CN206513533U - Fluid delivery system - Google Patents

Abstract

A kind of fluid delivery system, it is included：One valve lid, with an accommodation space, the buckle structure having on the inwall of the accommodation space；Valve body, with exit passageway and access road；Valve pocket housing, with inlet valve passage and outlet valve passage and pressure chamber, pressure chamber is connected with inlet valve passage, outlet valve passage respectively；Valve film, is arranged between valve body and valve pocket housing, and closing inlet valve passage and outlet valve passage formation valve switch structure are distinctly corresponded to two valve sheets；Actuator covers pressure chamber；Outer barrel has a hollow space, and the inwall of hollow space has buckle structure；Valve body, the valve pocket housing and the actuator are sequentially corresponded to stack and are arranged in the hollow space of the outer barrel respectively whereby, and positioning is combined with the mutual buckle of the plurality of buckle structure of the outer barrel with the valve lid forms.

Description

Fluid delivery system

【Technical field】

This case is on a kind of fluid delivery system, espespecially a kind of fluid delivery system suitable for micro-pump structure.

【Background technology】

The current either industry such as medicine, computer technology, printing, energy in each field, product is towards sophistication and micro- Smallization direction is developed, and the fluid delivery structure that wherein product such as Micropump, sprayer, ink gun, industrial printing devices is included is Its key technology, therefore how its technical bottleneck is broken through by means of innovation structure, for the important content of development.

Figure 11 A are referred to, Figure 11 A are known structural representation of micro-pump structure when non-start, it is known that micro-pump structure 8 is wrapped Containing access road 83, micro-actuator 85, drive block 84, interlayer film 82, discharge chambe 811, substrate 81 and exit passageway 86, wherein Definition forms a discharge chambe 811 between substrate 81 and interlayer film 82, is mainly used to store liquid, the volume of discharge chambe 811 will because every The influence of crust deformation of tunic 82 and change.

When a voltage acts on the two poles of the earth up and down of micro-actuator 85, an electric field can be produced so that micro-actuator 85 is herein Bending is produced in the presence of electric field and is moved to interlayer film 82 and the direction of discharge chambe 811, because micro-actuator 85 is arranged at transmission On block 84, therefore the thrust produced by micro-actuator 85 can be transferred to interlayer film 82 by drive block 84 so that interlayer film 82 also with And be deformed, i.e., as shown in Figure 10 B, liquid can flow according to the direction of arrow X in figure, make after access road 83 is flowed into The liquid being stored in discharge chambe 811 is squeezed, and flows to other spaces set in advance via exit passageway 86, to reach confession Purpose to fluid.

It is the top view of the micro-pump structure shown in Figure 11 C referring again to Figure 11 A, as illustrated, when the start of micro-pump structure 8 Shi Liuti conveying direction is as shown in the label Y direction of arrow in figure, and entrance diffuser 87 is both ends open cone of different sizes Shape structure, the larger one end that is open is connected with entrance channel 831, and is connected with the less one end of opening with discharge chambe 811, together When, outlet diffuser 88 and the entrance diffuser 87 of connection discharge chambe 811 and outlet flow 861 are set in the same direction, its with opening compared with Big one end is connected to discharge chambe 811, and is connected with the less one end of opening with outlet flow 861, due to being connected to compression The entrance diffuser 87 and outlet diffuser 88 at the two ends of room 811 are set to be equidirectional, therefore can be using the direction flow resistance of diffuser two not Same characteristic, and the harmomegathus of the volume of discharge chambe 811 make fluid produce unidirectional net flow rate, so that fluid can be from entrance channel 831 flow into discharge chambe 811 via entrance diffuser 87, then are flowed out by outlet diffuser 87 through outlet flow 861.

However, the micro-pump structure 8 of such a incorporeity valve easily produces the situation that fluid largely flows back, so to promote stream Rate increase, discharge chambe 811 needs larger compression ratio, to produce enough chamber pressures, therefore needs to expend higher cost micro- On actuator 85.

In view of this, a kind of fluid delivery system for improving above-mentioned known technology missing how is developed so that development is a kind of The certain working characteristics and flow velocity of fluid delivery system can be maintained under long-term use, it is actually in the urgent need to address at present to ask Topic.

【Utility model content】

The main purpose of this case is to provide a kind of fluid delivery system, mainly by valve body, valve film, valve pocket housing, Actuator and outer barrel are sequentially laminated, then connect cooperation positioning formation with the direct buckle group of a valve lid, during by actuator start Drive oscillating plate to produce deformation, the stereomutation of the pressure chamber between oscillating plate and valve pocket housing is produced pressure differential, and And because valve chip architecture its folding on valve film is swift in response so that pressure chamber can produce larger in the moment of harmomegathus Fluid suction and thrust, therefore fluid can be made to reach efficient transmission, and can effectively stop the adverse current of fluid, in order to the known skill of solution The micro-pump structure of art is also easy to produce the phenomenon of fluid reflux in the transmit process of fluid.

The another object of this case is to provide a kind of fluid delivery system, mainly by valve body, valve film, valve pocket housing, Actuator and outer barrel are sequentially laminated in the hollow space of an outer barrel, then combine to be formed with the direct buckle of valve lid, make layer Be laminated on above-mentioned superimposed elements in the hollow space of outer barrel directly can be assembled by positioning, and element is paid (for example without to lock：Spiral shell Silk, nut, bolt etc.) go to lock and pay positioning assembling, allow overall structure assembling to be fixed without any additional element and more facilitate, also thoroughly The setting for crossing sealing ring is provided to entrance opening, exit opening inlet valve passage, outlet valve passage and pressure chamber periphery Prevent fluid seepage from possessing more preferably anti-leakage.

It is a kind of fluid delivery system of offer for the broader implementation aspect up to above-mentioned purpose, this case, comprising:Valve cover Body, with an accommodation space, and with one first through hole and the one second through hole insertion accommodation space, and the accommodation space Inwall on have multiple equi-spaced aparts set buckle structure；Valve body, with an exit passageway, an access road, one One surface and a second surface, the access road and the exit passageway are disposed through between first surface and second surface, with And the access road is in connecting an entrance opening on second surface, the exit passageway is in connecting an exit opening on second surface； Valve film, respectively sets several extending brackets to make with elasticity branch with the valve sheet of thickness identical two, and around the valve sheet periphery Support, and each between making each extending bracket adjacent form a hollow hole；Valve pocket housing, with one the 3rd surface, one the 4th surface, One inlet valve passage and an outlet valve passage, the inlet valve passage and the outlet valve passage are disposed through the 3rd Between surface and the 4th surface, and two valve sheets of the valve film are carried on the inlet valve passage and the outlet valve respectively Valve mechanism is formed on passage, and a pressure chamber is put in the 4th surface fovea superior, respectively with the inlet valve passage and this go out Mouth valve passage connection；Actuator, covers the pressure chamber of the valve pocket housing；And outer barrel, it is hollow with a hollow space The inwall in space has bulge loop structure, and the outer rim of outer barrel has the buckle structure that multiple equi-spaced aparts are set；Whereby, with this Valve body, the valve pocket housing and the actuator are sequentially corresponded to stack and are arranged in the hollow space of the outer barrel respectively, with the valve The first through hole and the second through hole of lid correspond to is inserted in the exit passageway of the valve body and access road respectively, allow the valve Door closure body carries correspondence on the valve body and covered in the hollow space of the outer barrel, with the valve lid and the plurality of buckle of the outer barrel The mutual buckle of structure combines positioning former.

【Brief description of the drawings】

Fig. 1 show the three-dimensional appearance schematic diagram of this case fluid delivery system.

Fig. 2A is the positive decomposition texture schematic diagram of the fluid delivery system of this case preferred embodiment.

Fig. 2 B are the back side decomposition texture schematic diagram of the fluid delivery system shown in Fig. 2A.

The valve body front that Fig. 3 A show this case fluid delivery system regards to obtain schematic diagram.

The valve body bottom surface that Fig. 3 B show this case fluid delivery system regards to obtain schematic diagram.

The valve pocket housing front that Fig. 4 A show this case fluid delivery system regards to obtain schematic diagram.

The valve pocket housing bottom surface that Fig. 4 B show this case fluid delivery system regards to obtain schematic diagram.

The valve film front that Fig. 5 show this case fluid delivery system regards to obtain schematic diagram.

Fig. 6 show the valve pocket housing schematic perspective view of this case fluid delivery system.

The valve lid front that Fig. 7 A show this case fluid delivery system regards to obtain schematic diagram.

The valve lid bottom surface that Fig. 7 B show this case fluid delivery system regards to obtain schematic diagram.

Fig. 7 C show the valve lid diagrammatic cross-section of this case fluid delivery system.

Fig. 8 show the combination diagram of this case fluid delivery system.

Fig. 9 show the diagrammatic cross-section of this case fluid delivery system.

Figure 10 A show the trandfer fluid actuator state schematic diagram 1 of this case fluid delivery system.

Figure 10 B show the trandfer fluid actuator state schematic diagram 2 of this case fluid delivery system.

Figure 11 A show known structural representation of micro-pump structure when non-start.

Figure 11 B show structural representations of Figure 11 A when start.

Figure 11 C show the top view of the micro-pump structure shown in Figure 11 A.

【Embodiment】

Embodying some exemplary embodiments of this pattern characteristics and advantage will in detail describe in the explanation of back segment.It should be understood that This case can have various changes in different aspects, and it does not all depart from the scope of this case, and explanation therein and diagram It is illustrated as being used in itself, and is not used to limit this case.

Refer to shown in Fig. 1, Fig. 2A and Fig. 2 B, the fluid delivery system 1 of this case is applicable to the raw skill of medicine, computer section The industry such as skill, printing or the energy, and liquid can be conveyed, but be not limited, fluid delivery system 1 mainly includes:By valve Lid 2, valve body 3, valve film 4, valve pocket housing 5, actuator 6 and outer barrel 7.Wherein by valve body 3, valve film 4, valve pocket housing 5th, actuator 6 and outer barrel 7 are sequentially laminated in the inside of outer barrel 7, then with the positioned internal assembling of the buckle outer barrel 7 of valve lid 2 Into (as shown in Figure 1).

Refer to shown in Fig. 1, Fig. 2A, Fig. 2 B, Fig. 3 A and Fig. 3 B, valve body 3 and valve pocket housing 5 are that this case fluid conveys dress Putting the primary structure wherein valve body 3 of guiding fluid turnover in 1, there is access road 31, an one outlet passage 32 to pass through respectively Wear between first surface 33 and second surface 34, and access road 31 is in connecting entrance opening 311, and second on second surface 34 Surface 34 has the groove 341 around entrance opening 311, and with the convex portion structure 343 around the projection of entrance opening 311, And exit passageway 32 has around the recessed of exit opening 321 in connection exit opening 321 on second surface 34, and second surface 34 Groove 342, sets several clip tenon trough 3b on the second surface of valve body 3 in addition.

Valve pocket housing 5 can be corresponded to and be inserted in the clip tenon trough 3b of valve body 3 in setting several trip 5a on the 3rd surface 55, So that valve body 3 can be combined with each other with valve pocket housing 5 stacks positioning.Have in valve pocket housing 5 and run through the 3rd surface 55 to the 4th The inlet valve passage 51 and outlet valve passage 52 on surface 56, and it surround inlet valve passage in having on the 3rd surface 55 51 groove 53, and there is the convex portion structure 521 around the projection of outlet valve passage 52 on the 3rd surface 55, and with circular The groove 54 of outlet valve passage 52, in addition, pressure chamber 57 is put in the fovea superior of the 4th surface 56, respectively with inlet valve passage 51 And outlet valve passage 52 is connected, and the 4th surface 56 has segment difference groove 58 in the outside of pressure chamber 57.

Refer to shown in Fig. 3 A, Fig. 3 B and Fig. 5, the main material of valve film 4 is pi (Polyimide, PI) high score During sub- material, its manufacture method mainly utilizes the side of reactive ion gas dry ecthing (reactive ion etching, RIE) Method, with photonasty light blockage coating on valve mechanism, and exposure imaging goes out after valve mechanism pattern, then to be etched, by In having pi (Polyimide, PI) piece can be protected to be not etched by photoresistance covering, thus it is etchable go out valve film 4 on Valve mechanism.Valve film 4 is a flat sheet structure.As shown in figure 5, valve film 4 respectively retains in two pass-through zones 4a, 4b There are thickness identical one valve sheet 41a, 41b, and several extending bracket 42a, 42b are respectively set around valve sheet 41a, 41b peripheries Make to flexibly support, and each between making each extending bracket 42a, 42b adjacent form hollow hole 43a, a 43b, such thickness phase Same valve sheet 41a, 41b can be flexibly supported by extending bracket 42a, 42b on valve film 4 by active force and be protruded out deformation One displacement formation valve switch structure.Valve sheet 41a, 41b can be round, rectangle, square or various geometry patterns, but It is not limited.Also, valve film 4 is provided with multiple positioning hole 4c, valve pocket housing 5 can be inserted in the trip 5a on the 3rd surface 55 In, it is carried on positioning valve film 4 in valve pocket housing 5, covers the inlet valve of valve pocket housing 5 respectively for valve sheet 41a, 41b Passage 51 and outlet valve passage 52 (as shown in Figure 9), in the present embodiment, trip 5a quantity is 2, therefore positioning hole 4c numbers Measure as 2, but be not limited, can be set according to trip 5a quantity.

And refer to shown in the 9th figure, valve body 3 and valve pocket housing 5 be combined with each other when stacking, the groove 341 of valve body 3, 342 are inserted in thereon for sealing ring 8a, a 8b respectively, and the groove 53,54 of valve pocket housing 5 is inserted in it for sealing ring 8c, 8d respectively On, be combined with each other stacking between valve body 3 and valve pocket housing 5, using sealing ring 8a, 8b, 8c, 8d setting, with to periphery Prevent fluid seepage, the inlet valve passage 51 of the corresponding valve pocket housing 5 of access road 31 of such valve body 3, and with valve film 4 Valve sheet 41a keying access road 31 and inlet valve passage 51 between connect, and valve body 3 32 pairs of exit passageway The outlet valve passage 52 of valve pocket housing 5 is answered, and with the valve sheet 41b of valve film 4 keying exit passageway 32 and outlet valve Connected between passage 52, and when the valve sheet 41a of valve film 4 unlatching, access road 31, which imports fluid, can pass through entrance Valve passage 51 and inject and conflux in pressure chamber 57, and when the valve sheet 41b of valve film 4 unlatching, inject pressure chamber The fluid of room 57 can be discharged in outer by outlet valve passage 52 by exit passageway 32.

Referring again to shown in Fig. 2A and Fig. 2 B, actuator 6 is assembled by oscillating plate 61 and piezoelectric element 62, wherein pressing Electric device 62 attaches the surface for being fixed on oscillating plate 61.In the present embodiment, oscillating plate 61 is metal material, and piezoelectric element 62 can It is fabricated by, is fixed on attaching on oscillating plate 61 using the piezoelectricity powder of lead zirconate titanate (PZT) series of high-tension electricity number, for Apply voltage driving piezoelectric element 62 and produce deformation, cause oscillating plate 61 also with generation do vertical to deformation of reciprocating vibration, use To drive the start of fluid delivery system 1.And the oscillating plate 61 of actuator 6 is to be mounted on the 4th surface 56 of valve pocket housing 5 To cover pressure chamber 57, and segment difference groove 58 of the 4th surface 56 outside pressure chamber 57 for sealing ring 8e be nested with wherein, with Fluid seepage is prevented to the periphery of pressure chamber 57.

As shown in the above description, valve body 3, valve film 4, valve pocket housing 5, actuator 6 may make up fluid delivery system 1 The primary structure of trandfer fluid guiding turnover.But so stack how the structure combined will position, and element need not be paid to lock (for example：Screw, nut, bolt etc.) go lock to pay positioning assembling, it is the major subjects to be implemented of the utility model.Therefore it is following Just using the design of valve lid 2 and outer barrel 7, valve body 3, valve film 4, valve pocket housing 5, actuator 6 are sequentially laminated in outer Cylinder 7 is internal, then tightly fits in the explanation that the positioned internal of outer barrel 7 assembles with the direct buckle of valve lid 2.

Refer to shown in Fig. 2A, Fig. 2 B and Fig. 6, outer barrel 7 is metal material, and a hollow space is surrounded with an inwall 71, Inwall 71 has bulge loop structure 72, and the outer rim of outer barrel 7 has the buckle structure 73 that multiple equi-spaced aparts are set, wherein buckle Structure can be the structure of card convex tenon or sunk coak, and the buckle structure 73 of the present embodiment outer barrel 7 is the structure using card convex standard, but not As limit.Referring again to shown in Fig. 7 A, Fig. 7 B and Fig. 7 C, valve lid 2 is also metal material, with an accommodation space 23, And with the first through hole 21 and the insertion accommodation space 23 of the second through hole 22, and the access road 31 with valve body 3 respectively And the corresponding set of exit passageway 32 is inserted, and the inwall of accommodation space 23 also has the buckle structure that multiple equi-spaced aparts are set 73, the phase mutual energy combination snaps into position of buckle structure 73 for enabling valve lid 2, the buckle structure of the present embodiment valve lid 2 231 be the structure of sunk coak.Therefore in the present embodiment in order that outer barrel 7 and valve lid 2 can be combined with each other snaps into position, therefore outside 7 buckle structure 73 of cylinder and the buckle structure 231 of valve lid 2 must be the snaps into position component being combined with each other, and be to implement this The buckle structure 73 of exception cylinder 7 is the structure using card convex standard, and the buckle structure 231 of valve lid 2 is to use sunk coak Structure, allows outer barrel 7 to be able to the snaps into position that be combined with each other with valve lid 2.

Therefore refering to shown in Fig. 8 and the 9th figure, valve body 3, valve film 4, valve pocket housing 5, actuator 6 are sequentially laminated rearmounted In the inwall 71 for entering outer barrel 7, allow whole stepped construction to be carried in the bulge loop structure 72 of outer barrel 7, utilize the of valve lid 2 The through hole 22 of pass through aperture 21 and second is inserted in the access road 31 of valve body 3 and exit passageway 32 respectively, promotes valve cover Body 2 is carried on valve body 3, and is pulled using the correspondence set of multiple buckle structures 73 of outer barrel 7 into the accommodation space 23 of valve lid 2 In 23 multiple buckle structures 231 set by inwall, therefore outer barrel 7 is able to be mutually clamped and closed with charge-coupled binding with valve lid 2, And position valve body 3, valve film 4, valve pocket housing 5, actuator 6 and be sequentially laminated in the hollow space in outer barrel 7 Nei to form one Fluid delivery system 1, and actuator 6 can also be driven and shaken by voltage is applied with piezoelectric element 62 in the hollow space of outer barrel 7 Dynamic plate 61 does up-and-down movement and deformation is resonated, and element need not be paid (for example to lock by reaching：Screw, nut, bolt etc.) remove lock Pay the fluid delivery system 1 of positioning assembling.

As shown in Figure 9, this case constitutes fluid delivery system 1, the inlet valve passage 51 and valve body of valve pocket housing 5 3 entrance opening 311 is corresponding to be set, and closes therebetween and with the valve sheet 41a of valve film 4 effect for doing valve mechanism, and Valve sheet 41a cover valve body 3 entrance opening 311, while fit valve body 3 convex portion structure 343 and produce a prestressing (Preforce) act on, help to create it is bigger it is pre- cover tightly effect, to prevent non-return stream, and outlet valve passage 52 and valve body 3 exit opening 321 is corresponding to be set, and closes therebetween and with the valve sheet 41b of valve film 4 effect for doing valve mechanism, and The outlet valve passage 52 of the valve sheet 41b capping valve pockets housing 5 of valve film 4, while the convex portion structure for valve pocket housing 5 of fitting 521 and produce a prestressing (Preforce) effect, help to create it is bigger it is pre- cover tightly effect, to prevent non-return flowing pressure chamber 57, therefore this case constitutes fluid delivery system 1 in the case of not start, the access road 31 and exit passageway of valve body 3 Counter flow action will not be produced between 32.

As shown in the above description, the operation that this case fluid delivery system 1 is transmitted in specific implementation fluid, as shown in Figure 10 A, When the piezoelectric element 62 of actuator 6 is by applying voltage and activating makes the concave deformation of oscillating plate 61, the now volume of pressure chamber 57 It can increase, thus produce a suction, the valve sheet 4a of valve film 4 is born a suction and open rapidly, make fluid can in large quantities certainly Access road 31 on valve body 3 is drawn into, and flow through the entrance opening 311 of valve body 3, the hollow hole 4a of valve film 4, The inlet valve passage 51 of valve pocket housing 5 flow in pressure chamber 57 and kept in, while also by suction in outlet valve passage 52, The valve sheet 41b of valve film 4 is produced entirely smooth downwards be close proximity to by extending bracket 42b support by this suction Closed mode is presented in convex portion structure 521.

Thereafter, shown in Figure 10 B, after the direction of an electric field for putting on piezoelectric element 62 changes, piezoelectric element 62 will make vibration The convex deformation of plate 61, now pressure chamber 57 shrinks and volume reduces, and fluid in pressure chamber 57 is squeezed, and entrance simultaneously By thrust in valve passage 51, the valve sheet 41a of valve film 4 is produced by this thrust by extending bracket 42a support The raw whole convex portion structure 343 that is close proximity to smooth upwards is presented closed mode, fluid can not by the adverse current of inlet valve passage 51, and this When outlet valve passage 52 in also by thrust, the valve sheet 41b of valve film 4 is by this thrust, by extending bracket 42b's Support and produce the smooth state for being close proximity to convex portion structure 521 that is entirely upwardly separated from, opening is presented, fluid can be by exporting Outside the outflow pressure chamber 57 of valve passage 52, via the hollow hole on the outlet valve passage 52 of valve pocket housing 5, valve film 4 Exit opening 321 and exit passageway 32 on 43b, valve body 3 and flow out outside fluid delivery system 1, therefore complete fluid transmission Process, repeat the operation of Figure 10 A and Figure 10 B institute, you can persistently carry out the conveying of fluid, so filled using the conveying of this case fluid Putting 1 can make fluid not produce the situation of backflow in transmit process, reach efficient transmission.

In summary, this case fluid delivery system is mainly sequentially laminated by valve body, valve film, valve pocket housing, actuator It is internal in an outer barrel, then hyte fills to be formed depending on being connect with the direct buckle group of valve lid in the hollow space for be matched with outer barrel, Allow to be laminated in above-mentioned superimposed elements in the hollow space of outer barrel directly by positioning to be assembled, element (example is paid without to lock Such as：Screw, nut, bolt etc.) go lock to pay positioning assembling, allow overall structure assembling need not any additional element fix and more square Just, the setting also through sealing ring is provided to entrance opening, exit opening inlet valve passage, outlet valve passage and pressure chamber Room periphery prevents fluid seepage and possesses more preferably anti-leakage, while by the piezoelectric actuated of actuator so that the body of pressure chamber Product changes, and then the valve chip architecture being turned on and off on same valve film carries out the conveying operation that fluid has adverse current, to reach Efficient transmission.Therefore the value of the great industry of the fluid delivery system of this case, whence is filed an application in accordance with the law.

This case as the personage Ren Shi craftsman for being familiar with this technology think and be it is all as modify, so neither take off such as attached claim Be intended to Protector.

【Symbol description】

1：Fluid delivery system

2：Valve lid

21：First through hole

22：Second through hole

23：Accommodation space

231：Buckle structure

3：Valve body

31：Access road

311：Entrance opening

32：Exit passageway

321：Exit opening

33：First surface

34：Second surface

341、342：Groove

343：Convex portion structure

3b：Clip tenon trough

4：Valve film

4a、4b：Pass-through zone

41a、41b：Valve sheet

42a、42b：Extending bracket

43a、43b：Hollow hole

4c：Positioning hole

5：Valve pocket housing

51：Inlet valve passage

52：Outlet valve passage

521：Convex portion structure

53、54：Groove

55：3rd surface

56：4th surface

57：Pressure chamber

58：Segment difference groove

5a：Trip

6：Actuator

61：Oscillating plate

62：Piezoelectric element

7：Outer barrel

71：Inwall

72：Bulge loop structure

73：Buckle structure

8：Micro-pump structure

81：Substrate

811：Discharge chambe

82：Interlayer film

83：Access road

831：Entrance channel

84：Drive block

85：Micro-actuator

86：Exit passageway

861：Outlet flow

87：Entrance diffuser

88：Export diffuser

8a、8b、8c、8d、8e：Sealing ring

X、Y：Flow direction

Claims (9)

1. a kind of fluid delivery system, it is characterised in that include：

One valve lid, with an accommodation space, and with one first through hole and the one second through hole insertion accommodation space, And there is the buckle structure that multiple equi-spaced aparts are set on the inwall of the accommodation space；

One valve body, with an exit passageway, an access road, a first surface and a second surface, the access road and should Exit passageway is disposed through between the first surface and the second surface, and the access road is in connection on the second surface One entrance opening, the exit passageway is in connecting an exit opening on the second surface；

One valve film, with the valve sheet of thickness identical two, and around the valve sheet periphery respectively set multiple extending brackets to make with Resilient support, and each between making each extending bracket adjacent form a hollow hole；

One valve pocket housing, with one the 3rd surface, one the 4th surface, an inlet valve passage and an outlet valve passage, this enters Mouth valve passage and the outlet valve passage are disposed through between the 3rd surface and the 4th surface, and this of the valve film Two valve sheets are carried on the inlet valve passage and the outlet valve passage and form valve mechanism respectively, and on the 4th surface Fovea superior puts a pressure chamber, is connected respectively with the inlet valve passage and the outlet valve passage；

One actuator, covers the pressure chamber of the valve pocket housing；And

One outer barrel, a hollow space is surrounded with an inwall, and the inwall of the outer barrel has a bulge loop structure, the outer rim of the outer barrel The buckle structure set with multiple equi-spaced aparts；

Whereby, sequentially corresponded to respectively with the valve body, the valve pocket housing and the actuator stack be arranged at the outer barrel this is hollow In space, with first through hole and second through hole of the valve lid, corresponding outlet for being inserted in the valve body leads to respectively In road and the access road, allow the valve lid to carry correspondence on the valve body and cover in the hollow space of the outer barrel, with the valve Door closure body is combined positioning former with the mutual buckle of the plurality of buckle structure of the outer barrel.

2. fluid delivery system as claimed in claim 1, it is characterised in that the plurality of buckle structure of the valve lid is recessed The structure of tongue-and-groove.

3. fluid delivery system as claimed in claim 1, it is characterised in that the plurality of buckle structure of the outer barrel is card convex tenon Structure.

4. fluid delivery system as claimed in claim 1, it is characterised in that set multiple on the second surface of the valve body Clip tenon trough, and multiple trips are set on the 3rd surface of the valve pocket housing, being provided with correspondence is placed in the clip tenon trough, to position Valve pocket housing assembling is positioned on the valve body.

5. fluid delivery system as claimed in claim 3, it is characterised in that the valve film is arranged at the valve body and the valve pocket Between housing, and respectively to should the plurality of trip position of valve chamber seat multiple positioning holes are set, for penetrating the plurality of trip Middle positioning valve film.

6. fluid delivery system as claimed in claim 1, it is characterised in that the second surface of the valve body has ring respectively Around the entrance opening, multiple grooves of the exit opening, and the valve pocket housing in having to enter around this respectively on the 3rd surface Mouth valve passage, multiple grooves of the outlet valve passage, the plurality of groove are inserted in for a sealing ring respectively, to be prevented to periphery Fluid seepage.

7. fluid delivery system as claimed in claim 1, it is characterised in that the valve body is circular in having on the second surface One convex portion structure of the entrance opening projection, and the valve pocket housing is prominent around the outlet valve passage in having on the 3rd surface Rise a convex portion structure, the two convex portion structures promote respectively the valve film two valve sheets fit and contribute to it is pre- cover tightly it is anti-non-return A prestressing (Preforce) effect produced by stream.

8. fluid delivery system as claimed in claim 1, it is characterised in that the actuator is by an oscillating plate and a piezoelectric element Assemble, wherein the piezoelectric element attaches the surface for being fixed on the oscillating plate, drive the piezoelectric element to produce for applying voltage Deformation is given birth to, and the oscillating plate of the actuator is mounted on the 4th surface of the valve pocket housing, to cover the pressure chamber.

9. fluid delivery system as claimed in claim 1, it is characterised in that the 4th surface of the valve pocket housing is in the pressure Exterior thereto is provided with a segment difference groove, is nested with wherein for a sealing ring, to prevent fluid seepage to the pressure chamber periphery.