CN101634292A - Piezoelectric ceramic pump used for electronic product and CPU cooling system - Google Patents

Piezoelectric ceramic pump used for electronic product and CPU cooling system Download PDF

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Publication number
CN101634292A
CN101634292A CN200910109281A CN200910109281A CN101634292A CN 101634292 A CN101634292 A CN 101634292A CN 200910109281 A CN200910109281 A CN 200910109281A CN 200910109281 A CN200910109281 A CN 200910109281A CN 101634292 A CN101634292 A CN 101634292A
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China
Prior art keywords
valve
pump
pump housing
valve opening
overhang
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CN200910109281A
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Chinese (zh)
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CN101634292B (en
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胡军
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Hu Jun
Lin Dawei
Yang Zhujun
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Individual
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Priority to CN2009101092813A priority Critical patent/CN101634292B/en
Priority to PCT/CN2009/075052 priority patent/WO2011017862A1/en
Publication of CN101634292A publication Critical patent/CN101634292A/en
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Publication of CN101634292B publication Critical patent/CN101634292B/en
Expired - Fee Related legal-status Critical Current
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    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04BPOSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00Machines, pumps, or pumping installations having flexible working members
    • F04B43/02Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04Pumps having electric drive
    • F04B43/043Micropumps
    • F04B43/046Micropumps with piezoelectric drive
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00Piezoelectric or electrostrictive devices
    • H10N30/20Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
    • H10N30/2047Membrane type

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Reciprocating Pumps (AREA)

Abstract

The invention discloses a piezoelectric ceramic pump used for an electronic product and a CPU cooling system, comprising a basin-shaped pump body, a liquid inlet pipe, a liquid outlet pipe, a pump cover, a check valve and a piezoelectric ceramic energy-transducing piece; the piezoelectric ceramic pump is characterized in that a pump body inner chamber comprises a liquid inlet chamber, a liquid outlet chamber and a valve seat disc, wherein the disc is assembled in the pump body inner chamber, and a liquid inlet valve hole communicated with the liquid inlet chamber and a liquid outlet valve hole communicated with the liquid outlet chamber are arranged on the disc; the check valve is of two cantilever valves, wherein one end of the check valve is respectively fixed at one end of the liquid inlet valve hole or the liquid outlet valve hole, the other end of the check valve is respectively covered at the lower surface of the liquid inlet valve hole and the upper surface of the liquid outlet valve hole, the cantilever valves are contacted with one surface of the liquid inlet valve hole or the liquid outlet valve hole and attached to a layer of silica gel elastic film piece, and the cantilever valves are in a sealed state after being contacted with the plane of the valve holes; a waterproof insulating seal ring is additionally sleeved on the outer circle of the valve seat disc; and the piezoelectric ceramic energy-transducing piece is arranged between the waterproof insulating seal ring and the pump cover.

Description

The piezoelectric ceramic pump that is used for electronic product and CPU heat radiation cooling system
Technical field
The present invention relates to a kind of fluid pump, especially a kind of miniature piezoelectric ceramic pump.
Background technique
Piezoelectric pump is to utilize the stretch bending distortion of piezoelectric ceramic to cause the variation of pump chamber, and the liquid in the cavity is produced squeezing action and sucks and drain.Its working principle determined to such pump design, make and be equipped with higher requirement.Applicant is 02114470.2 in the patent No. of first to file, and notification number is CN1160514C, and it promptly is wherein a kind of that name is called " miniaturized hydraulic electronic pump ".The one-way valve that this patent has solved prior art scheme pump easily stops up, easily pressure release, and problems such as poor work stability have prolonged working life of pump, have improved the delivery pressure and the flow of pump.But this pump exists the deficiency that flow is little, volume is big and noise is big, and is unsuitable for fields such as aerospace industry, household electric appliance, notebook computer, desk top computer CPU cooling, instrument and apparatus, delicate metering, medical apparatus, biomedicine.
Summary of the invention
The objective of the invention is to overcome the deficiency that above prior art exists, and the piezoelectric ceramic pump that a kind of flow is big, volume is little, the little self-priming performance of noise is good, reaction velocity is fast and simple in structure, be applicable to the CPU cooling system is provided.
In order to realize above-mentioned purpose, can adopt following technological scheme: this programme is the same with prior art, the liquid inlet pipe and drain pipe, pump cover and the one-way valve that comprise the pump housing of peviform, communicate respectively with pump housing inner chamber are equipped with piezoelectric constant transducing sheet in the pump chamber that the pump housing and pump cover assembling back constitute; Piezoelectric constant transducing sheet top and below the dielectric voltage withstand protective layer that is attached with a spraying or parcel or pastes, be attached with an elastic packing glue-line in the outside of dielectric voltage withstand protective layer, its improvement is:
Said pump housing inner chamber comprises that an admission chamber and goes out sap cavity, and admission chamber communicates with liquid inlet pipe, goes out sap cavity and communicates with drain pipe; Also comprise:
One valve seat disk, this valve seat disk is assemblied in the pump housing inner chamber, which is provided with a feed liquor valve opening that communicates with admission chamber and one with go out the fluid valve opening that sap cavity communicates;
Described one-way valve is two overhang valves, one of them be contained in the valve seat disk the feed liquor valve opening below, another be contained in the valve seat disk the fluid valve opening above; The overhang valve is that thickness is the copper sheet or the spring steel plate of 0.1-0.2 millimeter, the one end is fixed on the end away from feed liquor valve opening or fluid valve opening, the other end cover respectively the following of feed liquor valve opening and fluid valve opening above, the one side of overhang valve contact feed liquor valve opening or fluid valve opening, be attached with one deck silica gel elastic thin film, be sealing state when overhang valve and valve opening plane contact; Also comprise:
One waterproof insulation ring set is on the cylindrical of valve seat disk;
Described piezoelectric constant transducing sheet is contained between elastic seal ring and the pump cover.
After starting this pump, piezoelectric constant transducing sheet generation stretch bending distortion also causes pump chamber to change, when piezoelectric ceramic is bent downwardly, the pressure of admission chamber reduces, by liquid inlet pipe liquid is sucked admission chamber, back down overhang valve below the feed liquor valve opening then and enter in the space between valve seat disk and piezoelectric constant transducing sheet; When piezoelectric constant transducing sheet was bent upwards, liquid was compressed, and entered out sap cavity by the overhang valve above the fluid valve opening, was discharged by drain pipe at last; Because the vibrations of the continuous high frequency of piezoelectric constant transducing sheet are also carried out imbibition and discharge opeing continuously.
The invention has the beneficial effects as follows:
1, because the one-way valve of this pump is the overhang valve, and the design of its valve body and valve seat is more thin and little, mechanism is compact more, so the volume of pump dwindles greatly;
2, this pump is because the pump housing and pump cover and one-way valve and valve base sealing are effective, so its flow is big, the cooling effect when being used for the CPU cooling system is even more ideal;
3, behind the overhang valve block that this pump adopts, its noise reduces greatly;
4, this pump using scope is wide, can be applicable to that aerospace industry, auto manufacturing, liquid fuel, fine chemistry industry, home intelligent ornaments are supporting, field such as CPU cooling of household electric appliance, electronic product, notebook computer and desk top computer, instrument and apparatus, delicate metering, medical apparatus, biomedicine, inkjet printing, industrial automation, agricultural spray drip irrigation.
In order to make the present invention be convenient to understand, it is described further below by drawings and Examples with more clear.
Description of drawings
Fig. 1 is the form structure schematic perspective view of embodiments of the invention 1.
Fig. 2 is the exploded perspective schematic representation of the component in Fig. 1 structure.
Fig. 3 is the elevational schematic view of the pump housing among Fig. 2.
Fig. 4 is that the A-A of Fig. 1 analyses and observe enlarged diagram.
Fig. 5 is the exploded perspective schematic representation of the component in the embodiments of the invention 2.
Fig. 6 is the A-A cross-sectional schematic of Fig. 5.
Fig. 7 be among Fig. 5 the pump housing look up enlarged diagram.
Fig. 8 is the exploded perspective schematic representation of the component in the embodiments of the invention 3.
Fig. 9 is the A-A cross-sectional schematic of Fig. 8.
Figure 10 be among Fig. 8 the pump housing look up enlarged diagram.
Figure 11 is that the single cantilever beam valve among Fig. 8 is contained in the enlarged diagram of looking up on the valve seat disk.
Figure 12 is that the single cantilever beam valve among Fig. 8 is contained in the enlarged diagram of overlooking on the valve seat disk.
Figure 13 (a) is that the master of the double cantilever beam valve block in the foregoing description looks schematic representation; Figure 13 (b) is the B-B part section enlarged view of Figure 13 (a).
Figure 14 (a) is that the master of the single cantilever beam valve block in the foregoing description looks schematic representation; Figure 14 (b) is the A-A part section enlarged view of Figure 14 (a).
Figure 15 is the enlarged diagram of piezoelectric ceramic in the foregoing description and its adhesive layer.
Embodiment
Embodiment 1, referring to Fig. 1-Fig. 4 and Figure 13-Figure 15.The pump B1 of present embodiment comprises liquid inlet pipe 111 and drain pipe 112, pump cover 17 and the one-way valve of drawing together the pump housing 11, communicating respectively with pump housing inner chamber, in the pump chamber that the pump housing 11 and pump cover 17 assembling backs constitute piezoelectric constant transducing sheet 16 is housed; Piezoelectric constant transducing sheet 16 top and below the dielectric voltage withstand protective layer 16.1 that is attached with a spraying or parcel or pastes, be attached with an elastic packing glue-line 16.2 (seeing Figure 15) in the outside of dielectric voltage withstand protective layer.
The end face of pump housing inner chamber upwards is recessed to form a big recess, comprise a horizontal narrow groove 116 in this big recess, this narrow groove 116 is divided into an admission chamber 115 and with big recess and goes out sap cavity 114, and admission chamber 115 communicates with liquid inlet pipe 111, go out sap cavity 114 and communicate with drain pipe 112, liquid inlet pipe 111 and drain pipe 112 are arranged on the homonymy of the pump housing 11; Also comprise:
One valve seat disk 13, this valve seat disk 13 is assemblied in the pump housing inner chamber, which is provided with a feed liquor valve opening 134 that communicates with admission chamber 115 and one with go out the fluid valve opening 131 that sap cavity 114 communicates, valve opening is a long strip; The external diameter of valve seat disk 13 is slightly less than the internal diameter of pump housing inner chamber, and its upper surface is provided with a horizontal bar plate 132, and this horizontal bar plate 132 can insert in the above-mentioned narrow groove 116; Feed liquor valve opening 134 and fluid valve opening 131 are separately positioned on the both sides of this horizontal bar plate 132.
One-way valve in the present embodiment is two double cantilever beam valves 12 and 14, one of them 14 be contained in the valve seat disk feed liquor valve opening 134 below, another 12 be contained in the valve seat disk fluid valve opening 131 above; The overhang valve is that thickness is the copper sheet or the spring steel plate of 0.1-0.2 millimeter, the one end is fixed on the pin 135 away from an end of feed liquor valve opening 134 or fluid valve opening 131, the other end cover respectively the following of feed liquor valve opening 134 and fluid valve opening 131 above, overhang valve 12 contacts the one side of feed liquor valve opening or fluid valve opening with 14, be attached with one deck silica gel elastic thin film (not shown), be sealing state when overhang valve and valve opening plane contact; In fact, the one side that contacts with the overhang valve of feed liquor valve opening or fluid valve opening is equivalent to a valve seat.The structure of double cantilever beam valve block 12 can be as shown in figure 13, and its middle part is a rectangle 12.4, and the middle part of this rectangle comprises a hollow part that punches out 12.2, thereby forms the double cantilever beam of this valve block, and the two ends of rectangle are connected with a semicircle 12.3 respectively; Be provided with the small through hole 12.1 of two circles away from an end of water inlet or osculum at this valve block, these two small through hole 12.1 are sleeved on the valve seat disk 13 (see figure 2) on two cylinders 135 that are provided with, match with it, and with binder with this end of this valve block be fixed on two cylinders around.The structure of double cantilever beam valve block 14 is identical with the structure of double cantilever beam valve block 12.
Also have a waterproof insulation seal ring 15 in addition, it is sleeved on the cylindrical of valve seat disk 13.The upper and lower of the waterproof insulation seal ring 15 of present embodiment is respectively equipped with the seam (see figure 4) of an indent, and the diameter of its middle and upper part seam equates that with the external diameter of valve seat disk 13 degree of depth of this seam equates with the thickness at valve seat disk 13 edges; The diameter of bottom seam equates that with the external diameter of piezoelectric constant transducing sheet 16 degree of depth of this seam equates with the thickness at piezoelectric constant transducing sheet 16 edges; Piezoelectric constant transducing sheet 16 is contained in this bottom seam, promptly between waterproof insulation seal ring 15 and pump cover 17.
In addition, on pump cover, can be provided with a plurality of air holes 172, experimental results show that like this and can improve pump performance.
Secondly, the pump housing 11 and pump cover 17 away from an end of liquid inlet and outlet pipe corresponding respectively be provided with a logical wire casing 113,173, after the pump housing and pump cover fasten, connect wires outside the described piezoelectric constant transducing sheet 16 18 and can from this logical wire casing, pass.
Once more, between the pump housing 11 and pump cover 17 junction planes 2 locating studs 171 can be set, the accurate location in the time of can guaranteeing to assemble like this makes assembling efficient more and simple.
Embodiment 2, referring to Fig. 4-Fig. 7 and Figure 14.The pump B2 of present embodiment and embodiment 1 structure are basic identical, and its distinctive points is:
Be provided with an admission chamber 214 and that upwards caves in the described pump housing 21 inner chambers and go out sap cavity 215; Wherein admission chamber 214 is a curved shape, and its outer end communicates with liquid inlet pipe 212, and its inner is semicircle, and this semicircular center of circle is at the center of the pump housing 21; Go out the side that sap cavity 215 is positioned at admission chamber 214, its profile is slightly larger than the gabarit of following single cantilever beam valve 22; This admission chamber 214 is in the same plane with the lower surface that goes out sap cavity 215, also is provided with 3 locating stud blind holes 213 on this plane;
The external diameter of described valve seat disk 23 is slightly less than the internal diameter of the pump housing 21 inner chambers, its upper surface is provided with 3 and above-mentioned 3 locating stud blind holes, 213 corresponding locating studs 232, the outer rim of its lower surface is provided with a circle boss 236, this boss 236 height a little more than the thickness of single cantilever beam valve 24; Feed liquor valve opening 231 on the valve seat disk 23 is arranged on the center of this disk 23, and fluid valve opening 232 is arranged on the inboard of this disk boss 236.
Described overhang valve is 2 single cantilever beam valves 22 and 24, its structure is a single cantilever beam valve block 19 shown in Figure 14, one end of this valve comprises the small through hole 19.1 of a rectangle, the other end is circular 19.3, the slightly larger in diameter of this circle 19.3 is in the diameter of feed liquor valve opening 231 and fluid valve opening 232, and these two ends couple together by the single-cantilever 19.2 of a middle fillet shape; The small through hole 19.1 of valve one end is sleeved on the projection 235 of valve seat disk 23 rectangular cross-sections that be provided with, that match with it, and with binder with this end of this valve block 19 be fixed on projection around.
Waterproof insulation seal ring 25 is a round section joint ring, and it is sleeved on the cylindrical of valve seat disk 23.Piezoelectric constant transducing sheet 26 is contained between waterproof insulation seal ring 25 and the pump cover 27.
Embodiment 3, referring to Fig. 8-Figure 12.The pump B3 of present embodiment is substantially the same manner as Example 2, and its distinctive points is:
Liquid inlet pipe 311 and the angle between the drain pipe 312 in the present embodiment are 90 °.Certainly its angle is that other angle also is fine.
The end face of the described pump housing 31 inner chambers is to being provided with two blind holes, and one of them blind hole 314 is positioned at the center of the pump housing 31, another 315 side that is positioned at central blind hole 314; Simultaneously, the end face of these pump housing 31 inner chambers upwards also is provided with the shallow pit pattern 316 that a profile is slightly larger than the gabarit of single cantilever beam valve 32, in this shallow pit pattern 316 with the corresponding end of single cantilever beam valve 32 free ends among the heart and central blind hole 314 coincide, the degree of depth of shallow pit pattern 316 is slightly larger than the thickness of overhang valve 32;
Described admission chamber is the one section groove 317 that is located in the pump housing, and its outer end communicates with liquid inlet pipe 311, and its inner communicates with above-mentioned central blind hole 314; Go out sap cavity and also be provided in a side of one section short interior groove 318 of the pump housing, its outer end communicates with drain pipe 312, and its inner communicates with the blind hole 315 of above-mentioned side.
With embodiment similarly be, the external diameter of described valve seat disk 33 is slightly less than the internal diameter of the pump housing 31 inner chambers, and the outer rim of its lower surface is provided with a circle boss 332, this boss 332 height a little more than the thickness of valve single cantilever beam valve 34; Feed liquor valve opening 331 on the valve seat disk 33 is arranged on the center of this disk 33, and fluid valve opening 334 is arranged on the inboard of these disk 33 boss.In Figure 11 and 12, also show the projection 335 of assembling single cantilever beam valve and 336 position.
Below only for the present invention's preferred embodiment; but it does not limit practical range of the present invention; for example single cantilever beam valve and the double cantilever beam valve among 3 embodiments all can be suitable for; as long as detailed structure is done to change slightly; therefore the equivalent variations and the modification that do not depart from claim of the present invention and done must belong to the present invention's protection domain.

Claims (8)

1 one kinds of piezoelectric ceramic pumps that are used for electronic product and CPU heat radiation cooling system, the liquid inlet pipe and drain pipe, pump cover and the one-way valve that comprise the pump housing of peviform, communicate respectively with pump housing inner chamber are equipped with piezoelectric constant transducing sheet in the pump chamber that the pump housing and pump cover assembling back constitute; Piezoelectric constant transducing sheet top and below the dielectric voltage withstand protective layer that is attached with a spraying or parcel or pastes, be attached with an elastic packing glue-line in the outside of dielectric voltage withstand protective layer, it is characterized in that:
Said pump housing inner chamber comprises that an admission chamber and goes out sap cavity, and admission chamber communicates with liquid inlet pipe, goes out sap cavity and communicates with drain pipe; Also comprise:
One valve seat disk, this valve seat disk is assemblied in the pump housing inner chamber, which is provided with a feed liquor valve opening that communicates with admission chamber and one with go out the fluid valve opening that sap cavity communicates;
Described one-way valve is two overhang valves, one of them be contained in the valve seat disk the feed liquor valve opening below, another be contained in the valve seat disk the fluid valve opening above; The overhang valve is that thickness is the copper sheet or the spring steel plate of 0.1-0.2 millimeter, the one end is fixed on the end away from feed liquor valve opening or fluid valve opening, the other end cover respectively the following of feed liquor valve opening and fluid valve opening above, the one side of overhang valve contact feed liquor valve opening or fluid valve opening, be attached with one deck silica gel elastic thin film, be sealing state when overhang valve and valve opening plane contact; Also comprise:
One waterproof insulation ring set is on the cylindrical of valve seat disk;
Described piezoelectric constant transducing sheet is contained between waterproof insulation seal ring and the pump cover.
2, the piezoelectric ceramic pump that is used for electronic product and CPU heat radiation cooling system according to claim 1 is characterized in that:
Described liquid inlet pipe and drain pipe are arranged on the homonymy of the pump housing;
Described overhang valve is the double cantilever beam valve;
The end face of described pump housing inner chamber upwards is recessed to form a big recess, comprises a horizontal narrow groove in this big recess, and this narrow groove is divided into a said admission chamber and with big recess and goes out sap cavity;
The external diameter of described valve seat disk is slightly less than the internal diameter of pump housing inner chamber, and its upper surface is provided with a horizontal bar plate, and this horizontal bar plate can insert in the above-mentioned narrow groove; Described feed liquor valve opening and fluid valve opening are separately positioned on the both sides of this horizontal bar plate.
3, the piezoelectric ceramic pump that is used for electronic product and CPU heat radiation cooling system according to claim 1 is characterized in that:
Described intake pipe and outlet pipe are arranged on the homonymy of the pump housing;
Described overhang valve is the single cantilever beam valve;
Be provided with an admission chamber and that upwards caves in the described pump housing inner chamber and go out sap cavity; Wherein admission chamber is a curved shape, and its outer end communicates with liquid inlet pipe, and its inner is semicircle, and this semicircular center of circle is at the center of the pump housing; Go out the side that sap cavity is positioned at admission chamber, its profile is slightly larger than the gabarit of overhang valve; This admission chamber is in the same plane with the lower surface that goes out sap cavity, also is provided with 3 locating stud blind holes on this plane;
The external diameter of described valve seat disk is slightly less than the internal diameter of pump housing inner chamber, its upper surface is provided with 3 and above-mentioned 3 corresponding locating studs of locating stud blind hole, the outer rim of its lower surface is provided with a circle boss, this boss height a little more than the thickness of valve overhang valve; Feed liquor valve opening on the valve seat disk is arranged on the center of this disk, and the fluid valve opening is arranged on the inboard of this disk boss.
4, the piezoelectric ceramic pump that is used for electronic product and CPU heat radiation cooling system according to claim 1 is characterized in that:
Described overhang valve is the single cantilever beam valve;
The end face of described pump housing inner chamber is to being provided with two blind holes, and one of them blind hole is positioned at the center of the pump housing, and another is positioned at a side of central blind hole; Simultaneously, the end face of this pump housing inner chamber upwards also is provided with the shallow pit pattern that a profile is slightly larger than the gabarit of overhang valve, in this recess with the corresponding end of overhang valve free end among the heart and central blind hole coincide, the degree of depth of shallow pit pattern is slightly larger than the thickness of overhang valve;
The outer end of described admission chamber communicates with liquid inlet pipe, and its inner communicates with above-mentioned central blind hole; The outer end that goes out sap cavity communicates with drain pipe, and its inner communicates with the blind hole of above-mentioned side;
The external diameter of described valve seat disk is slightly less than the internal diameter of pump housing inner chamber, and the outer rim of its lower surface is provided with a circle boss, this boss height a little more than the thickness of valve overhang valve; Feed liquor valve opening on the valve seat disk is arranged on the center of this disk, and the fluid valve opening is arranged on the inboard of this disk boss.
5, according to one of them described piezoelectric ceramic pump that is used for the CPU cooling system of claim 1-4, it is characterized in that described pump cover is provided with a plurality of air holes.
6, the piezoelectric ceramic pump that is used for the CPU cooling system according to claim 5, it is characterized in that a side of the described pump housing and pump cover corresponding respectively be provided with a logical wire casing, behind the pump housing and pump cover fastening, connect wires outside the described piezoelectric constant transducing sheet and can from this logical wire casing, pass.
7,, it is characterized in that described overhang valve is the single cantilever beam valve according to one of them described piezoelectric ceramic pump that is used for the CPU cooling system of claim 6.
8,, it is characterized in that described overhang valve is the double cantilever beam valve according to one of them described piezoelectric ceramic pump that is used for the CPU cooling system of claim 6.
CN2009101092813A 2009-08-10 2009-08-10 Piezoelectric ceramic pump used for electronic product and CPU cooling system Expired - Fee Related CN101634292B (en)

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Application Number Priority Date Filing Date Title
CN2009101092813A CN101634292B (en) 2009-08-10 2009-08-10 Piezoelectric ceramic pump used for electronic product and CPU cooling system
PCT/CN2009/075052 WO2011017862A1 (en) 2009-08-10 2009-11-20 Piezoceramics pump for electronic product and cpu radiating and cooling system

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CN2009101092813A CN101634292B (en) 2009-08-10 2009-08-10 Piezoelectric ceramic pump used for electronic product and CPU cooling system

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CN101634292A true CN101634292A (en) 2010-01-27
CN101634292B CN101634292B (en) 2011-04-13

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CN102734139A (en) * 2011-04-12 2012-10-17 林淑媛 Piezoelectric pump and piezoelectric ceramics piece protection process
WO2012139502A1 (en) * 2011-04-12 2012-10-18 Lin Shuyuan Piezoelectric pump and method of protecting piezoelectric ceramic piece
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CN105508208B (en) * 2016-01-22 2018-04-06 中国电子科技集团公司第二十六研究所 Piezoelectric pump
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