 are formed, form a pressure chamber 225 (shown in Fig. 2 (c)) between valve body cover 22 and the actuator 24, be mainly used to store fluid, the assembling mode of multi-flow passage fluid conveying device 20 is that valve body film 23 is arranged between valve block 21 and the valve body cover 22, and make valve body film 23 and valve block 21 and valve body cover 22 corresponding settings, and between valve body film 23 and valve body cover 22, form first temporary room, and between valve body film 23 and valve block 21, form second temporary room, and the opposite position on valve body cover 22 also is provided with actuator 24, actuator 24 is to be assembled by a vibration film 241 and an actuator 242, in order to drive the start of multi-flow passage fluid conveying device 20, at last, again lid 25 is arranged at the top of actuator 24, so it is in regular turn with valve block 21, valve body film 23, valve body cover 22, actuator 24 and lid 25 be corresponding to stack setting, with the assembling (shown in Fig. 2 (e)) of finishing multi-flow passage fluid conveying device 20.

Wherein, valve block 21 and valve body cover 22 are the main structure of direct fluid turnover in the multi-flow passage fluid conveying device 20 of the present invention, please consult Fig. 2 (b) again and cooperate Fig. 2 (a), wherein Fig. 2 (b) is the structure schematic representation of the valve block shown in Fig. 2 (a), shown in Fig. 2 (a), valve block 21 has inlet

channel

211a, 211b and

outlet passage

212a, 212b, but not as limit, the inlet channel that multi-flow passage fluid conveying device 20 is set and the quantity of outlet passage can be respectively one or more, fluid can be imported by the external world, by

entrance channel

211a, 211b is sent to the opening 213a of valve block 21 respectively, 213b, and, in present embodiment, formed second temporary room is the outlet temporary storage cavity 215a shown in the figure between valve body film 23 and the valve block 21,215b, but not as limit, its be by valve block 21 in outlet flow 212a, the corresponding position of 212b produces the part depression and forms, and respectively with

outlet flow

212a, 212b is connected, this outlet

temporary storage cavity

215a, 215b is in order to temporary transient store fluid, and makes fluid by outlet

temporary storage cavity

215a, 215b is by opening 214a, 214b and be delivered to

outlet passage

212a, 212b flows out.And, on valve block 21, also have a plurality of groove structures, use for a seal ring 26 (shown in Fig. 3 (a) and Fig. 4 (a)) and be provided with thereon, in present embodiment, valve block 21 has groove 216a, the 216b around opening 213a, 213b periphery, and is surrounded on groove 217a, the 217b of outlet

temporary storage cavity

215a, 215b periphery.

See also Fig. 2 (c) and cooperate Fig. 2 (a), wherein Fig. 2 (c) is the structure schematic representation of the valve body cover shown in Fig. 2 (a), as shown in the figure, valve body cage 22 has a upper surface 220 and a lower surface 221, and on valve body cage 22, also have and run through the inlet valve passage 222a of upper surface 220 to lower surface 221,222b and

outlet valve passage

223a, 223b, and this

inlet valve passage

222a, 222b is the opening 213a that is arranged at respectively with valve block 21, the corresponding position of 213b, and

outlet valve passage

223a, 223b then is arranged at the outlet temporary storage cavity 215a with valve block 21 respectively, opening 214a in the 215b, the corresponding position of 214b, and, in present embodiment, formed a plurality of first temporary rooms are the inlet temporary storage cavity 224a shown in the figure between valve body film 23 and the valve body cover 22,224b, and not as limit, its be by under the valve body cover 22 surface 221 in inlet valve passage 222a, the corresponding position of 222b produces the part depression and forms, and it is to be communicated in

inlet valve passage

222a, 222b.

Please consult Fig. 2 (c) again, as shown in the figure, the upper surface 220 of valve body cover 22 is partly to cave in, to form a pressure chamber 225, it is the actuator 242 corresponding settings with actuator 24, pressure chamber 225 is by

inlet valve passage

222a, 222b is communicated in inlet temporary storage cavity 224a respectively, 224b, and while and

outlet valve passage

223a, 223b is connected, therefore, when actuator 242 is subjected to voltage actuation actuator 24 epireliefs are out of shape, the volumetric expansion of build-up of pressure chamber 225 and produce Negative Pressure Difference, can make fluid through

inlet valve passage

222a, 222b flow in the pressure chamber 225, thereafter, after the direction of an electric field that puts on actuator 242 changes, actuator 242 will make actuator 24 concave deformation pressure chamber 225 shrink and volume reduces, make pressure chamber 225 and the extraneous positive pressure difference that produces, impel fluid by outlet valve passage 223a, outside the 223b outflow pressure chamber 225, in this simultaneously, there is segment fluid flow can flow into inlet valve passage 222a equally, 222b and inlet temporary room 224a, in the 224b, yet because the inlet valve structure 231a of this moment, 231b (shown in Fig. 3 (c) and Fig. 4 (c)) is for making the pressurized closing state, so this fluid can be by

inlet valve block

2313a, 2313b and produce the phenomenon of refluence, as for temporarily being stored in inlet temporary storage cavity 224a, fluid in the 224b, then be subjected to voltage actuation again in actuator 242, repeat to make actuator 24 again when epirelief distortion and boost pressure chamber 225 volumes, again by inlet temporary storage cavity 224a, the 224b warp is to inlet

valve passage

222a, 222b and in the feed pressure chamber 225, to carry out the conveying of fluid.

In addition, have a plurality of groove structures on the valve body cover 22 equally, with the present embodiment is example, upper surface 220 at valve body cage 22 has the groove 226 that is provided with around pressure chamber 225, it is arranged at wherein for a seal ring 28 (shown in Fig. 3 (a) and Fig. 4 (a)), on lower surface 221, then have around being arranged at inlet temporary storage cavity 224a, the groove 227a of 224b, 227b, and around being arranged at outlet valve passage 223a, the groove 228a of 223b, 228b, similarly, above-mentioned groove structure is to use for a seal ring 27 (shown in Fig. 3 (a) and Fig. 4 (a)) to be arranged at wherein.

See also Fig. 2 (d) and cooperate Fig. 2 (a), wherein Fig. 2 (d) is the structural representation of the valve body film shown in Fig. 2 (a), as shown in the figure, valve body film 23 mainly is to process with tradition, or planographic printing etching, or laser beam machining, or electroforming processing, or mode such as electro discharge machining is made, and be the identical in fact flake structure of a thickness, have a plurality of hollow out threshold switchs on it, comprise first threshold switch and second threshold switch, in present embodiment, first threshold switch is

inlet valve structure

231a, 231b, and second threshold switch is

outlet valve structure

232a, 232b, but not as limit, the inlet valve structure that multi-flow passage fluid conveying device 20 is set and the quantity of outlet valve structure can be respectively one or more, wherein,

inlet valve structure

231a, 231b has inlet valve block 2313a respectively, 2313b and a plurality of around

inlet valve block

2313a, 2313b periphery and the openwork hole 2312a that is provided with, 2312b, in addition, at hole 2312a, also have respectively between the 2312b and inlet valve block 2313a, the extension part 2311a that 2313b is connected, 2311b, bearing one when valve body film 23 transmits and during the stress that comes from pressure chamber 225, shown in Fig. 3 (c) and Fig. 4 (c),

inlet valve structure

231a, 231b is whole smooth on valve block 21, valve block 2313a enters the mouth this moment, 2313b can be near

groove

216a, 216b upper sealing ring 26 projections, and seal up opening 213a on the valve block 21,213b, and the openwork hole 2312a that it is peripheral, 2312b and

extension part

2311a, 2311b then takes advantage of a situation to float and is affixed on the valve block 21, so so inlet valve structure 231a, the closing function of 231b can't flow out fluid.

And under valve body film 23 is under pressure the suction that chamber 225 volumes increase and produce, owing to be arranged at the groove 216a of valve block 21, seal ring 26 in the 216b valve mechanism 231a that provided access, 231b one pre-power (Preforce), thereby inlet

valve block

2313a, 2313b can pass through extension part 2311a, the support of 2311b and produce the bigger tight effect of pre-lid, in case non-return stream, when the negative pressure because of pressure chamber 225 makes

inlet valve structure

231a, 231b produces displacement (shown in Fig. 3 (b) and Fig. 4 (b)), at this moment, fluid then can be by the hole 2312a of hollow out, 2312b is flow to the inlet temporary storage cavity 224a of valve body cover 22 by valve block 21,224b, and by inlet

temporary storage cavity

224a, 224b and

inlet valve passage

222a, 222b is sent in the pressure chamber 225, thus,

inlet valve structure

231a, 231b can open rapidly or close in response to the positive/negative pressure difference of pressure chamber's 225 generations, with the turnover of control fluid, and fluid can be back on the valve block 21.

Similarly, another valve mechanism that is positioned on the same valve body film 23 then is

outlet valve structure

232a, 232b, outlet valve block 2323a wherein, 2323b,

extension part

2321a, 2321b and

hole

2322a, 2322b do flowing mode all with

inlet valve structure

231a, 231b is identical, thereby repeat no more, thought outlet valve structure 232a, the seal ring 27 of 232b periphery is provided with direction, the seal ring 26 of 231b oppositely is provided with, thereby when producing a thrust when pressure chamber 225 compression, be arranged at the groove 228a of valve body cover 22, seal ring 27 in the 228b will provide

outlet valve mechanism

232a, 232b one pre-power (Preforce), make and

export valve block

2323a, 2323b can pass through extension part 2321a, the support of 2321b and produce the bigger tight effect of pre-lid, in case non-return stream (shown in Fig. 3 (b) and Fig. 4 (b)), when the malleation because of pressure chamber 225 makes

outlet valve mechanism

232a, 232b produces to top offset, at this moment, fluid then can be by the hole 2322a of hollow out, 2322b is flow to the outlet temporary storage cavity 215a of valve block 21 through valve body cover 22 by pressure chamber 225, in the 215b, and can pass through opening 214a, 214b and

outlet flow

212a, 212b discharges, thus, then can pass through outlet valve structure 232a, the mechanism that 232b opens, fluid is released in pressure chamber 225, with the function (shown in Fig. 3 (c) and Fig. 4 (c)) that reaches FLUID TRANSPORTATION.

See also Fig. 3 (a) and Fig. 4 (a), it is A-A and the B-B cross-sectional view that is respectively the not actuator state of the multi-flow passage fluid conveying device shown in Fig. 2 (e), in present embodiment, all

seal rings

26,27, but 28 its materials can be the good rubber material of endurance, but not as limit, wherein, be arranged on the valve block 21 around opening 213a, the groove 216a of 231b, seal ring 26 in the 216b can be a circle structure, its thickness is greater than groove 216a, the 216b degree of depth, make and be arranged at groove 216a, seal ring 26 in the 216b is that the surface that partly protrudes from valve block 21 constitutes a micro-convex structure, thereby make applying be arranged at the inlet valve structure 231a of the valve body film 23 on the valve block 21, the inlet valve block 2313a of 231b, 2313b forms a protuberance upwards because of the micro-convex structure of seal ring 26, and the remaining part of valve body film 23 is to replace mutually with valve body cover 22, so micro-convex structure is to inlet

valve structure

231a, 231b pushing tow and produce a pre-power (Preforce) effect, help to produce the bigger tight effect of pre-lid, in case non-return stream, and because the micro-convex structure that seal ring 26 upwards swells is the inlet valve structure 231a that is positioned at valve body film 23, the 231b place, so make

inlet valve structure

231a, 231b makes inlet valve block 2313a when start not, has a gap between the surface of 2313b and valve block 21, similarly, when seal ring 27 is arranged at around outlet valve passage 223a, the groove 228a of 223b, in the time of in the 228b, because its seal ring 27 is the lower surfaces 221 that are arranged at valve body cover 22, thereby sealing ring 27 is the outlet valve structure 232a that make valve body film 23,232b protrudes and forms one and swell downwards in the micro-convex structure of valve body cover 22, this micro-convex structure only its direction be formed at inlet valve structure 231a, the micro-convex structure of 231b is oppositely to be provided with, yet its function all as hereinbefore, thereby repeat no more.

Be arranged at groove structure 217a respectively as for all the other, 217b, 227a,

seal ring

26,27 and 28 in the 227b and 226, be mainly used to make respectively when fitting tightly between valve block 21 and valve body film 23, valve body film 23 and valve body cover 22 and valve body cover 22 and the actuator 24, prevent that fluid from leaking.

Certainly, above-mentioned micro-convex structure is except using groove and seal ring to arrange in pairs or groups to form, in some embodiments, the micro-convex structure of valve block 21 and valve body cover 22 also can adopt semiconductor technology, for example: planographic printing etching or plated film or galvanoplastics directly form on valve block 21 and valve body cover 22.

Please consult Fig. 3 (a)～Fig. 3 (c) and Fig. 4 (a)～Fig. 4 (c) simultaneously, as shown in the figure, when lid 25, actuator 24, valve body cover 22, valve body film 23,

seal ring

26,27,28 and valve block 21 correspond to each other the assembling be provided with after, opening 213a on the valve block 21,213b be respectively with valve body film 23 on inlet valve structure 231a, inlet valve passage 222a on 231b and the valve body cover 22,222b is corresponding, and the opening 214a on the valve block 21,214b then with valve body film 23 on outlet valve chip architecture 232a, outlet valve passage 223a on 232b and the valve body cover 22,223b is corresponding, and, because seal ring 26 is arranged at groove 216a, in the 216b, make the inlet valve structure 231a of valve body film 23, the 231b dimpling arises from the valve block 21, and by being positioned at groove 216a, seal ring 26 in the 216b contacts valve body film 23 and produces a pre-power (Preforce) effect, make

inlet valve structure

231a, 231b then forms a gap with the surface of valve block 21 when start not, similarly,

outlet valve structure

232a, 232b is also by establishing seal ring 27 as for groove 228a, the lower surface 221 of same way as among the 228b and valve body cover 22 forms a gap.

When with a voltage drive actuator 242, actuator 24 produces bending deflection, shown in Fig. 3 (b) and Fig. 4 (b), actuator 24 is the bending deflection that is directed downwards towards arrow b indication, make the volume of pressure chamber 225 increase, thereby produce a suction, make the inlet valve structure 231a of valve body film 23,231b,

outlet valve structure

232a, 232b all bears a downward pulling force, and make the inlet valve structure 231a that has a pre-power, the inlet valve block 2313a of 231b, 2313b opens (shown in Fig. 3 (b) and Fig. 4 (b)) rapidly, make liquid in large quantities inlet channel 211a and the 211b on valve block 21 drawn into, and the opening 213a on the valve block 21 of flowing through, 213b, inlet valve structure 231a on the valve body film 23, the hole 2312a of 231b, 2312b, inlet temporary storage cavity 224a on the valve body cover 22,224b, and inlet

valve block passage

222a, 222b and within the feed pressure chamber 225, at this moment, because the inlet valve structure 231a of valve body film 23,231b,

outlet valve structure

232a, 232b bears this downward pulling force, so be positioned at the outlet valve structure 232a of the other end, 232b is because of the feasible outlet valve block 2323a that is positioned on the valve body film 23 of this downward pulling force, 2323b seals up

outlet valve passage

223a, 223b, and make

outlet valve structure

232a, 232b closes.

When actuator 24 is bent upwards distortion because of the arrow a of direction of an electric field change shown in Fig. 3 (c) and Fig. 4 (c), volume that then can compression pressure chamber 225, make the fluid of 225 pairs of inside of pressure chamber produce a thrust, and make the inlet valve structure 231a of valve body film 23,231b,

outlet valve structure

232a, 232b bears a thrust upwards, at this moment, be arranged at groove 228a, seal ring 27 upper outlet valve mechanism 232a in the 228b, the outlet valve block 2323a of 232b, it can open (shown in Fig. 3 (c) and Fig. 4 (c)) rapidly 2323b, and liquid moment is led off in a large number, by pressure chamber 225 by the outlet valve passage 223a on the valve body cover 22,223b, outlet valve structure 232a on the valve body film 23, the hole 2322a of 232b, 2322b, outlet temporary storage cavity 215a on the valve block 21,215b, opening 214a, 214b and

outlet passage

212a, 212b and flowing out outside the multi-flow passage fluid conveying device 20, thereby finish the transmission course of fluid.

Similarly, this moment is because

inlet valve structure

231a, 231b bears the thrust that this makes progress, thereby feasible

inlet valve block

2313a, 2313b seals up opening 213a, 213b, thereby close

inlet valve structure

231a, 231b, make not adverse current of fluid, and, by

inlet valve structure

231a, 231b and

outlet valve structure

232a, 232b is equipped with the groove 216a on valve block 21 and valve body cover 22,216b and groove 228a, seal ring 26 in the 228b, 27 design, can make fluid in transport process, can not produce the situation of backflow, reach high efficiency transmission, and multi-flow passage fluid conveying device of the present invention is provided with a plurality of inlet valve structures and outlet valve structure on the constant valve body film of size, and different a plurality of inlet channeles and outlet passage are set on valve block, can form of mixing and the shunting output of a plurality of circulation ducts to carry out two kinds of different fluid.

Multi-flow passage fluid conveying device of the present invention can change by the configuration with set inlet valve structure and outlet valve structure on the valve body film; with mixing and/or shunting output in response to different fluid; see also Fig. 5 (a)～Fig. 5 (e); it is the structural representation of the various embodiments of the valve body film that multi-flow passage fluid conveying device of the present invention comprised; as shown in the figure; the valve body film of multi-flow passage fluid conveying device of the present invention can be selected to dispose two and advance two mixing that go out and flow divider structure (shown in Fig. 5 (a)); three advance a mixing valve structural arrangements that outes (shown in Fig. 5 (b)); one advances the three flow divider structural arrangements that go out (shown in Fig. 5 (c)); one advances the four flow divider structural arrangements that go out (shown in Fig. 5 (d)) or four advances a mixing valve structural arrangements that outes (shown in Fig. 5 (e)); but the configuration mode of the turnover valve mechanism of the valve body film of multi-flow passage fluid conveying device of the present invention is scope that the present invention protected so long as the configuration mode of the turnover valve mechanism of valve body film can reach the multithread road with the mixing of carrying out fluid and/or the effect of shunting output not as limit.

The inlet valve structure of the valve body film of multi-flow passage fluid conveying device of the present invention and the enforcement aspect of outlet valve structure also not only are confined to the inlet valve structure 231a shown in Fig. 2 (a) and Fig. 2 (d), 231b and outlet valve structure 232a, the form of 232b, also can use and have same thickness, same material, but the valve mechanism that rigidity is different, wherein, the rigidity of valve mechanism depends on the mode of appearance of valve mechanism, the width of the extension part that is comprised and quantity, and the vibration frequency adjustment that cooperates the control actuator is shunted or the ratio of fluid-mixing, see also Fig. 6 (a)～Fig. 6 (e), it is the structural representation of the valve mechanism of preferred embodiment of the present invention, shown in Fig. 6 (a), valve mechanism 61 has valve block 611, the openwork hole 612 that is provided with around valve block 611 peripheries, and between hole 612, also has the extension part 613 that is connected with valve block 611 respectively, in present embodiment middle valve plate 611 is a round structure, the quantity in hole 612 is 3, as for, the quantity of extension part 613 can be 3 and its shape can present the tangent line form, but the shape of valve block 611, the quantity of hole 612 and extension part 613 and shape be not as limit.

Please consult Fig. 6 (b) again, in some embodiments, the openwork hole 622 that valve mechanism 62 has valve block 621 equally, is provided with around valve block 621 peripheries, and between hole 622, also has the extension part 623 that is connected with valve block 621 respectively, in present embodiment middle valve plate 621 is a round structure, the quantity in hole 622 can be 4, as for, the quantity of extension part 623 is that 4 and its shape can present the straight line form, but the quantity of above-mentioned valve block 621 shapes, hole 622 and extension part 623 and shape be not as limit.

Please consult Fig. 6 (c) again, in some embodiments, valve mechanism 63 has valve block 631, hole 632 and extension part 633 equally, as for the annexation between valve block 631, hole 632 and the extension part 633 is same as described above, therefore do not give unnecessary details stating, in present embodiment, valve block 631 is a round structure, the quantity in hole 632 can be 4, as for, the quantity of extension part 633 is that 4 and its shape can present long S shape form, but the quantity of valve block 631 shapes, hole 632 and extension part 633 and shape be not as limit.

Please consult Fig. 6 (d) again, in some embodiments, valve mechanism 64 has valve block 641, hole 642 and extension part 643 equally, as for the annexation between valve block 641, hole 642 and the extension part 643 is in above-mentioned identical, therefore do not give unnecessary details stating, in present embodiment, valve block 641 is a round structure, the quantity in hole 642 can be 5, as for, the quantity of extension part 643 is that 5 and its shape can present short S shape form, but the quantity of valve block 641, hole 642 and extension part 643 and shape be not as limit.

Please consult Fig. 6 (e) again, in some embodiments, valve mechanism 65 has valve block 651, hole 652 and extension part 653 equally, as for the annexation between valve block 651, hole 652 and the extension part 653 is same as described above, therefore do not give unnecessary details stating, in present embodiment, valve block 651 is to have dentation structure 6511 around a similar round structure and its, the quantity in hole 652 can be 3, as for, the quantity of extension part 653 is that 3 and its shape can present the tangent line form, but the quantity of valve block 651 shapes, hole 652 and extension part 653 and shape be not as limit.

Certainly; the enforcement aspect of the valve mechanism that is suitable on the valve body film of multi-flow passage fluid conveying device of the present invention is not limited in Fig. 6 (a)～disclosed form of Fig. 6 (e); also can be by other variation; has same thickness so long as use; same material, but the different valve mechanism of rigidity is the scope that the present invention protects.

Can pass through valve mechanism and the change shape thereof shown in allocation plan 6 (a)～Fig. 6 (e) on the valve body film of multi-flow passage fluid conveying device of the present invention, utilize the valve mechanism combination of different rigidity design, under the body pressure of identical cabin, produce different valve openings because of its elasticity difference causes, cause the liquid of different proportion to mix.And, also can carry out fluid and shunt and be dispensed in the different vessels by suitable fluid line and terminal valve structural arrangements, reach as for distributing required ratio also can be provided with by aforesaid different rigidity valve mechanism.

See also Fig. 7 (a) to Figure 18 (a), it is the various embodiments structural representation of the valve mechanism of valve body film combination different rigidity of the present invention design, and Fig. 7 (a) to the valve body film shown in Figure 18 (a) be structure with two outlet valve mechanisms shuntings of two inlet valve structures of equal proportion rigid design collocation different rigidity ratio, in addition Fig. 7 (b) to Figure 18 (b) be respectively Fig. 7 (a) to the different rigidity shown in Figure 18 (a) two the outlet valve mechanisms experimental data figure, by Fig. 7 (b) to the laboratory data out of the ordinary of Figure 18 (b) as can be known, Fig. 7 (a) is to the configuration mode of the valve body film shown in Figure 18 (a) by two outlet valve mechanisms shuntings of the different rigidity of arranging in pairs or groups with two inlet valve structures of identical rigidity, when in case the vibration frequency of actuator (Frequency) changes, because the rigidity difference of two outlet valve mechanisms, therefore the two outlet valve mechanisms fluid flow of discharging is obviously also different, therefore can make multi-flow passage fluid conveying device of the present invention reach the effect of the shunting output of different proportion.

In addition, the configuration mode of valve body film can also export two inlet valve structures of valve mechanisms collocation different rigidities with two of identical rigid design, can make multi-flow passage fluid conveying device of the present invention reach the mixing effect of the different proportion that carries out two kinds of different liquids.

See also Figure 19 and the Fig. 2 that arranges in pairs or groups (a), wherein Figure 19 is the manufacturing flow chart of the multi-flow passage fluid conveying device of preferred embodiment of the present invention, at first need form a valve body layer, i.e. valve block 21 shown in Fig. 2 (a) (shown in step S191), thereafter, form a valve body cover layer, in present embodiment, this valve body cover layer is the valve body cover 22 shown in Fig. 2 (a), and it has a pressure chamber 225 (shown in step S192), then, on valve block 21 and valve body cover 22, form a micro-convex structure (shown in step S193) respectively, the generation type of this micro-convex structure can have dual mode, and not as limit: one, please refer to Fig. 2 (a), Fig. 3 (a), Fig. 4 (a) and embodiments of the invention, need prior to forming at least one groove respectively on valve block 21 and the valve body cover 22, promptly has groove 216a on the valve block 21 as shown in FIG., 216b, and in groove 216a, one seal ring 26 is set respectively in the 216b, owing to be arranged at groove 216a, seal ring 26 in the 216b is the surfaces that partly protrude from valve block 21, thereby can form a micro-convex structure in the surface of valve block 21, similarly,

groove

228a, 228b and seal ring 27 can also form a micro-convex structure by aforesaid way on the lower surface 221 of valve body cover 22; Two, can adopt semiconductor technology, for example: planographic printing etching or plated film or galvanoplastics, but, directly on valve block 21 and valve body cover 22, form a micro-convex structure not as limit.

Then, form a flexible film, it has a plurality of valve mechanisms, a plurality of valve mechanisms are stack piles and make with material, and wherein the rigidity of at least one valve mechanism is different with other valve mechanism, be valve body film 23 of the present invention and the inlet valve structure that is had and outlet valve structure (shown in step S194), then, form one again and activate film, be vibration film 241 of the present invention (shown in step S195), and form an actuator 242 (shown in step S196), afterwards, actuator 242 attachings are positioned on the vibration film 241, constitute one with assembling and activate device 24, and make actuator 242 and pressure chamber's 225 corresponding settings (shown in step S197), after step S197, valve body film 23 is arranged between valve block 21 and the valve body cover 22, and make valve block 21, the setting (shown in step S198) that corresponds to each other of valve body film 23 and valve body cover 22, at last, actuator 24 correspondences are arranged on the valve body cover 22, and make the pressure chamber 225 of valve body film 23 closed valve lids 22, to form a multi-flow passage fluid conveying device (shown in step S199).

In sum, multi-flow passage fluid conveying device of the present invention is to be applicable to micro-pump structure, mainly stack and form by valve block, valve body film, valve body cover, vibration film and actuator, the configuration concept that cooperates a plurality of circulation ducts, a plurality of import and export and a plurality of valve mechanisms thereof by single pressure chamber and actuator, can not increase under the overall dimensions, flow and lift are greatly increased, be suitable for very much flow and the higher relatively application of lift demand;

In addition, the manufacture method of multi-flow passage fluid conveying device of the present invention, it is that a plurality of valve mechanisms that have by valve body film are stack piles and make with material, and wherein the rigidity of at least one valve mechanism is different with other valve mechanism, valve combination by the different rigidity design, under the body pressure of identical cabin, produce different valve openings because of its elasticity difference causes, cause the liquid of different proportion to mix.And, also can carry out fluid and shunt and be dispensed in the different vessels by suitable fluid line and valve mechanism configuration, reach as for distributing required ratio also can be provided with by aforesaid different rigidity valve.Therefore, the manufacture method of multi-flow passage fluid conveying device of the present invention has the value of industry.

Claims

1. the manufacture method of a multi-flow passage fluid conveying device, it comprises the following step:

(a) form a valve body layer, it has at least one outlet passage and at least one inlet channel;

(b) the corresponding valve body cover layer that forms on this valve body layer, it has a pressure chamber;

(c) form a flexible film, it has a plurality of valve mechanisms, and these a plurality of valve mechanisms are stack piles and make with material, and wherein the rigidity of at least one valve mechanism is different with the rigidity of other valve mechanism;

(d) form one and activate device;

(e) this flexible film is arranged between this valve body layer and this valve body cover layer, and this valve body layer, this flexible film and this valve body cover layer are assembled the location mutually; And

(f) this actuator is sealed this pressure chamber of this valve body cover layer, to form a multi-flow passage fluid conveying device.

2. the manufacture method of multi-flow passage fluid conveying device according to claim 1 is characterized in that this fluid comprises gas and liquid.

3. the manufacture method of multi-flow passage fluid conveying device according to claim 1, it is characterized in that these a plurality of valve mechanisms are formed with a valve block, a plurality of hole and a plurality of extension part, these a plurality of holes are to be provided with around valve block periphery, and a plurality of extension parts are to be connected with this valve block and to be arranged between these a plurality of holes.

4. the manufacture method of multi-flow passage fluid conveying device according to claim 3 is characterized in that this valve block forms round structure.

5. the manufacture method of multi-flow passage fluid conveying device according to claim 4 is characterized in that comprising a dentation structure around this valve block.

6. the manufacture method of multi-flow passage fluid conveying device according to claim 3 is characterized in that this extension part is the tangent line form.

7. the manufacture method of multi-flow passage fluid conveying device according to claim 3 is characterized in that this extension part is the straight line form.

8. the manufacture method of multi-flow passage fluid conveying device according to claim 3 is characterized in that this extension part is long S shape form.

9. the manufacture method of multi-flow passage fluid conveying device according to claim 3 is characterized in that this extension part is short S shape form.

10. the manufacture method of multi-flow passage fluid conveying device according to claim 3, the hard conditions that it is characterized in that this valve mechanism depends on the mode of appearance of this valve mechanism.

11. the manufacture method of multi-flow passage fluid conveying device according to claim 3, the hard conditions that it is characterized in that this valve mechanism depends on the width of this extension part of this valve mechanism.

12. the manufacture method of multi-flow passage fluid conveying device according to claim 3, the hard conditions that it is characterized in that this valve mechanism depends on the quantity of this extension part of this valve mechanism.

13. the manufacture method of multi-flow passage fluid conveying device according to claim 1 is characterized in that these a plurality of valve mechanisms are to shunt or the ratio of fluid-mixing by the vibration frequency adjustment of controlling this actuator.

14. the manufacture method of multi-flow passage fluid conveying device according to claim 1, a plurality of valve mechanisms that it is characterized in that this flexible film are at least one inlet valve and at least one outlet valve.

15. the manufacture method of multi-flow passage fluid conveying device according to claim 14 is characterized in that this flexible film is the mixing and the flow divider structure of two inlet valves of configuration and two outlet valves.

16. the manufacture method of multi-flow passage fluid conveying device according to claim 14 is characterized in that this flexible film is the mixing valve structure of three inlet valves of configuration and an outlet valve.

17. the manufacture method of multi-flow passage fluid conveying device according to claim 14 is characterized in that this flexible film is the flow divider structure of an inlet valve of configuration and three outlet valves.

18. the manufacture method of multi-flow passage fluid conveying device according to claim 14 is characterized in that this flexible film is the flow divider structural arrangements of an inlet valve of configuration and four outlet valves.

19. the manufacture method of multi-flow passage fluid conveying device according to claim 14 is characterized in that this flexible film is the mixing valve structural arrangements of four inlet valves of configuration and an outlet valve.