KR20140074308A - 마이크로다이어프램 펌프 - Google Patents
마이크로다이어프램 펌프 Download PDFInfo
- Publication number
- KR20140074308A KR20140074308A KR1020147007966A KR20147007966A KR20140074308A KR 20140074308 A KR20140074308 A KR 20140074308A KR 1020147007966 A KR1020147007966 A KR 1020147007966A KR 20147007966 A KR20147007966 A KR 20147007966A KR 20140074308 A KR20140074308 A KR 20140074308A
- Authority
- KR
- South Korea
- Prior art keywords
- valve
- diaphragm
- valve plate
- plate
- valve seat
- Prior art date
Links
- 238000005530 etching Methods 0.000 claims description 12
- 229910052751 metal Inorganic materials 0.000 claims description 12
- 239000002184 metal Substances 0.000 claims description 12
- 238000000034 method Methods 0.000 claims description 9
- 238000004080 punching Methods 0.000 claims description 5
- 239000012530 fluid Substances 0.000 description 16
- 239000010935 stainless steel Substances 0.000 description 9
- 229910001220 stainless steel Inorganic materials 0.000 description 9
- 239000000446 fuel Substances 0.000 description 5
- 239000000758 substrate Substances 0.000 description 5
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 4
- 229910052710 silicon Inorganic materials 0.000 description 4
- 239000010703 silicon Substances 0.000 description 4
- UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical compound [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 description 3
- 229910002091 carbon monoxide Inorganic materials 0.000 description 3
- 238000009792 diffusion process Methods 0.000 description 3
- 239000007789 gas Substances 0.000 description 3
- 239000007788 liquid Substances 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 238000003825 pressing Methods 0.000 description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- 238000005219 brazing Methods 0.000 description 2
- 229910003460 diamond Inorganic materials 0.000 description 2
- 239000010432 diamond Substances 0.000 description 2
- 238000007599 discharging Methods 0.000 description 2
- 230000005684 electric field Effects 0.000 description 2
- 229910052739 hydrogen Inorganic materials 0.000 description 2
- 239000001257 hydrogen Substances 0.000 description 2
- 238000005304 joining Methods 0.000 description 2
- 238000010030 laminating Methods 0.000 description 2
- 238000003475 lamination Methods 0.000 description 2
- 238000003754 machining Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000000873 masking effect Effects 0.000 description 2
- 229910001316 Ag alloy Inorganic materials 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 229910020836 Sn-Ag Inorganic materials 0.000 description 1
- 229910020988 Sn—Ag Inorganic materials 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 239000003054 catalyst Substances 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 229940079593 drug Drugs 0.000 description 1
- 239000003814 drug Substances 0.000 description 1
- 239000002737 fuel gas Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 150000002431 hydrogen Chemical class 0.000 description 1
- 230000001050 lubricating effect Effects 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 238000000053 physical method Methods 0.000 description 1
- 238000005240 physical vapour deposition Methods 0.000 description 1
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
- 238000002407 reforming Methods 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 239000002689 soil Substances 0.000 description 1
- 238000005476 soldering Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
- 238000001947 vapour-phase growth Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B43/00—Machines, pumps, or pumping installations having flexible working members
- F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
- F04B43/04—Pumps having electric drive
- F04B43/043—Micropumps
- F04B43/046—Micropumps with piezoelectric drive
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B43/00—Machines, pumps, or pumping installations having flexible working members
- F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
- F04B43/06—Pumps having fluid drive
- F04B43/073—Pumps having fluid drive the actuating fluid being controlled by at least one valve
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B43/00—Machines, pumps, or pumping installations having flexible working members
- F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
- F04B43/04—Pumps having electric drive
- F04B43/043—Micropumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B53/00—Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
- F04B53/10—Valves; Arrangement of valves
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B53/00—Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
- F04B53/16—Casings; Cylinders; Cylinder liners or heads; Fluid connections
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05B—INDEXING SCHEME RELATING TO WIND, SPRING, WEIGHT, INERTIA OR LIKE MOTORS, TO MACHINES OR ENGINES FOR LIQUIDS COVERED BY SUBCLASSES F03B, F03D AND F03G
- F05B2210/00—Working fluid
- F05B2210/10—Kind or type
- F05B2210/11—Kind or type liquid, i.e. incompressible
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Reciprocating Pumps (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PCT/JP2011/072056 WO2013046330A1 (fr) | 2011-09-27 | 2011-09-27 | Pompe à microdiaphragme |
Publications (1)
Publication Number | Publication Date |
---|---|
KR20140074308A true KR20140074308A (ko) | 2014-06-17 |
Family
ID=47994445
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020147007966A KR20140074308A (ko) | 2011-09-27 | 2011-09-27 | 마이크로다이어프램 펌프 |
Country Status (5)
Country | Link |
---|---|
US (1) | US20140248170A1 (fr) |
EP (1) | EP2762725A4 (fr) |
KR (1) | KR20140074308A (fr) |
CN (1) | CN103906923A (fr) |
WO (1) | WO2013046330A1 (fr) |
Families Citing this family (21)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10344753B2 (en) * | 2014-02-28 | 2019-07-09 | Encite Llc | Micro pump systems |
US10330095B2 (en) | 2014-10-31 | 2019-06-25 | Encite Llc | Microelectromechanical systems fabricated with roll to roll processing |
ES2846834T3 (es) * | 2015-02-17 | 2021-07-29 | Daiken Medical Co Ltd | Unidad de bomba y procedimiento para fabricar la misma |
JP6639212B2 (ja) * | 2015-12-09 | 2020-02-05 | 株式会社エンプラス | エミッタおよび点滴灌漑用チューブ |
US10487820B2 (en) | 2016-01-29 | 2019-11-26 | Microjet Technology Co., Ltd. | Miniature pneumatic device |
US10451051B2 (en) | 2016-01-29 | 2019-10-22 | Microjet Technology Co., Ltd. | Miniature pneumatic device |
US10487821B2 (en) | 2016-01-29 | 2019-11-26 | Microjet Technology Co., Ltd. | Miniature fluid control device |
EP3203079B1 (fr) | 2016-01-29 | 2021-05-19 | Microjet Technology Co., Ltd | Actionneur piézoélectrique |
US10529911B2 (en) | 2016-01-29 | 2020-01-07 | Microjet Technology Co., Ltd. | Piezoelectric actuator |
US10615329B2 (en) | 2016-01-29 | 2020-04-07 | Microjet Technology Co., Ltd. | Piezoelectric actuator |
JP6765239B2 (ja) * | 2016-07-12 | 2020-10-07 | 日本ピラー工業株式会社 | ダイアフラムポンプ |
JP6981762B2 (ja) * | 2016-08-08 | 2021-12-17 | 株式会社エンプラス | 流体取扱装置および流体取扱方法 |
TWI658211B (zh) * | 2016-10-27 | 2019-05-01 | Nitto Kohki Co., Ltd. | Liquid pump |
TWI686537B (zh) * | 2016-11-10 | 2020-03-01 | 研能科技股份有限公司 | 微型氣壓動力裝置 |
US10683861B2 (en) | 2016-11-10 | 2020-06-16 | Microjet Technology Co., Ltd. | Miniature pneumatic device |
US10746169B2 (en) | 2016-11-10 | 2020-08-18 | Microjet Technology Co., Ltd. | Miniature pneumatic device |
US10655620B2 (en) | 2016-11-10 | 2020-05-19 | Microjet Technology Co., Ltd. | Miniature fluid control device |
CN108506197A (zh) * | 2017-02-24 | 2018-09-07 | 研能科技股份有限公司 | 流体输送装置 |
CN113864168B (zh) * | 2017-12-22 | 2023-06-27 | 株式会社村田制作所 | 阀、应用设备 |
TWI663507B (zh) * | 2018-04-09 | 2019-06-21 | 中原大學 | 微型散熱系統 |
WO2022060594A1 (fr) * | 2020-09-16 | 2022-03-24 | Frore Systems Inc. | Procédé et système pour la fabrication de systèmes de refroidissement basés sur les mems |
Family Cites Families (25)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2856955A (en) * | 1955-08-02 | 1958-10-21 | Winkelman James | Valve structure for aerators or the like |
US3814552A (en) * | 1973-04-17 | 1974-06-04 | Atomic Energy Commission | Personal air sampling pump |
JPS61171891A (ja) * | 1985-01-25 | 1986-08-02 | Nec Corp | 圧電型ポンプ |
JP2510589Y2 (ja) * | 1990-07-19 | 1996-09-11 | 三菱化学株式会社 | 圧電ポンプ |
JPH051669A (ja) | 1991-06-21 | 1993-01-08 | Seiko Epson Corp | マイクロポンプ及びマイクロバルブの製造方法 |
JPH0693972A (ja) | 1992-09-11 | 1994-04-05 | Seiko Epson Corp | マイクロポンプ及びその製造方法 |
US5542821A (en) * | 1995-06-28 | 1996-08-06 | Basf Corporation | Plate-type diaphragm pump and method of use |
JP3202643B2 (ja) | 1997-02-19 | 2001-08-27 | セイコーインスツルメンツ株式会社 | マイクロポンプおよびマイクロポンプの製造方法 |
JP4010639B2 (ja) * | 1998-03-31 | 2007-11-21 | 株式会社アルバック | 往復動式真空ポンプ |
JP2000274374A (ja) * | 1999-03-24 | 2000-10-03 | Kasei Optonix Co Ltd | 小型ポンプ |
JP3888015B2 (ja) * | 1999-12-22 | 2007-02-28 | 松下電工株式会社 | 圧電ダイヤフラムポンプの密封方法 |
US20020155010A1 (en) * | 2001-04-24 | 2002-10-24 | Karp Christoph D. | Microfluidic valve with partially restrained element |
JP4396095B2 (ja) * | 2002-06-03 | 2010-01-13 | セイコーエプソン株式会社 | ポンプ |
JP4529915B2 (ja) * | 2002-08-16 | 2010-08-25 | 日本電気株式会社 | 圧電ポンプおよびこれを用いた冷却装置 |
JP3946178B2 (ja) * | 2003-09-05 | 2007-07-18 | 松下電器産業株式会社 | マイクロポンプ用逆止弁装置およびその製造方法 |
JP4036834B2 (ja) * | 2004-01-21 | 2008-01-23 | 松下電器産業株式会社 | マイクロポンプ用逆止弁の製造方法 |
JP4501517B2 (ja) * | 2004-04-21 | 2010-07-14 | パナソニック電工株式会社 | 圧電ダイヤフラムポンプ |
CN2703141Y (zh) * | 2004-05-30 | 2005-06-01 | 卢启明 | 直流自吸泵 |
JP2006063960A (ja) * | 2004-08-30 | 2006-03-09 | Star Micronics Co Ltd | 逆止弁及びダイヤフラムポンプ |
JP2006161779A (ja) | 2004-12-10 | 2006-06-22 | Kanagawa Acad Of Sci & Technol | マイクロポンプ及びその製造方法 |
JP4285518B2 (ja) * | 2006-03-28 | 2009-06-24 | カシオ計算機株式会社 | 接続構造体、流路制御部、燃料電池型発電装置及び電子機器 |
US8256465B2 (en) * | 2006-05-01 | 2012-09-04 | Google Inc. | Microfluidic valve structure |
JP5221993B2 (ja) | 2008-03-28 | 2013-06-26 | 公立大学法人首都大学東京 | マイクロバルブ及びマイクロポンプ |
CN101550924A (zh) * | 2008-03-31 | 2009-10-07 | 研能科技股份有限公司 | 非对称双腔流体输送装置 |
EP2343456B1 (fr) * | 2008-09-29 | 2018-08-15 | Murata Manufacturing Co., Ltd. | Pompe piézoélectrique |
-
2011
- 2011-09-27 KR KR1020147007966A patent/KR20140074308A/ko not_active Application Discontinuation
- 2011-09-27 WO PCT/JP2011/072056 patent/WO2013046330A1/fr active Application Filing
- 2011-09-27 CN CN201180073680.4A patent/CN103906923A/zh active Pending
- 2011-09-27 EP EP11873526.5A patent/EP2762725A4/fr not_active Withdrawn
- 2011-09-27 US US14/347,535 patent/US20140248170A1/en not_active Abandoned
Also Published As
Publication number | Publication date |
---|---|
WO2013046330A1 (fr) | 2013-04-04 |
US20140248170A1 (en) | 2014-09-04 |
EP2762725A4 (fr) | 2015-06-10 |
CN103906923A (zh) | 2014-07-02 |
EP2762725A1 (fr) | 2014-08-06 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
WITN | Application deemed withdrawn, e.g. because no request for examination was filed or no examination fee was paid |