CN108506196A - Fluid delivery system - Google Patents
Fluid delivery system Download PDFInfo
- Publication number
- CN108506196A CN108506196A CN201710102319.9A CN201710102319A CN108506196A CN 108506196 A CN108506196 A CN 108506196A CN 201710102319 A CN201710102319 A CN 201710102319A CN 108506196 A CN108506196 A CN 108506196A
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- Prior art keywords
- valve
- delivery system
- fluid delivery
- channel
- outer barrel
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- 239000012530 fluid Substances 0.000 title claims abstract description 77
- 239000011796 hollow space material Substances 0.000 claims abstract description 11
- 238000007789 sealing Methods 0.000 claims description 9
- 230000007246 mechanism Effects 0.000 claims description 7
- 230000002411 adverse Effects 0.000 claims description 4
- 230000000149 penetrating effect Effects 0.000 claims description 3
- 238000003825 pressing Methods 0.000 claims description 3
- 238000000926 separation method Methods 0.000 claims description 3
- 238000010586 diagram Methods 0.000 description 15
- 239000011229 interlayer Substances 0.000 description 7
- 238000005516 engineering process Methods 0.000 description 6
- 230000005540 biological transmission Effects 0.000 description 5
- 239000004642 Polyimide Substances 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 239000007788 liquid Substances 0.000 description 4
- 229920001721 polyimide Polymers 0.000 description 4
- 230000005684 electric field Effects 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 238000007639 printing Methods 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- 230000009471 action Effects 0.000 description 2
- 238000000354 decomposition reaction Methods 0.000 description 2
- 239000003814 drug Substances 0.000 description 2
- 229910052451 lead zirconate titanate Inorganic materials 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000007769 metal material Substances 0.000 description 2
- 238000001020 plasma etching Methods 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 238000010992 reflux Methods 0.000 description 2
- 230000003213 activating effect Effects 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 230000008676 import Effects 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 230000001012 protector Effects 0.000 description 1
Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B43/00—Machines, pumps, or pumping installations having flexible working members
- F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
- F04B43/04—Pumps having electric drive
- F04B43/043—Micropumps
- F04B43/046—Micropumps with piezoelectric drive
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B53/00—Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
- F04B53/10—Valves; Arrangement of valves
- F04B53/1072—Valves; Arrangement of valves the valve being an elastic body, the length thereof changing in the opening direction
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B53/00—Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
- F04B53/10—Valves; Arrangement of valves
- F04B53/108—Valves characterised by the material
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/04—Constructional details
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05C—INDEXING SCHEME RELATING TO MATERIALS, MATERIAL PROPERTIES OR MATERIAL CHARACTERISTICS FOR MACHINES, ENGINES OR PUMPS OTHER THAN NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES
- F05C2225/00—Synthetic polymers, e.g. plastics; Rubber
- F05C2225/10—Polyimides, e.g. Aurum
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Reciprocating Pumps (AREA)
Abstract
A kind of fluid delivery system, it includes：Valve body has exit passageway and access road；There is valve chamber housing inlet valve channel and outlet valve channel and pressure chamber, pressure chamber to be connected respectively with inlet valve channel, outlet valve channel；Valve film is set between valve body and valve chamber housing, and having two valve sheets, distinctly corresponding closing inlet valve channel and outlet valve channel form valve switch structure；Actuator covers pressure chamber；Outer barrel has a hollow space, and the inner wall of hollow space is with projective structure and outer rim with clamping structure；Sequentially corresponding stack is set in the hollow space of the outer barrel respectively for valve body, the valve chamber housing and the actuator whereby, is mutually buckled with multiple clamping structure of the outer barrel and is formed in conjunction with positioning.
Description
【Technical field】
This case is about a kind of fluid delivery system, espespecially a kind of fluid delivery system suitable for micro-pump structure.
【Background technology】
The either industry such as medicine, computer technology, printing, energy in each field at present, product is towards sophistication and micro-
Smallization direction is developed, and the fluid delivery structure that wherein products such as Micropump, sprayer, ink gun, industrial printing devices are included is
Its key technology, therefore how by means of innovation structure its technical bottleneck is broken through, for the important content of development.
Fig. 9 A are please referred to, are structural schematic diagram of known micro-pump structure when non-start, it is known that micro-pump structure 7 includes entrance
Channel 73, micro-actuator 75, drive block 74, interlayer film 72, discharge chambe 711, substrate 71 and exit passageway 76, wherein substrate 71
Definition forms a discharge chambe 711 between interlayer film 72, is mainly used to store liquid, the volume of discharge chambe 711 will be because of interlayer film 72
Influence of crust deformation and change.
When a voltage acts on the two poles of the earth up and down of micro-actuator 75, an electric field will produce so that micro-actuator 75 is herein
Bending is generated under the action of electric field and is moved to interlayer film 72 and 711 direction of discharge chambe, since micro-actuator 75 is set to transmission
On block 74, therefore thrust caused by micro-actuator 75 can be transferred to interlayer film 72 by drive block 74 so that interlayer film 72 also with
It and is deformed, i.e., as shown in Figure 9 B, liquid can be flowed according to the direction of arrow X in figure, be made after being flowed by access road 73
The liquid being stored in discharge chambe 711 is squeezed, and flows to other preset spaces via exit passageway 76, to reach confession
To the purpose of fluid.
It is the vertical view of micro-pump structure shown in Fig. 9 A referring again to Fig. 9 C, Fig. 9 C, as shown, when micro-pump structure 7 is made
For the conveying direction of fluid as shown in the arrow direction of figure label Y, entrance diffuser 77 is that both ends open is of different sizes when dynamic
Cone structure, the larger one end that is open are connected with entrance channel 731, and are connect with discharge chambe 711 with the smaller one end that is open,
Meanwhile the outlet diffuser 78 for connecting discharge chambe 711 and outlet flow 761 is arranged in the same direction with entrance diffuser 77, with opening
Larger one end is connected to discharge chambe 711, and is connected with outlet flow 761 with the smaller one end that is open, due to being connected to pressure
The entrance diffuser 77 and outlet diffuser 78 at 711 both ends of contracting room are equidirectional setting, therefore can utilize two direction flow resistance of diffuser
The harmomegathus of different 711 volumes of characteristic and discharge chambe makes fluid generate unidirectional net flow rate, so that fluid can be from entrance channel
731 flow into via entrance diffuser 77 in discharge chambe 711, then are flowed out through outlet flow 761 by outlet diffuser 78.
However, the micro-pump structure 7 of such incorporeity valve easy tos produce the situation that fluid largely flows back, so to promote to flow
Rate increases, and discharge chambe 711 needs larger compression ratio, to generate enough chamber pressures, therefore needs to expend higher cost micro-
On actuator 75.
In view of this, how to develop a kind of fluid delivery system improving above-mentioned known technology missing, develop a kind of energy
The certain working characteristics and flow velocity of fluid delivery system are maintained under long-time service, actually problem in the urgent need to address at present.
【Invention content】
The main purpose of this case is to provide a kind of fluid delivery system, mainly by valve body, valve film, valve chamber housing,
Actuator and outer barrel are sequentially laminated in the inside of an outer barrel, then the segment difference card division phase of valve body is snapped in the clamping structure of outer barrel
Mutually buckle forms conveying device in conjunction with positioning, drives oscillating plate to generate deformation by when actuator start, make between oscillating plate and
The stereomutation of pressure chamber between valve chamber housing generates pressure difference, and its folding is anti-due to the valve chip architecture on valve film
It should be rapid so that pressure chamber can generate larger fluid suction and thrust in the moment of harmomegathus, therefore fluid can be made to reach efficient
The transmission of rate, and can effectively stop the adverse current of fluid, it is easy in the transmit process of fluid in order to the micro-pump structure for solving known technology
The phenomenon that generating fluid reflux.
The another object of this case is to provide a kind of fluid delivery system, mainly by valve body, valve film, valve chamber housing,
Actuator and outer barrel are sequentially laminated in the hollow space of an outer barrel, then are snapped in valve body with the clamping structure again with outer barrel
Segment difference card division mutually buckles combination, allow to be laminated in the hollow space of outer barrel above-mentioned superimposed elements directly by positioning assembling and
At, without with lock pay an element (such as：Screw, nut, bolt etc.) go lock to pay positioning assembling, allow overall structure assembling need not be any
Additional element fixation is more convenient, and the setting for also penetrating sealing ring provides to entrance opening, exit opening inlet valve channel, goes out
Mouth valve passage and pressure chamber periphery prevent fluid leakage from having more preferably anti-leakage.
In order to achieve the above object, the broader state sample implementation of this case is to provide a kind of fluid delivery system, including:Valve body,
With an exit passageway, an access road, a first surface and a second surface, which is a segment difference face, should
Access road and the exit passageway are disposed through between first surface and second surface and the access road is in second surface
One entrance opening of upper connection, the exit passageway is in being connected to an exit opening on second surface, and in the first surface of valve body week
Emargination sets a segment difference card division；Valve film has identical two valve sheet of thickness, and multiple prolong respectively is arranged around the valve sheet periphery
It stretches holder to make to flexibly support, and makes respectively to form a hollow hole between each extending bracket is adjacent；Valve chamber housing has a third
Surface, one the 4th surface, an inlet valve channel and an outlet valve channel, the inlet valve channel and the outlet valve channel
It is disposed through between the third surface and the 4th surface, and two valve sheets of the valve film are carried on the inlet valve respectively
Valve mechanism is formed on channel and the outlet valve channel, and sets a pressure chamber in the 4th surface fovea superior, is entered respectively with this
Mouth valve passage and outlet valve channel connection；Actuator covers the pressure chamber of the valve chamber housing；And outer barrel, tool
There is an inner wall to surround a hollow space, there is the inner wall of outer barrel bulge loop structure and the outer rim of outer barrel to be arranged with equidistant interval
Multiple sections of clamping structures；Whereby, stack that be set to this outer so that the valve body, the valve chamber housing and the actuator are sequentially corresponding respectively
It in hollow space in cylinder, and is carried in the bulge loop structure of the outer barrel, which is snapped in the segment difference card division of the outer barrel
The segment difference card division of body, which mutually buckles, to be combined to form fluid delivery system to position.
【Description of the drawings】
Fig. 1 show the three-dimensional appearance schematic diagram of this case fluid delivery system.
Fig. 2A is the positive decomposition texture schematic diagram of the fluid delivery system of this case preferred embodiment.
Fig. 2 B are the back side decomposition texture schematic diagram of fluid delivery system shown in Fig. 2A.
The valve body front that Fig. 3 A show this case fluid delivery system regards to obtain schematic diagram.
The valve body bottom surface that Fig. 3 B show this case fluid delivery system regards to obtain schematic diagram.
The valve chamber housing front that Fig. 4 A show this case fluid delivery system regards to obtain schematic diagram.
The valve chamber housing bottom surface that Fig. 4 B show this case fluid delivery system regards to obtain schematic diagram.
The valve film front that Fig. 5 show this case fluid delivery system regards to obtain schematic diagram.
Fig. 6 show the valve chamber housing stereoscopic schematic diagram of this case fluid delivery system.
Fig. 7 show the diagrammatic cross-section of the fluid delivery system of this case.
Fig. 8 A show the trandfer fluid actuator state schematic diagram 1 of this case fluid delivery system.
Fig. 8 B show the trandfer fluid actuator state schematic diagram 2 of this case fluid delivery system.
Fig. 9 A show known structural schematic diagram of micro-pump structure when non-start.
Fig. 9 B show structural schematic diagrams of Fig. 9 A when start.
Fig. 9 C show the vertical view of micro-pump structure shown in Fig. 9 A.
【Specific implementation mode】
Embodying some exemplary embodiments of this case features and advantages will in detail describe in the explanation of back segment.It should be understood that
This case can have various variations in different aspects, all not depart from the range of this case, and explanation therein and diagram
It is illustrated as being used in itself, rather than to limit this case.
It please refers to Fig.1, shown in Fig. 2A and Fig. 2 B, the fluid delivery system 1 of this case is applicable to the raw skill of medicine, computer section
The industry such as skill, printing or the energy, and liquid is can transport, but not limited to this, and fluid delivery system 1 includes mainly:Valve body
2, valve film 3, valve chamber housing 4, actuator 5 and outer barrel 6.Wherein valve body 2, valve film 3, valve chamber housing 4 are sequentially laminated in outer
Cylinder 6 is internal, then mutually fastens positioning with outer barrel 6 and valve body 2 and assemble (as shown in Figure 1).
It please refers to Fig.1, shown in Fig. 2A, Fig. 2 B, Fig. 4 A and 4B figures, valve body 2 and valve chamber housing 4 fill for this case fluid conveying
Set the primary structure that fluid disengaging is guided in 1.Wherein there is valve body 2 access road 21 and exit passageway 22 to extend through the
Between one surface 23 and second surface 24, and access road 21 is in being connected to entrance opening 211, and second surface on second surface 24
24 have the groove 241 around entrance opening 211, and with the protrusion structure 243 around 211 protrusion of entrance opening, and go out
Mouthful channel 22 is in being connected to an exit opening 221 on second surface 24, and second surface 24 has the groove around exit opening 221
242, a segment difference card division 25 in addition is set in 23 weeks emargination of the first surface of valve body 2, and on the second surface 24 of valve body 2
Multiple clip tenon trough 2b are set.
Valve chamber housing 4 can be corresponded to and be inserted in the clip tenon trough 2b of valve body 2 in multiple trip 4a are arranged on third surface 45,
So that valve body 2 can be combined with each other with valve chamber housing 4 stacks positioning.Have in valve chamber housing 4 and runs through third surface 45 to the 4th
The inlet valve channel 41 and outlet valve channel 42 on surface 46, and it surround inlet valve channel in having on third surface 45
41 groove 43, and there is the protrusion structure 421 around 42 protrusion of outlet valve channel on third surface 45, and with circular
The groove 44 in outlet valve channel 42, in addition, set a pressure chamber 47 in 46 fovea superior of the 4th surface, respectively with inlet valve channel
41 and outlet valve channel 42 be connected to, and the 4th surface 46 has a segment difference slot 48 in the outside of pressure chamber 47.
It please refers to shown in Fig. 3 A, Fig. 3 B and Fig. 5,3 main material of valve film is polyimide (Polyimide, PI) high score
When sub- material, manufacturing method mainly utilizes the side of reactive ion gas dry ecthing (reactive ion etching, RIE)
Method, with photonasty light blockage coating on valve mechanism, and after exposure imaging goes out valve mechanism pattern, then to be etched, by
Polyimide (Polyimide, PI) piece can be protected not to be etched at photoresist covering in having, thus it is etchable go out valve film 3 on
Valve mechanism.Valve film 3 is a flat sheet structure.As shown in figure 5, valve film 3 respectively retains in two pass-through zones 3a, 3b
There are thickness identical a valve sheet 31a, 31b, and multiple extending bracket 32a, 32b are respectively set around the peripheries valve sheet 31a, 31b
Make to flexibly support, and make respectively to form hollow hole 33a, 33b between each extending bracket 32a, 32b are adjacent, such thickness is identical
Valve sheet 31a, 31b can be protruded out deformation one by extending bracket 32a, 32b resilient support on valve film 3 by active force
Shifting measures to form valve switch structure.Valve sheet 31a, 31b can be round, rectangle, square or various geometry patterns, but not with
This is limited.Also, valve film 3 is equipped with multiple location hole 3c, valve chamber housing 4 can be inserted in the trip 4a on third surface 45, with
Positioning valve film 3 is carried in valve chamber housing 4, covers the inlet valve channel 41 of valve chamber housing 4 respectively for valve sheet 31a, 31b
And outlet valve channel 42 (as shown in Figure 7), in this present embodiment, trip 4a quantity is 2, therefore location hole 3c quantity is 2,
But not limited to this, can be arranged according to trip 4a quantity.
And please refer to shown in Fig. 7, valve body 2 and valve chamber housing 4 be combined with each other when stacking, the groove 241,242 of valve body 2
It is inserted in thereon for sealing ring 8a, a 8b respectively, and the groove 43,44 of valve chamber housing 4 is inserted in for sealing ring 8c, a 8d respectively, valve
Be combined with each other stacking between ontology 2 and valve chamber housing 4, using the setting of sealing ring 8a, 8b, 8c, 8d, with to the anti-fluid stopping in periphery
Body leaks, and the access road 21 of such valve body 2 corresponds to the inlet valve channel 41 of valve chamber housing 4, and with the valve of valve film 3
It is connected between the keying access road 21 of piece 31a and inlet valve channel 41 and the exit passageway of valve body 2 22 corresponds to valve chamber
The outlet valve channel 42 of housing 4, and with the keying exit passageway 22 of the valve sheet 31b of valve film 3 and outlet valve channel 42
Between be connected to, and when the unlatching of the valve sheet 31a of valve film 3, access road 21 imports fluid can be logical by inlet valve
Road 41 and inject confluence in pressure chamber 47, and when the unlatching of the valve sheet 31b of valve film 3, injection pressure chamber 47 flows
Body can be discharged by exit passageway 22 in outer by outlet valve channel 42.
Shown in Fig. 2A and Fig. 2 B, actuator 5 is assembled by oscillating plate 51 and piezoelectric element 52, wherein pressing
Electric device 52 attaches the surface for being fixed on oscillating plate 51.In this present embodiment, oscillating plate 51 is metal material, and piezoelectric element 52 can
It is fabricated using the piezoelectricity powder of lead zirconate titanate (PZT) series of high-voltage electricity number, is fixed on oscillating plate 51 with attaching, for
Apply voltage driving piezoelectric element 52 and generate deformation, cause oscillating plate 51 also with generation do vertically to deformation of reciprocating vibration, use
To drive the start of fluid delivery system 1.And the oscillating plate 51 of actuator 5 is to be mounted on the 4th surface 46 of valve chamber housing 4
To cover pressure chamber 47, and segment difference slot 48 of the 4th surface 46 outside pressure chamber 47, it is nested with wherein for a sealing ring 8e,
To prevent fluid from leaking on 47 periphery of pressure chamber.
As shown in the above description, valve body 2, valve film 3, valve chamber housing 4, actuator 5 may make up fluid delivery system 1
The primary structure of trandfer fluid guiding disengaging.But it so stacks how the structure combined will position, and element need not be paid with lock
(such as：Screw, nut, bolt etc.) go lock to pay positioning assembling, it is the major subjects of the invention to be implemented.Therefore following just to adopt
With valve body 2 and outer barrel 6 can mutual clip structure design, by valve body 2, valve film 3, valve chamber housing 4, actuator 5 according to
Sequence is laminated in 6 inside of outer barrel, then can mutually fasten the explanation that positioning assembles with valve body 2 and outer barrel 6.
It please referring to shown in Fig. 2A, Fig. 2 B and Fig. 6, outer barrel 6 is metal material, and there is an inner wall 61 to surround a hollow space,
It is that multiple sections of clamping structures 63 are arranged in equidistant interval that 61 bottom of inner wall, which has bulge loop structure 62 and the outer rim of outer barrel 6, wherein often
It is equipped with a separation trough 64 between section clamping structure 63, the outer rim that outer barrel 6 is set to for clamping structure 63 has the work of elasticity pressing
With.
Therefore as shown in fig.7, valve body 2, valve film 3, valve chamber housing 4, actuator 5 is made sequentially be laminateds after be placed in outside
In the inner wall 61 of cylinder 6, while the clamping structure 63 of outer barrel 6 is squeezed and can strut outward, allows entire actuator 5 to be carried at this time outer
When in the bulge loop structure 62 of cylinder 6, and the segment difference card division 25 of valve body 2 is enabled to correspond at 63 position of clamping structure of outer barrel 6, allows card
Tug structure 63 recoil to just make position and it is firm against bearing on the segment difference card division 25 of valve body 2, and mutually buckle in conjunction with fixed
Position valve body 2, valve film 3, valve chamber housing 4, actuator 5, which are sequentially laminated to assemble, forms fluid delivery system 1, and actuator 5
It may be disposed in the hollow space of inner wall 61 of outer barrel 6, it is vertical past that piezoelectric element 52 is driven oscillating plate 51 to do by application voltage
Multiple movement and deformation is resonated, reach need not be paid with lock an element (such as：Screw, nut, bolt etc.) go lock to pay the stream that positioning assembles
Body conveying device 1.
As shown in fig. 7, the constituted fluid delivery system 1 of this case, inlet valve channel 41 and the valve body 2 of valve chamber housing 4
Entrance opening 211 corresponding setting, close the effect for doing valve mechanism, and valve therebetween and with the valve sheet 31a of valve film 3
The entrance opening 211 of door piece 31a capping valve bodies 2, while being bonded the protrusion structure 243 of valve body 2 and generating a prestressing
(Preforce) it acts on, helps to create the pre- of bigger and cover tightly effect, to prevent non-return stream, and outlet valve channel 42 and valve body
2 221 corresponding setting of exit opening closes the effect for doing valve mechanism therebetween and with the valve sheet 31b of valve film 3, and
The outlet valve channel 42 of the valve sheet 31b capping valve chambers housing 4 of valve film 3, while being bonded the protrusion structure of valve chamber housing 4
421 and generate a prestressing (Preforce) act on, help to create the pre- of bigger and cover tightly effect, to prevent non-return flowing pressure chamber
47, therefore the constituted fluid delivery system of this case 1 is in the case of not start, the access road 31 and exit passageway of valve body 3
Counter flow action will not be produced between 32.
As shown in the above description, the operation that this case fluid delivery system 1 is transmitted in specific implementation fluid, as shown in Figure 8 A,
When the piezoelectric element 52 of actuator 5 is by applying voltage and activating makes 51 concave deformation of oscillating plate, the volume of pressure chamber 47 at this time
It can increase, thus generate a suction, so that the valve sheet 31a of valve film 3 is born a suction and open rapidly, make fluid can in large quantities certainly
Access road 21 on valve body 2 is drawn into, and flow through the entrance opening 211 of valve body 2, valve film 3 hollow hole
33a, valve chamber housing 4 inlet valve channel 41 flow in pressure chamber 47 keep in, while in outlet valve channel 42 also by
Suction, the valve sheet 31b of valve film 3 are generated entire smooth tight downwards by this suction by the support of extending bracket 32b
It is against protrusion structure 421 and closed state is presented.
Thereafter, shown in Fig. 8 B, after the direction of an electric field for being applied to piezoelectric element 52 changes, piezoelectric element 52 will make oscillating plate
51 convex deformations, pressure chamber 47 shrinks at this time and volume reduces, and fluid in pressure chamber 47 is made to be squeezed, and inlet valve simultaneously
By thrust in door 41, the valve sheet 31a of valve film 3 is generated by this thrust by the support of extending bracket 32a
The entire protrusion structure 243 that is close proximity to smooth upwards is presented closed state, and fluid can not be by 41 adverse current of inlet valve channel, and at this time
Also by thrust in outlet valve channel 42, the valve sheet 31b of valve film 3 is by this thrust, by the branch of extending bracket 32b
It supports and generates the smooth state for being close proximity to protrusion structure 421 that is entirely upwardly separated from, open state is presented, fluid can be by outlet valve
Except 42 outflow pressure chamber 47 of door, via the hollow hole on the outlet valve channel 42 of valve chamber housing 4, valve film 3
Exit opening 221 and exit passageway 22 on 33b, valve body 2 and flow out except fluid delivery system 1, therefore complete fluid transmission
Process, repeat the operation of Fig. 8 A and Fig. 8 B institute, you can the conveying of fluid is persistently carried out, so using this case fluid delivery system
1 can make fluid not will produce the situation of reflux in transmit process, reach efficient transmission.
In conclusion this case fluid delivery system is mainly sequentially laminated by valve body, valve film, valve chamber housing, actuator
It is internal in an outer barrel, then mutually buckle is snapped on the segment difference card division of valve body with the clamping structure of outer barrel and is incorporated into assembling shape
At, allow to be laminated in above-mentioned superimposed elements in the hollow space of outer barrel and directly assembled by positioning, without with lock pay an element (example
Such as：Screw, nut, bolt etc.) it goes to lock and pays positioning assembling, allow overall structure assembling to be fixed without any additional element more square
Just, the setting for also penetrating sealing ring is provided to entrance opening, exit opening inlet valve channel, outlet valve channel and pressure chamber
Room periphery prevents fluid from leaking and having more preferably anti-leakage, while by the piezoelectric actuated of actuator so that the body of pressure chamber
Product changes, and then the valve chip architecture being turned on and off on same valve film carries out the conveying operation of fluid tool adverse current, to reach
Efficient transmission.Therefore the value of the great industry of the fluid delivery system of this case, whence is filed an application in accordance with the law.
This case as the personage Ren Shi craftsman for being familiar with this technology thinks and be it is all as modify, it is so neither de- such as attached claim
Be intended to Protector.
【Symbol description】
1：Fluid delivery system
2：Valve body
21：Access road
211：Entrance opening
22：Exit passageway
231：Exit opening
23：First surface
24：Second surface
25：Segment difference card division
241、242：Groove
243：Protrusion structure
2b：Clip tenon trough
3：Valve film
3a、3b：Pass-through zone
31a、31b：Valve sheet
32a、32b：Extending bracket
33a、33b：Hollow hole
3c：Location hole
4：Valve chamber housing
41：Inlet valve channel
42：Outlet valve channel
421：Protrusion structure
43、44：Groove
45：Third surface
46：4th surface
47：Pressure chamber
48：Segment difference slot
4a：Trip
5：Actuator
51：Oscillating plate
52：Piezoelectric element
6：Outer barrel
61：Inner wall
62：Bulge loop structure
63：Clamping structure
64：Separation trough
7：Micro-pump structure
71：Substrate
711：Discharge chambe
72：Interlayer film
73：Access road
731：Entrance channel
74：Drive block
75：Micro-actuator
76：Exit passageway
761：Outlet flow
77：Entrance diffuser
78：Export diffuser
8a、8b、8c、8d、8e：Sealing ring
X、Y：Flow direction
Claims (8)
1. a kind of fluid delivery system, it is characterised in that include：
One valve body has an exit passageway, an access road, a first surface and a second surface, the first surface edge
For a segment difference face, the access road and the exit passageway are disposed through between the first surface and the second surface, and should
Access road in being connected to an entrance opening on the second surface, the exit passageway in being connected to an exit opening on the second surface,
Again a segment difference card division is set in first surface week emargination of the valve body；
One valve film has identical two valve sheet of thickness, and multiple extending brackets is respectively arranged around the two valve sheets periphery and make
With resilient support, and make respectively to form a hollow hole between each extending bracket is adjacent；
One valve chamber housing has a third surface, one the 4th surface, an inlet valve channel and an outlet valve channel, this enters
Mouthful valve passage and the outlet valve channel are disposed through between the third surface and the 4th surface, and the valve film should
Two valve sheets are carried on the inlet valve channel and the outlet valve channel and form valve mechanism respectively, and on the 4th surface
Fovea superior sets a pressure chamber, is connected to respectively with the inlet valve channel and the outlet valve channel；
One actuator covers the pressure chamber of the valve chamber housing；And
There is one outer barrel an inner wall to surround a hollow space, the inner wall of the outer barrel have a bulge loop structure and the outer barrel it
There is outer rim equidistant interval multiple sections of clamping structures are arranged；
Whereby, with the valve body, the valve chamber housing and the actuator, sequentially corresponding stacking is set in this in the outer barrel respectively
It in absolutely empty, and is carried in the bulge loop structure of the outer barrel, which is snapped in multiple section of clamping structure of the outer barrel
The segment difference card division of body, which mutually buckles, to be combined to form the fluid delivery system to position.
2. fluid delivery system as described in claim 1, which is characterized in that be equipped between the clamping structure of every section of the outer barrel
One separation trough, the outer rim that the outer barrel is set to for the clamping structure have the function of elasticity pressing.
3. fluid delivery system as described in claim 1, which is characterized in that be arranged on the second surface of the valve body multiple
Clip tenon trough, and multiple trips are set on the third surface of the valve chamber housing, being provided with correspondence is placed in the clip tenon trough, with positioning
Valve chamber housing assembling is positioned on the valve body.
4. fluid delivery system as claimed in claim 3, which is characterized in that the valve film is set to the valve body and the valve chamber
Between housing, and multiple location holes are arranged in the multiple trip position for corresponding to the valve chamber seat respectively, for penetrating multiple trip
Middle positioning valve film.
5. fluid delivery system as described in claim 1, which is characterized in that the second surface of the valve body has ring respectively
Around the entrance opening, multiple grooves of the exit opening, and valve chamber housing in having respectively around the entrance on the third surface
Valve passage, the outlet valve channel multiple grooves, multiple groove is inserted in for a sealing ring respectively, with to the anti-fluid stopping in periphery
Body leaks.
6. fluid delivery system as described in claim 1, which is characterized in that the valve body is circular in having on the second surface
One protrusion structure of the entrance opening protrusion, and the valve chamber housing is prominent around the outlet valve channel in having on the third surface
The protrusion structure risen, the two protrusion structures promote two valve sheet of the valve film to be bonded and pre- cover tightly is contributed to prevent respectively
A prestressing (Preforce) produced by adverse current acts on.
7. fluid delivery system as described in claim 1, which is characterized in that the actuator is by an oscillating plate and a piezoelectric element
Assemble, wherein the piezoelectric element attaches the surface for being fixed on the oscillating plate, drives the piezoelectric element to produce for applying voltage
Raw deformation, and the oscillating plate of the actuator is mounted on the 4th surface of the valve chamber housing to cover the pressure chamber.
8. fluid delivery system as described in claim 1, which is characterized in that the 4th surface of the valve chamber housing is in the pressure
Exterior thereto is equipped with a segment difference slot, is nested with wherein for a sealing ring, to prevent fluid from leaking on the pressure chamber periphery.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710102319.9A CN108506196B (en) | 2017-02-24 | 2017-02-24 | Fluid delivery device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710102319.9A CN108506196B (en) | 2017-02-24 | 2017-02-24 | Fluid delivery device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN108506196A true CN108506196A (en) | 2018-09-07 |
| CN108506196B CN108506196B (en) | 2020-04-21 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710102319.9A Active CN108506196B (en) | 2017-02-24 | 2017-02-24 | Fluid delivery device |
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| Country | Link |
|---|---|
| CN (1) | CN108506196B (en) |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59200083A (en) * | 1983-04-27 | 1984-11-13 | Sharp Corp | Pump |
| CN101581291A (en) * | 2008-05-16 | 2009-11-18 | 研能科技股份有限公司 | Fluid conveying device |
| CN101634292A (en) * | 2009-08-10 | 2010-01-27 | 胡军 | Piezoelectric ceramic pump used for electronic product and CPU cooling system |
| CN202628461U (en) * | 2012-05-24 | 2012-12-26 | 大大电子实业(深圳)有限公司 | Air cylinder casing of inflation machine |
| CN205977588U (en) * | 2016-08-26 | 2017-02-22 | 浙江捷力工贸有限公司 | Pocket inflater |
| CN206513534U (en) * | 2017-02-24 | 2017-09-22 | 研能科技股份有限公司 | Fluid delivery system |
-
2017
- 2017-02-24 CN CN201710102319.9A patent/CN108506196B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59200083A (en) * | 1983-04-27 | 1984-11-13 | Sharp Corp | Pump |
| CN101581291A (en) * | 2008-05-16 | 2009-11-18 | 研能科技股份有限公司 | Fluid conveying device |
| CN101634292A (en) * | 2009-08-10 | 2010-01-27 | 胡军 | Piezoelectric ceramic pump used for electronic product and CPU cooling system |
| CN202628461U (en) * | 2012-05-24 | 2012-12-26 | 大大电子实业(深圳)有限公司 | Air cylinder casing of inflation machine |
| CN205977588U (en) * | 2016-08-26 | 2017-02-22 | 浙江捷力工贸有限公司 | Pocket inflater |
| CN206513534U (en) * | 2017-02-24 | 2017-09-22 | 研能科技股份有限公司 | Fluid delivery system |
Also Published As
| Publication number | Publication date |
|---|---|
| CN108506196B (en) | 2020-04-21 |
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