WO2009057262A1 - 不揮発性半導体記憶装置およびその製造方法 - Google Patents
不揮発性半導体記憶装置およびその製造方法 Download PDFInfo
- Publication number
- WO2009057262A1 WO2009057262A1 PCT/JP2008/002992 JP2008002992W WO2009057262A1 WO 2009057262 A1 WO2009057262 A1 WO 2009057262A1 JP 2008002992 W JP2008002992 W JP 2008002992W WO 2009057262 A1 WO2009057262 A1 WO 2009057262A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- wiring
- storage device
- nonvolatile semiconductor
- semiconductor storage
- manufacturing
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B63/00—Resistance change memory devices, e.g. resistive RAM [ReRAM] devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier
- H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being a semiconductor body
- H01L27/10—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being a semiconductor body including a plurality of individual components in a repetitive configuration
- H01L27/102—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being a semiconductor body including a plurality of individual components in a repetitive configuration including bipolar components
- H01L27/1021—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being a semiconductor body including a plurality of individual components in a repetitive configuration including bipolar components including diodes only
Abstract
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN2008801142939A CN101842897B (zh) | 2007-10-30 | 2008-10-22 | 非易失性半导体存储装置和其制造方法 |
US12/738,778 US8253136B2 (en) | 2007-10-30 | 2008-10-22 | Nonvolatile semiconductor memory device and manufacturing method thereof |
JP2009538914A JP5284270B2 (ja) | 2007-10-30 | 2008-10-22 | 不揮発性半導体記憶装置およびその製造方法 |
US13/485,203 US8389990B2 (en) | 2007-10-30 | 2012-05-31 | Nonvolatile semiconductor memory device and manufacturing method thereof |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007281181 | 2007-10-30 | ||
JP2007-281181 | 2007-10-30 |
Related Child Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US12/738,778 A-371-Of-International US8253136B2 (en) | 2007-10-30 | 2008-10-22 | Nonvolatile semiconductor memory device and manufacturing method thereof |
US13/485,203 Division US8389990B2 (en) | 2007-10-30 | 2012-05-31 | Nonvolatile semiconductor memory device and manufacturing method thereof |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2009057262A1 true WO2009057262A1 (ja) | 2009-05-07 |
Family
ID=40590669
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/JP2008/002992 WO2009057262A1 (ja) | 2007-10-30 | 2008-10-22 | 不揮発性半導体記憶装置およびその製造方法 |
Country Status (4)
Country | Link |
---|---|
US (2) | US8253136B2 (ja) |
JP (1) | JP5284270B2 (ja) |
CN (1) | CN101842897B (ja) |
WO (1) | WO2009057262A1 (ja) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2013058691A (ja) * | 2011-09-09 | 2013-03-28 | Renesas Electronics Corp | 不揮発性半導体記憶装置及びその製造方法 |
US8450182B2 (en) | 2010-01-25 | 2013-05-28 | Panasonic Corporation | Method of manufacturing non-volatile semiconductor memory element and method of manufacturing non-volatile semiconductor memory device |
JP2015517221A (ja) * | 2012-04-19 | 2015-06-18 | カーネギー−メロン ユニバーシティCarnegie−Mellon University | 金属−半導体−金属(msm)ヘテロジャンクションダイオード |
Families Citing this family (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101878529B (zh) * | 2007-11-29 | 2012-07-04 | 松下电器产业株式会社 | 非易失性存储装置及其制造方法 |
US8017514B2 (en) * | 2008-05-05 | 2011-09-13 | International Business Machines Corporation | Optically transparent wires for secure circuits and methods of making same |
JP2011066347A (ja) * | 2009-09-18 | 2011-03-31 | Toshiba Corp | 半導体記憶装置 |
CN102709469A (zh) * | 2011-03-28 | 2012-10-03 | 中芯国际集成电路制造(上海)有限公司 | 相变存储器的形成方法 |
KR20130071006A (ko) * | 2011-12-20 | 2013-06-28 | 삼성전자주식회사 | 가변 저항 메모리 장치 및 그 형성 방법 |
CN103377899A (zh) * | 2012-04-25 | 2013-10-30 | 中芯国际集成电路制造(上海)有限公司 | 金属栅极制造方法和cmos制造方法 |
WO2014039550A1 (en) | 2012-09-04 | 2014-03-13 | Carnegie Mellon University | A hot-electron transistor having metal terminals |
JP2014082279A (ja) * | 2012-10-15 | 2014-05-08 | Panasonic Corp | 不揮発性記憶装置及びその製造方法 |
TWI500135B (zh) * | 2012-12-10 | 2015-09-11 | Ind Tech Res Inst | 堆疊式功率元件模組 |
CN103296051A (zh) * | 2013-05-30 | 2013-09-11 | 清华大学 | 具有肖特基势垒结构的阻变存储单元及其形成方法 |
US9112148B2 (en) | 2013-09-30 | 2015-08-18 | Taiwan Semiconductor Manufacturing Co., Ltd. | RRAM cell structure with laterally offset BEVA/TEVA |
US9276057B2 (en) * | 2014-01-27 | 2016-03-01 | United Microelectronics Corp. | Capacitor structure and method of manufacturing the same |
US9178144B1 (en) | 2014-04-14 | 2015-11-03 | Taiwan Semiconductor Manufacturing Co., Ltd. | RRAM cell with bottom electrode |
US9209392B1 (en) | 2014-10-14 | 2015-12-08 | Taiwan Semiconductor Manufacturing Co., Ltd. | RRAM cell with bottom electrode |
KR102468257B1 (ko) * | 2016-08-08 | 2022-11-18 | 에스케이하이닉스 주식회사 | 전자 장치 및 그 제조 방법 |
US20180138292A1 (en) * | 2016-11-11 | 2018-05-17 | Sandisk Technologies Llc | Methods and apparatus for three-dimensional nonvolatile memory |
JP2019114698A (ja) | 2017-12-25 | 2019-07-11 | 東芝メモリ株式会社 | 半導体記憶装置及びその製造方法 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2005522045A (ja) * | 2002-04-04 | 2005-07-21 | 株式会社東芝 | 相変化メモリ装置 |
JP2005217402A (ja) * | 2004-01-27 | 2005-08-11 | Hewlett-Packard Development Co Lp | 自動位置合わせされた整流素子を用いるナノメートルスケールのメモリデバイスおよびその作成方法 |
JP2007184086A (ja) * | 2006-01-04 | 2007-07-19 | Samsung Electronics Co Ltd | 相変化メモリ装置 |
JP2007281208A (ja) * | 2006-04-07 | 2007-10-25 | Matsushita Electric Ind Co Ltd | 多層抵抗変化素子アレイ、抵抗変化装置、多層不揮発性記憶素子アレイ、及び不揮発性記憶装置 |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2739855B2 (ja) * | 1995-12-14 | 1998-04-15 | 日本電気株式会社 | 半導体装置およびその製造方法 |
JPH11214521A (ja) * | 1998-01-22 | 1999-08-06 | Mitsubishi Electric Corp | 半導体集積回路および半導体集積回路の製造方法 |
US6531371B2 (en) | 2001-06-28 | 2003-03-11 | Sharp Laboratories Of America, Inc. | Electrically programmable resistance cross point memory |
US6753561B1 (en) * | 2002-08-02 | 2004-06-22 | Unity Semiconductor Corporation | Cross point memory array using multiple thin films |
JP2004319587A (ja) * | 2003-04-11 | 2004-11-11 | Sharp Corp | メモリセル、メモリ装置及びメモリセル製造方法 |
KR100773537B1 (ko) | 2003-06-03 | 2007-11-07 | 삼성전자주식회사 | 한 개의 스위칭 소자와 한 개의 저항체를 포함하는비휘발성 메모리 장치 및 그 제조 방법 |
JP2005285796A (ja) | 2004-03-26 | 2005-10-13 | Sharp Corp | 半導体集積回路装置の製造方法、および半導体集積回路装置 |
KR100593750B1 (ko) | 2004-11-10 | 2006-06-28 | 삼성전자주식회사 | 이성분계 금속 산화막을 데이터 저장 물질막으로 채택하는교차점 비휘발성 기억소자 및 그 제조방법 |
KR100657911B1 (ko) * | 2004-11-10 | 2006-12-14 | 삼성전자주식회사 | 한 개의 저항체와 한 개의 다이오드를 지닌 비휘발성메모리 소자 |
KR100697282B1 (ko) | 2005-03-28 | 2007-03-20 | 삼성전자주식회사 | 저항 메모리 셀, 그 형성 방법 및 이를 이용한 저항 메모리배열 |
US20070132049A1 (en) * | 2005-12-12 | 2007-06-14 | Stipe Barry C | Unipolar resistance random access memory (RRAM) device and vertically stacked architecture |
KR100791074B1 (ko) * | 2006-08-23 | 2008-01-02 | 삼성전자주식회사 | 귀금속을 함유하는 장벽막을 갖는 콘택 구조체, 이를채택하는 강유전체 메모리 소자 및 그 제조방법들 |
KR100909537B1 (ko) * | 2007-09-07 | 2009-07-27 | 주식회사 동부하이텍 | 반도체 소자 및 그 제조 방법 |
-
2008
- 2008-10-22 CN CN2008801142939A patent/CN101842897B/zh not_active Expired - Fee Related
- 2008-10-22 WO PCT/JP2008/002992 patent/WO2009057262A1/ja active Application Filing
- 2008-10-22 JP JP2009538914A patent/JP5284270B2/ja not_active Expired - Fee Related
- 2008-10-22 US US12/738,778 patent/US8253136B2/en active Active
-
2012
- 2012-05-31 US US13/485,203 patent/US8389990B2/en active Active
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2005522045A (ja) * | 2002-04-04 | 2005-07-21 | 株式会社東芝 | 相変化メモリ装置 |
JP2005217402A (ja) * | 2004-01-27 | 2005-08-11 | Hewlett-Packard Development Co Lp | 自動位置合わせされた整流素子を用いるナノメートルスケールのメモリデバイスおよびその作成方法 |
JP2007184086A (ja) * | 2006-01-04 | 2007-07-19 | Samsung Electronics Co Ltd | 相変化メモリ装置 |
JP2007281208A (ja) * | 2006-04-07 | 2007-10-25 | Matsushita Electric Ind Co Ltd | 多層抵抗変化素子アレイ、抵抗変化装置、多層不揮発性記憶素子アレイ、及び不揮発性記憶装置 |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8450182B2 (en) | 2010-01-25 | 2013-05-28 | Panasonic Corporation | Method of manufacturing non-volatile semiconductor memory element and method of manufacturing non-volatile semiconductor memory device |
JP2013058691A (ja) * | 2011-09-09 | 2013-03-28 | Renesas Electronics Corp | 不揮発性半導体記憶装置及びその製造方法 |
JP2015517221A (ja) * | 2012-04-19 | 2015-06-18 | カーネギー−メロン ユニバーシティCarnegie−Mellon University | 金属−半導体−金属(msm)ヘテロジャンクションダイオード |
Also Published As
Publication number | Publication date |
---|---|
US20100237313A1 (en) | 2010-09-23 |
JPWO2009057262A1 (ja) | 2011-03-10 |
US20120298945A1 (en) | 2012-11-29 |
US8253136B2 (en) | 2012-08-28 |
JP5284270B2 (ja) | 2013-09-11 |
CN101842897B (zh) | 2011-11-02 |
CN101842897A (zh) | 2010-09-22 |
US8389990B2 (en) | 2013-03-05 |
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