CN101408164B

CN101408164B - High flow fluid delivery device

Info

Publication number: CN101408164B
Application number: CN2007101529968A
Authority: CN
Inventors: 陈世昌; 余荣侯; 蔡志宏; 邱士哲
Original assignee: Microjet Technology Co Ltd
Current assignee: Microjet Technology Co Ltd
Priority date: 2007-10-11
Filing date: 2007-10-11
Publication date: 2010-11-10
Anticipated expiration: 2027-10-11
Also published as: CN101408164A

Abstract

The invention discloses a large flow fluid conveying appliance, comprising a valve seat, a valve cover body, a valve film and an actuating device; wherein, the valve film is positioned between the valve seat and the valve cover body; the actuating device includes an actuator and a vibration unit which is provided with a vibration film, a plurality of fixing blocks, a transmission block and a pinboard; the vibration film is arranged on the valve cover body; the fixing blocks are connected to the vibration film; the transmission block is connected with the vibration film; the pinboard is connected onto the transmission block and arranged on the fixing blocks in an extension way; and the actuator is arranged on the pinboard. When operating frequency, 10Hz-50Hz, is imposed on the actuator, the pinboard is driven to be deformed so as to push and extrude the transmission block and the vibration film, cause the volume of the pressure cavity of the valve cover boy to be changed, drive the valve switch structure of the valve film to be opened or closed, and cause the fluid flowing through the pressure cavity to reach large flow conveying which is more than 10cc/min.

Description

High flow fluid delivery device

Technical field

The invention relates to a kind of fluid delivery system, refer to a kind of high flow fluid delivery device that is applicable to micro-pump structure especially.

Background technique

In each field, no matter be industry such as medicine, computer technology, printing, the energy at present, product all develops towards sophistication and microminiaturization direction, wherein the fluid delivery structure that product comprised such as Micropump, sprayer, ink gun, industrial printing device are its key technology, therefore, how to break through its technical bottleneck, be the important content of development by innovation structure.

See also Fig. 1 (a), it is the structural representation of existing micro-pump structure when the start not, existing micro-pump structure 10 comprises inlet channel 13, micro-actuator 15, drive block 14, interlayer film 12, pressing chamber 111, substrate 11 and outlet passage 16, wherein 12 of substrate 11 and interlayer films limit and form a pressing chamber 111, be mainly used to storaging liquid, will make that the volume of pressing chamber 111 is changed because of the deformation influence of interlayer film 12.

When a voltage acts on the two poles of the earth up and down of micro-actuator 15, can produce an electric field, make micro-actuator 15 under this effect of electric field, produce crooked and move to interlayer film 12 and pressing chamber 111 directions, because micro-actuator 15 is arranged on the drive block 14, therefore drive block 14 can be passed to interlayer film 12 with the thrust that micro-actuator 15 is produced, make interlayer film 12 also and then be extruded distortion, promptly shown in Fig. 1 (b), liquid can flow according to the direction of arrow X among the figure, make by the liquid that are stored in the pressing chamber 111 after inlet channel 13 inflows and be squeezed, and flow to other predefined space via outlet passage 16, to reach the purpose of supplying with fluid.

Please consult Fig. 2 again, it is the plan view of the micro-pump structure shown in Fig. 1 (a), as shown in the figure, the throughput direction of fluid is shown in the direction of arrow of number in the figure Y when micro-pump structure 10 starts, inlet expands the cone structure that stream device 17 varies in size for both ends open, the end that opening is bigger is to be connected with entrance channel 191, and be connected with little pressing chamber 111 with the less end of opening, simultaneously, the expansion stream device 18 that connects pressing chamber 111 and outlet flow 192 is to expand stream device 17 with inlet to be provided with in the same way, itself so the bigger end of opening are connected in pressing chamber 111, and be connected with outlet flow 192 with the less end of opening, the inlet at pressing chamber 111 two ends expands stream device 17 and outlet expansion stream device 18 is equidirectional setting owing to be connected in, expand the different characteristic of stream device two direction flow resistances so can utilize, and the harmomegathus of pressing chamber 111 volumes makes fluid produce unidirectional net flow rate, flow in the pressing chamber 111 so that fluid can expand stream device 17 by inlet from entrance channel 191, expand stream device 18 by outlet again and flow out through outlet flow 192.

The micro-pump structure 10 of this kind incorporeity valve is easy to generate a large amount of situations that reflux of fluid, and institute thinks and impel flow rate to increase that pressing chamber 111 needs bigger compression ratio, presses to produce enough chambeies, so need expend higher cost on actuator 15.

Therefore, how to develop a kind of high flow fluid delivery device that improves above-mentioned prior art disappearance, real in pressing for the problem of solution at present.

Summary of the invention

Main purpose of the present invention is to provide a kind of high flow fluid delivery device, mainly by valve block, valve body film, valve body cover and actuator stack and form, it is by by the actuator start of actuator the time, to drive pinboard and produce deformation, to push drive block and vibrations film, make the pressure chamber's stereomutation between between vibrations film and valve body cover, to produce positive and negative pressure difference, simultaneously, because its folding of valve mechanism on the valve body film is swift in response, make pressure chamber can produce bigger fluid suction and thrust in the moment of harmomegathus, so can make fluid reach high efficiency transmission, and can effectively stop the adverse current of fluid, in the transport process of fluid, easily produce the phenomenon of fluid reflux with the micro-pump structure that solves prior art.

For reaching above-mentioned purpose, of the present invention one implements the sample attitude for a kind of high flow fluid delivery device is provided than broad sense, and in order to transmit fluid, it comprises: valve block; Valve body cover, it is arranged on the valve block, and has pressure chamber; Valve body film, it is arranged between valve block and the valve body cover, and has at least one threshold switch structure; And actuator, it comprises actuator and vibrations unit, wherein shake the unit and have vibrations film, a plurality of fixed block, drive block and pinboard, the vibrations film is arranged on the valve body cover, in order to the confining pressure chamber, a plurality of fixed blocks are connected in the dual-side of vibrations film, drive block is arranged between a plurality of fixed blocks and with the vibrations film and is connected, pinboard is connected on the drive block and the both sides extension is fixedly arranged on a plurality of fixed blocks, and actuator is arranged on the pinboard and corresponding being arranged between a plurality of fixed blocks; Wherein, when imposing operating frequency 10Hz-50Hz on the actuator of actuator, actuator will drive pinboard and produce deformation, to push drive block and vibrations film, make pressure chamber's stereomutation, and then the keying effect of actuating valve construction of switch, so that this fluid of the pressure chamber that flows through reaches the above big traffic transport of 10cc/min.

Description of drawings

Fig. 1 (a) is the structural representation of existing micro-pump structure when the start not.

Fig. 1 (b) is the structural representation of Fig. 1 (a) when start.

Fig. 2 is the plan view of the micro-pump structure shown in Fig. 1 (a).

Fig. 3 is the structural representation of the high flow fluid delivery device of the present invention's first preferred embodiment.

Fig. 4 is a valve block side structure schematic representation shown in Figure 3.

Fig. 5 (a) is the structure schematic representation of valve body cover shown in Figure 3.

Fig. 5 (b) is the cross-sectional view of Fig. 5 (a).

Fig. 6 (a) to Fig. 6 (c) be valve body film structural representation shown in Figure 3.

Fig. 7 (a) is the actuator shown in Figure 3 and the structural representation of valve body cage.

Fig. 7 (b) is another actuator shown in Figure 3 and the structural representation of valve body cage.

Fig. 8 (a) is the not actuator state schematic representation of the high flow fluid delivery device of preferred embodiment of the present invention.

Fig. 8 (b) is pressure chamber's swelling state schematic representation of Fig. 8 (a).

Fig. 8 (c) is pressure chamber's compressive state schematic representation of Fig. 8 (b).

Embodiment

Some exemplary embodiments that embody feature of the present invention and advantage will be described in detail in the explanation of back segment.Be understood that the present invention can have various variations on different aspects, its neither departing from the scope of the present invention, and explanation wherein and to be shown in be when the usefulness that explain in essence, but not in order to restriction the present invention.

See also Fig. 3, it is the structural representation of the high flow fluid delivery device of the present invention's first preferred embodiment, as shown in the figure, high flow fluid delivery device 20 of the present invention is given birth to skill applicable to medicine, computer technology, industry such as the printing or the energy, but and conveying gas or liquid, but not as limit, high flow fluid delivery device 20 mainly is by valve block 21, valve body cover 22, valve body film 23, a plurality of temporary rooms, actuator 24 and lid 25 are formed, wherein valve block 21, valve body cover 22, valve body film 23 forms a fluid valve seat 201, and between valve body cover 22 and actuator 24, form a pressure chamber 226, be mainly used to store fluid.

The assembling mode of this high flow fluid delivery device 20 is that valve body film 23 is arranged between valve block 21 and the valve body cover 22, and make valve body film 23 and valve block 21 and valve body cover 22 corresponding settings, and between valve body film 23 and valve body cover 22, form one first temporary room, and between valve body film 23 and valve block 21, form one second temporary room, and the opposite position on valve body cover 22 also is provided with actuator 24, actuator 24 is mainly in order to drive the start of high flow fluid delivery device 20, at last, again lid 25 is arranged at the top of actuator 24, so it is in regular turn with valve block 21, valve body film 23, valve body cover 22, actuator 24 and lid 25 be corresponding to stack setting, to finish the assembling of fluid delivery system 20.

Wherein, valve block 21 and valve body cover 22 are the main structure of direct fluid turnover in the high flow fluid delivery device 20 of the present invention, see also Fig. 4 and cooperate Fig. 3, wherein Fig. 4 is the side structure schematic representation of valve block shown in Figure 3, as shown in the figure, valve block 21 has an entrance channel 211 and an outlet flow 212, fluid can be imported by the external world, be sent to an opening 213 of valve block 21 upper surfaces 210 by entrance channel 211, and, in present embodiment, formed second temporary room is the outlet temporary storage cavity 215 shown in the figure between valve body film 23 and the valve block 21, but not as limit, its be by the upper surface 210 of valve block 21 in producing the part depression with outlet flow 212 corresponding positions and form, and be connected with outlet flow 212, this outlet temporary storage cavity 215 is in order to temporary transient store fluid, and make this fluid be delivered to outlet passage 212 by an opening 214 by outlet temporary storage cavity 215, flow out again outside the valve block 21.And, on valve block 21, have more a plurality of groove structures, use for a seal ring 26 (shown in Fig. 8 (a)) to be provided with thereon, in present embodiment, valve block 21 has the groove 216,218 around opening 213 peripheries, and is surrounded on the groove 217 of outlet temporary storage cavity 215 peripheries.See also Fig. 5 (a) and cooperate Fig. 3, wherein Fig. 5 (a) is the structure schematic representation of valve body cover shown in Figure 3, as shown in the figure, valve body cage 22 has a upper surface 220 and a lower surface 228, and on valve body cage 22, also have and run through inlet valve passage 221 and the outlet valve passage 222 of upper surface 220 to lower surface 228, and this inlet valve passage 221 is arranged at the opening 213 corresponding positions with valve block 21, outlet valve passage 222 then is arranged at the opening 214 corresponding positions in the outlet temporary storage cavity 215 with valve block 21, and, in present embodiment, formed first temporary room is the inlet temporary storage cavity 223 shown in the figure between valve body film 23 and the valve body cover 22, and not as limit, its be by surface 228 under the valve body cover 22 in producing partly depression with the corresponding positions of inlet valve passage 221 and form, and it is communicated in inlet valve passage 221.

See also Fig. 5 (b), it is the cross-sectional view of Fig. 5 (a), as shown in the figure, the upper surface 220 of valve body cover 22 is partly to cave in, to form a pressure chamber 226, it is and the actuator 242 corresponding settings of actuator 24 that pressure chamber 226 is communicated in inlet temporary storage cavity 223 by inlet valve passage 221, and is connected with outlet valve passage 222 simultaneously.

See also Fig. 7 (a) and cooperate Fig. 3, wherein Fig. 7 (a) is the actuator shown in Figure 3 and the structural representation of valve body cage, as shown in the figure, actuator 24 of the present invention is arranged on the valve body cover 22, and constituted by a vibrations unit 241 and an actuator 242, wherein shake 241 of unit and include vibrations film 2411, a plurality of fixed blocks 2412, drive block 2413 and pinboard 2414, valve body cover 22 will make that the volume of pressure chamber 226 is changed because of the deformation influence of vibrations film 2411, and vibrations film 2411 is fixedly arranged on the valve body cover 22, can be used to the side sealing with pressure chamber 226.

A plurality of fixed blocks 2412 are arranged at the dual-side of vibrations film 2411, and drive block 2413 is arranged on the vibrations film 2411 equally and between these a plurality of fixed blocks 2412 and correspond to pressure chamber 226 and be provided with, and pinboard 2414 its be connected on the drive block 2413 and both sides are extended respectively and are fixedly arranged on the fixed block 2412, as for, actuator 242 is arranged on the pinboard 2414 and corresponding being arranged between a plurality of fixed blocks 2412, and the two ends of actuator 242 are that free end is not fixed by pinboard 2414.

When a voltage acts on actuator 242, can produce an electric field that is directed downwards, make actuator 242 under this effect of electric field, can produce a deformation effect, the i.e. direction deformation of X and Y direction indication shown in Fig. 7 (a), because of the bottom of actuator 242 is connected on the pinboard 2414, the both sides of pinboard 2414 then are fixed on two fixed blocks 2412, the centre then is connected with drive block 2413, can allow pinboard 2414 produce interlock and and then deformation, promptly as the deformation of the direction of arrow indication dotted line of Fig. 7 (a) label E, make the drive block 2413 that is positioned at pinboard 2414 belows the thrust that pinboard 2414 is produced can be passed to vibrations film 2411, produce the actuating displacement amount to promote vibrations film 2411, promptly as the deformation of the direction of arrow indication dotted line of Fig. 7 (a) label F, and then the volume of change pressure chamber 226, make and flow the fluid that pressure chamber 226 originally prestored, reach the purpose of supplying with fluid to other predefined space.

Because the two ends of the actuator 242 of present embodiment are a free end, therefore when actuator 242 is subjected to electric field action, it can not only produce deformation, and its both end sides is a free end, it is bigger to produce deformation quantity relatively, so the whole deformation quantity that produces more is not restricted, and then it is bigger to produce the displacement amount that promotes vibrations film 2411.

In order to increase the volume change of vibrations film 2411, the width of drive block 2413 is healed better wide, but the width of this drive block 2413 is wideer, to make itself and pinboard 2414 area of contact also bigger, also can limit the bending displacement amount that pinboard 2414 is produced relatively, therefore, the design of drive block 2413 needs to match with the size of pinboard 2414 and vibrations film 2411, so that vibrations film 2411 obtains best displacement amount and volume change thereof, in present embodiment, the area that drive block 2413 contacts with pinboard 2414 can be same as and shake the area that film 2411 contacts, but not as limit, in some embodiments, the preferred shape of drive block 2413 can be the convex structure 2415 (shown in Fig. 7 (b)) that presents " protruding " font, the area that convex structure 2415 contacts with pinboard 2414 is to be smaller than and to shake film 2411 area of contact, can allow pinboard 2414 be subjected to less restriction, make pinboard 2414 produce bigger actuating displacement amount, and convex structure 2415 is bigger with the area of vibrations film 2411 side contacts, can allow the equivalent volume of vibrations film 2411 change quantitative change greatly.

When actuator 242 is subjected to voltage actuation actuator 24 epireliefs are out of shape, the volumetric expansion of build-up of pressure chamber 226 and produce Negative Pressure Difference, can make fluid in inlet valve passage 221 flow to pressure chamber 226, thereafter, after the direction of an electric field that puts on actuator 242 changes, actuator 242 will make actuator 24 concave deformation pressure chamber 226 shrink and volume reduces, make pressure chamber 226 and the extraneous positive pressure difference that produces, impel fluid by outside the outlet valve passage 222 outflow pressure chambers 226, in this simultaneously, there is segment fluid flow can flow in inlet valve passage 221 and the inlet temporary room 223 equally, yet because the inlet valve structure 231 (shown in Fig. 6 (c)) of this moment is for making the pressurized closing state, so this fluid can not produce the phenomenon that flows backwards by inlet valve block 231, as for the fluid that temporarily is stored in the inlet temporary storage cavity 223, then be subjected to voltage actuation again in actuator 242, repeat to make actuator 24 again when epirelief distortion and boost pressure chamber 226 volumes, again by inlet temporary storage cavity 223 through and in the feed pressure chamber 226, to carry out the conveying of fluid to inlet valve passage 221.

In addition, have a plurality of groove structures on the valve body cover 22 equally, with the present embodiment is example, upper surface 220 at valve body cage 22 has the groove 227 that is provided with around pressure chamber 226, on lower surface 228, then have around the groove 224 that is arranged at inlet temporary storage cavity 223, around groove 225 that is arranged at outlet valve passage 222 and groove 229, similarly, above-mentioned groove structure is to use for a seal ring 27 (shown in Fig. 8 (a)) to be arranged at wherein.

See also Fig. 6 (a) and cooperate Fig. 3, wherein Fig. 6 (a) is the structural representation of valve body film shown in Figure 3, as shown in the figure, valve body film 23 main therefore tradition processing, or gold-tinted etching, or laser beam machining, or electroforming processing, or mode such as electro discharge machining is made, and be the identical flake structure of a thickness, have a plurality of hollow out threshold switchs on it, comprise first threshold switch and second threshold switch, in present embodiment, first threshold switch is an inlet valve structure 231, and second threshold switch is an outlet valve structure 232, wherein, inlet valve structure 231 has inlet valve block 2313 and a plurality of cut-out openings 2312 that is provided with around inlet valve block 2313 peripheries, in addition, between hole 2312, also has the extension part 2311 that is connected with inlet valve block 2313, bearing one when valve body film 23 transmits and when coming downward stress from pressure chamber 226, shown in Fig. 8 (c), inlet valve structure 231 is whole smooth on valve block 21 downwards, entering the mouth valve block 2313 this moment can be near groove 216 upper sealing rings 26 projection, and seal up opening 213 on the

valve block

21, and 2311 of its peripheral cut-out openings 2312 and extension parts are taken advantage of a situation to float and are affixed on the valve block 21, so therefore the closing function of inlet valve structure 231 can't flow out fluid.

And under valve body film 23 is under pressure the suction that chamber 226 volumes increase and produce, owing to be arranged at seal rings 26 in the groove 216 of the valve block 21 valve mechanism 231 1 pre-power (Preforce) that provided access, thereby inlet valve block 2313 can produce the bigger tight effect of pre-lid by the support by extension part 2311, in case non-return stream, when making inlet valve structure 231, the negative pressure because of pressure chamber 226 up produces displacement (shown in Fig. 6 (b)), at this moment, fluid then can be flow to the inlet temporary storage cavity 223 of valve body cover 22 by the hole 2312 of hollow out by valve block 21, and be sent in the pressure chamber 226 by inlet temporary storage cavity 223 and inlet valve passage 221, thus, inlet valve structure 231 can be opened rapidly or close in response to the positive/negative pressure difference of pressure chamber's 226 generations, with the turnover of control fluid, and fluid can be back on the valve block 21.

Similarly, another valve mechanism that is positioned on the same valve body film 23 then is outlet valve structure 232, outlet valve block 2323 wherein, extension part 2321 and hole 2322 to make flowing mode all identical with inlet valve structure 231, thereby repeat no more, only direction is set is that seal ring 27 with inlet valve structure 231 oppositely is provided with to the seal ring 26 of outlet valve structure 232 peripheries, shown in Fig. 6 (c), thereby when producing a thrust when pressure chamber 226 compression, the groove 225 interior seal rings 27 that are arranged at valve body cover 22 will provide the outlet valve mechanism 232 1 pre-power (Preforce), make outlet valve block 2323 can produce the bigger tight effect of pre-lid by support by extension part 2321, in case non-return stream, when making outlet valve mechanism 232, the malleation because of pressure chamber 226 down produces displacement, at this moment, fluid then can be by hollow out hole 2322 by pressure chamber 226 in valve body cover 22 flow to the outlet temporary storage cavity 215 of valve block 21, and can discharge by opening 214 and outlet flow 212, thus, then can be by the mechanism of outlet valve structure 232 unlatchings, fluid is released in pressure chamber 226, to reach the function of FLUID TRANSPORTATION.

See also Fig. 8 (a), it is the not actuator state schematic representation of the high flow fluid delivery device of preferred embodiment of the present invention, in present embodiment, all groove structures 216,217,218 are provided with seal ring 26 respectively, and groove 224,225, seal ring 27 also is set respectively in 229, but its material is the good rubber material of endurance, and not as limit, wherein, be arranged on the valve block 21 and can be a circle structure around the seal ring in the groove 216 of opening 213, its thickness is greater than groove 216 degree of depth, make that the seal ring 26 that is arranged in the groove 216 is upper surface 210 formations one micro-convex structure that part protrudes from valve block 21, thereby the inlet valve block 2313 of the inlet valve structure 231 that is arranged at the valve body film 23 on the valve block 21 of make fitting forms a protuberance upwards because of the micro-convex structure of seal ring 26, and the remaining part of valve body film 23 is to replace mutually with valve body cover 22, so micro-convex structure produces a pre-power (Preforce) effect to inlet valve 231 pushing tows, help to produce the bigger tight effect of pre-lid, in case non-return stream, and because the micro-convex structure that seal ring 26 upwards swells is inlet valve structure 231 places that are positioned at valve body film 23, so being made between the upper surface 210 of inlet valve block 2313 and valve block 21, inlet valve structure 231 has a gap when start not, similarly, in the time of in seal ring 27 is arranged at around the groove 225 of outlet valve passage 222, because its seal ring 27 is arranged at the lower surface 228 of valve body cover 22, thereby sealing ring 27 is the outlet valve structure of valve body film 23 is protruded downwards and to be formed one and swell downwards in the micro-convex structure of valve body cover 22, this micro-convex structure only its direction is oppositely setting with the micro-convex structure that is formed at inlet valve structure 231, yet its function all as hereinbefore, thereby repeat no more.Be arranged at groove structure 217,218 and 224,229 and 227

interior seal rings

26,27 and 28 respectively as for all the other, be mainly used to make respectively when fitting tightly between valve block 21 and valve body film 23, valve body film 23 and valve body cover 22 and valve body cover 22 and the actuator 24, prevent that fluid from leaking.

Certainly, above-mentioned micro-convex structure is except using groove and seal ring to arrange in pairs or groups to form, in some embodiments, the micro-convex structure of valve block 21 and valve body cover 22 also can adopt semiconductor technology, for example: gold-tinted etching or plated film or galvanoplastics directly form on valve block 21 and valve body cover 22.

Please consult Fig. 8 (a) simultaneously, (b), (c), as shown in the figure, when lid 25, actuator 24, valve body cover 22, valve body film 23, seal ring 26 and valve block 21 correspond to each other the assembling be provided with after, opening 213 on the valve block 21 is corresponding with inlet valve structure 231 and the inlet valve passage 221 on the valve body cover 22 on the

valve body film

23, and 214 of the openings on the valve block 21 are corresponding with outlet valve block 232 and the outlet valve passage 222 on the valve body cover 22 on the valve body film 23, and, because seal ring 26 is arranged in the groove 216, make inlet valve structure 231 dimplings of valve body film 23 arise from the valve block 21, and by contact by the seal ring 26 that is positioned at groove 216 valve body film 23 produce a pre-power ((Preforce) effect, make inlet valve structure 231 when start not, then form a gap with the upper surface 210 of valve block 21, similarly, outlet valve structure 232 is also by forming a gap by the lower surface 228 that seal ring 27 is established as for same way as in the groove 225 and valve body cover 22.

When with a voltage drive actuator 242, actuator 24 occurs bending and deformation, shown in Fig. 8 (b), actuator 24 is that the direction towards arrow a indication is bent upwards distortion, make the volume of pressure chamber 226 increase, thereby produce a suction, make the inlet valve structure 231 of valve body film 23, outlet valve structure 232 is born a pulling force that makes progress, and the inlet valve block 2313 that makes the inlet valve structure 231 that has a pre-power (Preforce) is opened (shown in Fig. 6 (b)) rapidly, make liquid in large quantities the inlet channel on valve block 21 211 drawn, and the opening 213 on the valve block 21 of flowing through, the hole 2312 of the inlet valve structure 231 on the valve body film 23, inlet temporary storage cavity 223 on the valve body cover 22, inlet valve block passage 221 and within the feed pressure chamber 226, at this moment, because the inlet valve structure 231 of valve body film 23, outlet valve structure 232 is born this to upper pulling force, make the outlet valve block 2323 that be positioned at valve body film 23 on seal up outlet valve passage 222 because of this to upper pulling force so be positioned at the outlet valve structure 232 of the other end, and make outlet valve structure 232 close, thereby fluid countercurrent current.

When actuator 24 is bent downwardly distortion because of the arrow b of direction of an electric field change shown in Fig. 8 (c), volume that then can compression pressure chamber 226, make the fluid of 226 pairs of inside of pressure chamber produce a thrust, and make the inlet valve structure 231 of valve body film 23, outlet valve structure 232 is born a downward thrust, at this moment, be arranged at the seal ring 27 upper outlet valve mechanisms 232 in the groove 225 outlet valve block 2323 its can open (shown in Fig. 6 (c)) rapidly, and liquid moment is led off in a large number, by pressure chamber 226 by the outlet valve passage 222 on the valve body cover 22, the hole 2322 of the outlet valve structure 232 on the valve body film 23, outlet temporary storage cavity 215 on the valve block 21, opening 214 and outlet passage 212 and outside the effluent fluid feedway 20, thereby finish the transmission course of fluid, similarly, this moment is because inlet valve structure 231 is to bear this downward thrust, thereby make inlet valve block 2313 seal up opening 213, thereby close inlet valve structure 231, make not adverse current of fluid, and, by be equipped with the groove 216 on valve block 21 and valve body cover 22 by inlet valve structure 231 and outlet valve structure 232, seal ring 26 in 225,27 design, can make fluid in transport process, can not produce the situation of backflow, reach high efficiency transmission.

In addition, in present embodiment, the material of valve block 21 and valve body cover 22 can adopt thermoplastic plastic's material, polycarbonate resin (Polycarbonate PC) for example, poly-(the Polysulfone that mocks, PSF), ABS resin (Acrylonitrile Butadiene Styrene), vertical property low density polyethylene (LLDPE), low density polyethylene (LDPE), high density polyethylene (HDPE) (HDPE), polypropylene (PP), polyphenylene sulfide (PolyphenyleneSulfide, PPS), syndiotatic polystyrene (SPS), PPO (PPO), polyoxymethylene (Polyacetal, POM), polybutyl terapthalate (PBT), polyvinylidene fluoride (PVDF), ethylene tetrafluoroethylene copolymer (ETFE), cyclic olefin polymer thermoplastic plastic's materials such as (COC), but not as limit, and in present embodiment, the degree of depth of pressure chamber 226 is between 100 μ m to 300 μ m, diameter is between 10mm～30mm, and not as limit.

In present embodiment, clearance distance between this valve body film 23 and valve block 21 and the valve body cover 22 can be 10 μ m to 790 μ m, and the best is 180 μ m to 300 μ m, and in some embodiments, the separation distance that the vibrations film 2411 of this actuator 24 and valve body cover are 22, be the gap, can be 10 μ m to 790 μ m, the preferably is 100 μ m to 300 μ m.

And valve body film 23 be can tradition processing or gold-tinted etching or laser beam machining or modes such as electroforming processing or electro discharge machining make, its material can be good high-molecular organic material of any endurance or metal, when valve body film 23 adopts this macromolecular material, its elasticity coefficient is 2Gpa～20Gpa, pi (Polyimide for example, PI), its elasticity coefficient, be that young's modulus (E value) can be 10GPa, when valve body film 23 adopts metallic material, aluminium for example, aluminum alloy, nickel, nickel alloy, copper, Cuprum alloy or stainless steel and other metal materials, its young's modulus is 2GPa～240GPa, if this metallic material is an aluminum metal, its elasticity coefficient is 70GPa, or the nickel metal, its elasticity coefficient is 210GPa, or stainless steel metal, its elasticity coefficient is 240GPa etc., and not as limit.Thickness as for valve body film 23 can be between 10 μ m to 50 μ m, and the best is 21 μ m to 40 μ m.

Made method proposes explanation when below using unlike material with regard to valve body film 23 respectively.

When the material of valve body film 23 is pi (Polyimide; PI) time; its manufacture method mainly is to utilize reactive ion gas dry etching (reactive ion etching; RIE) method is coated on the valve mechanism with the rotation-sensitivity optical resist, and after exposure imaging goes out the valve mechanism pattern; again to carry out etching; (Polyimide, PI) sheet is not etched, thereby can etch the valve mechanism on the valve body film 23 owing to there is optical resist covering place can protect pi.

If the material of valve body film 23 is a stainless steel metal, then can the gold-tinted etching, laser beam machining and machining etc. make valve mechanism, wherein the etched mode of gold-tinted obtains the optical resist pattern of the valve mechanism on stainless steel sheets, is soaked in FeCl again ₃Add and carry out wet etching in the HCl solution, similar with preceding method, there is optical resist covering place can protect stainless steel sheets not etched, thereby can etches the valve mechanism on the valve body film 23.

And, if the material of valve body film 23 is a metallic nickel, it then is the method for utilizing electrotyping process, utilize the gold-tinted engraving method equally, obtain the optical resist pattern of the valve mechanism on stainless steel substrate, carry out the nickel electroforming then, there is optical resist covering place can electroforming, after the nickel metal of electroforming reaches certain thickness, it is broken away from from stainless steel substrate, then can obtain the valve body film 23 of tool valve mechanism 231,232.

In addition, except above-mentioned manufacture method, all materials that are applied to valve body film 23 are the processing method of available accurate punching all, or uses traditional mechanical processing mode, laser beam machining or modes such as electroforming processing or electro discharge machining and produce valve structure on it, but not as limit.

And, actuator 242 in the actuator 24 is a piezoelectric board, can adopt the piezoelectricity powder manufacturing of lead zirconate titanate (PZT) series of high tension electricity coefficient to form, wherein the thickness of actuator 242 can be between 100 μ m to 500 μ m, preferred thickness is 150 μ m to 250 μ m, young's modulus is 100GPa to 150GPa, and not as limit.

And the thickness of vibrations film 2411 is 10 μ m to 300 μ m, preferred thickness is 100 μ m to 250 μ m, and its material can be a single-layer metal and constitutes, for example stainless steel metal, its young's modulus is 240Gpa, thickness is between 140 μ m to 160 μ m, copper for example, and its young's modulus is 100Gpa, thickness is between 190 μ m to 210 μ m, and not as limit, or its material can be on the metallic material and to attach the double layer construction of the anti-biochemical macromolecule thin plate of one deck to constitute.

For in response to big flow fluid transmission requirements, can bestow operating frequency on the actuator 242 of actuator 24 is 10Hz-50Hz, and cooperates following condition:

The thickness of actuator 242 is about the rigidity characteristics of 100 μ m to 500 μ m, and preferred thickness is 150 μ m to 250 μ m, and young's modulus is about 100-150Gpa.

And the thickness of vibrations film 2411 is between 10 μ m to the 300 μ m, preferred thickness is 100 μ m to 250 μ m, young's modulus is 60-300GPa, its material can be a single-layer metal and constitutes, stainless steel metal for example, its young's modulus is 240Gpa, thickness is between 140 μ m to 160 μ m, copper for example, its young's modulus is 100Gpa, thickness is between 190 μ m to 210 μ m, and not as limit, or its material can be the double layer construction of the anti-biochemical macromolecule thin plate of attaching one deck to constitute on the metallic material.

The degree of depth of this pressure chamber 226 is that diameter is between 10 ~ 30mm between 100 μ m to 300 μ m.

Valve mechanism 231 on the valve body film 23,232 thickness is 10 μ m to 50 μ m, young's modulus is 2Gpa～240Gpa, can be good high-molecular organic material of any endurance or metal, this valve body film 23 adopts this macromolecular material, its elasticity coefficient is 2Gpa～20Gpa, pi (Polyimide for example, PI), its elasticity coefficient, be that young's modulus (E value) can be 10Gpa, this valve body film 23 adopts metallic material, aluminium for example, aluminum alloy, nickel, nickel alloy, copper, Cuprum alloy or stainless steel and other metal materials, its young's modulus is 2Gpa～240GPa, the aluminum metal elasticity coefficient is 70GPa, or nickel metallic elastic coefficient is 210GPa, or the stainless steel metal elasticity coefficient be 2406pa and, clearance distance between valve body film 23 and valve block 21 and the valve body cover 22 can be 10 μ m to 790 μ m, and the best is 180 μ m to 300 μ m.

By relevant parameter condition collocation such as above-mentioned actuator 242, vibrations film 2411, pressure chamber 226 and valve body film 23, then the inlet valve structure 231 of actuatable valve body thin film 23 and outlet valve structure 232 open and close effect, order about fluid and carry out one-way flow, and make the fluid of the pressure chamber 226 that flows through to reach the above big flow output of per minute 10cc.

Big flow fluid conveying device 20 of the present invention can be by the driving of actuator 24, and valve body film 23 and last integrally formed inlet valve structure 231 thereof can be equipped with the soft seal ring 26 in the groove 216 of valve block 21, make 231 unlatchings of inlet valve structure and deliver the fluid to pressure chamber 226, change the volume of pressure chamber 226 again because of actuator 24, thereby make outlet valve mechanism 232 be equipped with the soft seal ring 27 in the groove 225 on valve body cover 22 and open, so that FLUID TRANSPORTATION is to pressure chamber 226, because pressure chamber 226 can produce bigger fluid suction and thrust in the moment of volume harmomegathus, its reaction of folding rapidly of valve mechanism on the proportioning valve body thin film 23, feasible event can make fluid reach the transmission of big flow, and effectively stops the adverse current of fluid.

In sum, high flow fluid delivery device of the present invention is to be applicable to micro-pump structure, mainly by valve block, valve body film, valve body cover, vibrations film and actuator stack and form, it is piezoelectric actuated by by actuator, make the stereomutation of pressure chamber, and then open or close the inlet/outlet valve mechanism that forms on the same valve body film, cooperate soft seal ring and be arranged at valve block or valve body cover on groove, and carry out the conveying of fluid, because but high flow fluid delivery device of the present invention is conveying gas and fluid, splendid flow rate and delivery pressure are not only arranged, can also have High Accuracy Control in original state oneself draw liquid, but and because of its conveying gas, therefore more can get rid of bubble in fluid delivery process, to reach high efficiency transmission.

In addition, the bottom of actuator is to be connected and fixed with pinboard, and the pinboard two ends are connected and fixed on two fixed blocks, but make pinboard under the drive of actuator, also can be considered a deformable body, and the two ends of actuator are not connected and fixed on and can be considered a free end on the fixed block, when actuator is subjected to electric field action, actuator can not only produce deformation, and its both end sides is a free end, it is bigger to produce deformation quantity relatively, so the whole deformation quantity that produces more is not restricted, and then can promote the displacement amount that promotes the vibrations film.Therefore, high flow fluid delivery device of the present invention has the value of industry.

Claims

1. high flow fluid delivery device, in order to transmit a fluid, it comprises:

One valve block;

One valve body cover, it is arranged on this valve block, and has a pressure chamber;

One valve body film, it is arranged between this valve block and this valve body cover, and has at least one threshold switch structure; And

One activates device, it comprises an actuator and a vibrations unit, wherein this vibrations unit has a vibrations film, a plurality of fixed blocks, one drive block and a pinboard, this vibrations film is arranged on this valve body cover, in order to seal this pressure chamber, a plurality of fixed blocks are connected in the dual-side of this vibrations film, this drive block is arranged between these a plurality of fixed blocks and with this vibrations film and is connected, this pinboard is connected on this drive block and the both sides extension is fixedly arranged on these a plurality of fixed blocks, and this actuator is arranged on this pinboard and corresponding being arranged between these a plurality of fixed blocks;

Wherein, when imposing operating frequency 10Hz-50Hz on this actuator of this actuator, this actuator will drive this pinboard and produce deformation, to push this drive block and this vibrations film, make this pressure chamber's stereomutation, and then drive the keying effect of this threshold switch structure, so that this fluid of this pressure chamber that flows through reaches the above big traffic transport of 10cc/min.

2. high flow fluid delivery device according to claim 1 is characterized in that the area that this drive block contacts with this pinboard is to be smaller than the area that this drive block contacts with this vibrations film.

3. high flow fluid delivery device according to claim 1 is characterized in that the area that this drive block contacts with this pinboard is to be equal to the area that this drive block contacts with this vibrations film.

4. high flow fluid delivery device according to claim 1 is characterized in that this drive block is a convex structure.

5. high flow fluid delivery device according to claim 1, it is characterized in that this valve block and this valve body cover have a micro-convex structure respectively, and this micro-convex structure is to form owing in a plurality of grooves on this valve block and this valve body cover seal ring being set respectively, and the sealing ring is partly to protrude in this groove.

6. high flow fluid delivery device according to claim 1, the material that it is characterized in that this valve body film is a macromolecular material, and its Young's modulus is 2GPa～20GPa.

7. high flow fluid delivery device according to claim 5, this threshold switch structure that it is characterized in that this valve body film is inconsistent to form a pre-power with this micro-convex structure of this valve block and this valve body cover respectively, and make between this threshold switch structure and this valve block and this valve body cover and form a gap respectively, and the distance in this gap is 10 μ m to 790 μ m.

8. high flow fluid delivery device according to claim 1, the thickness that it is characterized in that this vibrations film are 10 μ m to 300 μ m.

9. high flow fluid delivery device according to claim 1, the thickness that it is characterized in that this vibrations film are 100 μ m to 250 μ m.

10. high flow fluid delivery device according to claim 1, the young's modulus that it is characterized in that this vibrations film is 60GPa to 300GPa.

11. high flow fluid delivery device according to claim 1, the young's modulus that it is characterized in that this actuator is 100GPa to 150GPa.

12. high flow fluid delivery device according to claim 1, the thickness that it is characterized in that this actuator are 100 μ m to 500 μ m.

13. high flow fluid delivery device according to claim 1, the optimum thickness that it is characterized in that this actuator are 150 μ m to 250 μ m.