CN206513532U - Fluid delivery system - Google Patents

Abstract

A kind of fluid delivery system, it is included：Valve lid；Valve body, with exit passageway and access road；Valve pocket housing, with inlet valve passage and outlet valve passage and pressure chamber, pressure chamber is connected with inlet valve passage, outlet valve passage respectively；Valve film, is arranged between valve body and valve pocket housing, and closing inlet valve passage and outlet valve passage formation valve switch structure are distinctly corresponded to two valve sheets；Actuator covers pressure chamber；And outer barrel；Valve lid is arranged assembling valve body whereby, makes to cover tightly on valve close in forming fluid delivery system in outer barrel to position assembling.

Description

Fluid delivery system

【Technical field】

This case is on a kind of fluid delivery system, espespecially a kind of fluid delivery system suitable for micro-pump structure.

【Background technology】

The current either industry such as medicine, computer technology, printing, energy in each field, product is towards sophistication and micro- Smallization direction is developed, and the fluid delivery structure that wherein product such as Micropump, sprayer, ink gun, industrial printing devices is included is Its key technology, therefore how its technical bottleneck is broken through by means of innovation structure, for the important content of development.

Figure 10 A are referred to, Figure 10 is known structural representation of micro-pump structure when non-start, it is known that micro-pump structure 8 is wrapped Containing access road 83, micro-actuator 85, drive block 84, interlayer film 82, discharge chambe 811, substrate 81 and exit passageway 86, wherein Definition forms a discharge chambe 811 between substrate 81 and interlayer film 82, is mainly used to store liquid, the volume of discharge chambe 811 will because every The influence of crust deformation of tunic 82 and change.

When a voltage acts on the two poles of the earth up and down of micro-actuator 85, an electric field can be produced so that micro-actuator 85 is herein Bending is produced in the presence of electric field and is moved to interlayer film 82 and the direction of discharge chambe 811, because micro-actuator 85 is arranged at transmission On block 84, therefore the thrust produced by micro-actuator 85 can be transferred to interlayer film 82 by drive block 84 so that interlayer film 82 also with And be deformed, i.e., as shown in 10B figures, liquid can flow according to the direction of arrow X in figure, make to be flowed into by access road 83 The liquid being stored in afterwards in discharge chambe 811 is squeezed, and flows to other spaces set in advance via exit passageway 86, to reach Supply the purpose of fluid.

Referring again to Figure 10 C, Figure 10 C are the top view of the micro-pump structure shown in Figure 10 A, as illustrated, when micro-pump structure 8 The conveying direction of fluid is as shown in the label Y direction of arrow in figure during start, and entrance diffuser 87 is that both ends open is of different sizes Cone structure, the larger one end of being open is connected with entrance channel 831, and is connected with the less one end of opening and discharge chambe 811 Connect, meanwhile, outlet diffuser 88 and the entrance diffuser 87 of connection discharge chambe 811 and outlet flow 861 are set in the same direction, and it is to open The larger one end of mouth is connected to discharge chambe 811, and is connected with the less one end of opening with outlet flow 861, due to being connected to The entrance diffuser 87 and outlet diffuser 88 at the two ends of discharge chambe 811 are set to be equidirectional, therefore can utilize the direction of diffuser two stream The different characteristic of resistance, and the harmomegathus of the volume of discharge chambe 811 make fluid produce unidirectional net flow rate, so that fluid can be from entrance stream Road 831 is flowed into discharge chambe 811 via entrance diffuser 87, then flowed out by outlet diffuser 87 through outlet flow 861.

However, the micro-pump structure 8 of such a incorporeity valve easily produces the situation that fluid largely flows back, so to promote stream Rate increase, discharge chambe 811 needs larger compression ratio, to produce enough chamber pressures, therefore needs to expend higher cost micro- On actuator 85.

In view of this, how to develop it is a kind of improve the fluid delivery system of above-mentioned known technology missing, develop a kind of energy The certain working characteristics and flow velocity of fluid delivery system are maintained under long-term use, the problem of actually in the urgent need to address at present.

【Utility model content】

The main purpose of this case is to provide a kind of fluid delivery system, mainly by valve body, valve film, valve pocket housing, Actuator and outer barrel are sequentially laminated in that an outer barrel is internal, then directly tightly fit in valve lid hyte depending on the inside of outer barrel Dress is formed drives oscillating plate to produce deformation by during actuator start, makes pressure chamber between oscillating plate and valve pocket housing Stereomutation produces pressure differential, and because valve chip architecture its folding on valve film is swift in response so that pressure chamber in The moment of harmomegathus can produce larger fluid suction and thrust, therefore fluid can be made to reach efficient transmission, and can effectively stop The adverse current of fluid, the phenomenon of fluid reflux is also easy to produce in order to the micro-pump structure for solving known technology in the transmit process of fluid.

The another object of this case is to provide a kind of fluid delivery system, mainly by valve body, valve film, valve pocket housing, Actuator and outer barrel are sequentially laminated in that an outer barrel is internal, then directly tightly fit in valve lid hyte depending on the inside of outer barrel Dress is formed, and is allow to be laminated in the above-mentioned superimposed elements of outer barrel and is directly assembled by positioning, without to lock a pair element (example Such as：Screw, nut, bolt etc.) go to lock and pay positioning assembling, allow overall structure assembling to fix more square without any additional element Just, the setting also through sealing ring is provided to entrance opening, exit opening inlet valve passage, outlet valve passage and pressure chamber Room periphery prevents fluid seepage from possessing more preferably anti-leakage.

It is a kind of fluid delivery system of offer for the broader implementation aspect up to above-mentioned purpose, this case, comprising:Valve cover Body, has a chamfering with the first through hole and the second through hole, and root edge；Valve body, leads to exit passageway, entrance Road, first surface and second surface, the access road and the exit passageway are disposed through between first surface and second surface, And the access road, in connecting an entrance opening on second surface, the exit passageway is opened in the outlet of connection one on second surface Mouthful；One valve film, respectively sets multiple extending brackets to make with bullet with the valve sheet of thickness identical two, and around the valve sheet periphery Property support, and each between making each extending bracket adjacent form a hollow hole；Valve pocket housing, with the 3rd surface, the 4th surface, Inlet valve passage and outlet valve passage, the inlet valve passage and the outlet valve passage are disposed through the 3rd surface And the 4th between surface, and two valve sheets of the valve film are carried on the inlet valve passage and the outlet valve passage respectively Upper formation valve mechanism, and a pressure chamber is put in the 4th surface fovea superior, respectively with the inlet valve passage and the outlet valve Door is connected；Actuator, covers the pressure chamber of the valve pocket housing；And outer barrel, it is absolutely empty in surrounding one with an inwall Between, and the inwall bottom of outer barrel has bulge loop structure；Whereby, with the valve body, the valve film, the valve pocket housing and the actuator Sequentially correspond to stack respectively and be arranged in the hollow space of the outer barrel, and be carried in the bulge loop structure of the outer barrel, with the valve The first through hole and the second through hole of lid correspond to be inserted in the exit passageway of the valve body and access road respectively, and to fall Angle smoothly imports the mutually charge-coupled binding of close-fitting in the inwall of outer barrel and closes the valve body, the valve film, the valve pocket housing, the actuator Sequentially stacking forms positioning.

【Brief description of the drawings】

Fig. 1 show the three-dimensional appearance schematic diagram of this case fluid delivery system.

Fig. 2A is the positive decomposition texture schematic diagram of the fluid delivery system of this case preferred embodiment.

Fig. 2 B are the back side decomposition texture schematic diagram of the fluid delivery system shown in Fig. 2A.

The valve body front that Fig. 3 A show this case fluid delivery system regards to obtain schematic diagram.

The valve body bottom surface that Fig. 3 B show this case fluid delivery system regards to obtain schematic diagram.

The valve pocket housing front that Fig. 4 A show this case fluid delivery system regards to obtain schematic diagram.

The valve pocket housing bottom surface that Fig. 4 B show this case fluid delivery system regards to obtain schematic diagram.

The valve film front that Fig. 5 show this case fluid delivery system regards to obtain schematic diagram.

Fig. 6 show the valve pocket housing schematic perspective view of this case fluid delivery system.

The valve lid front that Fig. 7 A show this case fluid delivery system regards to obtain schematic diagram.

The valve lid bottom surface that Fig. 7 B show this case fluid delivery system regards to obtain schematic diagram.

Fig. 8 show the diagrammatic cross-section of the fluid delivery system of this case.

Fig. 9 A show the trandfer fluid actuator state schematic diagram 1 of this case fluid delivery system.

Fig. 9 B show the trandfer fluid actuator state schematic diagram 2 of this case fluid delivery system.

Figure 10 A show known structural representation of micro-pump structure when non-start.

Figure 10 B show structural representations of Figure 10 A when start.

Figure 10 C show the top view of the micro-pump structure shown in Figure 10 A.

【Embodiment】

Embodying some exemplary embodiments of this pattern characteristics and advantage will in detail describe in the explanation of back segment.It should be understood that This case can have various changes in different aspects, and it does not all depart from the scope of this case, and explanation therein and diagram It is illustrated as being used in itself, and is not used to limit this case.

Refer to shown in Fig. 1, Fig. 2A and Fig. 2 B, the fluid delivery system 1 of this case is applicable to the raw skill of medicine, computer section The industry such as skill, printing or the energy, and liquid can be conveyed, but be not limited, fluid delivery system 1 mainly includes:Valve cover Body 2, valve body 3, valve film 4, valve pocket housing 5, actuator 6 and outer barrel 7.Wherein by valve body 3, valve film 4, valve pocket housing 5, Actuator 6 and outer barrel 7 are sequentially laminated in that outer barrel 7 is internal, then directly tightly fit in valve lid 2 positioned internal of outer barrel 7 Assemble (as shown in Figure 1).

Refer to shown in Fig. 1, Fig. 2A, Fig. 2 B, Fig. 4 A and 4B figure, valve body 3 and valve pocket housing 5 are that this case fluid conveys dress Put the primary structure that fluid turnover is guided in 1.Wherein valve body 3 has 32 points of an access road 31 and one outlet passage Guan Chuan not be between first surface 33 and second surface 34, and access road 31 is in connecting an entrance opening 311 on second surface 34, And second surface 34 has the groove 341 around entrance opening 311, and with around the convex portion of the projection of entrance opening 311 knot Structure 343, and exit passageway 32 is in connecting an exit opening 321 on second surface 34, and second surface 34 has and opened around outlet The groove 342 of mouth 321, sets several clip tenon trough 3b on the second surface 34 of valve body 3 in addition.

Valve pocket housing 5 can be corresponded to and be inserted in the clip tenon trough 3b of valve body 3 in setting several trip 5a on the 3rd surface 55, So that valve body 3 can be combined with each other with valve pocket housing 5 stacks positioning.Have in valve pocket housing 5 and run through the 3rd surface 55 to the 4th The inlet valve passage 51 and outlet valve passage 52 on surface 56, and it surround inlet valve passage in having on the 3rd surface 55 51 groove 53, and there is the convex portion structure 521 around the projection of outlet valve passage 52 on the 3rd surface 55, and with circular The groove 54 of outlet valve passage 52 a, in addition, pressure chamber 57 is put in the fovea superior of the 4th surface 56, respectively with inlet valve passage 51 and outlet valve passage 52 connect, and the 4th surface 56 has segment difference groove 58 in the outside of pressure chamber 57.

Refer to shown in Fig. 3 A, Fig. 3 B and Fig. 5, the main material of valve film 4 is pi (Polyimide, PI) high score During sub- material, the method that its manufacture method mainly utilizes reactive ion gas dry ecthing (reactive ionetching, RIE), With photonasty light blockage coating on valve mechanism, and exposure imaging goes out after valve mechanism pattern, then to be etched, due to having Pi (Polyimide, PI) piece can be protected to be not etched by photoresistance covering, thus it is etchable go out valve film 4 on valve Structure.Valve film 4 is a flat sheet structure.As shown in figure 5, valve film 4 respectively remains with thickness in two pass-through zones 4a, 4b Spend identical two valve sheet 41a, 41b, and around valve sheet 41a, 41b peripheries respectively set multiple extending bracket 42a, 42b to make with Resilient support, and each between making each extending bracket 42a, 42b adjacent form hollow hole 43a, a 43b, such thickness identical One valve sheet 41a, 41b can be flexibly supported by extending bracket 42a, 42b on valve film 4 by active force and be protruded out deformation one Shifting measures to form valve switch structure.Valve sheet 41a, 41b can be round, rectangle, square or various geometry patterns, but not with This is limited.Also, valve film 4 is provided with multiple positioning hole 4c, valve pocket housing 5 can be inserted in the trip 5a on the 3rd surface 55, with Positioning valve film 4 is carried in valve pocket housing 5, covers the inlet valve passage 51 of valve pocket housing 5 respectively for valve sheet 41a, 41b And outlet valve passage 52 (as shown in Figure 8), in the present embodiment, trip 5a quantity is 2, therefore positioning hole 4c quantity is 2, But it is not limited, can be set according to trip 5a quantity.

And refer to shown in Fig. 8, valve body 3 and valve pocket housing 5 be combined with each other when stacking, the groove 341,342 of valve body 3 It is inserted in thereon for sealing ring 8a, a 8b respectively, and the groove 53,54 of valve pocket housing 5 is inserted in it for sealing ring 8c, a 8d respectively On, be combined with each other stacking between valve body 3 and valve pocket housing 5, using sealing ring 8a, 8b, 8c, 8d setting, with to periphery Prevent fluid seepage, the inlet valve passage 51 of the corresponding valve pocket housing 5 of access road 31 of such valve body 3, and with valve film 4 Valve sheet 41a keying access road 31 and inlet valve passage 51 between connect, and valve body 3 32 pairs of exit passageway The outlet valve passage 52 of valve pocket housing 5 is answered, and with the valve sheet 41b of valve film 4 keying exit passageway 32 and outlet valve Connected between passage 52, and when the valve sheet 41a of valve film 4 unlatching, access road 31, which imports fluid, can pass through entrance Valve passage 51 and inject and conflux in pressure chamber 57, and when the valve sheet 41b of valve film 4 unlatching, inject pressure chamber The fluid of room 57 can be discharged in outer by outlet valve passage 52 by exit passageway 32.

Referring again to shown in Fig. 2A and Fig. 2 B, actuator 6 is assembled by oscillating plate 61 and piezoelectric element 62, wherein pressing Electric device 62 attaches the surface for being fixed on oscillating plate 61.In the present embodiment, oscillating plate 61 is metal material, and piezoelectric element 62 can It is fabricated by, is fixed on attaching on oscillating plate 61 using the piezoelectricity powder of lead zirconate titanate (PZT) series of high-tension electricity number, for Apply voltage driving piezoelectric element 62 and produce deformation, cause oscillating plate 61 also with generation do vertical to deformation of reciprocating vibration, use To drive the start of fluid delivery system 1.And the oscillating plate 61 of actuator 6 is to be mounted on the 4th surface 56 of valve pocket housing 5 To cover pressure chamber 57, and segment difference groove 58 of the 4th surface 56 outside pressure chamber 57, it is nested with wherein for a sealing ring 8e, To prevent fluid seepage to the periphery of pressure chamber 57.

As shown in the above description, valve body 3, valve film 4, valve pocket housing 5, actuator 6 may make up fluid delivery system 1 The primary structure of trandfer fluid guiding turnover.But so stack how the structure combined will position, and element need not be paid to lock (for example：Screw, nut, bolt etc.) go lock to pay positioning assembling, it is the major subjects to be implemented of the utility model.Therefore it is following Just using the design of valve lid 2 and outer barrel 7, valve body 3, valve film 4, valve pocket housing 5, actuator 6 are sequentially laminated in outer Cylinder 7 is internal, then the explanation that the positioned internal for directly tightly fitting in outer barrel 7 with valve lid 2 assembles.

Refer to shown in Fig. 2A, Fig. 2 B and Fig. 6, outer barrel 7 is metal material, a hollow space is surrounded with inwall 71, and The bottom of inwall 71 of outer barrel 7 has bulge loop structure 72.Refer to again shown in Fig. 7 A and Fig. 7 B, valve lid 2 is also a metal material Matter, with the first through hole 21 and the second through hole 22, is available for the access road 31 and the phase of exit passageway 32 with valve body 3 respectively Correspondence set is inserted, and the root edge of valve lid 2 has a chamfering 23, and the outside dimension of valve lid 2 is slightly over outer barrel 7 The size of inwall 71.

Therefore as shown in fig.8, valve body 3, valve film 4, valve pocket housing 5, actuator 6 are placed in outer barrel after being sequentially laminated In 7 inwall 71, allow whole stepped construction to be carried in the bulge loop structure 72 of outer barrel 7, promote valve lid 2 to be omited with outside dimension More than the design of the size of inwall 71 of outer barrel 7, in the inwall 71 that outer barrel 7 can be smoothly imported using chamfering 23, and mutually tight fit Group binding closes positioning valve body 3, valve film 4, valve pocket housing 5, actuator 6 and is sequentially laminated and forms fluid delivery system 1, and activates Device 6 also can be in the hollow space of inwall 71 of outer barrel 7, and piezoelectric element 62 is driven oscillating plate 61 to do vertically reciprocating by voltage is applied Move and deformation resonance, element need not be paid (for example to lock by reaching：Screw, nut, bolt etc.) go lock to pay the fluid that positioning is assembled Conveying device 1.

As shown in figure 8, this case constitutes fluid delivery system 1, inlet valve passage 51 and the valve body 3 of valve pocket housing 5 Entrance opening 311 it is corresponding set, close therebetween and with the valve sheet 41a of valve film 4 effect for doing valve mechanism, and valve Door piece 41a covers the entrance opening 311 of valve body 3, at the same the convex portion structure 343 for valve body 3 of fitting and produce a prestressing (Preforce) act on, help to create it is bigger it is pre- cover tightly effect, to prevent non-return stream, and outlet valve passage 52 and valve body 3 exit opening 321 is corresponding to be set, and closes therebetween and with the valve sheet 41b of valve film 4 effect for doing valve mechanism, and The outlet valve passage 52 of the valve sheet 41b capping valve pockets housing 5 of valve film 4, while the convex portion structure for valve pocket housing 5 of fitting 521 and produce a prestressing (Preforce) effect, help to create it is bigger it is pre- cover tightly effect, to prevent non-return flowing pressure chamber 57 Pressure chamber 57, therefore this case constitutes fluid delivery system 1 in the case of not start, the access road 31 of valve body 3 and Counter flow action will not be produced between exit passageway 32.

As shown in the above description, the operation that this case fluid delivery system 1 is transmitted in specific implementation fluid, as shown in Figure 9 A, When the piezoelectric element 62 of actuator 6, by application voltage, activating makes 61 times concave change of oscillating plate for the pressure chamber 57 on the 4th surface 56 Shape, now the volume of pressure chamber 57 can increase, thus produce suction, and making the valve sheet 4a of valve film 4, to bear a suction rapid Open, fluid is drawn into large quantities from the access road 31 on valve body 3, and flow through the entrance opening of valve body 3 311st, the hollow hole 43a of valve film 4, the inlet valve passage 51 of valve pocket housing 5 flow in pressure chamber 57 and kept in, and export simultaneously Also by suction in valve passage 52, the valve sheet 41b of valve film 4 is by this suction, by extending bracket 42b support Produce the whole convex portion structure 521 that is close proximity to smooth downwards and closed mode is presented.

Thereafter, shown in Fig. 9 B, after the direction of an electric field for putting on piezoelectric element 62 changes, piezoelectric element 62 will make oscillating plate 61 convex deformations, now pressure chamber 57 shrinks and volume reduces, and fluid in pressure chamber 57 is squeezed, and inlet valve simultaneously By thrust in door 51, the valve sheet 41a of valve film 4 is produced by this thrust by extending bracket 42a support The whole convex portion structure 343 that is close proximity to smooth upwards is presented closed mode, and fluid can not be by the adverse current of inlet valve passage 51, and now Also by thrust in outlet valve passage 52, the valve sheet 41b of valve film 4 is by this thrust, by extending bracket 42b branch Support and produce the smooth state for being close proximity to convex portion structure 521 that is entirely upwardly separated from, opening is presented, fluid can be by outlet valve Outside the outflow pressure chamber 57 of door 52, via the hollow hole on the outlet valve passage 52 of valve pocket housing 5, valve film 4 Exit opening 321 and exit passageway 32 on 43b, valve body 3 and flow out outside fluid delivery system 1, therefore complete fluid transmission Process, repeat the operation of Fig. 9 A and Fig. 9 B institute, you can persistently carry out the conveying of fluid, so use this case fluid delivery system 1 can make fluid not produce the situation of backflow in transmit process, reach efficient transmission.

In summary, this case fluid delivery system is mainly sequentially laminated by valve body, valve film, valve pocket housing, actuator It is internal in outer barrel, then hyte fills to be formed depending on directly tightly fitting in valve lid the inside of outer barrel, makes to be laminated in outer barrel The above-mentioned superimposed elements in portion directly can be assembled by positioning, and element is paid (for example without to lock：Screw, nut, bolt etc.) go Lock and pay positioning assembling, allow overall structure assembling to fix and more facilitate without any additional element, also through the setting of sealing ring Offer prevent fluid seepage to entrance opening, exit opening inlet valve passage, outlet valve passage and pressure chamber periphery and Possess more preferably anti-leakage, while by the piezoelectric actuated of actuator so that the stereomutation of pressure chamber, and then be turned on and off Valve chip architecture on same valve film carries out the conveying operation that fluid has adverse current, to reach efficient transmission.Therefore this case The great industry of fluid delivery system value, whence file an application in accordance with the law.

This case as the personage Ren Shi craftsman for being familiar with this technology think and be it is all as modify, so neither take off such as attached claim Be intended to Protector.

【Symbol description】

1：Fluid delivery system

2：Valve lid

21：First through hole

22：Second through hole

23：Chamfering

3：Valve body

31：Access road

311：Entrance opening

32：Exit passageway

321：Exit opening

33：First surface

34：Second surface

341、342：Groove

343：Convex portion structure

3b：Clip tenon trough

4：Valve film

4a、4b：Pass-through zone

41a、41b：Valve sheet

42a、42b：Extending bracket

43a、43b：Hollow hole

4c：Positioning hole

5：Valve pocket housing

51：Inlet valve passage

52：Outlet valve passage

521：Convex portion structure

53、54：Groove

55：3rd surface

56：4th surface

57：Pressure chamber

58：Segment difference groove

5a：Trip

6：Actuator

61：Oscillating plate

62：Piezoelectric element

7：Outer barrel

71：Inwall

72：Bulge loop structure

8：Micro-pump structure

81：Substrate

811：Discharge chambe

82：Interlayer film

83：Access road

831：Entrance channel

84：Drive block

85：Micro-actuator

86：Exit passageway

861：Outlet flow

87：Entrance diffuser

88：Export diffuser

8a、8b、8c、8d、8e：Sealing ring

X、Y：Flow direction

Claims (7)

1. a kind of fluid delivery system, comprising：

One valve lid, has a chamfering with one first through hole and one second through hole, and root edge；

One valve body, with an exit passageway, an access road, a first surface and a second surface, the access road and should Exit passageway is disposed through between a first surface and a second surface, and the access road is in connection on the second surface One entrance opening, the exit passageway is in connecting an exit opening on the second surface；

One valve film, with the valve sheet of thickness identical two, and around the valve sheet periphery respectively set multiple extending brackets to make with Resilient support, and each between making each extending bracket adjacent form a hollow hole；

One valve pocket housing, with one the 3rd surface, one the 4th surface, an inlet valve passage and an outlet valve passage, this enters Mouth valve passage and the outlet valve passage are disposed through between the 3rd surface and the 4th surface, and this of the valve film Two valve sheets are carried on the inlet valve passage and the outlet valve passage and form valve mechanism respectively, and on the 4th surface Fovea superior puts a pressure chamber, is connected respectively with the inlet valve passage and the outlet valve passage；

One actuator, covers the pressure chamber of the valve pocket housing；And

One outer barrel, a hollow space is surrounded with an inwall, and the inwall bottom of the outer barrel has a bulge loop structure；

Whereby, sequentially correspond to stacking respectively with the valve body, the valve film, the valve pocket housing and the actuator and be arranged at the outer barrel The hollow space in, and be carried in the bulge loop structure of the outer barrel, with first through hole of the valve lid and this Two through holes correspond to is inserted in the exit passageway of the valve body and the access road respectively, and it is outer with the chamfering smoothly to import this Mutually the charge-coupled binding of close-fitting closes the valve body, the valve film, the valve pocket housing, the actuator and is sequentially laminated shape in the inwall of cylinder Into positioning.

2. fluid delivery system as claimed in claim 1, it is characterised in that footpath size is outer slightly larger than this outside the valve lid The size of the inwall of cylinder, to mutually form, close-fitting is charge-coupled to be connect.

3. fluid delivery system as claimed in claim 1, it is characterised in that set multiple on the second surface of the valve body Clip tenon trough, and multiple trips are set on the 3rd surface of the valve pocket housing, being provided with correspondence is placed in the clip tenon trough, to position Valve pocket housing assembling is positioned on the valve body.

4. fluid delivery system as claimed in claim 3, it is characterised in that the valve film is arranged at the valve body and the valve pocket Between housing, and respectively to should the plurality of trip position of valve chamber seat multiple positioning holes are set, for penetrating the plurality of trip Middle positioning valve film.

5. fluid delivery system as claimed in claim 1, it is characterised in that the second surface of the valve body has ring respectively Around the entrance opening, multiple grooves of the exit opening, and the valve pocket housing in having to enter around this respectively on the 3rd surface Mouth valve passage, multiple grooves of the outlet valve passage, the plurality of groove are inserted in for a sealing ring respectively, to be prevented to periphery Fluid seepage.

6. fluid delivery system as claimed in claim 1, it is characterised in that the valve body is circular in having on the second surface One convex portion structure of the entrance opening projection, and the valve pocket housing is prominent around the outlet valve passage in having on the 3rd surface The convex portion structure risen, two convex portion structures promote two valve sheet of the valve film to fit and contribute to pre- cover tightly to prevent respectively A prestressing (Preforce) effect produced by adverse current.

7. fluid delivery system as claimed in claim 1, it is characterised in that the actuator is by an oscillating plate and a piezoelectric element Assemble, wherein the piezoelectric element, which is attached, is fixed on the surface of the oscillating plate so that application voltage drives the piezoelectric element to produce Deformation, and the oscillating plate of the actuator is mounted on the 4th surface of the valve pocket housing to cover the pressure chamber.