WO2011040437A1 - Esd保護デバイスおよびその製造方法 - Google Patents
Esd保護デバイスおよびその製造方法 Download PDFInfo
- Publication number
- WO2011040437A1 WO2011040437A1 PCT/JP2010/066905 JP2010066905W WO2011040437A1 WO 2011040437 A1 WO2011040437 A1 WO 2011040437A1 JP 2010066905 W JP2010066905 W JP 2010066905W WO 2011040437 A1 WO2011040437 A1 WO 2011040437A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- particles
- counter electrode
- metal particles
- electrode
- esd protection
- Prior art date
Links
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01T—SPARK GAPS; OVERVOLTAGE ARRESTERS USING SPARK GAPS; SPARKING PLUGS; CORONA DEVICES; GENERATING IONS TO BE INTRODUCED INTO NON-ENCLOSED GASES
- H01T4/00—Overvoltage arresters using spark gaps
- H01T4/10—Overvoltage arresters using spark gaps having a single gap or a plurality of gaps in parallel
- H01T4/12—Overvoltage arresters using spark gaps having a single gap or a plurality of gaps in parallel hermetically sealed
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01C—RESISTORS
- H01C7/00—Non-adjustable resistors formed as one or more layers or coatings; Non-adjustable resistors made from powdered conducting material or powdered semi-conducting material with or without insulating material
- H01C7/10—Non-adjustable resistors formed as one or more layers or coatings; Non-adjustable resistors made from powdered conducting material or powdered semi-conducting material with or without insulating material voltage responsive, i.e. varistors
- H01C7/105—Varistor cores
- H01C7/108—Metal oxide
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01C—RESISTORS
- H01C7/00—Non-adjustable resistors formed as one or more layers or coatings; Non-adjustable resistors made from powdered conducting material or powdered semi-conducting material with or without insulating material
- H01C7/10—Non-adjustable resistors formed as one or more layers or coatings; Non-adjustable resistors made from powdered conducting material or powdered semi-conducting material with or without insulating material voltage responsive, i.e. varistors
- H01C7/12—Overvoltage protection resistors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/58—Structural electrical arrangements for semiconductor devices not otherwise provided for, e.g. in combination with batteries
- H01L23/60—Protection against electrostatic charges or discharges, e.g. Faraday shields
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier
- H01L27/0203—Particular design considerations for integrated circuits
- H01L27/0248—Particular design considerations for integrated circuits for electrical or thermal protection, e.g. electrostatic discharge [ESD] protection
- H01L27/0251—Particular design considerations for integrated circuits for electrical or thermal protection, e.g. electrostatic discharge [ESD] protection for MOS devices
- H01L27/0288—Particular design considerations for integrated circuits for electrical or thermal protection, e.g. electrostatic discharge [ESD] protection for MOS devices using passive elements as protective elements, e.g. resistors, capacitors, inductors, spark-gaps
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01T—SPARK GAPS; OVERVOLTAGE ARRESTERS USING SPARK GAPS; SPARKING PLUGS; CORONA DEVICES; GENERATING IONS TO BE INTRODUCED INTO NON-ENCLOSED GASES
- H01T1/00—Details of spark gaps
- H01T1/20—Means for starting arc or facilitating ignition of spark gap
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01T—SPARK GAPS; OVERVOLTAGE ARRESTERS USING SPARK GAPS; SPARKING PLUGS; CORONA DEVICES; GENERATING IONS TO BE INTRODUCED INTO NON-ENCLOSED GASES
- H01T21/00—Apparatus or processes specially adapted for the manufacture or maintenance of spark gaps or sparking plugs
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01T—SPARK GAPS; OVERVOLTAGE ARRESTERS USING SPARK GAPS; SPARKING PLUGS; CORONA DEVICES; GENERATING IONS TO BE INTRODUCED INTO NON-ENCLOSED GASES
- H01T4/00—Overvoltage arresters using spark gaps
- H01T4/10—Overvoltage arresters using spark gaps having a single gap or a plurality of gaps in parallel
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/095—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00 with a principal constituent of the material being a combination of two or more materials provided in the groups H01L2924/013 - H01L2924/0715
- H01L2924/097—Glass-ceramics, e.g. devitrified glass
- H01L2924/09701—Low temperature co-fired ceramic [LTCC]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/11—Device type
- H01L2924/12—Passive devices, e.g. 2 terminal devices
- H01L2924/1204—Optical Diode
- H01L2924/12044—OLED
Definitions
- the present invention relates to an ESD protection device for protecting a semiconductor device or the like from electrostatic breakdown and a method for manufacturing the same.
- ESD protection devices for protecting semiconductor devices such as LSIs from electrostatic discharge (ESD) (Electron-Statics Discharge) have been widely used.
- ESD electrostatic discharge
- an ESD protection device connected between the first electrode and the second electrode, and non-conductive powder (silicon carbide powder), metal conductive powder (Cu powder), adhesive (glass), and
- non-conductive powder silicon carbide powder
- metal conductive powder Cu powder
- adhesive glass
- an overvoltage protection element including a porous structure portion produced by firing using a material for an overvoltage protection element including the above.
- the present invention has been made in view of the above circumstances, and an object thereof is to provide an ESD protection device that has stable characteristics and does not deteriorate even when static electricity is repeatedly applied, and a method for manufacturing the same. .
- the ESD protection device of the present invention is A counter electrode comprising one side counter electrode and the other side counter electrode formed so that the tip portions thereof are opposed to each other at an interval inside the ceramic substrate;
- a discharge auxiliary electrode disposed in contact with each of the one side counter electrode and the other side counter electrode constituting the counter electrode and extending from the one side counter electrode to the other side counter electrode;
- the discharge auxiliary electrode includes metal particles, semiconductor particles, and vitreous, and Between the metal particles, between the semiconductor particles, and between the metal particles and the semiconductor particles are bonded through the vitreous,
- the average particle diameter X of the metal particles is 1.0 ⁇ m or more, and the relationship between the thickness Y of the discharge auxiliary electrode and the average particle diameter X of the metal particles satisfies the requirement of 0.5 ⁇ Y / X ⁇ 3. It is characterized by satisfying.
- the metal particles are preferably Cu particles, and the semiconductor particles are preferably silicon carbide particles.
- the vitreous material is produced by a reaction between the metal particles and the semiconductor particles.
- the discharge gap portion in which the tip portions of the one side counter electrode and the other side counter electrode constituting the counter electrode face each other and the region located in the discharge gap portion of the discharge auxiliary electrode are inside the ceramic base material. It is desirable to face the cavity provided in the.
- the manufacturing method of the ESD protection device of the present invention includes: One main surface of the first ceramic green sheet includes metal particles having an average particle diameter of 1.0 ⁇ m or more, semiconductor particles, and an organic vehicle, and at least one of the metal particles and the semiconductor particles has a surface By printing a discharge auxiliary electrode paste having a glass network-forming component and a ratio of 7% to 25% by volume of the total of the metal particles and the semiconductor particles. Forming a discharge auxiliary electrode for firing; By printing a counter electrode paste on one main surface of the first ceramic green sheet, each of the one side counter electrodes covers a part of the discharge auxiliary electrode and is spaced from each other.
- the metal particles contained in the auxiliary discharge electrode are alumina-coated Cu particles, and the semiconductor particles are silicon carbide particles.
- the ESD protection device of the present invention is in contact with a counter electrode provided with a first counter electrode and a second counter electrode facing each other, a first counter electrode and a part of the second counter electrode, and from the first counter electrode to the other side.
- a discharge auxiliary electrode disposed across the counter electrode, the discharge auxiliary electrode including at least metal particles, semiconductor particles, and vitreous, and between the metal particles, between the semiconductor particles, and the metal particles.
- the average particle diameter X of the metal particles is 1.0 ⁇ m or more
- the relationship between the thickness Y of the discharge auxiliary electrode and the average particle diameter X of the metal particles is Since the requirement of 0.5 ⁇ Y / X ⁇ 3 is satisfied, it is possible to provide an ESD protection device that has stable characteristics and does not deteriorate even when static electricity is repeatedly applied.
- the vitreous does not cover the whole of each particle or is not filled between the particles, for example, when each particle is bound by vitreous scattered on the surface of each particle, It is a broad concept including
- the metal particles are preferably Cu particles. This is because the ESD protection device can lower the discharge start voltage and the peak voltage by using Cu particles as the metal particles. Can be configured.
- silicon carbide particles as the semiconductor particles, but this is because the clamp voltage can be lowered by using silicon carbide particles as the semiconductor particles.
- the vitreous material when the vitreous material is generated by the reaction between the metal particles and the semiconductor particles, the vitreous material is uniformly dispersed without the need to add a glass component separately to the raw material.
- the discharge auxiliary electrode can be formed efficiently and reliably.
- a cavity portion provided in the ceramic base is provided with a region in the discharge gap portion of the discharge gap electrode and the discharge gap portion of the discharge auxiliary electrode in which the tip portions of the one side counter electrode and the other side counter electrode that constitute the counter electrode face each other. Therefore, since the discharge phenomenon occurs even in the cavity when ESD is applied, the discharge capability can be improved as compared with the case where there is no cavity, which is significant.
- the ESD protection device manufacturing method of the present invention includes, on one main surface of the first ceramic green sheet, metal particles having an average particle diameter of 1.0 ⁇ m or more, semiconductor particles, and an organic vehicle.
- a process of forming an unfired auxiliary discharge electrode by printing paste and a portion of the auxiliary discharge electrode are covered and spaced apart from each other by printing a counter electrode paste.
- a step of forming an unfired counter electrode including the provided one side counter electrode and the other side counter electrode; and a second ceramic group on one main surface of the first ceramic green sheet.
- the ESD protection device having the configuration of the present invention can be efficiently and reliably manufactured.
- the ESD protection device provided with the external electrode by printing the external electrode paste on the surface of the unfired laminate so as to be connected to the counter electrode before firing the laminate, and then firing the paste. It is also possible to obtain an external electrode by printing and baking an external electrode paste on the surface of the laminate after firing the laminate.
- the glass network-forming component that at least one of the metal particles and the semiconductor particles has on its surface is a glass component alone, for example, SiO 2 2 , B 2 O 3 , Al 2 O 3 , P 2 O 5 , ZrO 2 , V 2 O 5 , TiO 2 , ZnO, GeO 2 , As 2 O 5 , Sb 2 O 5 , PbO, BeO and the like. .
- alumina-coated Cu particles are used as the metal particles contained in the discharge auxiliary electrode and silicon carbide particles are used as the raw material for the semiconductor particles, they usually exist on the surface of alumina (Al 2 O 3 ) or silicon carbide.
- a small amount of silicon oxide or the like that functions as a network-forming component of glass, and is stable because the metal particles constituting the discharge auxiliary electrode, between the semiconductor particles, or between the metal particles and the semiconductor particles are bonded via glass.
- FIG. 1 It is front sectional drawing which shows typically the structure of the ESD protection device concerning the Example of this invention. It is a principal part expanded front sectional view which expands and shows the principal part of the ESD protection device concerning the Example of this invention. It is a top view which shows the internal structure of the ESD protection device concerning the Example of this invention.
- FIG. 1 is a cross-sectional view schematically showing the structure of an ESD protection device according to an embodiment of the present invention.
- FIG. 2 is an enlarged front cross-sectional view showing a main part of the ESD protection device.
- FIG. It is a top sectional view of an ESD protection device concerning one example of the invention.
- this ESD protection device includes a ceramic base material 1, one side counter electrode 2 a and the other side counter electrode that are formed on the same plane in the ceramic base material 1, and whose tip portions are opposed to each other. 2b, a counter electrode (extraction electrode) 2, a discharge auxiliary electrode 3 formed so as to be in contact with a part of the one side counter electrode 2a and the other side counter electrode 2b and extending from the one side counter electrode 2a to the other side counter electrode 2b. And an external electrode for electrical connection to the outside, which is disposed at both ends of the ceramic substrate 1 so as to be electrically connected to the one side counter electrode 2a and the other side counter electrode 2b constituting the counter electrode 2 5a and 5b are provided.
- the discharge auxiliary electrode 3 includes metal particles, semiconductor particles, and glass, and the metal particles, the semiconductor particles, and the metal particles and the semiconductor particles are bonded via the glass.
- This glassy substance is a reaction product generated by the reaction between metal particles and semiconductor particles.
- Cu particles are used as the metal particles
- silicon carbide particles are used as the semiconductor particles.
- the relationship between the thickness Y of the auxiliary discharge electrode 3 and the average particle diameter X of the metal particles is a requirement of 0.5 ⁇ Y / X ⁇ 3 (that is, a requirement of the present invention). It is configured to satisfy.
- the regions of the one-side counter electrode 2a and the other-side counter electrode 2b that constitute the counter electrode 2 that are opposite to each other and the discharge gap portion 10 of the discharge auxiliary electrode 3 are located within the ceramic substrate 1. It arrange
- the opposing portion (discharge gap portion 10) of the one-side counter electrode 2a and the other-side counter electrode 2b, the connection portion between the counter electrode 2 and the discharge auxiliary electrode 3, and the discharge of the discharge auxiliary electrode 3 A seal layer 11 is disposed so as to cover the region located in the gap part 10, the cavity part 12, and the like.
- This seal layer 11 is a porous layer made of ceramic particles such as alumina, and absorbs and holds (traps) glass components contained in the ceramic substrate 1 and glass components generated in the ceramic substrate 1 in the firing process.
- the glass component functions to prevent the glass component from flowing into the cavity 12 and the discharge gap 10 inside thereof.
- the glass component flows into the discharge auxiliary electrode 3 to prevent the sintering from progressing excessively, and the conductivity of the discharge auxiliary electrode 3 becomes too high, thereby causing a short circuit failure or the glass component to the cavity. It is possible to secure a high discharge capability by preventing the inflow of the gas, securing a cavity, and causing a discharge phenomenon also in the cavity.
- the ceramic substrate 1 is mainly composed of oxides of Ba, Al, and Si having a square planar shape, a length of 1.0 mm, a width of 0.5 mm, and a thickness of 0.3 mm.
- a glass ceramic substrate as a component is used.
- the constituent material of the ceramic substrate 1 is not limited, and other types such as an alumina substrate and a silicon substrate can be used depending on circumstances.
- the ceramic substrate 1 should have a relative dielectric constant of 50 or less, preferably 10 or less.
- a binder resin composed of 80% by weight of Cu powder having an average particle diameter of about 2 ⁇ m and ethyl cellulose is prepared as a counter electrode paste for forming the pair of counter electrodes 2a and 2b.
- a counter electrode paste was prepared by adding a solvent and stirring and mixing with three rolls.
- the average particle size of the Cu powder refers to the center particle size (D50) determined from the particle size distribution measurement using Microtrac.
- discharge auxiliary electrode paste for forming discharge auxiliary electrode 3
- metal particles (metal conductor powder) and semiconductor particles (semiconductor powder) are blended at a predetermined ratio, and a vehicle is prepared.
- a discharge auxiliary electrode paste was added and stirred and mixed with three rolls to prepare a discharge auxiliary electrode paste.
- the volume fraction of the vehicle was 75 to 95 vol%, and the volume fraction of metal particles and semiconductor particles was the remaining 5 to 25 vol%.
- Table 1 shows the types of metal particles (metal conductor powder) used in the evaluation.
- the Al 2 O 3 coating amount (% by weight) and the ZrO 2 coating amount (% by weight) in Table 1 are the weight ratio of the coating species in the entire coated Cu particles, and the balance is metal particles (metal conductor powder). is there.
- Table 2 shows the types of semiconductor particles (semiconductor powder) used in the evaluation.
- Table 2 also shows the types of insulator particles (insulator powder) used for comparative evaluation.
- Table 3 shows the composition of the vehicle, that is, the binder type, solvent type, dispersant type, and their blending ratio.
- Tables 4 and 5 show the compositions (vol%) of discharge auxiliary electrode pastes prepared using metal particles, semiconductor particles, insulator particles, and vehicles.
- seal layer paste containing alumina and an organic vehicle was prepared as a paste for forming the above-described seal layer.
- a resin paste such as a resin, an organic solvent, an organic binder, etc. that decomposes and burns in the firing process is produced.
- the discharge auxiliary electrode paste is printed on the seal layer paste by a screen printing method so as to have a predetermined pattern, and dried to form an unfired discharge auxiliary electrode.
- the average particle diameter X of the metal particles constituting the discharge auxiliary electrode is 1.0 ⁇ m or more, the thickness Y of the discharge auxiliary electrode, and the average particle of the metal particles The relationship with the diameter X satisfies the requirement of 0.5 ⁇ Y / X ⁇ 3.
- a counter electrode paste is applied to form an unfired one side counter electrode and the other side counter electrode constituting the counter electrode.
- the discharge gap 10 is formed between the mutually opposing front-end
- the width W (FIG. 3) of the one-side counter electrode 2a and the other-side counter electrode 2b constituting the counter electrode 2 is 100 ⁇ m, and the dimension G of the discharge gap 10 (FIG. 3). was set to 30 ⁇ m.
- a resin paste for forming a cavity is applied from above the counter electrode 2 and the discharge auxiliary electrode 3 to a region where the cavity 12 is to be formed. Further, an unfired seal layer is formed by applying a seal layer paste so as to cover the resin paste for forming the cavity from above.
- the paste is applied on the first ceramic green sheet to which the paste is applied in the order of the seal layer paste, the discharge auxiliary electrode paste, the counter electrode paste, the resin paste, and the seal layer paste.
- a second ceramic green sheet that has not been applied is laminated and pressure-bonded.
- a laminate having a thickness of 0.3 mm after firing was formed.
- the chip coated with the external electrode paste is fired in an N 2 atmosphere.
- a rare gas such as Ar or Ne
- the firing process in a temperature region where the ceramic material is contracted and sintered is performed using a rare gas such as Ar and Ne. What is necessary is just to implement in a gas atmosphere.
- an electrode material that is not oxidized it can be fired in an air atmosphere.
- the external electrodes formed in the firing step (9) are plated in the order of Ni and Sn plating by electrolytic plating. As a result, an external electrode having a Ni plating film and a Sn plating film and having excellent characteristics such as solderability is formed. Thereby, an ESD protection device having a structure as shown in FIGS. 1 to 3 is obtained.
- Short-circuit resistance is 50 times when 8 kV is applied by contact discharge, 10 times when 4 kV is applied, 10 times when 2 kV is applied, 10 times when 1 kV is applied, 10 times when 0.5 kV is applied, and 10 times when 0.2 kV is applied. Evaluation was conducted by examining IR after 10 times. IR is for those of less than 10 6 Omega determines the short resistance by ESD is applied is poor ( ⁇ mark), for more than 10 6 Omega was determination short resistance and good ( ⁇ mark).
- ESD discharge response In evaluating ESD discharge responsiveness (ESD repeat resistance), which is a response to repeated ESD, first, each of 100 samples was subjected to an electrostatic discharge immunity test defined in IEC standard, IEC61000-4-2. The average value was obtained. Then, for each sample, as in the case of (1) above, 8 kV application was performed 50 times, 4 kV application 10 times, 2 kV application 10 times, 1 kV application 10 times, 0.5 kV application 10 times by contact discharge. After applying 0.2 kV 10 times, an electrostatic discharge immunity test was conducted to investigate ESD discharge response (ESD repeat resistance).
- Tables 6 and 7 show the conditions of the discharge auxiliary electrode paste, the relationship between the average particle diameter X and the thickness Y of the discharge auxiliary electrode, the results of characteristic evaluation, and the like.
- the sample numbers marked with * are samples that do not have the requirements of the present invention.
- the relationship between the thickness Y of the discharge auxiliary electrode and the average particle diameter X of the metal is 0.5> Y / X, and sample numbers 11, 16, 21, 25, 29, 33, which do not satisfy the requirements of the present invention. In the 34 and 38 ESD protection devices, it was confirmed that the short circuit resistance deteriorated.
- the average particle diameter X of the metal particles contained in the discharge auxiliary electrode is 1.0 ⁇ m or more, and the relationship between the thickness Y of the discharge auxiliary electrode and the average particle diameter X of the metal is 0.5 ⁇ Y / X
- the requirements of the invention as ⁇ 3
- short circuit resistance The ESD discharge response was good.
- the average particle diameter X of the metal particles constituting the discharge auxiliary electrode is 1.0 ⁇ m or more, and the relationship between the thickness Y of the discharge auxiliary electrode and the average particle diameter X of the metal particles is 0.5 ⁇ Y.
- (a) Good short-circuit resistance due to repeated ESD application (b) Even if no glass is added, the surface of the metal particles constituting the discharge auxiliary electrode reacts with the surface of the semiconductor particles in the firing step to produce a vitreous material between the metal particles, between the semiconductor particles, and the metal. It was confirmed that the short-circuit resistance is maintained well even when static electricity is repeatedly applied because the discharge auxiliary electrode is formed by bonding the particles and the semiconductor particles by vitreous.
- the ESD protection device including the seal layer and the cavity portion has been described as an example.
- the present invention does not include any one of the seal layer and the cavity portion. It is also possible to adopt a configuration that does not include
- this invention is not limited to the said Example,
- the material of a counter electrode, its specific shape, the specific shape of a discharge auxiliary electrode, the metal particle which comprises a discharge auxiliary electrode, and the kind of semiconductor particle Various kinds of applications and modifications within the scope of the invention, relating to the type of glassy material that functions to bond between metal particles, between semiconductor particles, and between metal particles and semiconductor particles, and the method of forming a sealing layer and a cavity. Can be added.
- the present invention it is possible to provide an ESD protection device that has stable characteristics and does not deteriorate even when static electricity is repeatedly applied. Therefore, the present invention can be widely applied to the field of ESD protection devices used for protecting various devices and apparatuses including semiconductor devices.
Abstract
Description
(1)ガラスの分散不良により、製品の特性にばらつきが大きくなる傾向があり、信頼性の高い製品を提供することが困難である。
(2)ガラスの分散不良により、繰り返しESDが印加されるとショート耐性が劣化する傾向がある。
セラミック基材の内部に、先端部が間隔をおいて対向するように形成された一方側対向電極と他方側対向電極とを備えてなる対向電極と、
前記対向電極を構成する前記一方側対向電極と前記他方側対向電極のそれぞれと接し、前記一方側対向電極から前記他方側対向電極にわたるように配設された放電補助電極と
を具備し、
前記放電補助電極は、金属粒子と、半導体粒子と、ガラス質とを含み、かつ、
前記金属粒子間、前記半導体粒子間、および前記金属粒子と前記半導体粒子の間が、前記ガラス質を介して結合しているとともに、
前記金属粒子の平均粒子径Xが1.0μm以上であり、前記放電補助電極の厚みYと、前記金属粒子の平均粒子径Xとの関係が、0.5≦Y/X≦3の要件を満たすこと
を特徴としている。
第1のセラミックグリーンシートの一方主面上に、平均粒子径が1.0μm以上の金属粒子と、半導体粒子と、有機ビヒクルとを含むとともに、前記金属粒子と前記半導体粒子の少なくとも一方が、表面にガラスの網目形成成分を有し、かつ、前記金属粒子と前記半導体粒子とを合わせたものが占める割合が7体積%~25体積%である放電補助電極ペ-ストを印刷することにより、未焼成の放電補助電極を形成する工程と、
前記第1のセラミックグリーンシートの一方主面上に、対向電極ペーストを印刷することにより、それぞれが、前記放電補助電極の一部を覆うとともに、互いに間隔をおいて配設された一方側対向電極と他方側対向電極とを備える未焼成の対向電極を形成する工程と、
前記第1のセラミックグリーンシートの一方主面上に、第2のセラミックグリーンシートを積層して未焼成の積層体を形成する工程と、
前記積層体を焼成し、前記放電補助電極の前記金属粒子の表面と前記半導体粒子の表面とを反応させることにより、ガラス質を生成させる工程と
を備えている。
(a)各粒子間に充満するガラス質により各粒子が結びつけられている場合、
(b)各粒子の全体がガラス質により覆われ、かつ、該ガラス質により各粒子が結合している場合、
(c)ガラス質が各粒子の全体を覆ったり、各粒子間に充満したりしておらず、例えば、各粒子の表面に点在するガラス質により各粒子が結合している場合、
などを含む広い概念である。
なお、上記積層体を焼成する工程の前に、未焼成の積層体の表面に、対向電極と接続するように外部電極ペーストを印刷し、その後に焼成することにより外部電極を備えたESD保護デバイスを得るようにすることも可能であり、また、上記積層体の焼成後に、積層体の表面に外部電極ペーストを印刷し、焼き付けることにより外部電極を形成することも可能である。
図1は、本発明の一実施例にかかるESD保護デバイスの構造を模式的に示す断面図であり、図2は、その要部を拡大して示す要部拡大正面断面図、図3は本発明の一実施例にかかるESD保護デバイスの平面断面図である。
ただし、セラミック基材1の構成材料に制約はなく、場合によってはアルミナ基板やシリコン基板など他の種類のものを用いることも可能である。なお、セラミック基材1としては比誘電率が50以下、好ましくは10以下のものを用いることが望ましい。
(1)セラミックグリーンシートの作製
セラミック基材1の材料となるセラミック材料として、Ba、Al、Siを主たる成分とする材料を用意する。
そして、各材料を所定の組成になるよう調合し、800~1000℃で仮焼する。得られた仮焼粉末をジルコニアボールミルで12時間粉砕し、セラミック粉末を得る。
このセラミック粉末に、トルエン・エキネンなどの有機溶媒を加え混合した後、さらにバインダー、可塑剤を加え、混合することによりスラリーを作製する。
このスラリーをドクターブレード法により成形し、厚さ50μmのセラミックグリーンシートを作製した。
また、一対の対向電極2a,2bを形成するための対向電極ペーストとして、平均粒径約2μmのCu粉80重量%と、エチルセルロースなどからなるバインダー樹脂を調合し、溶剤を添加して3本ロールにより撹拌、混合することにより対向電極ペーストを作製した。なお、上記のCu粉の平均粒径とは、マイクロトラックによる粒度分布測定から求めた中心粒径(D50)をいう。
さらに、放電補助電極3を形成するための放電補助電極ペーストとして、金属粒子(金属導体粉末)と、半導体粒子(半導体粉末)を所定の割合で配合し、ビヒクルを添加して3本ロールにより撹拌、混合することにより放電補助電極ペーストを作製した。
なお、放電補助電極ペーストは、ビヒクルの体積分率が75~95vol%、金属粒子、半導体粒子の体積分率が残りの5~25vol%となるようにした。
なお、評価に用いた金属粒子(金属導体粉末)種を表1に示す。
上述のシール層を形成するためのペーストとして、アルミナと有機ビヒクルを含むシール層ペーストを用意した。
上述の空洞部12を形成するためのペーストとして、樹脂、有機溶剤、有機バインダーなど、焼成工程で分解、燃焼して消失する樹脂ペーストを作製した。
上述の放電補助電極ペースト、対向電極ペースト、シール層ペースト、および空洞部形成用の樹脂ペーストを、第1のセラミックグリーンシ-ト上に印刷する。
具体的には、まず、第1のセラミックグリーンシートにシール層ペーストを塗布する。
なお、この実施例では、焼成後の段階で、対向電極2を構成する一方側対向電極2a,他方側対向電極2bの幅W(図3)が100μm、放電ギャップ10の寸法G(図3)が30μmとなるようにした。
さらに、その上から空洞部形成用の樹脂ペーストを覆うように、シール層ペーストを塗布して未焼成のシール層を形成する。
上述のようにして、シール層ペースト、放電補助電極ペースト、対向電極ペースト、樹脂ペースト、シール層ペーストの順で各ペーストを塗布した第1のセラミックグリーンシート上に、ペーストの塗布されていない第2のセラミックグリーンシートを積層し、圧着する。ここでは焼成後に厚みが0.3mmとなる積層体が形成されるようにした。
積層体をマイクロカッタでカットして、各チップに分割する。ここでは、焼成後に、長さ1.0mm、幅0.5mmになるようにカットした。その後、端面に外部電極ペーストを塗布して未焼成の外部電極を形成した。
次いで、外部電極ペーストを塗布したチップをN2雰囲気中で焼成する。
なお、ESDに対する応答電圧を下げるため、空洞部12にAr,Ne等の希ガスを導入する場合には、セラミック材料の収縮、焼結が行われる温度領域における焼成工程をAr,Neなどの希ガス雰囲気中で実施すればよい。酸化しない電極材料を用いる場合には、大気雰囲気で焼成することも可能である。
上記(9)の焼成工程で形成された外部電極上に電解めっきによりNiおよびSnめっきの順でめっきを施す。これにより、Niめっき膜およびSnめっき膜を備え、はんだ付け性などの特性に優れた外部電極が形成される。
これにより、図1~3に示すような構造を有するESD保護デバイスが得られる。
次に、上述のようにして作製したESD保護デバイスについて、以下の方法で各特性を調べた。
ショート耐性は、接触放電にて8kV印加を50回、4kV印加を10回、2kV印加を10回、1kV印加を10回、0.5kV印加を10回、0.2kV印加を10回行った後のIRを調べることにより評価した。
IRが106Ω未満のものについてはESD印加によるショート耐性が不良(×印)であると判定し、106Ω以上のものについてはショート耐性が良好(○印)と判定した。
繰り返しESDに対する応答性であるESD放電応答性(ESD繰返し耐性)の評価を行うにあたっては、まず、それぞれ100個の試料について、IECの規格、IEC61000-4-2に規定されている静電気放電イミュニティ試験を行い、その平均値を求めた。それから、各試料について、上記(1)の場合と同様に、接触放電にて8kV印加を50回、4kV印加を10回、2kV印加を10回、1kV印加を10回、0.5kV印加を10回、0.2kV印加を10回行った後、静電気放電イミュニティ試験を行い、ESD放電応答性(ESD繰返し耐性)を調べた。
上記のショート耐性とESD放電応答性の2つの特性評価結果の両方が良好であるものを総合判定良好(○印)と評価し、どちらか一方または両方が不良であるものを総合判定不良(×印)と評価した。
表6および7において、試料番号に*を付したものは、本発明の要件を備えていない試料である。
これは、放電補助電極中のCu密度が局所的に高くなったことが原因と考えられる。すなわち、放電補助電極中に局所的に存在する微粒のAl2O3によって過剰な液相成分が形成され、局所的にCu粒子が過焼結状態になったことによるものと推察される。
(a)繰り返しESD印加によるショート耐性が良好であること、
(b)ガラスを添加しなくても、焼成工程で放電補助電極を構成する金属粒子の表面と半導体粒子の表面とが反応してガラス質が生成し、金属粒子間、半導体粒子間、および金属粒子と半導体粒子の間がこのガラス質により結合した放電補助電極が形成されるため、繰り返して静電気を印加した場合にもショート耐性が良好に保たれること
が確認された。
2 対向電極
2a 対向電極を構成する一方側対向電極
2b 対向電極を構成する他方側対向電極
3 放電補助電極
5a,5b 外部電極
11 シール層
12 空洞部
10 放電ギャップ部
W 対向電極の幅
G 放電ギャップ部の寸法
Claims (7)
- セラミック基材の内部に、先端部が間隔をおいて対向するように形成された一方側対向電極と他方側対向電極とを備えてなる対向電極と、
前記対向電極を構成する前記一方側対向電極と前記他方側対向電極のそれぞれと接し、前記一方側対向電極から前記他方側対向電極にわたるように配設された放電補助電極と
を具備し、
前記放電補助電極は、金属粒子と、半導体粒子と、ガラス質とを含み、かつ、
前記金属粒子間、前記半導体粒子間、および前記金属粒子と前記半導体粒子の間が、前記ガラス質を介して結合しているとともに、
前記金属粒子の平均粒子径Xが1.0μm以上であり、前記放電補助電極の厚みYと、前記金属粒子の平均粒子径Xとの関係が、0.5≦Y/X≦3の要件を満たすこと
を特徴とするESD保護デバイス。 - 前記金属粒子がCu粒子であることを特徴とする請求項1記載のESD保護デバイス。
- 前記半導体粒子が炭化ケイ素粒子であることを特徴とする請求項1または2記載のESD保護デバイス。
- 前記ガラス質は、前記金属粒子と前記半導体粒子との反応により生じるものであることを特徴とする請求項1~3のいずれかに記載のESD保護デバイス。
- 前記対向電極を構成する前記一方側対向電極と前記他方側対向電極の先端部が互いに対向する放電ギャップ部および前記放電補助電極の前記放電ギャップ部に位置する領域が、前記セラミック基材内部に設けられた空洞部に臨んでいることを特徴とする請求項1~4のいずれかに記載のESD保護デバイス。
- 第1のセラミックグリーンシートの一方主面上に、平均粒子径が1.0μm以上の金属粒子と、半導体粒子と、有機ビヒクルとを含むとともに、前記金属粒子と前記半導体粒子の少なくとも一方が表面にガラスの網目形成成分を有し、かつ、前記金属粒子と前記半導体粒子とを合わせたものが占める割合が7体積%~25体積%である放電補助電極ペ-ストを印刷することにより、未焼成の放電補助電極を形成する工程と、
前記第1のセラミックグリーンシートの一方主面上に、対向電極ペーストを印刷することにより、それぞれが、前記放電補助電極の一部を覆うとともに、互いに間隔をおいて配設された一方側対向電極と他方側対向電極とを備える未焼成の対向電極を形成する工程と、
前記第1のセラミックグリーンシートの一方主面上に、第2のセラミックグリーンシートを積層して未焼成の積層体を形成する工程と、
前記積層体を焼成し、前記放電補助電極の前記金属粒子の表面と前記半導体粒子の表面とを反応させることにより、ガラス質を生成させる工程と
を備えることを特徴とするESD保護デバイスの製造方法。 - 前記放電補助電極に含まれる金属粒子がアルミナコートCu粒子であり、前記半導体粒子が炭化ケイ素粒子であることを特徴とする、請求項6記載のESD保護デバイスの製造方法。
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2011534267A JP5310863B2 (ja) | 2009-09-30 | 2010-09-29 | Esd保護デバイスおよびその製造方法 |
KR1020127007528A KR101392455B1 (ko) | 2009-09-30 | 2010-09-29 | Esd 보호 디바이스 및 그 제조 방법 |
EP10820552.7A EP2447959B1 (en) | 2009-09-30 | 2010-09-29 | Esd protection device and method for manufacturing same |
CN201080042985.4A CN102576586B (zh) | 2009-09-30 | 2010-09-29 | Esd保护器件及其制造方法 |
US13/407,790 US8421582B2 (en) | 2009-09-30 | 2012-02-29 | ESD protection device and manufacturing method therefor |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2009227200 | 2009-09-30 | ||
JP2009-227200 | 2009-09-30 |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US13/407,790 Continuation US8421582B2 (en) | 2009-09-30 | 2012-02-29 | ESD protection device and manufacturing method therefor |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2011040437A1 true WO2011040437A1 (ja) | 2011-04-07 |
Family
ID=43826253
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/JP2010/066905 WO2011040437A1 (ja) | 2009-09-30 | 2010-09-29 | Esd保護デバイスおよびその製造方法 |
Country Status (6)
Country | Link |
---|---|
US (1) | US8421582B2 (ja) |
EP (1) | EP2447959B1 (ja) |
JP (1) | JP5310863B2 (ja) |
KR (1) | KR101392455B1 (ja) |
CN (1) | CN102576586B (ja) |
WO (1) | WO2011040437A1 (ja) |
Cited By (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2013011821A1 (ja) * | 2011-07-15 | 2013-01-24 | 株式会社村田製作所 | Esd保護デバイスおよびその製造方法 |
WO2013038893A1 (ja) * | 2011-09-14 | 2013-03-21 | 株式会社村田製作所 | Esd保護デバイスおよびその製造方法 |
WO2013038892A1 (ja) * | 2011-09-14 | 2013-03-21 | 株式会社村田製作所 | Esd保護デバイスおよびその製造方法 |
JP5221794B1 (ja) * | 2012-08-09 | 2013-06-26 | 立山科学工業株式会社 | 静電気保護素子とその製造方法 |
WO2013115054A1 (ja) * | 2012-01-30 | 2013-08-08 | 株式会社村田製作所 | Esd保護装置 |
WO2013129270A1 (ja) * | 2012-02-29 | 2013-09-06 | 株式会社村田製作所 | Esd保護デバイスおよびその製造方法 |
WO2013129272A1 (ja) * | 2012-02-29 | 2013-09-06 | 株式会社村田製作所 | Esd保護デバイスおよびその製造方法 |
WO2015002045A1 (ja) * | 2013-07-03 | 2015-01-08 | 株式会社村田製作所 | サージ保護デバイス、その製造方法、および、それを含む電子部品 |
JP2015138932A (ja) * | 2014-01-24 | 2015-07-30 | Tdk株式会社 | 静電気保護部品 |
US9209619B2 (en) | 2011-10-28 | 2015-12-08 | Epcos Ag | ESD protection component and component comprising an ESD protection component and an LED |
Families Citing this family (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101679099B1 (ko) * | 2009-03-26 | 2016-11-23 | 쇼킹 테크놀로지스 인코포레이티드 | 전압 스위칭형 유전 물질을 갖는 소자 |
GB2497252A (en) | 2010-09-29 | 2013-06-05 | Murata Manufacturing Co | ESD protection device and method of manufacturing thereof |
US8885324B2 (en) | 2011-07-08 | 2014-11-11 | Kemet Electronics Corporation | Overvoltage protection component |
US9142353B2 (en) | 2011-07-08 | 2015-09-22 | Kemet Electronics Corporation | Discharge capacitor |
TWI517227B (zh) * | 2012-02-24 | 2016-01-11 | Amazing Microelectronic Corp | Planetary Discharge Microchannel Structure and Its Making Method |
US9849376B2 (en) * | 2012-05-02 | 2017-12-26 | Microsoft Technology Licensing, Llc | Wireless controller |
DE102013012842A1 (de) | 2013-08-02 | 2015-02-05 | Epcos Ag | Verfahren zur Herstellung einer Vielzahl von Ableitern im Verbund, Ableiter und Ableiterverbund |
CN106463912B (zh) * | 2014-05-09 | 2018-07-06 | 株式会社村田制作所 | 静电放电保护设备 |
DE102015116278A1 (de) * | 2015-09-25 | 2017-03-30 | Epcos Ag | Überspannungsschutzbauelement und Verfahren zur Herstellung eines Überspannungsschutzbauelements |
KR102218896B1 (ko) | 2015-11-16 | 2021-02-24 | 삼성전기주식회사 | 정전기 방전 보호용 조성물 및 이 조성물을 이용한 정전기 방전 보호 소자 |
US9953749B2 (en) * | 2016-08-30 | 2018-04-24 | Samsung Electro-Mechanics Co., Ltd. | Resistor element and resistor element assembly |
CN108366480A (zh) * | 2018-01-05 | 2018-08-03 | 东莞久尹电子有限公司 | 静电保护元件及其制造方法 |
US10741313B1 (en) * | 2019-02-06 | 2020-08-11 | Eaton Intelligent Power Limited | Bus bar assembly with integrated surge arrestor |
CN114765085A (zh) * | 2021-01-11 | 2022-07-19 | 国巨电子(中国)有限公司 | 点火器电阻及其制造方法 |
JP2022185854A (ja) * | 2021-06-03 | 2022-12-15 | Tdk株式会社 | 過渡電圧保護デバイス |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2008085284A (ja) | 2006-09-28 | 2008-04-10 | Inpaq Technology Co Ltd | 過電圧保護素子の材料、過電圧保護素子およびその製造方法 |
WO2009008944A2 (en) * | 2007-07-09 | 2009-01-15 | Siemens Energy, Inc. | Turbine airfoil cooling system with rotor impingement cooling |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE19741658A1 (de) * | 1997-09-16 | 1999-03-18 | Siemens Ag | Gasgefüllte Entladungsstrecke |
JP4140173B2 (ja) * | 2000-05-31 | 2008-08-27 | 三菱マテリアル株式会社 | チップ型サージアブソーバおよびその製造方法 |
JP2005276666A (ja) * | 2004-03-25 | 2005-10-06 | Mitsubishi Materials Corp | サージアブソーバ |
TW200625743A (en) * | 2004-07-15 | 2006-07-16 | Mitsubishi Materials Corp | Surge absorber |
CN101536275B (zh) * | 2006-10-31 | 2012-05-30 | 松下电器产业株式会社 | 防静电部件及其制造方法 |
JP4247581B2 (ja) * | 2007-05-28 | 2009-04-02 | 株式会社村田製作所 | Esd保護デバイス |
JP2009152348A (ja) | 2007-12-20 | 2009-07-09 | Panasonic Corp | 静電気対策部品 |
WO2009098944A1 (ja) * | 2008-02-05 | 2009-08-13 | Murata Manufacturing Co., Ltd. | Esd保護デバイス |
-
2010
- 2010-09-29 KR KR1020127007528A patent/KR101392455B1/ko active IP Right Grant
- 2010-09-29 EP EP10820552.7A patent/EP2447959B1/en active Active
- 2010-09-29 CN CN201080042985.4A patent/CN102576586B/zh active Active
- 2010-09-29 JP JP2011534267A patent/JP5310863B2/ja active Active
- 2010-09-29 WO PCT/JP2010/066905 patent/WO2011040437A1/ja active Application Filing
-
2012
- 2012-02-29 US US13/407,790 patent/US8421582B2/en active Active
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2008085284A (ja) | 2006-09-28 | 2008-04-10 | Inpaq Technology Co Ltd | 過電圧保護素子の材料、過電圧保護素子およびその製造方法 |
WO2009008944A2 (en) * | 2007-07-09 | 2009-01-15 | Siemens Energy, Inc. | Turbine airfoil cooling system with rotor impingement cooling |
Non-Patent Citations (1)
Title |
---|
See also references of EP2447959A4 |
Cited By (28)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103650267A (zh) * | 2011-07-15 | 2014-03-19 | 株式会社村田制作所 | Esd保护装置及其制造方法 |
US9386673B2 (en) | 2011-07-15 | 2016-07-05 | Murata Manufacturing Co., Ltd. | ESD protection device and method for producing same |
WO2013011821A1 (ja) * | 2011-07-15 | 2013-01-24 | 株式会社村田製作所 | Esd保護デバイスおよびその製造方法 |
KR101555047B1 (ko) * | 2011-07-15 | 2015-09-23 | 가부시키가이샤 무라타 세이사쿠쇼 | Esd 보호 디바이스 및 그 제조방법 |
US9368253B2 (en) | 2011-09-14 | 2016-06-14 | Murata Manufacturing Co., Ltd. | ESD protection device and method for producing the same |
WO2013038893A1 (ja) * | 2011-09-14 | 2013-03-21 | 株式会社村田製作所 | Esd保護デバイスおよびその製造方法 |
WO2013038892A1 (ja) * | 2011-09-14 | 2013-03-21 | 株式会社村田製作所 | Esd保護デバイスおよびその製造方法 |
US9117834B2 (en) | 2011-09-14 | 2015-08-25 | Murata Manufacturing Co., Ltd. | ESD protection device and method for producing the same |
KR101540388B1 (ko) * | 2011-09-14 | 2015-07-29 | 가부시키가이샤 무라타 세이사쿠쇼 | Esd 보호 디바이스 및 그 제조방법 |
US9209619B2 (en) | 2011-10-28 | 2015-12-08 | Epcos Ag | ESD protection component and component comprising an ESD protection component and an LED |
WO2013115054A1 (ja) * | 2012-01-30 | 2013-08-08 | 株式会社村田製作所 | Esd保護装置 |
JPWO2013115054A1 (ja) * | 2012-01-30 | 2015-05-11 | 株式会社村田製作所 | Esd保護装置 |
JP5585744B2 (ja) * | 2012-02-29 | 2014-09-10 | 株式会社村田製作所 | Esd保護デバイスおよびその製造方法 |
CN104160567A (zh) * | 2012-02-29 | 2014-11-19 | 株式会社村田制作所 | Esd保护器件及其制造方法 |
KR20140114056A (ko) * | 2012-02-29 | 2014-09-25 | 가부시키가이샤 무라타 세이사쿠쇼 | Esd 보호 디바이스 및 그 제조방법 |
US9374877B2 (en) | 2012-02-29 | 2016-06-21 | Murata Manufacturing Co., Ltd. | ESD protection device and method for producing the same |
US9373954B2 (en) | 2012-02-29 | 2016-06-21 | Murata Manufacturing Co., Ltd. | ESD protection device and method for producing the same |
KR101596909B1 (ko) | 2012-02-29 | 2016-02-23 | 가부시키가이샤 무라타 세이사쿠쇼 | Esd 보호 디바이스 및 그 제조방법 |
WO2013129270A1 (ja) * | 2012-02-29 | 2013-09-06 | 株式会社村田製作所 | Esd保護デバイスおよびその製造方法 |
WO2013129272A1 (ja) * | 2012-02-29 | 2013-09-06 | 株式会社村田製作所 | Esd保護デバイスおよびその製造方法 |
JP5221794B1 (ja) * | 2012-08-09 | 2013-06-26 | 立山科学工業株式会社 | 静電気保護素子とその製造方法 |
WO2014024730A1 (ja) * | 2012-08-09 | 2014-02-13 | 立山科学工業株式会社 | 静電気保護素子とその製造方法 |
JP5884949B2 (ja) * | 2013-07-03 | 2016-03-15 | 株式会社村田製作所 | サージ保護デバイス、その製造方法、および、それを含む電子部品 |
WO2015002045A1 (ja) * | 2013-07-03 | 2015-01-08 | 株式会社村田製作所 | サージ保護デバイス、その製造方法、および、それを含む電子部品 |
JPWO2015002045A1 (ja) * | 2013-07-03 | 2017-02-23 | 株式会社村田製作所 | サージ保護デバイス、その製造方法、および、それを含む電子部品 |
KR101775921B1 (ko) | 2013-07-03 | 2017-09-07 | 가부시키가이샤 무라타 세이사쿠쇼 | 서지 보호 디바이스, 그 제조방법 및 그것을 포함하는 전자부품 |
US9814124B2 (en) | 2013-07-03 | 2017-11-07 | Murata Manufacturing Co., Ltd. | Surge protection device, method for manufacturing the same, and electronic component including the same |
JP2015138932A (ja) * | 2014-01-24 | 2015-07-30 | Tdk株式会社 | 静電気保護部品 |
Also Published As
Publication number | Publication date |
---|---|
EP2447959B1 (en) | 2019-01-02 |
US8421582B2 (en) | 2013-04-16 |
KR20120062821A (ko) | 2012-06-14 |
KR101392455B1 (ko) | 2014-05-07 |
JPWO2011040437A1 (ja) | 2013-02-28 |
JP5310863B2 (ja) | 2013-10-09 |
EP2447959A1 (en) | 2012-05-02 |
CN102576586A (zh) | 2012-07-11 |
US20120169452A1 (en) | 2012-07-05 |
EP2447959A4 (en) | 2013-05-15 |
CN102576586B (zh) | 2015-06-03 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP5310863B2 (ja) | Esd保護デバイスおよびその製造方法 | |
KR101072673B1 (ko) | Esd 보호 디바이스 | |
KR101027092B1 (ko) | Esd 보호 디바이스 | |
JP4984011B2 (ja) | Esd保護デバイスおよびその製造方法 | |
WO2011096335A1 (ja) | Esd保護装置の製造方法及びesd保護装置 | |
TWI487226B (zh) | 靜電放電保護裝置及其製造方法 | |
JP5459295B2 (ja) | Esd保護デバイスおよびその製造方法 | |
JP5561370B2 (ja) | Esd保護デバイスおよびその製造方法 | |
KR20140046072A (ko) | Esd 보호 디바이스 및 그 제조방법 | |
JP6428938B2 (ja) | Esd保護装置 | |
US20160044769A1 (en) | Esd protection device | |
JP5614563B2 (ja) | Esd保護デバイスの製造方法 | |
WO2012050073A1 (ja) | Esd保護デバイス | |
JP5644829B2 (ja) | Esd保護デバイスとその製造方法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
WWE | Wipo information: entry into national phase |
Ref document number: 201080042985.4 Country of ref document: CN |
|
121 | Ep: the epo has been informed by wipo that ep was designated in this application |
Ref document number: 10820552 Country of ref document: EP Kind code of ref document: A1 |
|
WWE | Wipo information: entry into national phase |
Ref document number: 2011534267 Country of ref document: JP |
|
WWE | Wipo information: entry into national phase |
Ref document number: 2010820552 Country of ref document: EP |
|
ENP | Entry into the national phase |
Ref document number: 20127007528 Country of ref document: KR Kind code of ref document: A |
|
NENP | Non-entry into the national phase |
Ref country code: DE |