Classifications

• • G—PHYSICS
  • G01—MEASURING; TESTING
  • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
  • G01R33/00—Arrangements or instruments for measuring magnetic variables
  • G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
  • G01R33/06—Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
  • G01R33/09—Magnetoresistive devices
  • G01R33/093—Magnetoresistive devices using multilayer structures, e.g. giant magnetoresistance sensors
• • B—PERFORMING OPERATIONS; TRANSPORTING
  • B82—NANOTECHNOLOGY
  • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
  • B82Y25/00—Nanomagnetism, e.g. magnetoimpedance, anisotropic magnetoresistance, giant magnetoresistance or tunneling magnetoresistance
• • G—PHYSICS
  • G01—MEASURING; TESTING
  • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
  • G01R15/00—Details of measuring arrangements of the types provided for in groups G01R17/00 - G01R29/00, G01R33/00 - G01R33/26 or G01R35/00
  • G01R15/14—Adaptations providing voltage or current isolation, e.g. for high-voltage or high-current networks
  • G01R15/20—Adaptations providing voltage or current isolation, e.g. for high-voltage or high-current networks using galvano-magnetic devices, e.g. Hall-effect devices, i.e. measuring a magnetic field via the interaction between a current and a magnetic field, e.g. magneto resistive or Hall effect devices
  • G01R15/205—Adaptations providing voltage or current isolation, e.g. for high-voltage or high-current networks using galvano-magnetic devices, e.g. Hall-effect devices, i.e. measuring a magnetic field via the interaction between a current and a magnetic field, e.g. magneto resistive or Hall effect devices using magneto-resistance devices, e.g. field plates

Definitions

• This invention relates generally to magnetic field sensors, and more particularly, to the design of magnetic field sensors that use magnetoresistive (MR) elements to sense an external magnetic field.
• MR magnetoresistive
• IC integrated circuit
• Sources of mismatch include variation in geometrical shapes, poor layout and non-uniformities in fabrication process and operating environment. Fabrication processing non-uniformity may be introduced by, for example, mask misalignment and non-uniform etching.
• the invention is directed to a sensor that includes one or more magnetoresistive (MR) elements and one or more dummy MR elements. Each such dummy MR element is disposed near a select one of the one or more MR elements.
• MR magnetoresistive
• Embodiments of the invention may include one or more of the following features.
• the one or more MR elements and the one or more dummy MR elements may be giant magnetoresistance (GMR) elements, magnetic tunnel junction (MTJ) elements, tunneling magnetoresi stance (TMR) elements or anisotropic magnetoresistance (AMR) elements.
• the one or more MR elements may be MR elements electrically connected to form a bridge circuit, and each dummy MR element may be disposed near a select one of the MR elements of the bridge circuit.
• the select one of the MR elements may have as neighboring elements another of the MR elements of the bridge circuit and the dummy MR element where the neighboring elements are disposed on opposite sides of the select one of the MR elements and are symmetrical in terms of structure and position relative to the select one of the MR elements.
• the bridge circuit may be a full bridge circuit or a half bridge circuit.
• the neighboring elements may be shielded MR elements.
• the dummy MR element may be connected to a voltage supply so that, during sensor operation, the neighboring elements carry current of similar magnitude. All of the MR elements of the bridge circuit may be active MR elements.
• the sensor may further include an amplifier connected to output of the bridge circuit and a conductor through which current is applied, wherein the amplifier provides as an output an output voltage proportional to the applied current.
• the invention is directed to an angle measurement device.
• the angle measurement device includes a first sensing device and a second sensing device.
• Each of the first and second sensing devices includes MR elements electrically connected to form a bridge circuit and one or more dummy MR elements. Each such dummy MR element is disposed near a select one of the MR elements.
• the MR elements of the second sensing device are provided at a predetermined angle relative to the MR elements of the first sensing device.
• the invention is directed to a sensing device that includes MR elements electrically connected to form a bridge circuit and a dummy MR element.
• One of the MR elements of the bridge circuit is an active MR element and has as neighboring elements another of the MR elements of the bridge circuit and the dummy MR element.
• the neighboring elements are disposed on opposite sides of the active MR element and are symmetrical in terms of structure and position relative to the active MR element.
• Dummy MR elements can provide symmetry to the bridge circuit layout where such symmetry might otherwise be lacking. Symmetry in the MR elements near an active MR element serves to reduce variations caused by nearest neighbor induced magnetic field effects.
• the dummy MR elements may be provided at the outermost edges of the bridge circuit layout so that the bridge MR elements can be uniformly patterned.
• FIG. 1 shows an exemplary magnetoresi stive (MR) sensing device that includes a full bridge (of four MR elements) and two dummy MR elements;
• MR magnetoresi stive
• FIG. 2 shows an exemplary MR sensing device that includes a full bridge and two current-carrying dummy MR elements
• FIG. 3 shows an exemplary MR sensing device that includes two dummy MR elements and a full bridge in which all of the bridge MR elements are sensing elements
• FIG. 4 shows an exemplary MR sensing device that includes a half bridge (of two MR elements) and two dummy MR elements;
• FIG. 5 shows an exemplary current sensor employing the MR sensing device of FIG. 2;
• FIGS. 6A-6B show exemplary angle sensors employing MR sensing devices like those shown in FIGS. 1-4; and FIG. 7 shows an exemplary angle measurement device that utilizes the angle sensor shown in FIG. 6A.
• Resistor mismatch can be a serious problem in the design of resistive bridge circuits that require resistors in the bridge to have the same value. This is especially true in the case of bridge circuits used in magnetoresistive (MR) sensors.
• An MR sensor is a magnetic field sensor that makes use of the MR effect, the property of a current carrying material to change its resistance in the presence of an external magnetic field.
• the MR type resistors or "magnetoresistors" of the sensor's bridge circuit, referred to herein as MR elements are very sensitive to the stray magnetic field effects of neighboring MR elements. Neighboring interactions can result in variations in an MR element's electrical behavior. Any variation, however small, can limit sensitivity and overall accuracy of the MR sensor.
• the circuits of an MR sensor are also affected by non-uniformities introduced by a particular process during device fabrication. Often the processing-related non-uniformities occur at the outer edges of the circuit layout and thus affect the outside elements. For example, the outside elements may be etched at a faster rate due to a higher concentration of etchant at the outer edges of the circuit layout (and therefore have a higher resistance) than those elements that are not outside elements.
• the present invention features the use of "dummy MR elements" disposed near select MR elements of a bridge circuit.
• the dummy MR elements are non-functional elements, those that are not part of or required for the operation of the bridge circuit.
• the dummy MR elements may be used in various locations (in the bridge layout) and for various reasons, as will be described.
• the MR elements referred to herein may be made from any type of MR device, including, but not limited to: a anisotropic magnetoresistance (AMR) device; a giant magneto resistance (GMR) device, including unpinned sandwich, antiferromagnetic multilayers and spin valve; a magnetic tunnel junction (MTJ, also known as spin- dependent tunneling or "SDT”) device; and a tunneling magnetoresistance (TMR) device.
• AMR anisotropic magnetoresistance
• GMR giant magneto resistance
• MTJ magnetic tunnel junction
• SDT spin- dependent tunneling
• TMR tunneling magnetoresistance
• an MR sensing device 10 that includes MR elements 12, 14, 16, 18 connected to form a full (or “Wheatstone") bridge circuit 20 is shown.
• the labels "VCC” and “GND” indicate voltage supply and ground terminals, respectively.
• the MR elements 12 and 14 are connected in series between VCC and GND.
• the MR elements 16 and 18 are connected in series between VCC and GND.
• a first output (Voutl) 22 is provided between MR elements 12, 14, at a node "a”.
• a second output (Vout2) 24 is provided between MR elements 16, 18, at a node "b".
• the magnetic shields 14 and MR element 16 are covered by magnetic shields, which isolate those elements from the applied magnetic field and allow them to act as reference elements.
• the MR elements 14, 16 are covered by magnetic shields 26, 28, respectively.
• the MR elements 14, 16 with magnetic shields are shown as shielded MR elements 30, 32, respectively.
• the two remaining MR elements, MR elements 12 and 18, are exposed to the magnetic field and thus operate as active (or sensing) elements.
• the magnetic shielding may be achieved by surrounding the MR element with a high-permeability material such as NiFe.
• the magnetic shielding may be a multilayer shielding. During operation, a differential output voltage is available between the bridge circuit outputs 22, 24.
• the presence of a magnetic field causes a change in resistance in the bridge MR elements and the change in resistance produces a corresponding change in voltage across the bridge outputs 22, 24.
• the MR elements are oriented such that the sensitive axis (indicated schematically by the arrows) of each element is in parallel to the sensitive axis of the other elements.
• the voltage across outputs 22, 24 increases as the magnetic field in the direction of the sensitive axis increases.
• the sensing device 10 also includes at least one dummy MR element.
• there are two dummy elements shown as dummy MR element 34 and dummy MR element 36.
• a magnetic shield 37 is provided to dummy MR element 36, with the magnetic shield 37 and dummy MR element 36 thus forming a shielded dummy MR element 38.
• each of the dummy MR elements is connected at both ends to GND, as shown.
• the sensing device 10 is illustrated by a schematic diagram, the arrangement of MR elements in this figure (as well as other figures to be described later) is intended to suggest that of an actual layout (from a plan view) to convey as simplistically as possible how the dummy MR elements are used.
• the MR and dummy MR elements of the sensing device 10 are shown to represent corresponding MR patterns disposed horizontally (from left to right) in the order 34, 30, 12, 32, 18, 38.
• the dummy MR element 34 is disposed on the left side of the shielded MR element 30 and the shielded dummy MR element 38 is disposed on the right side of the MR element 18.
• Each dummy MR element is placed next to an outside bridge MR element so that that bridge MR element is flanked by like elements.
• the structure, defined by size, shape, construction and orientation, as well as placement (relative to shielded MR element 30) of the dummy MR element 34 is chosen to be like that of MR element 12.
• the structure and placement (relative to MR element 18) of the shielded dummy MR element 38 is chosen to be like that of shielded MR element 32.
• the shielded MR element 32 may be referred to as the like MR element of the shielded dummy MR element 38 and the MR element 12 may be referred to as the like MR element of dummy MR element 34.
• the dummy elements and corresponding, like MR elements in the bridge circuit will show very similar characteristics (in terms of various properties, such as electrical, magnetic, thermal and mechanical properties).
• the structure of the bridge and dummy MR elements may utilize any type of MR technology, such as GMR, MTJ, TMR and AMR.
• the 'like' structure can include magnetic shielding, if the corresponding bridge element is shielded.
• the like dummy MR element 38 is provided as a shielded MR element as well.
• the outside MR elements 30 and 18 each now "sees" symmetry in its neighboring elements in the same way that the inside MR elements 12 and 32 do. As a consequence, a more optimal matching of the four MR elements of the bridge circuit is achieved.
• each "active" bridge element it is desirable for each "active" bridge element to be symmetrically balanced, using a dummy MR element as necessary (when the active bridge element doesn't already have two neighboring bridge elements) to achieve symmetry. It is the active MR element that is sensitive to neighboring element interactions.
• the use of dummy MR elements near shielded (or otherwise non-sensing) MR elements can also be advantageous when processing-related non-uniformities that occur at the outer edges of the bridge circuit layout are of particular concern, as the non-uniformities will impact the dummy MR elements (which are not part of the bridge circuit) instead of the bridge elements.
• the use of only one dummy MR element if possible, however, allows for simplification in design and reduction in the size of the sensor.
• the structure and placement of the dummy MR element are chosen to match (as closely as possible), that of the like bridge MR element located on the opposite side of the outside bridge MR element, that is, the outside bridge MR element's nearest neighboring bridge MR element. In the resulting layout, the outside bridge MR elements will see the same environment (magnetic effects) on both sides.
• the arrangement of the dummy MR elements relative to the bridge MR elements serves to provide properties of symmetry and uniformity to the outer MR elements in an MR bridge circuit layout for improved resistor matching.
• MR elements of the bridge circuit in particular GMR and MJT elements, tend to be aligned with one or more of the other MR elements, along horizontal and/or vertical axes.
• the MR elements could be arranged in an approximately semi-circular, interleaved or some other pattern as well.
• the dummy MR element may be connected at one end to a voltage supply, as shown in FIG. 2.
• a sensing device 40 includes the same full bridge circuit 20 as shown in FIG. 1.
• the dummy MR elements 34, 36 are replaced by current-carrying dummy MR elements 42, 44, respectively, each capable of carrying current similar in magnitude to its corresponding like bridge MR element.
• the dummy MR element 44 like dummy MR element 36 in FIG. 1, is covered by a magnetic shield (shown as magnetic shield 46).
• the dummy MR element 44 with magnetic shield 46 is shown as a shielded dummy MR element 48.
• the magnitude of the current carried by dummy MR element 42 is similar to that of the current carried by the like bridge MR element 12 and the magnitude of the current carried by the shielded dummy MR element 48 is similar to that of the current carried by the like shielded bridge MR element 32.
• One end of the dummy MR element 42 is coupled to a voltage supply (VCC/2) at terminal 50.
• the other end of dummy MR element 42 is connected to GND.
• one end of the shielded dummy MR element 48 is coupled to VCC/2 at terminal 52 and the other end is connected to GND.
• the two active MR elements 12 and 18 are on opposite sides of the bridge circuit and have a like response - they both increase in value or decrease in value.
• the two active MR elements could be on the same side of the bridge (i.e., connected in series) and have resistances that change in opposite directions.
• shielded devices can act as flux concentrators, it may be desirable to use only unshielded devices in certain designs.
• two of the four bridge MR elements of the sensing devices of FIGS. 1 and 2 are shown as shielded devices, a sensing device with dummy MR elements as described herein need not include any shielded elements.
• the two shielded bridge MR elements each could be replaced by some type of unshielded MR element that is not responsive to an external magnetic field, for example, the type of structure described in U. S Patent Application No. 10/962,889, entitled "Resistor Having a Predetermined Temperature Coefficient," filed October 12, 2004 with inventors William P. Taylor and Michael C.
• FIG. 3 illustrates a sensing device 60 in which all of the bridge MR elements, shown as MR elements 62, 64, 66, 68 are active elements.
• the MR elements 62, 64, 66, 68 are connected to form a full bridge circuit 70 having a first bridge output 72 and a second bridge output 74. Because all of the bridge MR elements are active, the dummy MR elements, which are shown as current-carrying dummy MR elements 76, 78, are unshielded and fabricated like the active bridge elements.
• the bridge elements are magnetically oriented such that the resistance of MR elements 64 and 68 increases (with an increase in the external magnetic field to be sensed) while the resistance of MR elements 62 and 66 decreases.
• Any technique for constructing active bridge MR elements with different orientations may be used.
• One example is described in U.S. Patent No. 5,561 ,368, to Dovek et al., entitled “Bridge Circuit Magnetic Field Sensor Having Spin Valve Magnetoresistive Elements Formed on Common Substrate.”
• the bridge circuit may be implemented as a half-bridge circuit.
• the half-bridge circuit is also known as a resistor (or voltage) divider circuit.
• FIG. 4 shows a sensing device 80 that includes a half bridge circuit 82.
• the sensing device 80 also includes a dummy MR element 84 having a magnetic shield 86 (shielded dummy MR element 88) and a dummy MR element 90.
• the half bridge circuit 82 includes two bridge MR elements, a bridge MR element 92 having a magnetic shield 94 (shielded MR element 96) and a bridge MR element 98.
• the shielded MR element 96 and the MR element 98 are connected in series between VCC and GND, with shielded MR element 96 connected to VCC and MR element 98 connected to GND.
• a single-ended output voltage is provided at bridge output Vout 99.
• the dummy MR elements 88, 90 each are connected to VCC/2 and GND. Alternatively, each of the dummy MR elements 88, 90 could be connected at both ends to GND (like the dummy MR elements 34, 38 of the full bridge implementation shown in FIG. 1).
• the sensing device 80 is shown to include shielded MR elements, it will be understood that it could be implemented without magnetically shielded MR elements, as was discussed earlier in reference to the full bridge implementation of the bridge circuit. That is, the reference bridge element could be constructed as an unshielded reference bridge element. The like dummy MR element could be similarly constructed. As was also mentioned earlier, the bridge circuit need not include both dummy MR elements. Thus, in the half bridge embodiment of FIG. 4, the dummy MR element 90 could be omitted.
• Magnetic field sensing is utilized for control and measurement purposes - for example, proximity detection, linear and rotary position sensing, current sensing and angular position sensing.
• the MR sensing device with at least one dummy element examples of which are illustrated in and described with reference to FIGS. 1-4 above, can be used in various types of MR sensor applications, such as a current sensor or an angle sensor, to give a few examples.
• FIG. 5 shows an exemplary current sensor.
• FIGS. 6A- 6B show different examples of an angle sensor.
• a current sensor 100 includes an MR sensing device based on a full bridge configuration like or similar to the one shown in FIG. 2. In the full bridge configuration of FIG.
• each of the active bridge MR elements 12, 18 is symmetrically balanced by like structures.
• Shielded dummy MR element 48 and shielded bridge MR element 32 are disposed on opposite sides of active bridge MR element 18.
• Shielded bridge MR element 30 and a shielded dummy MR element 101 are disposed on opposite sides of the active bridge MR element 12.
• the bridge outputs of the MR sensing device, bridge outputs 22 and 24, are coupled to an amplifier 102.
• the current sensor 100 also includes a conduction path 104. A current to be measured would be applied to the conduction path in a direction indication by arrow 106. During operation, the applied current flowing through the conduction path 104 generates a magnetic field, which is sensed by the active bridge MR elements 12 and 18.
• the sensed magnetic field is converted into a proportional voltage across the bridge outputs 22, 24.
• Bridge output 22 is connected to the negative input of the amplifier 102.
• the other bridge output 24 is connected to the positive input of the amplifier 102.
• the amplifier's output is provided as a current sensor voltage output (Vout) 108 as well coupled to GND through the resistor 1 10.
• the current can be determined from the voltage available at Vout and the resistor 110. While the design that is illustrated is that of a simple, open loop current sensor, other current sensor designs (e.g., other types of open loop or closed loop designs) are contemplated as well. Referring to FIG.
• an angle sensor 120 includes two sensing devices (with bridges shown as half bridges) 122 and 124 positioned at an offset angle of 90° to each other.
• Each sensing device includes a fixed value resistor, shown as resistors 126a, 126b, in the sensing devices 122, 124, respectively, connected to VCC and an active MR element, shown as MR elements 128a, 128b, in sensing devices 122, 124, respectively, which is also connected to GND.
• the fixed value resistor is connected to the active MR element to form a half bridge circuit.
• Disposed on both sides of the MR element in each sensing device is a dummy MR element connected to VCC and to GND.
• the dummy MR elements in the sensing device 122 are shown as dummy MR elements 130a and 132a.
• the dummy MR elements in sensing device 124 are shown as dummy MR elements 130b and 132b.
• the dummy MR elements in each sensing device are like elements.
• _Bridge outputs are shown as bridge output 134a (for sensing device 122) and bridge output 134b (for sensing device 124).
• an angle sensor 140 includes two sensing devices (again, with bridges shown as half bridges) 142 and 144 positioned at an offset angle of 90 degrees to each other.
• both of the bridge resistors are MR elements, one active and one shielded.
• Sensing device 142 includes a shielded MR element 146a connected to VCC and to an active MR element 148a, which is also connect to GND.
• Sensing device 142 also includes a single, shielded dummy MR element 150a.
• Sensing device 144 includes a shielded MR element 146b connected to VCC and to an active MR element 148b, which is also connect to GND.
• Sensing device 144 includes a single, shielded dummy MR element 150b.
• the active MR element and the shielded MR element are connected to form a half bridge circuit.
• the shielded dummy MR element is disposed on one side of each active MR element to balance the shielded bridge element on the opposite side of the active MR element.
• Outputs of the sensing devices 142, 144 are shown as outputs 152a, 152b, respectively.
• output signals at bridge outputs Voutl and Vout2 will show an electrical phase shift of 90°. It will be understood that other angles of offset and phase shift may be chosen. Also, although two half bridges are shown, the angle sensor could instead be implemented with two full bridges.
• the angle sensor is stationary and a permanent magnet is attached to a rotating shaft (rotor) near the angle sensor.
• the magnet creates a magnetic field that is in the plane of the angle sensor and rotates with the rotating magnet/rotor assembly. Therefore, when a supply voltage is applied to the bridges, one bridge output voltage may be a sine function and the other bridge output voltage may be a cosine function due to the spatial position of the sensor's elements in relation to the permanent magnet.
• FIG. 7 shows an angle measurement device 160 that utilizes the output of the angle sensor to determine an angle value.
• the angle measurement device 160 includes an angle sensor, for example, the angle sensor 120 from FIG. 6A (as shown) or the angle sensor 140 from FIG.
• the signal conditioning unit 162 performs the angle calculation. It combines the two output signals from the angle sensor 120 into one digital output signal.
• the signal conditioning unit 162 provides a digital output, although it could be designed to provide an analog output instead.
• Output signals provided at the sensor's bridge outputs 134a, 134b are sampled and then converted into the digital domain by an Analog-to-Digital Converter (ADC) 164.
• a processor (or microcontroller) 166 receives digital representations of the sensor output signals, shown as ADC outputs 168a, 168b, and determines an angle value from them.
• Various known algorithms for example, the CORDIC algorithm, may be used to perform the angle calculation.
• Clock and control signals are provided to the ADC 164 and the processor 166 by a clock generation and control circuit 169. Once the angle is determined, it is represented as a digital angle value at an output 170 (of the signal conditioning unit 162) that is accessible by an external controller or user (not shown).
• Sensor and associated electronics such as amplification and signal conditioning may be packaged in separate integrated circuit chips.
• devices can be manufactured that incorporate both sensors and signal processing electronics on the same chip.
• dummy MR elements are equally applicable to a sensor implemented to use a single MR element (in lieu of a bridge circuit) for magnetic field sensing.

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• Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)

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