WO2010109739A1 - 製造装置、製造方法およびパッケージデバイス - Google Patents
製造装置、製造方法およびパッケージデバイス Download PDFInfo
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- WO2010109739A1 WO2010109739A1 PCT/JP2010/000186 JP2010000186W WO2010109739A1 WO 2010109739 A1 WO2010109739 A1 WO 2010109739A1 JP 2010000186 W JP2010000186 W JP 2010000186W WO 2010109739 A1 WO2010109739 A1 WO 2010109739A1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/01—Subjecting similar articles in turn to test, e.g. "go/no-go" tests in mass production; Testing objects at points as they pass through a testing station
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/26—Testing of individual semiconductor devices
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
- H01L22/20—Sequence of activities consisting of a plurality of measurements, corrections, marking or sorting steps
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/013—Alloys
- H01L2924/014—Solder alloys
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/49117—Conductor or circuit manufacturing
- Y10T29/49124—On flat or curved insulated base, e.g., printed circuit, etc.
- Y10T29/4913—Assembling to base an electrical component, e.g., capacitor, etc.
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/49117—Conductor or circuit manufacturing
- Y10T29/49124—On flat or curved insulated base, e.g., printed circuit, etc.
- Y10T29/49147—Assembling terminal to base
- Y10T29/49149—Assembling terminal to base by metal fusion bonding
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/53—Means to assemble or disassemble
- Y10T29/53039—Means to assemble or disassemble with control means energized in response to activator stimulated by condition sensor
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/53—Means to assemble or disassemble
- Y10T29/53039—Means to assemble or disassemble with control means energized in response to activator stimulated by condition sensor
- Y10T29/53061—Responsive to work or work-related machine element
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/53—Means to assemble or disassemble
- Y10T29/5313—Means to assemble electrical device
- Y10T29/5317—Laminated device
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/53—Means to assemble or disassemble
- Y10T29/5313—Means to assemble electrical device
- Y10T29/53174—Means to fasten electrical component to wiring board, base, or substrate
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/53—Means to assemble or disassemble
- Y10T29/5313—Means to assemble electrical device
- Y10T29/53174—Means to fasten electrical component to wiring board, base, or substrate
- Y10T29/53178—Chip component
Definitions
- the present invention relates to a manufacturing apparatus, a manufacturing method, and a package device for manufacturing a device.
- Patent Document 1 Japanese Patent Publication No. 2006-173503 Patent Document 2 Japanese Patent No. 4122102
- an object of one aspect of the present invention is to provide a manufacturing apparatus, a manufacturing method, and a package device that can solve the above-described problems. This object is achieved by a combination of features described in the independent claims.
- the dependent claims define further advantageous specific examples of the present invention.
- a substrate connected to the device terminal at a position corresponding to the device terminal on the substrate, and a detection unit that detects a position of the device terminal of the device
- a manufacturing apparatus and a manufacturing method including a generation unit that generates a side terminal, and a mounting unit that mounts the device on the substrate and connects the device terminal and the substrate side terminal.
- the device includes an electronic circuit, a first substrate on which the device is mounted, and a surface of the first substrate on which the device is mounted. And a flexible second substrate that sandwiches the device therebetween.
- FIG. 1 shows a configuration of a device manufacturing system 10 according to the present embodiment.
- FIG. 2 shows an example of a package device packaged in a test package manufactured in the device manufacturing system 10 according to the present embodiment.
- FIG. 3 shows a processing flow of the device manufacturing system 10 according to the present embodiment.
- FIG. 4 shows a functional configuration of the test packaging unit 14.
- FIG. 5 shows a processing flow of the test packaging unit 14 according to the present embodiment.
- FIG. 6 shows an example of the operation of the test packaging unit 14 from step S21 to step S24 in FIG.
- FIG. 7 shows an example of the operation of the test packaging unit 14 in step S25 of FIG.
- FIG. 8 shows an example of connection between the first device terminal 42 of the device 30 and the first substrate side terminal 52 of the first substrate 32.
- FIG. 1 shows a configuration of a device manufacturing system 10 according to the present embodiment.
- FIG. 2 shows an example of a package device packaged in a test package manufactured in the device manufacturing system 10 according to the present embodiment.
- FIG. 9 shows an example of the operation of the test packaging unit 14 from step S26 to step S32 in FIG.
- FIG. 10 shows an example of the operation of the test packaging unit 14 in step S33 of FIG.
- FIG. 11 shows an example of the connection between the second device terminal 44 of the device 30 and the second substrate side terminal 56 of the second substrate 34.
- FIG. 12 shows an example of connection between the first wiring 54 of the first substrate 32 and the third wiring 62 of the second substrate 34.
- FIG. 13 shows a connection example when the device 30 and the first substrate 32 are connected via the terminal ball 66.
- FIG. 14 shows an example of the test cell 70.
- FIG. 15 shows an example of the cell matrix 80.
- FIG. 1 shows a configuration of a device manufacturing system 10 according to the present embodiment.
- the device manufacturing system 10 manufactures a packaged device from a disk-shaped wafer on which a plurality of devices 30 are formed.
- the device manufacturing system 10 includes a cutout part 12, a test packaging part 14, a test part 16, a removal part 18, and a product packaging part 20.
- the cutout unit 12 cuts out the chip-like device 30 from the wafer on which the plurality of devices 30 having electronic circuits are formed.
- the test packaging unit 14 packages each device 30 cut out by the cutout unit 12 into a test package.
- the test unit 16 tests the device 30 packaged in the test package as a device under test.
- the test unit 16 is, for example, a test apparatus that tests a semiconductor circuit or the like.
- the removal unit 18 removes the tested device 30 from the test package.
- the product packaging unit 20 packages the device 30 removed from the test package into a product package.
- FIG. 2 shows an example of the test package device 28.
- the test package device 28 includes a chip-shaped device 30, a first substrate 32, and a second substrate 34.
- the first substrate 32 has a chip-like device 30 mounted thereon.
- the second substrate 34 is a flexible substrate.
- the second substrate 34 is stacked on the surface of the first substrate 32 on which the device 30 is mounted, and the device 30 is sandwiched between the second substrate 34 and the first substrate 32.
- Such a package device 28 is easier to handle than the case of a single chip because the device 30 is housed between two substrates.
- the package device 28 can be handled by a test apparatus or the like for testing a device packaged in a product package.
- FIG. 3 shows a processing flow of the device manufacturing system 10 according to the present embodiment.
- the cutting unit 12 cuts out each chip-shaped device 30 from the wafer on which the plurality of devices 30 are formed.
- step S ⁇ b> 12 the test packaging unit 14 individually packages each chip-shaped device 30 cut out in step S ⁇ b> 11 into a test package generated for each device 30.
- the test packaging unit 14 seals the device 30 in the test package.
- the test packaging unit 14 sucks the gas between the first substrate 32 and the second substrate 34, at least one of which is a flexible substrate, and thereby the first substrate 32 and the first substrate 32.
- the device 30 is sealed between the two substrates 34.
- the test packaging unit 14 causes the second substrate 34, which is a flexible substrate, to be vacuum-sucked or vacuum-sucked to the first substrate 32 and the device 30.
- test packaging unit 14 presses the second substrate 34, which is a flexible substrate, against the first substrate 32 by tension, so that the first substrate 32 and the second substrate 34 are pressed.
- the device 30 may be sandwiched. Details of the packaging method in step S12 will be further described in FIG.
- step S ⁇ b> 13 the test packaging unit 14 attaches the device 30 packaged in the test package to a test substrate for connecting the external device and the device 30. If the external device can directly exchange signals with the device 30 packaged in the test package, the external device may not be attached to the test substrate.
- step S14 the test unit 16 transmits / receives a signal to / from the device 30 via the test substrate, and tests the device 30 packaged in the test package.
- the test unit 16 may test the plurality of devices 30 in parallel. Thereby, the test unit 16 can improve the throughput of the test.
- step S15 the removal unit 18 removes the tested device 30 from the test package. If the device 30 is sealed between the first substrate 32 and the second substrate 34, the detaching unit 18, as an example, puts gas between the first substrate 32 and the second substrate 34 to remove from the test package. The device 30 is removed.
- the detaching unit 18 removes the device 30 determined to be a product as a result of the test in step S14 from the test package. Furthermore, the detaching unit 18 discards the test package from which the device 30 is removed, as an example.
- step S16 the product packaging unit 20 packages the device 30 removed from the test package into the product package.
- the product packaging unit 20 packages a device 30 that is determined to be a product as a result of the test into a product package.
- the product packaging unit 20 may package two or more devices 30 individually tested in one product package.
- the product packaging unit 20 may three-dimensionally mount two or more devices 30 cut out from one or two or more wafers.
- the product packaging unit 20 may mount such two or more devices 30 on a multichip module and package them in a product package.
- the device manufacturing system 10 tests each device 30 cut out from the wafer by packaging it in a test package. Therefore, the device manufacturing system 10 can perform the test performed on the device 30 in the state before being cut out from the wafer on the device 30 in the chip state. Thereby, according to the device manufacturing system 10, it is possible to eliminate the wafer test and reduce the test cost.
- FIG. 4 shows a functional configuration of the test packaging unit 14.
- the test packaging unit 14 includes a detection unit 22, a generation unit 24, and a mounting unit 26.
- the detection unit 22 detects the position of the device terminal of the chip-like device 30.
- the detection unit 22 includes a handling device 36, an imaging device 37, and a data processing device 38.
- the handling device 36 sucks and handles the device 30.
- the imaging device 37 images the surface of the device 30 handled by the handling device 36.
- the data processing device 38 detects the position of the device terminal formed on the surface of the device 30 from the captured image captured by the imaging device 37.
- the generation unit 24 generates a substrate-side terminal connected to the device terminal at a position corresponding to the device terminal detected by the detection unit 22 on the substrate on which the test package is formed. Further, as an example, the generation unit 24 generates an external terminal for connecting an external device to the substrate on which the test package is formed. Furthermore, the generation unit 24 generates a wiring that connects the external terminal and the board-side terminal.
- the generation unit 24 includes a printing apparatus 40 as an example.
- the printing apparatus 40 sprays a conductive material onto the substrate and prints a specified pattern on the substrate. Thereby, the printing apparatus 40 can generate the board-side terminal, the external terminal, and the wiring on the board.
- the mounting unit 26 mounts the chip-shaped device 30 on the substrate and connects the device terminal and the substrate-side terminal.
- FIG. 5 shows a processing flow of the test packaging unit 14 according to the present embodiment.
- 6 shows an operation example from steps S21 to S24 in FIG. 5
- FIG. 7 shows an operation example in step S25 in FIG.
- FIG. 8 shows an example of connection between the device 30 and the first substrate 32.
- FIG. 9 shows an operation example from steps S26 to S32 in FIG. 5
- FIG. 10 shows an operation example in step S33 in FIG.
- FIGS. 11 and 12 show connection examples of the device 30, the first substrate 32, and the second substrate 34.
- step S ⁇ b> 21 for example, as illustrated in FIG. 6, the detection unit 22 handles the device 30 with the handling device 36.
- the handling device 36 sucks and handles the device 30 from the second surface side.
- the handling apparatus 36 can handle the device 30 with the first surface exposed.
- step S ⁇ b> 22 the detection unit 22 captures an image of the first surface of the device 30 by the imaging device 37 while handling the device 30. Then, the detection unit 22 detects the position of the first device terminal 42 formed on the first surface of the device 30 from the imaging screen captured by the imaging device 37 by the data processing device 38.
- step S23 for example, as illustrated in FIG. 6, the generation unit 24 causes the printing device 40 to place the first device terminal 42 at a position corresponding to the first device terminal 42 of the device 30 on the first substrate 32.
- the pattern of the first board side terminal 52 connected to the is printed.
- step S24 for example, as illustrated in FIG. 6, the generation unit 24 generates a pattern of the first wiring 54 that makes the predetermined position and the first substrate side terminal 52 conductive by the printing device 40. Printing on the first substrate 32.
- the first wiring 54 is a wiring for connecting the first device terminal 42 to a wiring pattern on the second substrate 34 connected to the external terminal 58.
- the mounting unit 26 mounts the device 30 on the first substrate 32, for example, as shown in FIG.
- the mounting unit 26 contacts and connects the first device terminal 42 of the device 30 and the first substrate side terminal 52 of the first substrate 32 as shown in FIG. 8, for example. Accordingly, the mounting unit 26 can electrically connect the first wiring 54 formed on the first substrate 32 and the first device terminal 42 of the device 30 via the first substrate-side terminal 52.
- step S25 the mounting unit 26 mounts the device 30 on the first substrate 32 while maintaining the handling in step S21 (that is, without releasing the device 30 handled in step S21). Thereby, since the relative position of the first surface of the device 30 with respect to the handling device 36 does not shift between the time of detection and the time of mounting, the mounting unit 26 connects the first device terminal 42 and the first board side terminal 52. Can be contacted accurately.
- step S25 the mounting unit 26 mounts the device 30 on the first substrate 32 so that the device 30 can be removed after mounting. For example, when the device 30 is detached from the first substrate 32, the mounting unit 26 adheres with an adhesive force that does not damage the device 30.
- step S26 for example, as shown in FIG. 9, the detection unit 22 handles the device 30 mounted on the first substrate 32 by the handling device 36.
- the handling device 36 adsorbs and handles the first substrate 32 from the side where the device 30 is not mounted.
- the handling device 36 can handle the device 30 with the second surface of the device 30 exposed.
- step S27 for example, as illustrated in FIG. 9, the detection unit 22 causes the imaging device 37 to mount the device 30 on the first substrate 32 and handle the device 30 on the second surface side. Image. Then, the detection unit 22 detects the position of the second device terminal 44 formed on the second surface side of the device 30 from the imaging screen by the imaging device 37 by the data processing device 38. Subsequently, in step S ⁇ b> 28, the detection unit 22 detects the position of the first wiring 54 printed on the first substrate 32 from the imaging screen by the imaging device 37 by the data processing device 38.
- step S ⁇ b> 29 the generation unit 24 causes the printing device 40 to place the second device terminal 44 at a position corresponding to the second device terminal 44 of the device 30 on the second substrate 34.
- the pattern of the second board side terminal 56 connected to the is printed.
- step S ⁇ b> 30 for example, as illustrated in FIG. 9, the generation unit 24 prints a pattern of the external terminal 58 that connects an external device to the second substrate 34 using the printing device 40.
- the external terminal 58 is connected to a through wiring penetrating the second substrate 34 as an example. Thereby, the external terminal 58 can connect an external apparatus to the 2nd board
- the external terminal 58 may be provided on the second substrate 34 in advance. In this case, the process of step S30 is not performed. In the present embodiment, the external terminal 58 is provided on the second substrate 34 in advance.
- the external terminal 58 is a penetrating terminal that can be connected from both the upper surface and the lower surface of the second substrate 34.
- step S ⁇ b> 31 for example, as illustrated in FIG. 9, the generation unit 24 prints the pattern of the second wiring 60 between the external terminal 58 and the second substrate side terminal 56 using the printing device 40.
- step S32 for example, as illustrated in FIG. 9, the generation unit 24 uses the printing device 40 to determine the position corresponding to the first wiring 54 connected to the first device terminal 42 on the first substrate 32, and The pattern of the third wiring 62 between the external terminals 58 is printed on the second substrate 34.
- the printing apparatus 40 prints a pattern of the third wiring 62 between the position corresponding to the first wiring 54 and the external terminal 58 to which the second wiring 60 is not connected.
- the arrangement interval between the plurality of external terminals 58 is wider than the arrangement interval between the first device terminal 42 and the second device terminal 44 in the device 30. Thereby, an external device can be easily connected to the second substrate 34.
- step S33 for example, as shown in FIG. 10, the mounting unit 26 is attached to the second substrate 34 on the first substrate 32 on which the device 30 is mounted. More specifically, the mounting unit 26 sandwiches the device 30 between the first substrate 32 and the second substrate 34 by overlapping the second substrate 34 on the surface of the first substrate 32 on which the device 30 is mounted. 30 is connected to the first substrate 32 and the second substrate 34. The mounting unit 26 seals the device 30 between the first substrate 32 and the second substrate 34.
- the mounting unit 26 sucks the gas between the first substrate 32 and the second substrate 34 and places the device 30 between the first substrate 32 and the second substrate 34. Is sealed. Further, for example, the mounting unit 26 presses the second substrate 34 that is a flexible substrate against the other first substrate 32 by tension, and sandwiches the device 30 between the first substrate 32 and the second substrate 34. But you can.
- step S33 the mounting unit 26 contacts and connects the second device terminal 44 of the device 30 and the second substrate side terminal 56 of the second substrate 34 as shown in FIG. 11, for example. Accordingly, the mounting unit 26 electrically connects the external terminal 58 formed on the second substrate 34 and the second device terminal 44 of the device 30 via the second substrate side terminal 56 and the second wiring 60. be able to.
- step S33 the mounting unit 26 contacts and connects the first wiring 54 on the first substrate 32 and the third wiring 62 on the second substrate 34, for example, as shown in FIG.
- the mounting unit 26 connects the external terminal 58 formed on the second substrate 34 and the first device terminal 42 of the device 30 via the third wiring 62, the first wiring 54, and the first substrate side terminal 52. It can be electrically connected.
- step S33 the mounting unit 26 mounts the device 30 on the second substrate 34 while maintaining the handling in step S26 (that is, without releasing the device 30 handled in step S26).
- the mounting unit 26 since the relative position of the second surface of the device 30 with respect to the handling device 36 does not shift between the time of detection and the time of mounting, the mounting unit 26 includes the second device terminal 44, the second board side terminal 56, and The first wiring 54 and the third wiring 62 can be brought into contact with each other accurately.
- step S33 the mounting unit 26 mounts the device 30 on the second substrate 34 so that the device 30 can be removed after mounting.
- the mounting portion 26 adheres with an adhesive force that does not damage the device 30.
- the test packaging unit 14 overlaps the first substrate 32 by overlapping the device 30, the first substrate 32 on which the device 30 is mounted, and the surface of the first substrate 32 on which the device 30 is mounted. It is possible to manufacture a test package device 28 including a flexible second substrate 34 that sandwiches the device 30 therebetween. That is, the test packaging unit 14 can function as a manufacturing apparatus for manufacturing the device 30 packaged in the test package.
- the test packaging unit 14 can package the device 30 so that the test apparatus can easily handle the device 30. Further, the test packaging unit 14 can send and receive signals from the test apparatus to the device 30 via the first substrate 32 and the second substrate 34 that form the test package. Thereby, according to the test packaging unit 14, the device after being cut out from the wafer can be tested by the test apparatus before product packaging.
- FIG. 13 shows a connection example in the case where the device 30 and the first substrate 32 are connected via the terminal ball 66.
- the generation unit 24 arranges the conductive terminal balls 66 to be the first substrate side terminal 52 at the position corresponding to the first device terminal 42 on the first substrate 32. Good.
- Such a terminal ball 66 is sandwiched between the device 30 and the first substrate 32 and functions as the first substrate-side terminal 52 when the device 30 is mounted on the first substrate 32.
- the terminal ball 66 may be a spherical spacer as shown in Japanese Patent No. 3140995.
- the generation unit 24 can reliably establish conduction between the device 30 and the first substrate 32 by generating the first substrate-side terminal 52 using the terminal ball 66.
- the mounting unit 26 may arrange terminal balls 66 to be the second substrate side terminals 56 at positions corresponding to the second device terminals 44 on the second substrate 34. Accordingly, the generation unit 24 can form the second substrate side terminal 56 on the second substrate 34 by mounting the device 30 on the second substrate 34.
- FIG. 14 shows an example of the test cell 70.
- the test packaging unit 14 attaches the device 30 packaged in the test package to the test board 72 to generate the test cell 70.
- the test cell 70 includes the device 30 packaged in a test package, a test board 72, and at least one temperature control unit 74.
- the test board 72 is electrically connected to an external terminal 58 of the test package (in this example, the external terminal 58 included in the second substrate 34).
- the test board 72 is a substrate for exchanging signals between an external test apparatus and the device 30.
- the test board 72 is provided with a test circuit 76 such as a circuit for inputting / outputting signals to / from the device 30 and a circuit for inputting / outputting signals to / from an external test apparatus.
- the temperature controller 74 is an overheating or cooling member for controlling the device 30 in the test package to a predetermined temperature.
- the test cell 70 includes two temperature control units 74 provided so as to sandwich the device 30 therebetween. Thereby, the temperature control unit 74 can maintain the entire device 30 at a specified temperature. Such a test cell 70 can make connection between the test apparatus and the device 30 easier.
- FIG. 15 shows an example of the cell matrix 80.
- the cell matrix 80 includes a plurality of test cells 70 combined in a three-dimensional matrix.
- the device 30 can be handled easily, and the test throughput can be improved.
- 10 device manufacturing system 12 cutting unit, 14 testing packaging unit, 16 testing unit, 18 removal unit, 20 product packaging unit, 22 detection unit, 24 generation unit, 26 mounting unit, 28 packaging device, 30 device, 32 1st board, 34 2nd board, 36 handling device, 37 imaging device, 38 data processing device, 40 printing device, 42 1st device terminal, 44 2nd device terminal, 52 1st substrate side terminal, 54 1st wiring 56, second substrate side terminal, 58 external terminal, 60 second wiring, 62 third wiring, 66 terminal ball, 70 test cell, 72 test board, 74 temperature control unit, 76 test circuit, 80 cell matrix
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
- Packaging Frangible Articles (AREA)
Abstract
Description
特許文献1 日本国特許公開公報 特開2006-173503号
特許文献2 日本国特許第4122102号明細書
Claims (17)
- デバイスが有するデバイス端子の位置を検出する検出部と、
基板における前記デバイス端子に応じた位置に、前記デバイス端子に接続する基板側端子を生成する生成部と、
前記デバイスを前記基板に実装して前記デバイス端子と前記基板側端子とを接続させる実装部と、
を備える製造装置。 - 前記検出部は、前記デバイスを撮像して撮像画像から前記デバイス端子の位置を検出する請求項1に記載の製造装置。
- 前記生成部は、前記基板における前記デバイス端子に応じた位置に、前記基板側端子のパターンをプリントする請求項1または2に記載の製造装置。
- 前記生成部は、前記基板における前記デバイス端子に応じた位置に、前記基板側端子となる導電性の端子ボールを並べる請求項1から3のいずれかに記載の製造装置。
- 前記生成部は、外部の装置を前記基板に接続する外部端子と前記基板側端子との間の配線のパターンをプリントする請求項1から4のいずれかに記載の製造装置。
- 前記生成部は、前記外部端子を更にプリントする請求項5に記載の製造装置。
- 前記生成部は、基板に予め設けられた前記外部端子と前記基板側端子との間の前記配線のパターンをプリントする請求項5に記載の製造装置。
- 前記生成部は、第1基板における前記デバイスの第1デバイス端子に応じた位置に、前記第1デバイス端子に接続する第1基板側端子を生成し、第2基板における前記デバイスの第2デバイス端子に応じた位置に、前記第2デバイス端子に接続する第2基板側端子を生成し、
前記実装部は、前記第1基板および前記第2基板の間に前記デバイスを挟みこんで、前記デバイスを前記第1基板および前記第2基板に接続させる
請求項1から7のいずれかに記載の製造装置。 - 前記第1基板および前記第2基板の少なくとも一方は、フレキシブル基板であり、
前記実装部は、前記第1基板および前記第2基板の間の気体を吸引して、前記第1基板および前記第2基板の間に前記デバイスを封止する
請求項8に記載の製造装置。 - 前記第1基板および前記第2基板の少なくとも一方は、フレキシブル基板であり、
前記実装部は、前記フレキシブル基板を他方の基板に対して張力により押し付けて、前記第1基板および前記第2基板の間に前記デバイスを挟みこむ
請求項8に記載の製造装置。 - 前記生成部は、前記第1基板における前記第1デバイス端子に応じた位置に、前記第1デバイス端子に接続する前記第1基板側端子を生成し、
前記実装部は、前記デバイスを前記第1基板に実装して前記第1デバイス端子と前記第1基板側端子とを接続させ、
前記検出部は、前記デバイスが前記第1基板に実装された状態で、前記第2デバイス端子の位置を検出し、
前記生成部は、前記第2基板における前記第2デバイス端子に応じた位置に、前記第2デバイス端子に接続する第2基板側端子を生成し、
前記実装部は、前記第1基板における前記デバイスが実装された面に前記第2基板を重ねることにより前記第1基板および前記第2基板の間に前記デバイスを挟みこんで、前記デバイスを前記第1基板および前記第2基板に接続させる
請求項8から10のいずれかに記載の製造装置。 - 前記実装部は、前記第1基板および前記第2基板の間に前記デバイスを封止することにより試験用パッケージにパッケージングし、
前記試験用パッケージにパッケージングした前記デバイスを試験した後に、前記第1基板および前記第2基板の間に気体を入れて前記試験用パッケージから前記デバイスを取り外す
請求項8から11のいずれかに記載の製造装置。 - 前記生成部は、外部の装置を前記第2基板に接続する外部端子に接続された第2基板上のパターンに、前記第1デバイス端子を接続するパターンの少なくとも一部を前記第1基板にプリントし、
前記実装部は、前記第1基板における前記第1デバイス端子に接続されたパターンと、前記第2基板における前記外部端子に接続されたパターンとを接触させて、前記第1デバイス端子を前記第2基板上の前記外部端子に接続させる
請求項8から12のいずれかに記載の製造装置。 - 前記実装部は、前記デバイスを前記基板に実装することにより、前記デバイスを試験するための試験用パッケージにパッケージングし、
試験済の前記デバイスを前記試験用パッケージから取り外す取外し部と、
前記試験用パッケージから取り外した前記デバイスを製品パッケージにパッケージングする製品パッケージング部と、
を更に備える請求項1から13のいずれかに記載の製造装置。 - パッケージされたデバイスを製造する製造方法であって、
前記デバイスが有するデバイス端子の位置を検出する検出段階と、
パッケージ用の基板における前記デバイス端子に応じた位置に、前記デバイス端子に接続する基板側端子を生成する生成段階と、
前記デバイスを前記基板に実装して前記デバイス端子と前記基板側端子とを接続させることにより、外部の装置に接続される外部端子と前記デバイス端子とを前記基板側端子を介して導通させるパッケージング段階と、
を備える製造方法。 - 電子回路を有するデバイスと、
前記デバイスを搭載する第1基板と、
前記第1基板における前記デバイスが実装された面に重ねられて、前記第1基板との間に前記デバイスを挟みこむフレキシブルな第2基板と、
を備えるパッケージデバイス。 - 前記第2基板は、前記第1基板および前記デバイスに対して真空吸着または減圧吸着される請求項16に記載のパッケージデバイス。
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JP2011505817A JPWO2010109739A1 (ja) | 2009-03-27 | 2010-01-15 | 製造装置、製造方法およびパッケージデバイス |
KR1020117020330A KR101316049B1 (ko) | 2009-03-27 | 2010-01-15 | 제조 장치, 제조 방법 및 패키지 디바이스 |
CN2010800134078A CN102362187A (zh) | 2009-03-27 | 2010-01-15 | 制造装置、制造方法及封装器件 |
US13/208,352 US8667669B2 (en) | 2009-03-27 | 2011-08-12 | Apparatus and method for manufacturing a packaged device |
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Cited By (3)
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US8970243B2 (en) | 2011-04-20 | 2015-03-03 | Advantest Corporation | Test carrier and board assembly |
US8994394B2 (en) | 2011-04-20 | 2015-03-31 | Advantest Corporation | Test carrier |
US9120335B2 (en) | 2012-08-30 | 2015-09-01 | Advantest Corporation | Pattern printing apparatus, pattern printing method, and test apparatus |
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US20120205143A1 (en) | 2012-08-16 |
US8667669B2 (en) | 2014-03-11 |
KR101316049B1 (ko) | 2013-10-07 |
TW201036084A (en) | 2010-10-01 |
CN102362187A (zh) | 2012-02-22 |
JPWO2010109739A1 (ja) | 2012-09-27 |
KR20110111522A (ko) | 2011-10-11 |
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