CN209510595U - Fluid delivery system - Google Patents

Abstract

A kind of fluid delivery system, it includes: valve lid；Valve body has access road and exit passageway；Valve chamber housing, has inlet valve channel, outlet valve channel and pressure chamber, and pressure chamber is connected with inlet valve channel with outlet valve channel respectively；Valve film is set between valve body and valve chamber housing, and having two valve sheets, distinctly corresponding closing inlet valve channel and outlet valve channel form valve mechanism；First gasket is set between valve body and valve film；Second gasket is set between valve film and valve chamber housing；Actuator covers pressure chamber；Outer cylinder；Valve lid is arranged assembling valve body whereby, make valve upper cover closely in outer cylinder with positioning assembling form fluid delivery system；By the setting of the first gasket and the second gasket, can reinforce sealing effect prevents fluid from leaking.

Description

Fluid delivery system

[technical field]

This case is about a kind of fluid delivery system, espespecially a kind of fluid delivery system suitable for micro-pump structure.

[background technique]

The either industry such as medicine, computer technology, printing, energy in each field at present, product is towards sophistication and micro- Smallization direction is developed, and the fluid delivery structure that wherein products such as Micropump, sprayer, ink gun, industrial printing devices are included is Its key technology, therefore how innovation structure to be borrowed to break through its technical bottleneck, for the important content of development.

Figure 10 A is please referred to, Figure 10 A is structural schematic diagram of known micro-pump structure when non-actuation, it is known that micro-pump structure 8 wraps Containing access road 83, micro-actuator 85, drive block 84, interlayer film 82, discharge chambe 811, substrate 81 and exit passageway 86, wherein Definition forms a discharge chambe 811 between substrate 81 and interlayer film 82, is mainly used to store liquid, the volume of discharge chambe 811 will because every The influence of crust deformation of tunic 82 and change.

When a voltage acts on the two poles of the earth up and down of micro-actuator 85, an electric field can be generated, so that micro-actuator 85 is herein Bending is generated under the action of electric field and is moved to interlayer film 82 and 811 direction of discharge chambe, since micro-actuator 85 is set to transmission On block 84, therefore thrust caused by micro-actuator 85 can be transferred to interlayer film 82 by drive block 84 so that interlayer film 82 also with Be deformed, i.e., as shown in Figure 10 B, liquid can according in figure arrow X direction flow, make by access road 83 flow into after The liquid being stored in discharge chambe 811 is squeezed, and flows to other preset spaces via exit passageway 86, to reach confession To the purpose of fluid.

It is the top view of micro-pump structure shown in Figure 10 A referring again to Figure 10 C, Figure 10 C, as shown, working as micro-pump structure 8 For the conveying direction of fluid as shown in the arrow direction of figure label Y, entrance diffuser 87 is that both ends open is of different sizes when actuation Cone structure, the biggish one end that is open is connected with entrance channel 831, and to be open lesser one end and discharge chambe 811 connects It connects, meanwhile, the outlet diffuser 88 and entrance diffuser 87 for connecting discharge chambe 811 and outlet flow 861 are arranged in the same direction, to open The biggish one end of mouth is connected to discharge chambe 811, and is connected with being open lesser one end with outlet flow 861, due to being connected to The entrance diffuser 87 and outlet diffuser 88 at 811 both ends of discharge chambe are equidirectional setting, therefore can be flowed using two direction of diffuser The breathing for hindering different 811 volumes of characteristic and discharge chambe makes fluid generate unidirectional net flow rate, so that fluid can be from entrance stream Road 831 is flowed into discharge chambe 811 via entrance diffuser 87, then is flowed out by outlet diffuser 88 through outlet flow 861.

However, the micro-pump structure 8 of such incorporeity valve is easy to produce the situation that fluid largely flows back, so, to promote Flow rate increases, and discharge chambe 811 needs biggish compression ratio, to generate enough chamber pressures, therefore needs to expend higher cost and exists On micro-actuator 85.

In view of this, how to develop a kind of fluid delivery system that can improve above-mentioned known technology missing, develop a kind of energy The certain working characteristics and flow velocity of fluid delivery system are maintained under long-time service, actually problem in the urgent need to address at present.

[utility model content]

The main purpose of this case is to provide a kind of fluid delivery system, mainly by valve body, valve film, valve chamber housing and Actuator is sequentially laminated in the hollow space of an outer barrel, then directly tightly fits in valve lid position depending on the inside of outer cylinder Assembling is formed.It drives oscillating plate to generate deformation by when actuator actuation, makes the pressure chamber between oscillating plate and valve chamber housing The stereomutation of room generates pressure difference, and its folding is swift in response due to the valve chip architecture on valve film, so that pressure chamber Room can produce biggish fluid suction and thrust in the moment of breathing, therefore fluid high-effective rate can be made to transmit, and can effectively stop to flow The adverse current of body, in order to solve known technology micro-pump structure be also easy to produce fluid reflux in the transmit process of fluid the phenomenon that.

The another object of this case is to provide a kind of fluid delivery system, mainly by valve body, valve film, valve chamber housing and Actuator is sequentially laminated in the hollow space of an outer barrel, then directly tightly fits in valve lid position depending on the inside of outer cylinder Assembling is formed, and is allow to be laminated in the above-mentioned superimposed elements in outer cylinder and is directly assembled by positioning, pays element (example without with lock It such as: screw, nut, bolt) goes to lock and pays positioning assembling, make overall structure assembling more square without the fixation of any additional element Just, the setting more through the first gasket and the second gasket is provided to entrance opening, exit opening, inlet valve channel, outlet valve Door and pressure chamber periphery prevent fluid from leaking, and the fluid delivery system of this case is made to have more preferably anti-leakage.

In order to achieve the above object, the broader state sample implementation of this case is to provide a kind of fluid delivery system, include: valve cover Body has one first through hole and one second through hole, and has a chamfering in root edge；Valve body has an access road, one Exit passageway, a first surface and a second surface more protrude out a protrusion platform on the second surface on the second surface Form that recessed one the oneth set connects the face ﹐ access road and the exit passageway is disposed through between first surface and second surface, And the access road, in being connected to an entrance opening on the second surface, the exit passageway is in one outlet of connection on the second surface Opening；Valve film has identical two valve sheet of thickness, and multiple extending brackets is respectively arranged around the valve sheet periphery and make with bullet Property support, and make each extending bracket it is adjacent between respectively form a hollow hole；First gasket is bonded first junction and is arranged Between the valve body and the valve film, and corresponding to the entrance opening has one to perforate；One valve chamber housing has a third Surface, one the 4th surface, an inlet valve channel and an outlet valve channel, the more corresponding valve body should on the third surface First junction protrudes out a protrusion platform in forming recessed one second junction set on the third surface, the inlet valve channel and should Outlet valve channel is disposed through between the third surface and the 4th surface, and two valve sheet of the valve film is held respectively It is loaded on the inlet valve channel and the outlet valve channel and forms valve mechanism, it is more recessed on the 4th surface to set a pressure chamber Room is connected to the inlet valve channel and the outlet valve channel respectively；Second gasket is bonded second junction and is set to this Between valve film and the valve chamber housing, and corresponding to the exit opening has one to perforate；Actuator covers the valve chamber housing The pressure chamber；And outer cylinder, there is an inner wall to surround a hollow space, and the inner wall bottom of the outer cylinder has a bulge loop knot Structure；The valve body, first gasket, the valve film, second gasket, the valve chamber housing and the actuator sequentially correspond to heap respectively It is folded to be set in the hollow space of the outer cylinder, and be carried in the bulge loop structure of the outer cylinder, the valve lid this first Through hole and second through hole are respectively corresponded and are inserted in the access road and the exit passageway of the valve body, and with the chamfering Smoothly import mutual close-fitting in the inner wall of the outer cylinder be combined binding conjunction, and make the valve body, first gasket, the valve film, Formation positioning is sequentially laminated in second gasket, the valve chamber housing and the actuator.

[Detailed description of the invention]

Fig. 1 show the three-dimensional appearance schematic diagram of this case fluid delivery system.

Fig. 2A is the positive decomposition texture schematic diagram of the fluid delivery system of this case preferred embodiment.

Fig. 2 B is the back side decomposition texture schematic diagram of fluid delivery system shown in Fig. 2A.

The valve body front that Fig. 3 A show this case fluid delivery system regards to obtain schematic diagram.

The valve body bottom surface that Fig. 3 B show this case fluid delivery system regards to obtain schematic diagram.

The valve chamber housing front that Fig. 4 A show this case fluid delivery system regards to obtain schematic diagram.

The valve chamber housing bottom surface that Fig. 4 B show this case fluid delivery system regards to obtain schematic diagram.

The valve film front that Fig. 5 show this case fluid delivery system regards to obtain schematic diagram.

Fig. 6 show the valve chamber housing stereoscopic schematic diagram of this case fluid delivery system.

The valve lid front that Fig. 7 A show this case fluid delivery system regards to obtain schematic diagram.

The valve lid bottom surface that Fig. 7 B show this case fluid delivery system regards to obtain schematic diagram.

Fig. 8 show the diagrammatic cross-section of the fluid delivery system of this case.

Fig. 9 A show the trandfer fluid actuator state schematic diagram 1 of this case fluid delivery system.

Fig. 9 B show the trandfer fluid actuator state schematic diagram 2 of this case fluid delivery system.

Figure 10 A show known structural schematic diagram of micro-pump structure when non-actuation.

Figure 10 B show structural schematic diagram of Figure 10 A when actuation.

Figure 10 C show the top view of micro-pump structure shown in Figure 10 A.

[specific embodiment]

The some exemplary embodiments for embodying this case features and advantages will describe in detail in the explanation of back segment.It should be understood that This case can have various variations in different aspects, all not depart from the range of this case, and explanation therein and diagram It is illustrated as being used in itself, rather than to limit this case.

The fluid delivery system 1 of this case is applicable to the industry such as the raw skill of medicine, computer technology, printing or the energy, and can Liquid is conveyed, but not limited to this, please refers to Fig. 1, Fig. 2A and Fig. 2 B, and fluid delivery system 1 specifically includes that valve lid 2, valve Ontology 3, valve film 4, valve chamber housing 5, actuator 6 and outer cylinder 7.Wherein by valve body 3, valve film 4, valve chamber housing 5 and cause It is internal that dynamic device 6 is sequentially laminated in outer cylinder 7, then is assembled with the positioned internal that valve lid 2 directly tightly fits in outer cylinder 7 (as shown in Figure 1).

B is please referred to Fig.1 to Fig.4, valve body 3 and valve chamber housing 5 are guiding fluid disengaging in this case fluid delivery system 1 Primary structure.Wherein valve body 3 have an access road 31 and one outlet channel 32 extend through first surface 33 and Between second surface 34, access road 31 is in being connected to an entrance opening 311 on second surface 34, and exit passageway 32 is in the second table An exit opening 321 is connected on face 34.A protrusion platform 341 is more protruded out on second surface 34 and forms recessed 1 set first connects Face 342.In the preferred embodiment, as shown in Figure 3B, several clip tenon trough 3a and second surface 34 are set on second surface 34 With more the protrusion structure 344 around 311 protrusion of entrance opening in first junction 342.In the preferred embodiment, second surface 34 With more an outer rim annular section 343, outer rim annular section 343 is around the periphery of protrusion platform 341 and the first junction 342.

Valve chamber housing 5 can be corresponded to and be inserted in the clip tenon trough 3a of valve body 3 in several trip 5a are arranged on third surface 53, So that valve body 3 and valve chamber housing 5 can be combined with each other stacking positioning.Have in valve chamber housing 5 and runs through third surface 53 to the 4th The inlet valve channel 51 and outlet valve channel 52 on surface 54, and the second surface 34 of the more corresponding valve body 3 in third surface 53 On the first junction 342 protrude out a protrusion platform 531, and form recessed one second junction 532 set.In addition, valve chamber housing 5 in 4th surface, 54 fovea superior sets a pressure chamber 55, is connected to respectively with inlet valve channel 51 and outlet valve channel 52, and the 4th Surface 54 has segment difference slot 56 outside pressure chamber 55.In the preferred embodiment, have an outer rim cyclic annular on third surface 53 Around the periphery of protrusion platform 531 and the second junction 532, also, as shown in Figure 4 A, third surface 53 connects second in region 533 There is the protrusion structure 534 around 52 protrusion of outlet valve channel on face 532.

Fig. 2A, Fig. 2 B and Fig. 5 are please referred to, the main material of valve film 4 is polyimide (Polyimide, PI) macromolecule material When material, the method that manufacturing method mainly utilizes reactive ion gas dry ecthing (reactive ion etching, RIE), with Photonasty light blockage coating is on valve mechanism, and after exposure development goes out valve mechanism pattern, then to be etched, due to there is light Polyimide (Polyimide, PI) piece can be protected not to be etched at resistance covering, thus the valve knot on etchable valve film 4 out Structure.Valve film 4 is a flat sheet structure.As shown in figure 5, valve film 4 respectively remains with thickness in two pass-through zones 4a, 4b Identical two valve sheets 41a, 41b, and multiple extending bracket 42a, 42b are respectively set around the periphery valve sheet 41a, 41b and are made with bullet Property support, and make each extending bracket 42a, 42b it is adjacent between respectively form hollow hole 43a, a 43b, the identical valve of such thickness Door piece 41a, 41b can be flexibly supported by extending bracket 42a, 42b on valve film 4 by active force and be protruded out one displacement of deformation Form valve switch structure.Valve sheet 41a, 41b can be round, rectangle, square or various geometry patterns, but not as Limit.Also, valve film 4 is equipped with multiple location hole 41c, valve chamber housing 5 can be inserted in the trip 5a on third surface 53, with positioning Valve film 4 is carried in valve chamber housing 5, is covered the inlet valve channel 51 of valve chamber housing 5 respectively for valve sheet 41a, 41b and is gone out Mouth valve passage 52 (as shown in Figure 8), in this present embodiment, trip 5a quantity are 4, therefore location hole 41c quantity is also 4, But not limited to this, can be arranged according to trip 5a quantity.

Please refer to Fig. 2A, Fig. 2 B and Fig. 8, the fluid delivery system 1 of the utility model further include one first gasket 9a and One second gasket 9b.First gasket 9a fit in the first junction 342 of valve body 3 and be set to valve body 3 and valve film 4 it Between, corresponding to entrance opening 311 has a perforation 91a.Second gasket 9b fit in the second junction 532 of valve chamber housing 5 and It is set between valve film 4 and valve chamber housing 5, corresponding to exit opening 321 has a perforation 91b.In the preferred embodiment, One gasket 9a more opens up multiple pads location hole 92a, and the second gasket 9b also opens up multiple pads location hole 92b, for respectively Valve chamber housing 5 is inserted in the trip 5a on third surface 53, positioning assembling the first gasket 9a and the second gasket 9b is in fluid whereby Conveying device 1.

The material of first gasket 9a and the second gasket 9b are the material being elastically compressed, and wherein preferably is rubber.The One gasket 9a and the second gasket 9b has symmetrical shape, and the shape of valve film 4 is the pad of the first gasket 9a and second The combination that the shape of piece 9b is involutory.In the present embodiment, the first gasket 9a and the second gasket 9b are semicircle, and valve film 4 is Circle, but not limited to this.For example, the first gasket 9a, the second gasket 9b can be rectangle, and valve film 4 is then two square The square of shape combination.The top surface of the protrusion platform 341 of valve body 3, the second junction 532 of valve chamber housing 5 and the second gasket 9b It corresponds to each other and there is same shape and size；The top of first junction 342 of valve body 3, the protrusion platform 531 of valve chamber housing 5 Face corresponds to each other with the first gasket 9a and has same shape and size.First gasket 9a has identical thickness with the second gasket 9b Degree, the protrusion platform 341 of valve body 3 and the protrusion platform 531 of valve chamber housing 5 have approximation or are identical to aforementioned thicknesses size Podium level.

Fig. 2A, Fig. 2 B and Fig. 8 are please referred to, when valve body 3, the first gasket 9a, valve film 4, the second gasket 9b and valve chamber Housing 5 sequentially be combined with each other when stacking, the outer rim annular section 343 and valve chamber housing 5 on the second surface 34 of valve body 3 An annular groove is constituted between outer rim annular section 533 on third surface 53, for being arranged a sealing ring 10a, has and reinforces preventing Shield inhibits the effect of fluid leakage.Through the configuration of the first gasket 9a and the second gasket 9b, in addition sealing ring 10a's is dual close Envelope effect can generate the good result for preventing fluid from leaking, the corresponding valve chamber housing of the access road 31 of such valve body 3 to periphery 5 inlet valve channel 51, and opened and closed with the valve sheet 41a of valve film 4 and connected between access road 31 and inlet valve channel 51 The outlet valve channel 52 of logical and valve body 3 the corresponding valve chamber housing 5 of exit passageway 32, and with the valve sheet of valve film 4 It is connected between 41b opening and closing exit passageway 32 and outlet valve channel 52, and when the valve sheet 41a of valve film 4 is opened, entrance is logical Road 31 imports fluid can inject confluence in pressure chamber 55 by inlet valve channel 51, and work as the valve of valve film 4 When piece 41b is opened, the fluid of injection pressure chamber 55 can be discharged by exit passageway 32 in outer by outlet valve channel 52.

Referring again to shown in Fig. 2A and Fig. 2 B, actuator 6 is assembled by oscillating plate 61 and piezoelectric element 62, wherein pressing Electric device 62 attaches the surface for being fixed on oscillating plate 61.In this present embodiment, oscillating plate 61 is metal material, and piezoelectric element 62 can It is fabricated using the piezoelectricity powder of lead zirconate titanate (PZT) series of high-voltage electricity number, is fixed on oscillating plate 61 with attaching, for Apply voltage driving piezoelectric element 62 and generate deformation, cause oscillating plate 61 also with generation do vertically to deformation of reciprocating vibration, use To drive the actuation of fluid delivery system 1.And the oscillating plate 61 of actuator 6 be mounted on the 4th surface 54 of valve chamber housing 5 with Pressure chamber 55, and segment difference slot 56 of the 4th surface 54 outside pressure chamber 55 are covered, is nested with it for a sealing ring 10b In, so as to preventing fluid from leaking on 55 periphery of pressure chamber.

As shown in the above description, valve body 3, the first gasket 9a, valve film 4, the second gasket 9b, valve chamber housing 5, actuator 6 may make up the primary structure of the trandfer fluid guiding disengaging of fluid delivery system 1.But so stack how the structure combined will determine Position, and an element (such as: screw, nut, bolt etc.) need not be paid with lock, lock is gone to pay positioning assembling, it is the class to be implemented of this case Topic.Therefore following just using the design of valve lid 2 and outer cylinder 7, by valve body 3, valve film 4, valve chamber housing 5, actuator 6 according to Sequence is laminated in the inside of outer cylinder 7, then the explanation assembled with the positioned internal that valve lid 2 directly tightly fits in outer cylinder 7.

It please referring to shown in Fig. 2A, Fig. 2 B and Fig. 6, outer cylinder 7 is metal material, there is inner wall 71 to surround a hollow space, and 71 bottom of inner wall of outer cylinder 7 has bulge loop structure 72.It is please referred to shown in Fig. 7 A and Fig. 7 B again, valve lid 2 is also a metal material Matter has the first through hole 21 and the second through hole 22, respectively for 32 phase of access road 31 and exit passageway with valve body 3 Correspondence is inserted in.The root edge of valve lid 2 has more a chamfering 23, and the outer diameter of valve lid 2 is slightly larger than the inner wall of outer cylinder 7 71 sizes.

Therefore as shown in fig.8, valve body 3, the first gasket 9a, valve film 4, the second gasket 9b, valve chamber housing 5, actuating It after device 6 is sequentially laminated, is placed in the inner wall 71 of aforementioned outer cylinder 7, entire stepped construction is allowed to be carried on the bulge loop structure 72 of outer cylinder 7 On, and using 2 outer diameter of valve lid slightly larger than outer cylinder 7 71 size of inner wall design, by chamfering 23 import outer cylinder 7 it In inner wall 71, and mutually close-fitting is combined and connects, combine whereby positioning valve body 3, the first gasket 9a, valve film 4, the second gasket 9b, Valve chamber housing 5, actuator 6 are sequentially laminated and form fluid delivery system 1.Actuator 6 can also press in the hollow space of outer cylinder 7 Electric device 62 is driven oscillating plate 61 to do up-and-down movement and deformation is resonated by voltage is applied, and an element need not be paid with lock by reaching (such as: screw, nut, bolt etc.) go lock to pay the fluid delivery system 1 that positioning assembles.In addition, close compared to only using merely Seal ring, the contact area of the first gasket 9a and the second gasket 9b due to increasing itself and valve body 3 and valve chamber housing 5, can increase It prevents fluid from leaking by force, and assembles also simple and quick compared with sealing ring.

As shown in figure 8, the constituted fluid delivery system 1 of this case, the inlet valve channel 51 of valve chamber housing 5 and valve body 3 The corresponding setting of entrance opening 311, close and generate therebetween and with the valve sheet 41a of valve film 4 effect of valve mechanism, And valve sheet 41a cover valve body 3 entrance opening 311 when, while be bonded valve body 3 protrusion structure 344 and generate one Prestressing (Preforce) effect, help to create it is bigger it is pre- cover tightly effect, to prevent non-return stream, and outlet valve channel 52 and valve The corresponding setting of exit opening 321 of ontology 3 is closed therebetween and with the valve sheet 41b of valve film 4 and generates valve mechanism Effect, and when the outlet valve channel 52 of the valve sheet 41b capping valve chamber housing 5 of valve film 4, while being bonded valve chamber housing 5 Protrusion structure 534 and generate a prestressing (Preforce) effect, help to create it is bigger it is pre- cover tightly effect, pressed to prevent non-return stream Power chamber 55, therefore the constituted fluid delivery system 1 of this case is in the case where not actuation, the access road 31 of valve body 3 and goes out Mouth will not generate backflow phenomena between channel 32.

As shown in the above description, the operation that this case fluid delivery system 1 is transmitted in specific implementation fluid, as shown in Figure 9 A, When actuator 6 piezoelectric element 62 by apply voltage and activating makes 61 concave deformation of oscillating plate, at this time 55 volume of pressure chamber increase Add, thus generate suction, so that the valve sheet 41a of valve film 4 is born a suction and open rapidly, fluid can be in large quantities from valve body 3 On access road 31 be drawn into, and flow through the entrance opening 311 of valve body 3, the hollow hole 43a of valve film 4 (is not indicated In Fig. 9 A, see Fig. 5), the inlet valve channel 51 of valve chamber housing 5 flow in pressure chamber 55 and keep in, while outlet valve channel Also by suction in 52, the valve sheet 41b of valve film 4 is entire downward by the support of extending bracket 42b by this suction The state closed is presented in the smooth protrusion structure 534 that is close proximity to.

Thereafter, shown in Fig. 9 B, after the direction of an electric field for being applied to piezoelectric element 62 changes, piezoelectric element 62 will make oscillating plate 61 convex deformations, pressure chamber 55 shrinks at this time and volume reduces, and fluid in pressure chamber 55 is made to be squeezed, and inlet valve simultaneously By thrust in door 51, the valve sheet 41a of valve film 4 is entire by the support of extending bracket 42a by this thrust The state closed is presented in the smooth protrusion structure 344 that is close proximity to upwards, and fluid can not be gone out at this time by 51 adverse current of inlet valve channel Also by thrust in mouth valve passage 52, the valve sheet 41b of valve film 4 is by this thrust, by the support of extending bracket 42b And it is entirely upwardly separated from protrusion structure 534, open state is presented, fluid can be by 52 outflow pressure chamber 55 of outlet valve channel Except, via on the outlet valve channel 52 of valve chamber housing 5, valve film 4 hollow hole 43b (not being shown in Fig. 9 B, see Fig. 5), Exit opening 321 and exit passageway 32 on valve body 3 and flow out except fluid delivery system 1, complete the process of fluid transmission. It repeats to operate as shown in Fig. 9 A and Fig. 9 B, i.e., the sustainable conveying for carrying out fluid.It can make to flow using this case fluid delivery system 1 Body will not generate the situation of reflux in transmit process, achieve the purpose that high-efficiency transfer.

In conclusion this case fluid delivery system mainly by valve body 3, the first gasket 9a, valve film 4, the second gasket 9b, Valve chamber housing 5, actuator 6 are sequentially laminated in that outer cylinder 7 is internal, then with valve lid 2 directly tightly fit in outer cylinder 7 inside and Positioning assembling is formed, and assembles the above-mentioned superimposed elements being laminated in inside outer cylinder 7 directly by positioning, is paid without with lock Element (such as: screw, nut, bolt etc.) it goes to lock and pays positioning assembling, allow overall structure assembling to fix without any additional element And more convenient assembling, also the setting through the first gasket 9a, the second gasket 9b and sealing ring 10a, 10b is provided to entrance opening 311, exit opening 321, inlet valve channel 51, outlet valve channel 52 and 55 periphery of pressure chamber prevent fluid from leaking and having Standby more preferably anti-leakage, while by the piezoelectric actuated of actuator 6, so that the stereomutation of pressure chamber 55, and then open or close Valve sheet 41a, 41b structure closed on same valve film 4 carries out the fluid conveying operation of counterflow-preventing, to reach efficient biography It is defeated.Therefore the value of the great industry of fluid delivery system 1 of this case, whence is filed an application in accordance with the law.

This case as the personage Ren Shi craftsman for being familiar with this technology thinks and be it is all as modify, it is so neither de- such as attached claim Be intended to Protector.

[symbol description]

1: fluid delivery system

2: valve lid

21: the first through holes

22: the second through holes

23: chamfering

3: valve body

31: access road

311: entrance opening

32: exit passageway

321: exit opening

33: first surface

34: second surface

341: protrusion platform

342: the first junctions

343: outer rim annular section

344: protrusion structure

3a: clip tenon trough

4: valve film

4a, 4b: pass-through zone

41a, 41b: valve sheet

41c: location hole

42a, 42b: extending bracket

43a, 43b: hollow hole

5: valve chamber housing

51: inlet valve channel

52: outlet valve channel

53: third surface

531: protrusion platform

532: the second junctions

533: outer rim annular section

534: protrusion structure

54: the four surfaces

55: pressure chamber

56: segment difference slot

5a: trip

6: actuator

61: oscillating plate

62: piezoelectric element

7: outer cylinder

71: inner wall

72: bulge loop structure

8: micro-pump structure

81: substrate

811: discharge chambe

82: interlayer film

83: access road

831: entrance channel

84: drive block

85: micro-actuator

86: exit passageway

861: outlet flow

87: entrance diffuser

88: outlet diffuser

9a: the first gasket

91a: perforation

92a: gasket location hole

9b: the second gasket

91b: perforation

92b: gasket location hole

10a, 10b: sealing ring

X, Y: flow direction

Claims (10)

1. a kind of fluid delivery system, characterized by comprising:

There is one valve lid one first through hole and one second through hole and root edge to have a chamfering；

One valve body has an access road, an exit passageway, a first surface and a second surface, on the second surface more Protrude out a protrusion platform and in forming recessed one first junction set on the second surface, the access road and the exit passageway run through It is set between the first surface and the second surface and the access road is in being connected to an entrance opening on the second surface, The exit passageway is in being connected to an exit opening on the second surface；

One valve film, has identical two valve sheet of thickness, and around the valve sheet periphery be respectively arranged multiple extending brackets make with Resilient support, and make each extending bracket it is adjacent between respectively form a hollow hole；

One first gasket is bonded first junction and is set between the valve body and the valve film, and the corresponding entrance is opened Mouth has a perforation；

One valve chamber housing has a third surface, one the 4th surface, an inlet valve channel and an outlet valve channel, this First junction of the more corresponding valve body protrudes out a protrusion platform and in forming recessed one set on the third surface on three surfaces Second junction, the inlet valve channel and the outlet valve channel are disposed through between the third surface and the 4th surface, And two valve sheet of the valve film is carried on the inlet valve channel and the outlet valve channel respectively and forms valve mechanism, It is more recessed on 4th surface to set a pressure chamber, it is connected to respectively with the inlet valve channel and the outlet valve channel；

One second gasket is bonded second junction and is set between the valve film and the valve chamber housing, and the corresponding outlet Opening has a perforation；

One actuator covers the pressure chamber of the valve chamber housing；And

There is one outer cylinder an inner wall to surround a hollow space, and the inner wall bottom of the outer cylinder has a bulge loop structure；

Whereby, with the valve body, first gasket, the valve film, second gasket, the valve chamber housing and the actuator respectively according to Ordered pair, which should stack, to be set in the hollow space of the outer cylinder, and is carried in the bulge loop structure of the outer cylinder, with the valve cover First through hole and second through hole of body are respectively corresponded and are inserted in the access road and the exit passageway of the valve body, And it mutual close-fitting in the inner wall of the outer cylinder is imported smoothly with the chamfering is combined binding and close the valve body, first gasket, the valve Formation positioning is sequentially laminated in diaphragm, second gasket, the valve chamber housing, the actuator.

2. fluid delivery system as described in claim 1, which is characterized in that first gasket and second gasket have phase Symmetrical shape, and the shape of the valve film is the combination of first gasket and the shape of second gasket.

3. fluid delivery system as claimed in claim 2, which is characterized in that first gasket and second gasket are semicircle Shape, the valve film are circle.

4. fluid delivery system as described in claim 1, which is characterized in that second surface and the valve chamber of the valve body The third surface of housing more separately includes an outer rim annular section, the valve body, first gasket, the valve film, this second Sequentially heap poststack, multiple outer rim annular section are formed between the valve body and the valve chamber housing for gasket and the valve chamber housing One annular groove is for being arranged a sealing ring.

5. fluid delivery system as described in claim 1, which is characterized in that the outer diameter of the valve lid is outer slightly larger than this The size of the inner wall of cylinder is combined with to mutually form close-fitting and is connect.

6. fluid delivery system as described in claim 1, which is characterized in that be arranged on the second surface of the valve body multiple Clip tenon trough, and multiple trips are set on the third surface of the valve chamber housing, being provided with correspondence is placed in the clip tenon trough, with positioning Valve chamber housing assembling is positioned on the valve body.

7. fluid delivery system as claimed in claim 6, which is characterized in that the valve film is set to the valve body and the valve chamber Between housing, and multiple location holes are arranged in the multiple trip position for respectively corresponding the valve chamber housing, for penetrating multiple trip Middle positioning valve film.

8. fluid delivery system as claimed in claim 6, which is characterized in that first gasket is opened more respectively with second gasket If an at least gasket location hole, multiple gasket location hole corresponds to multiple trip position and is arranged for penetrating in multiple trip Position first gasket and second gasket.

9. fluid delivery system as described in claim 1, which is characterized in that the valve body is circular in having on the second surface One protrusion structure of the entrance opening protrusion, and the valve chamber housing is prominent around the outlet valve channel in having on the third surface Rise a protrusion structure, two protrusion structures promote respectively the valve film two valve sheet be bonded and facilitate it is pre- cover tightly prevent it is non-return The effect of a prestressing (Preforce) produced by flowing.

10. fluid delivery system as described in claim 1, which is characterized in that the actuator is by an oscillating plate and piezoelectricity member Part assembles, and wherein the piezoelectric element attaches the surface for being fixed on the oscillating plate so that application voltage drives the piezoelectric element to produce Raw deformation, and the oscillating plate of the actuator is mounted on the 4th surface of the valve chamber housing to cover the pressure chamber.