CN108506196B

CN108506196B - Fluid delivery device

Info

Publication number: CN108506196B
Application number: CN201710102319.9A
Authority: CN
Inventors: 陈寿宏; 陈世昌; 廖鸿信; 黄启峰; 蔡长谚
Original assignee: Microjet Technology Co Ltd
Current assignee: Microjet Technology Co Ltd
Priority date: 2017-02-24
Filing date: 2017-02-24
Publication date: 2020-04-21
Anticipated expiration: 2037-02-24
Also published as: CN108506196A

Abstract

A fluid delivery device, comprising: a valve body having an outlet passage and an inlet passage; the valve cavity body seat is provided with an inlet valve channel, an outlet valve channel and a pressure chamber, and the pressure chamber is respectively communicated with the inlet valve channel and the outlet valve channel; the valve diaphragm is arranged between the valve body and the valve cavity seat and is provided with two valve sheets which respectively and correspondingly seal the inlet valve channel and the outlet valve channel to form a valve switch structure; an actuator cap pressure chamber; the outer cylinder has a hollow space, the inner wall of the hollow space has a protruding structure and the outer edge has a locking structure; the valve body, the valve cavity seat and the actuator are correspondingly stacked in the hollow space of the outer cylinder in sequence respectively, and are formed by mutually buckling, combining and positioning the plurality of clamping structures of the outer cylinder.

Description

Fluid delivery device

[ technical field ] A method for producing a semiconductor device

The present disclosure relates to a fluid delivery device, and more particularly, to a fluid delivery device suitable for a micro-pump structure.

[ background of the invention ]

At present, in all fields, no matter in medicine, computer technology, printing, energy and other industries, products are developed towards refinement and miniaturization, wherein fluid conveying structures contained in products such as micropumps, sprayers, ink jet heads, industrial printing devices and the like are key technologies thereof, so that how to break through technical bottlenecks thereof by means of innovative structures is an important content of development.

Referring to fig. 9A, which is a schematic structural view of a conventional micro pump structure when it is not operated, the conventional micro pump structure 7 includes an inlet channel 73, a micro actuator 75, a transmission block 74, a diaphragm 72, a compression chamber 711, a base plate 71, and an outlet channel 76, wherein a compression chamber 711 is defined between the base plate 71 and the diaphragm 72 and is mainly used for storing liquid, and a volume of the compression chamber 711 is changed due to a deformation effect of the diaphragm 72.

When a voltage is applied to the upper and lower poles of the micro-actuator 75, an electric field is generated, so that the micro-actuator 75 bends under the action of the electric field and moves towards the interlayer film 72 and the compression chamber 711, and the micro-actuator 75 is disposed on the transmission block 74, so that the transmission block 74 can transmit the thrust generated by the micro-actuator 75 to the interlayer film 72, and the interlayer film 72 is extruded and deformed, that is, as shown in fig. 9B, the liquid can flow in the direction of arrow X in the figure, so that the liquid flowing from the inlet channel 73 and stored in the compression chamber 711 is extruded, and flows to other preset spaces through the outlet channel 76, thereby achieving the purpose of supplying the fluid.

Referring to fig. 9C, fig. 9C is a top view of the micro pump structure shown in fig. 9A, as shown in the figure, when the micro pump structure 7 is operated, the fluid conveying direction is shown by the arrow direction of the symbol Y in the figure, the inlet diffuser 77 is a cone-shaped structure with openings at two ends different in size, the end with a larger opening is connected with the inlet flow channel 731, and the end with a smaller opening is connected with the compression chamber 711, meanwhile, the outlet diffuser 78 connecting the compression chamber 711 and the outlet flow channel 761 is arranged in the same direction as the inlet diffuser 77, and the end with a larger opening is connected with the compression chamber 711, and the end with a smaller opening is connected with the outlet flow channel 761, because the inlet diffuser 77 and the outlet diffuser 78 connected with two ends of the compression chamber 711 are arranged in the same direction, the flow resistance can utilize the different characteristics of the diffusers in two directions, and the expansion and contraction of the volume of the compression chamber 711 to generate a, so that the fluid can flow from the inlet channel 731 into the compression chamber 711 through the inlet diffuser 77 and then flow out from the outlet diffuser 78 through the outlet channel 761.

However, since the micro pump structure 7 without the solid valve is prone to generate a large amount of fluid backflow, the compression chamber 711 needs to have a large compression ratio to generate a sufficient chamber pressure to promote an increase in the flow rate, and thus, a high cost is required for the micro actuator 75.

In view of the above, it is an urgent need to develop a fluid delivery device that can improve the above-mentioned shortcomings of the prior art, and to develop a fluid delivery device that can maintain a certain operating characteristic and flow rate of the fluid delivery device for a long time.

[ summary of the invention ]

The main purpose of the present invention is to provide a fluid conveying device, which is mainly formed by sequentially stacking a valve body, a valve diaphragm, a valve cavity seat, an actuator and an outer cylinder inside an outer cylinder, and then buckling and positioning the valve body with a buckling structure of the outer cylinder in a mutually buckling and combining manner at a section difference buckling part of the valve body to form the conveying device.

Another objective of the present invention is to provide a fluid conveying device, which is mainly formed by sequentially stacking a valve body, a valve diaphragm, a valve cavity seat, an actuator and an outer cylinder in a hollow space of the outer cylinder, and then fastening the stacked components in the hollow space of the outer cylinder by a fastening structure of the outer cylinder to each other, so that the stacked components can be directly positioned and assembled without locking and positioning components (such as screws, nuts, bolts, etc.), thereby facilitating the assembly of the whole structure without any additional components, and providing better leakage prevention for the inlet opening, the outlet opening, the inlet valve passage, the outlet valve passage and the periphery of the pressure chamber to prevent fluid leakage through the arrangement of sealing rings.

To achieve the above object, a fluid delivery device according to a broader aspect of the present invention comprises a valve body having an outlet channel, an inlet channel, a first surface and a second surface, wherein an edge of the first surface is a differential surface, the inlet channel and the outlet channel are disposed between the first surface and the second surface, the inlet channel is communicated with an inlet opening on the second surface, the outlet channel is communicated with an outlet opening on the second surface, and a differential clamping portion is recessed on an edge of the first surface of the valve body; the valve diaphragm is provided with two valve plates with the same thickness, a plurality of extension supports are respectively arranged around the periphery of each valve plate for elastic support, and a hollow hole is respectively formed between every two adjacent extension supports; the valve cavity seat is provided with a third surface, a fourth surface, an inlet valve channel and an outlet valve channel, the inlet valve channel and the outlet valve channel are arranged between the third surface and the fourth surface in a penetrating mode, two valve plates of the valve membrane are respectively borne on the inlet valve channel and the outlet valve channel to form valve structures, and a pressure chamber is recessed on the fourth surface and is respectively communicated with the inlet valve channel and the outlet valve channel; an actuator covering the pressure chamber of the valve cavity seat; and an outer cylinder having an inner wall surrounding a hollow space, the inner wall of the outer cylinder having a convex ring structure, and the outer edge of the outer cylinder having a plurality of segment locking structures arranged at equal intervals; therefore, the valve body, the valve cavity seat and the actuator are respectively and correspondingly stacked in the hollow space in the outer cylinder in sequence and are borne on the convex ring structure of the outer cylinder, and the section difference clamping part of the outer cylinder is clamped and buckled with the section difference clamping part of the valve body to be mutually clamped and combined to form the fluid conveying device.

[ description of the drawings ]

Fig. 1 is a schematic perspective view of the fluid delivery device of the present invention.

Fig. 2A is a schematic front exploded view of a fluid conveying device according to a preferred embodiment of the present disclosure.

Fig. 2B is a schematic diagram of a back exploded structure of the fluid delivery device shown in fig. 2A.

Fig. 3A is a schematic front view of a valve body of the fluid delivery device.

Fig. 3B is a schematic view of the bottom of the valve body of the fluid transfer device of the present invention.

Fig. 4A is a schematic front view of a valve chamber seat of the fluid delivery device of the present disclosure.

Fig. 4B is a schematic bottom view of the valve chamber body of the fluid delivery device of the present invention.

Fig. 5 is a schematic front view of a valve diaphragm of the fluid transfer device of the present invention.

Fig. 6 is a perspective view of a valve chamber seat of the fluid delivery device of the present invention.

Fig. 7 is a schematic cross-sectional view of the fluid delivery device of the present disclosure.

Fig. 8A is a schematic diagram of the fluid delivery device in the present embodiment illustrating the fluid delivery state 1.

Fig. 8B is a schematic diagram of the fluid delivery device in the present embodiment illustrating the fluid delivery state 2.

Fig. 9A is a schematic structural diagram of a conventional micro pump structure when it is not operated.

FIG. 9B is a schematic view of the structure of FIG. 9A during operation.

Fig. 9C is a top view of the micro-pump structure shown in fig. 9A.

[ detailed description ] embodiments

Exemplary embodiments that embody features and advantages of this disclosure are described in detail below in the detailed description. It will be understood that the present disclosure is capable of various modifications without departing from the scope of the disclosure, and that the description and drawings are to be regarded as illustrative in nature, and not as restrictive.

Referring to fig. 1, fig. 2A and fig. 2B, the fluid delivery device 1 of the present invention is suitable for use in medical technology, computer technology, printing or energy industry, and can deliver liquid, but not limited thereto, the fluid delivery device 1 mainly includes a valve body 2, a valve diaphragm 3, a valve chamber seat 4, an actuator 5 and an outer cylinder 6. Wherein the valve body 2, the valve diaphragm 3 and the valve chamber seat 4 are sequentially stacked inside the outer cylinder 6, and then the outer cylinder 6 and the valve body 2 are mutually buckled, positioned and assembled (as shown in fig. 1).

Referring to fig. 1, fig. 2A, fig. 2B, fig. 4A and fig. 4B, a valve body 2 and a valve chamber seat 4 are main structures for guiding fluid to enter and exit in the fluid conveying device 1 of the present invention. The valve body 2 has an inlet passage 21 and an outlet passage 22 respectively passing through the first surface 23 and the second surface 24, the inlet passage 21 is connected to the inlet opening 211 on the second surface 24, the second surface 24 has a groove 241 surrounding the inlet opening 211 and a protrusion 243 protruding around the inlet opening 211, the outlet passage 22 is connected to an outlet opening 221 on the second surface 24, the second surface 24 has a groove 242 surrounding the outlet opening 221, a differential locking portion 25 is recessed on the periphery of the first surface 23 of the valve body 2, and a plurality of locking grooves 2b are formed on the second surface 24 of the valve body 2.

The valve cavity seat 4 is provided with a plurality of tenons 4a on the third surface 45, which can be correspondingly sleeved in the mortise 2b of the valve body 2, so that the valve body 2 and the valve cavity seat 4 can be combined with each other to be stacked and positioned. The valve chamber seat 4 has an inlet valve channel 41 and an outlet valve channel 42 penetrating through the third surface 45 to the fourth surface 46, a groove 43 surrounding the inlet valve channel 41 is formed on the third surface 45, a protrusion 421 protruding around the outlet valve channel 42 is formed on the third surface 45, a groove 44 surrounding the outlet valve channel 42 is formed on the third surface 45, a pressure chamber 47 is recessed on the fourth surface 46 and is respectively communicated with the inlet valve channel 41 and the outlet valve channel 42, and the fourth surface 46 has a segment difference groove 48 outside the pressure chamber 47.

Referring to fig. 3A, fig. 3B and fig. 5, when the main material of the valve diaphragm 3 is Polyimide (PI) polymer material, the manufacturing method mainly uses Reactive Ion Etching (RIE) method to coat photosensitive photoresist on the valve structure, expose and develop the valve structure pattern, and then perform etching, since the Polyimide (PI) sheet is protected from etching by the photoresist covering portion, the valve structure on the valve diaphragm 3 can be etched. The valve membrane 3 is a flat sheet structure. As shown in fig. 5, the valve diaphragm 3 has a

valve plate

31a, 31b with the same thickness in each of the two penetrating

areas

3a, 3b, and a plurality of extending

brackets

32a, 32b are respectively disposed around the

valve plate

31a, 31b for elastic support, and a

hollow hole

33a, 33b is respectively formed between adjacent extending

brackets

32a, 32b, so that the

valve plate

31a, 31b with the same thickness can be elastically supported by the extending

brackets

32a, 32b to protrude and deform by a displacement amount to form a valve switch structure. The

valve plates

31a, 31b may be circular, rectangular, square or various geometric patterns, but not limited thereto. Furthermore, the valve membrane 3 is provided with a plurality of positioning holes 3c, which can be inserted into the tenons 4a of the valve cavity seat 4 on the third surface 45, so that the valve membrane 3 is supported on the valve cavity seat 4, and the

valve pieces

31a and 31b respectively cover the inlet valve passage 41 and the outlet valve passage 42 of the valve cavity seat 4 (as shown in fig. 7).

Referring to fig. 7, when the valve body 2 and the valve chamber seat 4 are combined and stacked, the grooves 241 and 242 of the valve body 2 are respectively sleeved with a sealing ring 8a and 8b, the grooves 43 and 44 of the valve chamber seat 4 are respectively sleeved with a sealing ring 8c and 8d, the valve body 2 and the valve chamber seat 4 are combined and stacked, and the sealing rings 8a, 8b, 8c and 8d can be used to prevent fluid leakage around the valve body, so that the inlet channel 21 of the valve body 2 corresponds to the inlet valve channel 41 of the valve chamber seat 4, the inlet channel 21 of the valve diaphragm 3 is communicated with the inlet valve channel 41 by opening and closing the valve piece 31a, and the outlet channel 22 of the valve body 2 corresponds to the outlet valve channel 42 of the valve chamber seat 4, the outlet channel 22 of the valve piece 31b of the valve diaphragm 3 is communicated with the outlet valve channel 42 by opening and closing the valve piece 31a, when the valve piece 31a of the valve diaphragm 3 is opened, the fluid introduced into the inlet passage 21 passes through the inlet valve passage 41 and is injected into the pressure chamber 47, and when the valve plate 31b of the valve diaphragm 3 is opened, the fluid injected into the pressure chamber 47 passes through the outlet valve passage 42 and is discharged from the outlet passage 22.

Referring to fig. 2A and 2B, the actuator 5 is assembled by a vibration plate 51 and a piezoelectric element 52, wherein the piezoelectric element 52 is attached and fixed on the surface of the vibration plate 51. In the present embodiment, the vibration plate 51 is made of metal, and the piezoelectric element 52 is made of piezoelectric powder of lead zirconate titanate (PZT) series with high piezoelectric number, and is attached to the vibration plate 51, so that the piezoelectric element 52 is driven to deform by applying a voltage, and the vibration plate 51 is driven to perform reciprocating vibration deformation in the vertical direction along with the deformation, so as to drive the operation of the fluid delivery device 1. The vibrating plate 51 of the actuator 5 is assembled on the fourth surface 46 of the valve cavity seat 4 to cover the pressure chamber 47, and the fourth surface 46 is disposed in the step groove 48 outside the pressure chamber 47 for receiving a sealing ring 8e, so as to prevent fluid leakage around the pressure chamber 47.

As is apparent from the above description, the valve body 2, the valve diaphragm 3, the valve chamber seat 4, and the actuator 5 constitute a main structure of the fluid transport device 1 for guiding the transport fluid in and out. However, the main subject of the present invention is how to position the stacked and combined structure, and the locking and positioning assembly without using locking elements (such as screws, nuts, bolts, etc.). Therefore, the following description will be made by adopting the structural design of the valve body 2 and the outer cylinder 6 that can be engaged with each other, and stacking the valve body 2, the valve diaphragm 3, the valve chamber seat 4, and the actuator 5 in sequence inside the outer cylinder 6, and then assembling the valve body 2 and the outer cylinder 6 that can be engaged with each other.

Referring to fig. 2A, 2B and 6, the outer cylinder 6 is made of metal, and has an inner wall 61 surrounding a hollow space, a convex ring structure 62 at the bottom of the inner wall 61, and a plurality of segment locking structures 63 arranged at equal intervals on the outer edge of the outer cylinder 6, wherein a separation groove 64 is arranged between each segment of locking structures 63 for the locking structures 63 to be arranged on the outer edge of the outer cylinder 6 for elastic pressing.

Therefore, referring to fig. 7, the valve body 2, the valve diaphragm 3, the valve chamber seat 4, and the actuator 5 are sequentially stacked and then placed in the inner wall 61 of the outer cylinder 6, and the latching structure 63 of the outer cylinder 6 is pressed to be expanded outward, so that when the entire actuator 5 is supported on the convex ring structure 62 of the outer cylinder 6, the stepped latching portion 25 of the valve body 2 is corresponding to the latching structure 63 of the outer cylinder 6, the latching structure 63 is rebounded to the initial position and firmly abuts against the stepped latching portion 25 of the valve body 2, and the valve body 2, the valve diaphragm 3, the valve chamber seat 4, and the actuator 5 are sequentially stacked and assembled to form the fluid delivery device 1, and the actuator 5 can also be disposed in the hollow space of the inner wall 61 of the outer cylinder 6, and the piezoelectric element 52 is applied with a voltage to drive the vibrating plate 51 to vertically reciprocate and resonate, thereby achieving the fluid delivery device without using locking elements (e.g., screws, valves, diaphragms 3, valve chamber seats 4, and actuators 5) to, Nuts, bolts, etc.) to lock and position the assembled fluid delivery device 1.

As shown in fig. 7, in the fluid conveying apparatus 1 of the present invention, the inlet valve passage 41 of the valve chamber seat 4 is disposed corresponding to the inlet opening 211 of the valve body 2, and the valve piece 31a of the valve diaphragm 3 is used to seal and function as a valve structure, and the valve piece 31a covers the inlet opening 211 of the valve body 2, and is attached to the protrusion structure 243 of the valve body 2 to generate a preload (preload) effect, which helps to generate a larger preload effect to prevent the reverse flow, while the outlet valve passage 42 is disposed corresponding to the outlet opening 221 of the valve body 2, and the valve piece 31b of the valve diaphragm 3 is used to seal and function as a valve structure, and the valve piece 31b of the valve diaphragm 3 covers the outlet valve passage 42 of the valve chamber seat 4, and is attached to the protrusion structure 421 of the valve chamber seat 4 to generate a preload (preload) effect, which helps to generate a larger preload effect, the fluid transfer device 1 is constructed so that no backflow occurs between the inlet passage 31 and the outlet passage 32 of the valve body 3 when the fluid transfer device 1 is not operated.

As can be seen from the above description, when the piezoelectric element 52 of the actuator 5 is actuated by applying a voltage to deform the vibration plate 51 to be concave, the volume of the pressure chamber 47 is increased, so that a suction force is generated, the valve plate 31a of the valve diaphragm 3 is rapidly opened by the suction force, a large amount of fluid can be sucked from the inlet channel 21 of the valve body 2 and flows through the inlet opening 211 of the valve body 2, the hollow hole 33a of the valve diaphragm 3, the inlet valve channel 41 of the valve chamber seat 4 to the pressure chamber 47 for temporary storage, and the outlet valve channel 42 is also subjected to the suction force, and the valve plate 31b of the valve diaphragm 3 is supported by the extending support 32b to be entirely flush against the convex portion 421 to assume a closed state, as shown in fig. 8A.

Thereafter, as shown in fig. 8B, when the direction of the electric field applied to the piezoelectric element 52 is changed, the piezoelectric element 52 deforms the vibrating plate 51 in a convex manner, the pressure chamber 47 contracts and the volume thereof is reduced, so that the fluid in the pressure chamber 47 is compressed, the thrust is applied to the inlet valve channel 41, the valve plate 31a of the valve diaphragm 3 is subjected to the thrust, the extending support 32a supports the valve plate 31a to be entirely and upwardly in flat contact with the protrusion structure 243 to be closed, the fluid cannot flow back from the inlet valve channel 41, the thrust is applied to the outlet valve channel 42 at the same time, the valve plate 31B of the valve diaphragm 3 is subjected to the thrust, the extending support 32B supports the valve plate 31B to be entirely and upwardly out of flat contact with the protrusion structure to be opened, and the fluid can flow out of the pressure chamber 47 through the outlet valve channel 42 of the valve chamber seat 4 and then flows through the outlet valve channel 42 421 of the valve chamber seat, The hollow hole 33B on the valve membrane 3, the outlet opening 221 on the valve body 2 and the outlet channel 22 flow out of the fluid delivery device 1, so that the fluid delivery process is completed, and the operation shown in fig. 8A and 8B is repeated to continuously deliver the fluid, so that the fluid delivery device 1 of the present invention can prevent the fluid from flowing back during the delivery process, thereby achieving high-efficiency delivery.

To sum up, the fluid conveying device of the present invention is mainly formed by sequentially stacking a valve body, a valve diaphragm, a valve cavity seat, and an actuator inside an outer cylinder, and then fastening the outer cylinder to a step locking portion of the valve body by a fastening structure of the outer cylinder to be fastened and assembled with each other, so that the stacked components inside a hollow space of the outer cylinder can be directly positioned and assembled without locking and positioning components (such as screws, nuts, bolts, etc.), the whole structure assembly is more convenient without any additional components, and the sealing ring is provided to prevent fluid leakage around an inlet opening, an outlet opening inlet valve passage, an outlet valve passage, and a pressure chamber to have better leakage resistance, and the volume of the pressure chamber is changed by piezoelectric actuation of the actuator, so as to open or close the valve plate structure on the same valve diaphragm to perform the conveying operation of fluid with reverse flow, to achieve efficient transmission. Therefore, the fluid delivery device of the present application has great industrial value, and the application is proposed according to the method.

Various modifications may be made by those skilled in the art without departing from the scope of the invention as defined by the appended claims.

[ notation ] to show

1: fluid delivery device

2: valve body

21: inlet channel

211: an inlet opening

22: outlet channel

231: outlet opening

23: first surface

24: second surface

25: segment difference clamping part

241. 242: groove

243: convex part structure

2 b: mortise and tenon slot

3: valve diaphragm

3a, 3 b: through region

31a, 31 b: valve plate

32a, 32 b: extension support

33a, 33 b: hollow hole

3 c: locating hole

4: valve cavity seat

41: inlet valve passage

42: outlet valve passage

421: convex part structure

43. 44: groove

45: third surface

46: the fourth surface

47: pressure chamber

48: segment difference groove

4 a: clamping tenon

5: actuator

51: vibrating plate

52: piezoelectric element

6: outer cylinder

61: inner wall

62: convex ring structure

63: clamping structure

64: separation groove

7: micropump structure

71: substrate

711: compression chamber

72: barrier film

73: inlet channel

731: inlet flow passage

74: transmission block

75: micro-actuator

76: outlet channel

761: outlet flow passage

77: inlet diffuser

78: outlet diffuser

8a, 8b, 8c, 8d, 8 e: sealing ring

X, Y: direction of flow

Claims

1. A fluid delivery device, comprising:

the valve body is provided with an outlet channel, an inlet channel, a first surface and a second surface, the edge of the first surface is a section of differential surface, the inlet channel and the outlet channel are arranged between the first surface and the second surface in a penetrating way, the inlet channel is communicated with an inlet opening on the second surface, the outlet channel is communicated with an outlet opening on the second surface, and a section of differential clamping part is concavely arranged on the edge of the first surface of the valve body;

the valve diaphragm is provided with two valve plates with the same thickness, a plurality of extension supports are respectively arranged around the peripheries of the two valve plates for elastic support, and a hollow hole is respectively formed between every two adjacent extension supports;

the valve cavity seat is provided with a third surface, a fourth surface, an inlet valve channel and an outlet valve channel, the inlet valve channel and the outlet valve channel are arranged between the third surface and the fourth surface in a penetrating mode, the two valve sheets of the valve membrane are respectively borne on the inlet valve channel and the outlet valve channel to form valve structures, and a pressure chamber is recessed on the fourth surface and is respectively communicated with the inlet valve channel and the outlet valve channel;

an actuator covering the pressure chamber of the valve cavity seat; and

an outer cylinder, which has an inner wall surrounding a hollow space, the inner wall of the outer cylinder has a convex ring structure, and the outer edge of the outer cylinder has a plurality of clamping structures arranged at equal intervals, a separation groove is arranged between each clamping structure of the outer cylinder, and the clamping structures are arranged at the outer edge of the outer cylinder and have the function of elastic pressing;

therefore, the valve body, the valve cavity seat and the actuator are respectively and correspondingly stacked in the hollow space in the outer cylinder in sequence and are borne on the convex ring structure of the outer cylinder, and the plurality of section clamping structures of the outer cylinder are clamped and buckled with the section difference clamping parts of the valve body to be mutually clamped and combined to form the fluid conveying device in a positioning mode.

2. The fluid delivery device according to claim 1, wherein the second surface of the valve body has a plurality of mortise slots and the third surface of the valve chamber seat has a plurality of tenons for corresponding engagement in the mortise slots to position the valve chamber seat assembly on the valve body.

3. The fluid delivery device according to claim 2, wherein the valve membrane is disposed between the valve body and the valve cavity seat, and a plurality of positioning holes are disposed at positions corresponding to the plurality of tenons of the valve cavity seat, respectively, for penetrating into the plurality of tenons to position the valve membrane.

4. The fluid delivery device according to claim 1, wherein the second surface of the valve body has a plurality of grooves surrounding the inlet opening and the outlet opening, respectively, and the valve chamber seat has a plurality of grooves surrounding the inlet valve passage and the outlet valve passage, respectively, on the third surface, the plurality of grooves being adapted to receive a sealing ring to prevent fluid leakage to the periphery.

5. The fluid delivery device of claim 1, wherein the valve body has a protrusion on the second surface surrounding the inlet opening protrusion, and the valve chamber seat has a protrusion on the third surface surrounding the outlet valve passage protrusion, the two protrusions respectively urging the two valve flaps of the valve diaphragm into engagement to facilitate pre-capping and prevent a pre-force (force) from occurring due to reverse flow.

6. The fluid delivery device according to claim 1, wherein the actuator is assembled by a vibrating plate and a piezoelectric element, wherein the piezoelectric element is attached to a surface of the vibrating plate for applying a voltage to drive the piezoelectric element to deform, and the vibrating plate of the actuator is disposed on the fourth surface of the valve cavity seat to cover the pressure chamber.

7. The fluid transfer device according to claim 1, wherein the fourth surface of the valve cavity seat is provided with a stepped groove outside the pressure chamber for a sealing ring to be received therein to prevent fluid leakage around the pressure chamber.