WO2013046330A1 - Pompe à microdiaphragme - Google Patents

Pompe à microdiaphragme Download PDF

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Publication number
WO2013046330A1
WO2013046330A1 PCT/JP2011/072056 JP2011072056W WO2013046330A1 WO 2013046330 A1 WO2013046330 A1 WO 2013046330A1 JP 2011072056 W JP2011072056 W JP 2011072056W WO 2013046330 A1 WO2013046330 A1 WO 2013046330A1
Authority
WO
WIPO (PCT)
Prior art keywords
valve
diaphragm
plate
valve plate
micro
Prior art date
Application number
PCT/JP2011/072056
Other languages
English (en)
Japanese (ja)
Inventor
椛澤康成
光部崇
Original Assignee
株式会社菊池製作所
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社菊池製作所 filed Critical 株式会社菊池製作所
Priority to PCT/JP2011/072056 priority Critical patent/WO2013046330A1/fr
Priority to CN201180073680.4A priority patent/CN103906923A/zh
Priority to KR1020147007966A priority patent/KR20140074308A/ko
Priority to US14/347,535 priority patent/US20140248170A1/en
Priority to EP11873526.5A priority patent/EP2762725A4/fr
Publication of WO2013046330A1 publication Critical patent/WO2013046330A1/fr

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F04B43/043—Micropumps
    • F04B43/046—Micropumps with piezoelectric drive
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/06—Pumps having fluid drive
    • F04B43/073—Pumps having fluid drive the actuating fluid being controlled by at least one valve
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F04B43/043—Micropumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B53/00—Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
    • F04B53/10—Valves; Arrangement of valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B53/00—Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
    • F04B53/16—Casings; Cylinders; Cylinder liners or heads; Fluid connections
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05B—INDEXING SCHEME RELATING TO WIND, SPRING, WEIGHT, INERTIA OR LIKE MOTORS, TO MACHINES OR ENGINES FOR LIQUIDS COVERED BY SUBCLASSES F03B, F03D AND F03G
    • F05B2210/00—Working fluid
    • F05B2210/10—Kind or type
    • F05B2210/11—Kind or type liquid, i.e. incompressible

Definitions

  • the present invention relates to a micro diaphragm pump formed by laminating and joining a plurality of thin metal plates having patterns such as a valve plate, a valve seat, and a diaphragm.
  • Patent Document 1 discloses a flat in which a pump body is provided with an inflow valve and an outflow valve with a valve element sandwiched between a metal out bush (first cylindrical portion) and an in bush (second cylindrical portion).
  • a micropump arranged to be orthogonal to a pressure chamber.
  • the diaphragm which forms a pressure chamber here is arrange
  • a pressure chamber (diaphragm chamber) is provided between the suction valve and the discharge valve, and the pressure in the pressure chamber is changed by a piezo element attached to the diaphragm that defines the pressure chamber.
  • a pump that discharges is shown. That is, the diaphragm does not cover the suction valve and the discharge valve (is in contact with one side surface of both valves).
  • a silicon substrate is partially used.
  • JP 2009-236284 A Japanese Patent Laid-Open No. 2006-161779 JP-A-6-93972 Japanese Patent Laid-Open No. 5-1669 JP-A-10-299659
  • An object of the present invention is to provide a highly reliable micro-diaphragm pump that can increase suction force and discharge force, increase the degree of freedom in material selection without being restricted to a silicon substrate.
  • a first object is a micro-diaphragm pump having a diaphragm chamber that is in contact with one side of an intake valve and a discharge valve, wherein one of the valve plates of the intake valve and the discharge valve and a flow path of the other valve And two valve plate sheets laminated in a direction in which the valve plate and the flow channel opening face each other, and the valve of the one valve plate sheet laminated on both surfaces of the laminated body
  • Two valve seat seats formed with a valve seat facing the plate and a valve stopper facing the valve plate of the other valve plate seat, and superimposed on one valve seat seat and communicated with the intake valve and the discharge valve, respectively
  • a base plate having two flow paths, a frame that is superimposed on the periphery of the other valve seat and surrounds the suction valve and the discharge valve, and a valve seat that is superimposed on the frame and overlaps the frame
  • a diaphragm that forms a diaphragm chamber between them
  • the two valve plate seats and the two valve seat seats are made of a thin metal plate such as stainless steel, and if they are joined in multiple layers, there is no need to use a relatively expensive silicon substrate. It is recommended to select a metal that will not corrode the fluid.
  • solder with high Sn (tin) concentration or silver alloy solder plating such as Sn-Ag is used in terms of wettability and soldering strength to stainless steel.
  • Various methods such as adhesives and metal diffusion bonding can be used.
  • the valve plate is structured to be held by a support arm extending from the inner edge of the valve plate opening formed in the valve plate sheet to the inner diameter side, and becomes a flow path opening formed in the valve plate sheet and a flow path of the discharge valve formed in the base plate.
  • the opening diameter of the flow path opening is preferably equal to (including substantially equal to or substantially equal to) the inner diameter of the valve plate opening. In this case, it is necessary to laminate and pressurize when multi-layered valve plate seats and valve seats are used. At this time, no pressure is applied to the valve plate and its supporting arm, and these are joined to other sheets. Can be prevented.
  • Valve plate sheet and valve seat sheet can be processed by various methods such as etching and press punching.
  • etching and press punching various methods such as etching and press punching.
  • these sheets can be manufactured efficiently.
  • the frame and the diaphragm are made of thin metal plates, which are laminated on one side of the laminate formed in claim 2 (preliminary laminate), and a base plate is laminated on the other side of the laminate to join the pump. Can be formed. As described above, the assembly accuracy can be improved and the production efficiency can be improved by dividing the lamination of the valve plate sheet and the valve seat sheet and the lamination of the frame body, the diaphragm, and the base plate into two joints.
  • This protrusion can be formed by leaving a portion that becomes a valve seat and slightly carving the periphery by half etching, but it may be formed by other methods. In this case, the contact pressure with respect to the protrusion of the valve plate is increased, and the sealing performance is improved. That is, the sealing performance as a valve is improved.
  • DLC Diamond Like Carbon
  • DLC includes a carbon structure with a good molecular structure and a diamond structure with a high hardness, and has the advantages of both. Therefore, the protrusion can be hardened and smoothed, and the wear resistance and durability are improved, and the sealing performance is improved.
  • DLC processing is performed on the ridges in this way, the adhesion between the valve plate and the valve seat is further improved by stamping (pressing) the valve plate onto the ridges by utilizing the high hardness of DLC. Can be made. In order to make this stamping possible, an opening through which a processing tool (such as a punch) for stamping is passed is formed in the valve stopper.
  • valve stopper is provided with an annular portion facing the ridge serving as the valve seat (and thus facing the valve plate) and a circumferentially divided flow path around the annular portion, and a stamping tool is inserted into the annular portion. That's fine.
  • Piezo element is suitable for the drive element held in the diaphragm.
  • a sintered body of a piezoelectric material that includes zircon / lead titanate (PZT) and is collectively called PZT, which is bonded to a diaphragm and polarized by applying an electric field.
  • PZT zircon / lead titanate
  • the movable area (movable space) of the drive element and the diaphragm can be secured inside the second frame, and the pump is mounted on a substrate or the like. When mounted on, the adjacent parts do not come into contact with each other and the pump operation is not hindered.
  • the present invention can be expanded by expanding the area of the diaphragm to the outside of the suction valve and the discharge valve, the volume change of the diaphragm chamber can be increased to smoothly perform the fluid suction / discharge operation.
  • the suction valve and the discharge valve are formed by overlapping two valve plate sheets and overlapping the valve seat sheets on both outer sides thereof, the whole can be made extremely thin and the pump can be miniaturized.
  • the valve plate seat, valve seat seat, base plate, frame, and diaphragm can be laminated and joined (multi-layered joining), and the drive element can be attached to the diaphragm from the outside, resulting in high productivity and significant cost reductions. is there.
  • valve plate seat and the valve seat can be stacked in the opposite direction if the combination of the two sheets constituting the intake valve and the combination of the two sheets constituting the discharge valve have the same shape. Therefore, in this case, the productivity is further improved.
  • a plurality of pumps are formed simultaneously by preparing sheet-like members each formed with a valve plate sheet, valve seat sheet, base plate, frame, and diaphragm corresponding to a plurality of pumps, and laminating and joining them. Then, it is possible to cut the laminated body and divide it into individual pumps. In this case, the productivity is further improved.
  • the diaphragm chamber (pressure chamber) and each valve are in contact with each other through one valve seat, the fluid flow path connecting the diaphragm chamber and each valve is extremely short, and the diaphragm when the diaphragm discharges fluid.
  • the chamber volume can be made sufficiently small. That is, the ratio of (maximum volume / unnecessary volume) can be extremely increased. Therefore, the suction / discharge operation can be surely performed for each stroke of the diaphragm, and the management of the fluid discharge amount (flow rate) becomes accurate. Further, since the diaphragm area is large, the suction / discharge force of the fluid can be increased, and there is a possibility that it can be used not only for incompressible fluid (liquid etc.) but also for compressible fluid (gas etc.).
  • the perspective view of the micro diaphragm pump which is one Example of this invention 1 is an exploded perspective view of the micro diaphragm pump shown in FIG. Enlarged side sectional view of the micro diaphragm pump shown in FIG. An enlarged exploded perspective view of a part of the micro diaphragm pump shown in FIG. Plan view of valve plate and flow path opening of valve plate seat Plan view of valve seat and valve stopper of valve seat VII-VII line enlarged sectional view in FIG. Side sectional view of the laminate taken along line VIII-VIII in FIG.
  • reference numeral 10 denotes a micro diaphragm pump according to the present invention.
  • the pump 10 is a multi-layered joint of a plurality of thin metal plates made of stainless steel and a frame, that is, a metal thin plate or the like is aligned and laminated and joined, and is a square having a side of about 7 to 10 mm.
  • Reference numeral 12 denotes a valve plate sheet.
  • a valve plate 14 and a channel opening 16 are formed by etching or press punching on a stainless steel plate having a thickness of 0.01 mm (10 microns).
  • the valve plate 14 is held by a support arm 14b extending from the valve plate opening 14a having substantially the same diameter as the flow path opening 16 while being bent toward the inner diameter side.
  • valve seat 18 is a valve seat, which is formed by etching or press punching a valve seat 20 and a valve stopper 22 on a stainless steel plate having a thickness of 0.05 mm as shown in FIG.
  • the valve seat 20 has a circular opening 20a serving as a flow path and an annular protrusion 20b along the periphery.
  • the ridge 20b can be formed by slightly denting the ridge 20b while leaving the ridge 20b half-etched (removed to a predetermined depth by etching).
  • reference numeral 20c denotes a range to be half-etched. Half-etching is performed in the range of the same diameter as the channel opening 16 from the center of the opening 20a.
  • the valve stopper 22 has an annular portion 22a that is wider than the protrusion 20b and three flow paths 22b that are divided in the circumferential direction around the annular portion 22a.
  • the annular portion 22a is opposed to the protrusion 20b of the valve seat 20 through the valve plate 14 in a state where the pump 10 is assembled as will be described later.
  • the circular opening 22c of the annular portion 22a has a slightly larger diameter than the protrusion 20b because it needs to pass a stamping tool as will be described later.
  • valve plate sheet 12 and the valve seat sheet 18 processed in this way are prepared two by two, the valve plate sheets 12 and 12 are stacked as shown in FIGS. 2 to 4, and the valve seat sheets 18 and 18 are placed on both sides thereof.
  • Multi-layer joining is performed. For example, diffusion bonding (bonding by heating and pressing in vacuum) is performed.
  • the valve plate sheets 12 and 12 are stacked with the left and right sides reversed (turned 180 degrees) or turned upside down.
  • the valve plate 14 and the flow path opening 16 of the valve plate sheet 12 are formed at positions that overlap with the valve seat 20 and the valve stopper 22 of the valve seat 18 when the left and right sides of the valve plate sheet 12 are reversed or turned over.
  • the laminated body (preliminary laminated body) 24 is formed with the suction valve 26 and the discharge valve 28 shown in FIG.
  • a DLC film is formed on the protrusion 20b.
  • the DLC can be formed, for example, by a physical method (PVD) such as vacuum deposition or sputtering, or a chemical method (vapor phase growth method) such as plasma CVD.
  • PVD physical method
  • CVD chemical method
  • masking for preventing the formation of a film is performed in the region other than the protrusions 20b.
  • the half etching 20c is performed, masking for preventing etching is performed on a region not etched such as the protrusion 20b.
  • the preliminary laminated body 24 is passed through the tip of a stamping tool (such as a punch) 30 having an annular press surface through an opening 22 c provided in the valve stopper 22 of the suction valve 26 from above, and a valve plate 14 is pressed (stamped) against the protrusion 20b of the valve seat 20 below.
  • the tip of the stamping tool 30 is passed through the opening 22c provided in the valve stopper 22 of the discharge valve 28 from below, and the valve plate 14 is pressed against the protrusion 20b of the valve seat 20 thereon.
  • reference numeral 32 denotes a base plate.
  • the base plate 32 is a stainless steel plate having a thickness of 0.5 mm, for example, and includes a flow path 32a facing the valve seat 20 (opening 20a) of the suction valve 26 and a valve stopper 22 (flow path 22b) of the discharge valve 28. And a flow path 32b opposite to each other. These flow paths 32 a and 32 b are laminated on the lower surface of the preliminary laminated body 24.
  • Reference numeral 34 is a frame body, which has the same outer shape as the base plate 32, and is formed by punching out a rectangular opening 34a on the inner side of a predetermined width from the outer peripheral edge of a stainless thin plate having a thickness of 0.02 mm.
  • the opening 34 a surrounds the suction valve 26 and the discharge valve 28.
  • Reference numeral 36 denotes a diaphragm, which is a thin stainless steel plate having a thickness of 0.05 mm. This also has the same outer shape as the base plate 32.
  • Reference numeral 38 denotes a second frame, which is a thin stainless steel plate having a thickness of 0.04 mm. The outer shape of the second frame 38 is the same as that of the base plate 32.
  • the base plate 32 is laminated on the lower surface of the preliminary laminated body 24, and the frame body 34, the diaphragm 36, and the second frame body 38 are sequentially laminated on the upper surface, and are multilayered and bonded while being pressurized. For example, diffusion bonding is performed. As a result, a diaphragm chamber (pressure chamber) 40 is formed between the diaphragm 36 and the upper valve seat 18 facing the diaphragm 36.
  • the sheet-like PZT 42 is then attached to the diaphragm 36 from the right side of the second frame 38. If this PZT 42 is not polarized, it is polarized in an electric field.
  • the wiring connected to the electrode of the PZT 42 is guided upward and connected to a drive circuit (not shown).
  • the flow paths 32a and 32b of the base plate 32 are connected to a fluid supply path and a discharge path (both not shown), respectively, and the drive circuit of the PZT 42 is operated.
  • the diaphragm 36 vibrates up and down by the operation of the PZT 42, and the volume of the diaphragm chamber 40 is changed by this vibration.
  • the valve plate 14 of the suction valve 26 moves away from the valve seat 20 and the suction valve 26 opens, and the valve plate 14 of the discharge valve 28 contacts the valve seat 20 and the discharge valve 28 closes.
  • new fluid is sucked from the suction valve 26.
  • the diaphragm 36 pressurizes the diaphragm chamber 40, the suction valve 26 is closed, the discharge valve 28 is opened, and the fluid is discharged from the diaphragm chamber 40 through the discharge valve 28.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Reciprocating Pumps (AREA)

Abstract

La présente invention concerne une pompe à microdiaphragme présente une chambre de diaphragme qui entre en contact avec un côté d'un clapet d'aspiration et un clapet de refoulement, et qui présente : deux plaques porte-claquet (12), qui sont empilées en face l'une de l'autre et inversées l'une par rapport à l'autre, et dans chacune d'entre elles une plaque porte-clapet (14) du clapet d'aspiration (26) ou du clapet de refoulement (28) et un orifice de voie d'écoulement (16) qui est la voie d'écoulement de l'autre clapet sont formés ; deux plaques de siège de clapet (18), qui sont empilées sur ce corps empilé des plaques porte-clapet susmentionnées et dans chacune d'entre elles un siège de clapet (20) et une butée de clapet (22) sont formés ; une plaque de base (32) ; un corps de cadre (34) ; un diaphragme (36) ; et un élément d'entraînement (42). Cette pompe à microdiaphragme présente des dimensions externes extrêmement petites, une bonne productivité, une régulation du volume d'écoulement extrêmement précise et fonctionne en douceur, présente une grande force d'aspiration et une grande force d'évacuation et est extrêmement fiable.
PCT/JP2011/072056 2011-09-27 2011-09-27 Pompe à microdiaphragme WO2013046330A1 (fr)

Priority Applications (5)

Application Number Priority Date Filing Date Title
PCT/JP2011/072056 WO2013046330A1 (fr) 2011-09-27 2011-09-27 Pompe à microdiaphragme
CN201180073680.4A CN103906923A (zh) 2011-09-27 2011-09-27 微型隔膜泵
KR1020147007966A KR20140074308A (ko) 2011-09-27 2011-09-27 마이크로다이어프램 펌프
US14/347,535 US20140248170A1 (en) 2011-09-27 2011-09-27 Microdiaphragm pump
EP11873526.5A EP2762725A4 (fr) 2011-09-27 2011-09-27 Pompe à microdiaphragme

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2011/072056 WO2013046330A1 (fr) 2011-09-27 2011-09-27 Pompe à microdiaphragme

Publications (1)

Publication Number Publication Date
WO2013046330A1 true WO2013046330A1 (fr) 2013-04-04

Family

ID=47994445

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2011/072056 WO2013046330A1 (fr) 2011-09-27 2011-09-27 Pompe à microdiaphragme

Country Status (5)

Country Link
US (1) US20140248170A1 (fr)
EP (1) EP2762725A4 (fr)
KR (1) KR20140074308A (fr)
CN (1) CN103906923A (fr)
WO (1) WO2013046330A1 (fr)

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WO2015131033A1 (fr) * 2014-02-28 2015-09-03 Marsh Stephen Alan Systèmes de micropompe
US10330095B2 (en) 2014-10-31 2019-06-25 Encite Llc Microelectromechanical systems fabricated with roll to roll processing

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WO2016133024A1 (fr) * 2015-02-17 2016-08-25 大研医器株式会社 Unité de pompe et son procédé de fabrication
JP6639212B2 (ja) * 2015-12-09 2020-02-05 株式会社エンプラス エミッタおよび点滴灌漑用チューブ
US10487820B2 (en) 2016-01-29 2019-11-26 Microjet Technology Co., Ltd. Miniature pneumatic device
EP3203077B1 (fr) 2016-01-29 2021-06-16 Microjet Technology Co., Ltd Actionneur piézoélectrique
US10451051B2 (en) 2016-01-29 2019-10-22 Microjet Technology Co., Ltd. Miniature pneumatic device
EP3203079B1 (fr) 2016-01-29 2021-05-19 Microjet Technology Co., Ltd Actionneur piézoélectrique
US10529911B2 (en) 2016-01-29 2020-01-07 Microjet Technology Co., Ltd. Piezoelectric actuator
US10487821B2 (en) 2016-01-29 2019-11-26 Microjet Technology Co., Ltd. Miniature fluid control device
JP6765239B2 (ja) * 2016-07-12 2020-10-07 日本ピラー工業株式会社 ダイアフラムポンプ
JP6981762B2 (ja) * 2016-08-08 2021-12-17 株式会社エンプラス 流体取扱装置および流体取扱方法
TWI658211B (zh) * 2016-10-27 2019-05-01 Nitto Kohki Co., Ltd. Liquid pump
US10655620B2 (en) 2016-11-10 2020-05-19 Microjet Technology Co., Ltd. Miniature fluid control device
US10746169B2 (en) 2016-11-10 2020-08-18 Microjet Technology Co., Ltd. Miniature pneumatic device
US10683861B2 (en) 2016-11-10 2020-06-16 Microjet Technology Co., Ltd. Miniature pneumatic device
TWI686537B (zh) * 2016-11-10 2020-03-01 研能科技股份有限公司 微型氣壓動力裝置
CN108506197A (zh) * 2017-02-24 2018-09-07 研能科技股份有限公司 流体输送装置
CN110546415B (zh) * 2017-12-22 2021-09-24 株式会社村田制作所 阀、应用设备
TWI663507B (zh) * 2018-04-09 2019-06-21 中原大學 微型散熱系統
KR20230049729A (ko) * 2020-09-16 2023-04-13 프로리 시스템스 인코포레이티드 Mems-기반 냉각 시스템들을 제조하기 위한 방법 및 시스템

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CN103906923A (zh) 2014-07-02
US20140248170A1 (en) 2014-09-04
EP2762725A1 (fr) 2014-08-06
KR20140074308A (ko) 2014-06-17

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