US20140248170A1 - Microdiaphragm pump - Google Patents

Microdiaphragm pump Download PDF

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Publication number
US20140248170A1
US20140248170A1 US14/347,535 US201114347535A US2014248170A1 US 20140248170 A1 US20140248170 A1 US 20140248170A1 US 201114347535 A US201114347535 A US 201114347535A US 2014248170 A1 US2014248170 A1 US 2014248170A1
Authority
US
United States
Prior art keywords
valve
sheets
diaphragm
sheet
valve seat
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
US14/347,535
Other languages
English (en)
Inventor
Yasunari Kabasawa
Takashi Kobe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kikuchi Seisakusho Co Ltd
Original Assignee
Kikuchi Seisakusho Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kikuchi Seisakusho Co Ltd filed Critical Kikuchi Seisakusho Co Ltd
Assigned to KIKUCHI SEISAKUSHO CO., LTD reassignment KIKUCHI SEISAKUSHO CO., LTD ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: KABASAWA, YASUNARI, KOBE, TAKASHI
Publication of US20140248170A1 publication Critical patent/US20140248170A1/en
Abandoned legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F04B43/043—Micropumps
    • F04B43/046—Micropumps with piezoelectric drive
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/06—Pumps having fluid drive
    • F04B43/073—Pumps having fluid drive the actuating fluid being controlled by at least one valve
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F04B43/043—Micropumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B53/00—Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
    • F04B53/10—Valves; Arrangement of valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B53/00—Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
    • F04B53/16—Casings; Cylinders; Cylinder liners or heads; Fluid connections
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05B—INDEXING SCHEME RELATING TO WIND, SPRING, WEIGHT, INERTIA OR LIKE MOTORS, TO MACHINES OR ENGINES FOR LIQUIDS COVERED BY SUBCLASSES F03B, F03D AND F03G
    • F05B2210/00—Working fluid
    • F05B2210/10—Kind or type
    • F05B2210/11—Kind or type liquid, i.e. incompressible
US14/347,535 2011-09-27 2011-09-27 Microdiaphragm pump Abandoned US20140248170A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2011/072056 WO2013046330A1 (ja) 2011-09-27 2011-09-27 マイクロダイヤフラムポンプ

Publications (1)

Publication Number Publication Date
US20140248170A1 true US20140248170A1 (en) 2014-09-04

Family

ID=47994445

Family Applications (1)

Application Number Title Priority Date Filing Date
US14/347,535 Abandoned US20140248170A1 (en) 2011-09-27 2011-09-27 Microdiaphragm pump

Country Status (5)

Country Link
US (1) US20140248170A1 (zh)
EP (1) EP2762725A4 (zh)
KR (1) KR20140074308A (zh)
CN (1) CN103906923A (zh)
WO (1) WO2013046330A1 (zh)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20170118814A (ko) * 2015-02-17 2017-10-25 다이켄 이키 가부시키가이샤 펌프 유닛 및 그 제조 방법
WO2022060594A1 (en) * 2020-09-16 2022-03-24 Frore Systems Inc. Method and system for fabricating mems-based cooling systems
US11306711B2 (en) * 2018-04-09 2022-04-19 Chung-Yuan Christian University Miniature cooling system

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10344753B2 (en) 2014-02-28 2019-07-09 Encite Llc Micro pump systems
US10330095B2 (en) 2014-10-31 2019-06-25 Encite Llc Microelectromechanical systems fabricated with roll to roll processing
JP6639212B2 (ja) * 2015-12-09 2020-02-05 株式会社エンプラス エミッタおよび点滴灌漑用チューブ
US10451051B2 (en) 2016-01-29 2019-10-22 Microjet Technology Co., Ltd. Miniature pneumatic device
US10487821B2 (en) 2016-01-29 2019-11-26 Microjet Technology Co., Ltd. Miniature fluid control device
EP3203077B1 (en) 2016-01-29 2021-06-16 Microjet Technology Co., Ltd Piezoelectric actuator
US10529911B2 (en) 2016-01-29 2020-01-07 Microjet Technology Co., Ltd. Piezoelectric actuator
US10487820B2 (en) 2016-01-29 2019-11-26 Microjet Technology Co., Ltd. Miniature pneumatic device
US10388850B2 (en) 2016-01-29 2019-08-20 Microjet Technology Co., Ltd. Piezoelectric actuator
JP6765239B2 (ja) * 2016-07-12 2020-10-07 日本ピラー工業株式会社 ダイアフラムポンプ
JP6981762B2 (ja) * 2016-08-08 2021-12-17 株式会社エンプラス 流体取扱装置および流体取扱方法
CN109891096B (zh) * 2016-10-27 2020-08-18 日东工器株式会社 液体泵
TWI686537B (zh) * 2016-11-10 2020-03-01 研能科技股份有限公司 微型氣壓動力裝置
US10683861B2 (en) 2016-11-10 2020-06-16 Microjet Technology Co., Ltd. Miniature pneumatic device
US10655620B2 (en) 2016-11-10 2020-05-19 Microjet Technology Co., Ltd. Miniature fluid control device
US10746169B2 (en) 2016-11-10 2020-08-18 Microjet Technology Co., Ltd. Miniature pneumatic device
CN108506197A (zh) * 2017-02-24 2018-09-07 研能科技股份有限公司 流体输送装置
JP6551636B1 (ja) * 2017-12-22 2019-07-31 株式会社村田製作所 バルブ、アプリケーション機器

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2856955A (en) * 1955-08-02 1958-10-21 Winkelman James Valve structure for aerators or the like
US3814552A (en) * 1973-04-17 1974-06-04 Atomic Energy Commission Personal air sampling pump
US20040018100A1 (en) * 2002-06-03 2004-01-29 Seiko Epson Corporation Pump
US20070248478A1 (en) * 2004-08-30 2007-10-25 Star Micronics Co., Ltd. Check Valve and Diaphram Pump
US20070251592A1 (en) * 2006-05-01 2007-11-01 Christenson John C Microfluidic valve structure

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61171891A (ja) * 1985-01-25 1986-08-02 Nec Corp 圧電型ポンプ
JP2510589Y2 (ja) * 1990-07-19 1996-09-11 三菱化学株式会社 圧電ポンプ
JPH051669A (ja) 1991-06-21 1993-01-08 Seiko Epson Corp マイクロポンプ及びマイクロバルブの製造方法
JPH0693972A (ja) 1992-09-11 1994-04-05 Seiko Epson Corp マイクロポンプ及びその製造方法
US5542821A (en) * 1995-06-28 1996-08-06 Basf Corporation Plate-type diaphragm pump and method of use
JP3202643B2 (ja) 1997-02-19 2001-08-27 セイコーインスツルメンツ株式会社 マイクロポンプおよびマイクロポンプの製造方法
JP4010639B2 (ja) * 1998-03-31 2007-11-21 株式会社アルバック 往復動式真空ポンプ
JP2000274374A (ja) * 1999-03-24 2000-10-03 Kasei Optonix Co Ltd 小型ポンプ
JP3888015B2 (ja) * 1999-12-22 2007-02-28 松下電工株式会社 圧電ダイヤフラムポンプの密封方法
US20020155010A1 (en) * 2001-04-24 2002-10-24 Karp Christoph D. Microfluidic valve with partially restrained element
JP4529915B2 (ja) * 2002-08-16 2010-08-25 日本電気株式会社 圧電ポンプおよびこれを用いた冷却装置
JP3946178B2 (ja) * 2003-09-05 2007-07-18 松下電器産業株式会社 マイクロポンプ用逆止弁装置およびその製造方法
JP4036834B2 (ja) * 2004-01-21 2008-01-23 松下電器産業株式会社 マイクロポンプ用逆止弁の製造方法
JP4501517B2 (ja) * 2004-04-21 2010-07-14 パナソニック電工株式会社 圧電ダイヤフラムポンプ
CN2703141Y (zh) * 2004-05-30 2005-06-01 卢启明 直流自吸泵
JP2006161779A (ja) 2004-12-10 2006-06-22 Kanagawa Acad Of Sci & Technol マイクロポンプ及びその製造方法
JP4285518B2 (ja) * 2006-03-28 2009-06-24 カシオ計算機株式会社 接続構造体、流路制御部、燃料電池型発電装置及び電子機器
JP5221993B2 (ja) 2008-03-28 2013-06-26 公立大学法人首都大学東京 マイクロバルブ及びマイクロポンプ
CN101550924A (zh) * 2008-03-31 2009-10-07 研能科技股份有限公司 非对称双腔流体输送装置
WO2010035862A1 (ja) * 2008-09-29 2010-04-01 株式会社村田製作所 圧電ポンプ

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2856955A (en) * 1955-08-02 1958-10-21 Winkelman James Valve structure for aerators or the like
US3814552A (en) * 1973-04-17 1974-06-04 Atomic Energy Commission Personal air sampling pump
US20040018100A1 (en) * 2002-06-03 2004-01-29 Seiko Epson Corporation Pump
US20070248478A1 (en) * 2004-08-30 2007-10-25 Star Micronics Co., Ltd. Check Valve and Diaphram Pump
US20070251592A1 (en) * 2006-05-01 2007-11-01 Christenson John C Microfluidic valve structure

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20170118814A (ko) * 2015-02-17 2017-10-25 다이켄 이키 가부시키가이샤 펌프 유닛 및 그 제조 방법
US20180045191A1 (en) * 2015-02-17 2018-02-15 Daiken Medical Co., Ltd. Pump unit and method of manufacturing same
EP3260702A4 (en) * 2015-02-17 2018-07-25 Daiken Medical Co., Ltd. Pump unit and method of manufacturing same
US10605239B2 (en) * 2015-02-17 2020-03-31 Daiken Medical Co., Ltd. Pump unit and method of manufacturing same
KR102435914B1 (ko) 2015-02-17 2022-08-24 다이켄 이키 가부시키가이샤 펌프 유닛 및 그 제조 방법
US11306711B2 (en) * 2018-04-09 2022-04-19 Chung-Yuan Christian University Miniature cooling system
WO2022060594A1 (en) * 2020-09-16 2022-03-24 Frore Systems Inc. Method and system for fabricating mems-based cooling systems
TWI825478B (zh) * 2020-09-16 2023-12-11 美商弗瑞歐系統有限公司 用於製造基於微機電系統之冷卻系統的方法及系統

Also Published As

Publication number Publication date
CN103906923A (zh) 2014-07-02
EP2762725A4 (en) 2015-06-10
WO2013046330A1 (ja) 2013-04-04
EP2762725A1 (en) 2014-08-06
KR20140074308A (ko) 2014-06-17

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Legal Events

Date Code Title Description
AS Assignment

Owner name: KIKUCHI SEISAKUSHO CO., LTD, JAPAN

Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNORS:KABASAWA, YASUNARI;KOBE, TAKASHI;REEL/FRAME:032932/0711

Effective date: 20140413

STCB Information on status: application discontinuation

Free format text: ABANDONED -- FAILURE TO RESPOND TO AN OFFICE ACTION