Classifications

• • G—PHYSICS
  • G02—OPTICS
  • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
  • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
  • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
  • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
• • G—PHYSICS
  • G01—MEASURING; TESTING
  • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
  • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
  • G01N21/84—Systems specially adapted for particular applications
  • G01N21/88—Investigating the presence of flaws or contamination
  • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
  • G01N21/958—Inspecting transparent materials or objects, e.g. windscreens
• • G—PHYSICS
  • G01—MEASURING; TESTING
  • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
  • G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
• • G—PHYSICS
  • G01—MEASURING; TESTING
  • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
  • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
  • G01N21/84—Systems specially adapted for particular applications
• • G—PHYSICS
  • G01—MEASURING; TESTING
  • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
  • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
  • G01N21/84—Systems specially adapted for particular applications
  • G01N21/88—Investigating the presence of flaws or contamination
  • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
  • G01N2021/9513—Liquid crystal panels
• • G—PHYSICS
  • G01—MEASURING; TESTING
  • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
  • G01N2201/00—Features of devices classified in G01N21/00
  • G01N2201/02—Mechanical
  • G01N2201/021—Special mounting in general

Definitions

• Substrate holding apparatus and substrate inspection apparatus are Substrate holding apparatus and substrate inspection apparatus
• a glass substrate such as a large liquid crystal display (hereinafter abbreviated as LCD), a flat panel display (hereinafter abbreviated as PDP) such as a plasma display panel (hereinafter abbreviated as PDP), etc.
• the present invention relates to a substrate holding device that holds and swings a glass substrate when performing a defect inspection of the substrate, and a substrate inspection device using the substrate holding device.
• glass substrates are multifaceted, and their sizes tend to be larger.
• the size of the glass substrate is, for example, a large size of 1 2 5 0 X 1 1 0 O m m.
• Substrate inspection is performed on large glass substrates manufactured in such FPD manufacturing processes.
• One of the techniques for board inspection is to use a combination of macro inspection and micro inspection.
• macro inspection a glass substrate is irradiated with illumination light and the light reflected by the glass substrate is visually observed.
• micro inspection the defects identified by the macro inspection are magnified and observed with a microscope.
• the holder is raised centering on the lower side, so if the glass substrate to be inspected becomes large, the large glass substrate at the time of rising is The top edge should be higher than the observer's eye position. As a result, the distance from the observer's eyes to the upper end of the large glass substrate becomes longer, and the upper end of the large glass substrate becomes obscured.
• a pedestal a substrate holder provided on the pedestal for holding a large substrate, and a substrate holder capable of swinging in the horizontal state or raising direction of the substrate holder on the pedestal,
• the substrate holding device is provided with a rocking mechanism that lowers the lower edge of the substrate holder from the edge portion of the upper surface of the pedestal by the rising.
• the substrate holder there is provided above the substrate holder. And providing a macro illumination device for irradiating the macro illumination light to a large substrate held on the substrate holder raised or rocked by the swing mechanism. Board inspection equipment is provided.
• FIG. 1 is a block diagram showing a first embodiment of a substrate holding apparatus according to the present invention.
• FIG. 2 is a front view of the substrate holder in the first embodiment of the substrate holding device according to the present invention.
• FIG. 3 is an enlarged view of a hinge portion in the first embodiment of the substrate holding device according to the present invention.
• FIG. 4 is a view showing the raising and lowering operation of the substrate holder in the first embodiment of the substrate holding device according to the present invention.
• FIG. 5 is a block diagram showing a second embodiment of a substrate holding device according to the present invention.
• FIG. 6 is a block diagram of another direction rocking mechanism in the second embodiment of the substrate holding device according to the present invention.
• FIG. 7 is a view showing swinging of the substrate holder in a swing direction in the second embodiment of the substrate holding device according to the present invention.
• FIG. 1 is a cross-sectional view of a substrate inspection apparatus to which the substrate holding device of the present invention is applied.
• the gantry 1 consists of a leg 2 and a base 3 provided on the leg 2 and a force. Large glass on this base 3 A substrate holder 5 for holding the substrate 4 is provided.
• the horizontal height of the substrate holder 5 is set to the delivery height of the transfer robot.
• the upper surface of the base 3 is provided horizontally.
• An opening 6 is formed in the substrate holder 5 as shown in FIG.
• each reference pin 7 for determining the reference position of the large glass substrate 4 a reference pin 8 with a roller, and a pressing pin 9 are provided.
• the pressing pin 9 is provided so as to be movable in the direction to press the large glass substrate 4 against the reference pin 7 side.
• the substrate holder 5 is mounted on the upper surface of the base 3 in a swing mechanism (a hinge 10 serving as a swing fulcrum and a linear guide 15 serving as a lift mechanism) described below.
• the link mechanism 1 allows the hinge 10 to be pivoted about the hinge 10.
• the swinging direction is the direction in which the substrate holder 5 is raised or returned to the horizontal state.
• the hinges 10 are respectively provided on both ends of the base 3 when the substrate holding device is viewed from the front side.
• each hinge support member 1 2 is provided at each end of the edge portion 1 1 on the front side of the upper surface of the base 3.
• Each hinge 10 is rotatably provided on each of these hinge support members 1 2. The pivot axis 1 3 of these hinges 10 raises the substrate holder 5 or returns it to the horizontal position.
• the move block 1 4 is provided in the hinge 10.
• the moving block 14 is provided on the back of the substrate holder 5.
• a sliding groove 16 fitted to the straight guide 15 is formed.
• the straight guide 15 slides the inside of the sliding groove 16 when the substrate holder 5 is raised and causes the substrate holder 5 to face the front side.
• the hinge 10 has a rotation shaft 1 3. Swing the substrate holder 5 with the fulcrum as the fulcrum. As a result, the lower end of the substrate holder 5 is lowered from the edge portion 1 1 of the upper surface of the base 3, and an out-going mechanism is formed by the linear guide 15 and the hinge 10. Be done.
• the linear guides 15 are respectively provided on both ends of the back surface of the substrate holder 5 and are placed in the respective sliding grooves 16 formed in the moving blocks 14 on both ends of the base 3. .
• these linear guides 15 slide in the sliding groove 16 so that the substrate holder 5 faces the front side and becomes the lower end side of the substrate holder 5. It is formed to have a length sufficient to lower the edge from the edge portion 1 1 of the upper surface of the base 3, for example, from the lower end side of the substrate holder 5 to slightly above the central portion.
• a stock, ° 15 a is provided at the upper end of these straight guides 1 5.
• these stoppers 15a limit the inclination of the substrate holder 5 so that the substrate holder 5 is not inclined more than the preset maximum inclination angle. It is provided in order to
• the link mechanism 1 7 swings the substrate holder 5 horizontally or up in the raising direction on the base 3.
• This link mechanism 1 7 consists of links 1 8 and jacks 1 9.
• the link 18 is formed in a fixed length.
• the link 18 is provided at the lower end of the base 3 and below the substrate holder 5. It is provided between the support member 2 1 and the support member 2 1. This link
• Jack 1 9 has a telescopic rod 1 9 a.
• This jack 19 is provided between the support member 21 side of the link 18 and the horizontal beam 2 a of the leg 2.
• the jack 19 is rotatably connected to the link 18 at the end of the telescopic rod 19 a so as to be rotatable about the fulcrum 24.
• the lower end of the jack 1 9 is a horizontal beam
• the link mechanisms 17 are respectively provided on both ends of the substrate holder 5 when the substrate holding device is viewed from the front side.
• the interval of 3 fluctuates.
• the substrate holder 5 slides on the straight guide 15 to the front side.
• the edge on the lower end side of the holder 5 protrudes more to the front than the edge portion 1 1 on the upper surface of the base 3.
• the lowering distance of the lower edge part 1 1 of the substrate holder 5 is to change the length of the link 1 8, the length of the linear guide 1 5, and the length of the extension of the telescopic rod 1 9 a. Is set arbitrarily.
• each supporting point 22 and 23 depending on the extension length of the expansion rod 19a.
• the rising angle (inclination angle) of the substrate holder 5 is determined by the distance between the fulcrum 22 of the link 18 and the rotation axis 13 of the hinge 10 by the length of the link 18 The shorter it is, the more inclined it is You can make the corners bigger.
• the extension length of the expansion rod 1 9 a by adjusting the extension length of the expansion rod 1 9 a, the angle between the side passing through each of the supporting points 22 and 23 and the side passing through the supporting point 23 and the hinge 10 can be changed.
• the rising angle of the substrate holder 5 and the lowering distance of the lower end edge portion 1 1 of the substrate holder 5 can be set arbitrarily.
• the substrate holder 5 is placed horizontally on the base 3 by a portion consisting of the hinge support member 12, hinges 10 and moving block 14 and the support member 21. Ru.
• the heights of the hinge support member 12, the hinge 10 and the moving block 14 are identical to the height of the support member 21.
• the macro illumination device 30 includes a macro light source 31 emitting macro illumination light and a reflection mirror 3 reflecting the macro illumination light emitted from the macro light source 31. 2 and Fresnel lens 3 3 and Ka which converge the McPorch illumination light reflected by this reflection mirror 3 2.
• the macro light source 3 1 is provided, for example, to emit macro illumination light in the horizontal direction (X direction).
• the reflective mirror 32 is horizontally inclined at about 50 degrees and bent toward the large glass substrate side where the illumination light axis is raised.
• the micro inspection device 40 can move in the Y direction along the horizontal arm of the portal arm 4 1 provided movable on the base 3 in the X direction and the portal arm 4 1. It consists of a microscope 4 2 installed on the.
• Controller 4 3 controls the expansion and contraction of jack 19 and Lighting control of mouth light source 3 1. Further, the control device 4 3 controls the movement of the microscope stage 4 2 in the X and Y directions to move the observation field of view of the microscope 4 2 to a position where the defect portion on the large glass substrate 4 is captured. Defects on the large glass substrate 4 are identified by macro inspection, and their coordinate data are also stored.
• the jack 1 9 is shrunk, and the substrate holder 5 on which the large glass substrate 4 is placed is in the horizontal state.
• the straight guides 15 on the lower surface of the substrate holder 5 slide in the sliding grooves 16.
• the substrate holder 5 is pulled forward from the edge portion 1 1 of the base 3 and is raised with the hinge 10 as the swing center.
• the lower end side of the substrate holder 5 is the edge portion 1 1 of the upper surface of the base 3. It also descends.
• the observer adjusts the extension of jack 19's expansion joint 1 9 a.
• the substrate holder 5 is adjusted to an arbitrary raising angle for easy observation of the opening, and thus becomes the lower end side of the raised substrate holder 5. Since the edge is lowered from the edge portion 1 1 of the upper surface of the base 3, the entire surface of the large glass substrate 4 approaches the observer even if the substrate holder 5 is provided on the gantry 1.
• the height of the upper end portion of the large glass substrate 4 is lower than that of the conventional case, and the distance between the upper end portion of the large glass substrate 4 and the observer is shortened.
• the observer visually inspects the light reflected by the large glass substrate 4 for macro inspection.
• the observer since the height of the upper end portion of the large glass substrate 4 is lower than that of the prior art, the observer does not look up the upper end portion of the large glass substrate 4 and the entire surface of the large glass substrate 4 is For example, it is possible to capture the light of different reflection directions depending on the direction of a defect such as a flaw or a flaw, for example, and to surely identify the defect present in the large glass substrate 4.
• each jack 19 can be used as a telescopic rod 1 9 a Repeat the expansion and contraction operation with the expansion and contraction length set in advance.
• the substrate holder 5 is continuously rocked in the direction of arrow A in a predetermined cycle by the repetition of this expansion and contraction operation (the rising angle range of the substrate holder 5 which is swinging is controlled by the control device 4 It is preset to 3.
• This control unit 4 3 controls the stretch length of the stretchable opening 1 9 a of each jack 19 according to the preset rise angle range. .
• the coordinate data of the defective part on the large glass substrate 4 identified by the macro inspection is input to the control unit 4 3.
• Jack 1 9 shrinks the telescopic rod 1 9 a by the control of control device 4 3.
• the link 1 8 rotates around the fulcrum 2 2 in the direction opposite to the direction in which the substrate holder 5 is raised. By this, the substrate holder 5 returns to the original horizontal state.
• the control device 4 3 sets the microscope stage 4 1 in the X and Y directions based on the coordinate data of the defect portion inputted at the time of the macro opening inspection. The movement is controlled, and the observation field of view of the microscope 4 2 is moved to a position where the defect portion on the large glass substrate 4 identified by the macro inspection is captured.
• Image of the enlarged defect Ri by the microscope 4 2 is captured Ri by the CCD Camera, t observer is displayed on the monitor Tele vision is displayed in Monitate les revisions Observe a magnified image of the defective part.
• the control device 43 may move and control the microscope 42 in the X and Y directions so that the observation field of the microscope 42 scans the entire surface of the large glass substrate 4.
• the substrate holder 5 is a hinge support member 1 2
• the substrate holder 5 is mounted on the base 3 by the portion consisting of the hinges 10 and the moving block 14 and the support member 21, so that the substrate holder 5 is not affected by the external vibration. Stability is improved.
• This substrate holding device is used for transporting the large glass substrate 4 when the large glass substrate 4 is placed on the substrate holder 5 and when it is removed from the substrate holder 5, not only at the macro opening inspection and the micro opening inspection. It can also be used as a device.
• the substrate holder 5 when the large glass substrate 4 is placed on the substrate holder 5, if the expansion rod 1 9 a of the jack 1 9 is extended under the control of the control device 4 3, the substrate holder 5 is As shown in Fig. 4, the lower edge of the substrate holder 5 is raised and lowered from the edge portion 1 1 of the upper surface of the base 3.
• the large glass substrate 4 is placed on the reference pins 8 with rollers shown in FIG. 2 in a substantially vertical direction (Z direction). Be Then, the large glass substrate 4 is pressed against each reference pin 7 by the pressing pin 9 and set at the reference position.
• the large glass substrate 4 is sucked and fixed onto the surface of the substrate holder 5 by suction from suction holes (not shown) provided on the substrate holder 5. Thereafter, when the expansion rod 1 9 a of the jack 1 9 is shrunk, the substrate holder 5 returns to the original horizontal state.
• the adsorption on the large glass substrate 4 is released in a state where the substrate holder 5 is raised in the reverse of the case described above. Be done. Then, the large glass substrate 4 is erected in the substantially vertical direction (Z direction). It is removed from the substrate holder 5.
• the substrate holder 5 When placing or removing such a large glass substrate 4 on or from the substrate holder 5, the substrate holder 5 lowers the lower end edge from the edge portion 1 1 of the upper surface of the base 3. . As a result, when placing the large glass substrate 4 on the substrate holder 5, there is no need to lift the large glass substrate 4 to the high position, and the large glass substrate 4 can be easily transferred to the substrate holder 5. Can be placed or removed.
• the large glass substrate 4 is placed upright on the substrate holder 5, the lower side of the large glass substrate 4 is placed on the roller reference pin 8 by its own weight. It will be positioned. As a result, it is possible to omit the pressing pin facing the reference pin 8 with roller on the substrate holder 5, and the surface contact resistance between the large glass substrate 4 and the substrate holder 5. Can be made smaller and the pressing force of the pressing pin 9 can be made smaller.
• the lower end side of the substrate holder 5 is the edge portion 1 1 of the base 3 of the rack 1.
• the entire surface of the large glass substrate 4 can be made closer to the observer.
• the height of the upper end of the large glass substrate 4 of, for example, 1250 x 110 0 mm can be made lower than that of the conventional one, and the distance between the upper end of the large glass substrate 4 and the observer Can be shortened.
• the observer does not look up the upper end portion of the large glass substrate 4 and the entire surface of the large glass substrate 4 can For example, it is possible to capture the light of different reflection directions depending on the direction of a defect or a defect such as a defect and to surely identify the defect existing in the large glass substrate 4.
• the installation position of the macro illumination device 30 can be lowered, and the installation space of the entire substrate inspection device can be reduced. it can.
• macro inspection for example, while adjusting the substrate holder 5 to an arbitrary raising angle for easy macro observation, the expansion and contraction operation of each jack 19 is continuously repeated to obtain the substrate holder. If 5 is moved, the movement of the viewpoint of the observer can be reduced, and light of different reflection directions can be captured by the direction of the defect portion such as a flaw or a spot to identify the defect portion.
• the angle range in which the substrate holder 5 is pivoted can be arbitrarily set to the control device 43. For example, not only scratches, dirt, etc., but a wide variety of defects such as chips, dirt, dust, etc. It is possible to identify the part.
• this apparatus raises the substrate holder 5 so that the lower end side edge is lowered from the edge portion 1 1 of the base 3 of the gantry 1, and the large glass substrate 4 is used as the substrate holder.
• the large glass substrate 4 When used as a transport device when placed on top and when removed from the top of substrate holder 5 It will come. In this case, it is not necessary to lift the large glass substrate 4 to a high position, and the large glass substrate 4 can be easily mounted on or removed from the substrate holder 5.
• the substrate holder 5 is raised while raising the substrate holder 5 at the front side from the edge portion 1 1 of the base 3, there is no possibility of blocking the macro illumination light.
• the rocking mechanism can be made inexpensive by using a rocking fulcrum hinge 10, a linear guide 15 as a pulling out mechanism, a link mechanism 17 etc. .
• FIG. 5 is a configuration diagram in which the substrate holding device of the present invention is applied to a substrate inspection apparatus.
• hinge 10 hinge support member 1 2, moving block 1 4, linear guide 1 5, link 18, jacket 1 9, extension end 20 and support
• one pair of members 2 1 is provided on both end sides in the Y direction when viewed from the front side.
• each hinge 10 ' is referred to as respective hinges 10, 10 ', respective hinge support members 12 and 12', movable blocks 14 and 14 ', and linear guides 15 and 1 respectively.
• Each symbol of 5 ', each link 18 and 18 and each jack 19 and 19' and each support member 21 and 21 ' is shown.
• the substrate holder 5 is arranged in the axial direction perpendicular to the axial direction of the rocking movement of the substrate holder 5 in the rising direction.
• the hinge unit (rotation support member) is rotated (in the direction of arrow B) in the direction perpendicular to the direction of the swinging axis of the substrate holder 5 in the direction of the swinging direction of the substrate holder 5.
• the hinge unit 5 1 includes a hinge holding arm 52, and respective hinge supporting pieces 52 a and 52 b respectively provided on both ends of the hinge holding arm 52, and a hinge holding arm 5.
• Each hinge support piece 52a, 52b is rotatably provided with a hinge 13a, 13b, respectively.
• the rotation shaft 5 3 is rotatably provided in a rotation hole 5 4 formed substantially at the center on the front side of the base 3.
• the control device 4 3 controls the amounts of expansion and contraction of the respective jacks 1 9 and 1 9 ′ with respectively different amounts of swing.
• one jack 1 9 or 19 ′ may be expanded or contracted without expanding or contracting the other jack 1 9 ′ or 1 9 ′.
• the expansion and contraction movement of each jack 1 9, 1 9 ′ is expanded and contracted synchronously.
• each observer 1 9 1 19 1 telescopic rod 1 9 a 1 9 a 1 Growth is adjusted.
• the substrate holder 5 is adjusted to an arbitrary raising angle where it is easy to observe the mask.
• the substrate holder 5 has an arrow at a predetermined cycle. Swing continuously in the A direction.
• one jack 19 or 19 ' is expanded or contracted without expanding or contracting one jack 19 or 19'. Or extend one jack 19 or 19 'and shrink the other jack 19 or 19'. Or, repeat the expansion and contraction operation of each jack 1 9, 1 9 ′ continuously.
• the substrate holder 5 is centered on the hinge unit 5 1 force S rotation axis 5 3 shown in FIG. Rotate in the arrow B direction.
• the substrate holder 5 swings in the left-right direction (hereinafter referred to as the swing direction) when viewed from the front side.
• Figure 7 shows the case where one jack 19 or 19 'is expanded and contracted while the other jack 19' or 19 is expanded and contracted.
• the substrate holder 5 swings to the left as viewed from the front side.
• the swing range of this swing direction may be set in advance in the control device 4 3 or may be set arbitrarily by the operation of the observer.
• the substrate holder 5 is swung in the swing direction to set an arbitrary swing angle, or to be swung continuously. Can increase the number of validations of the exam. As a result, it is possible to observe the reflected light from defects such as flaws on the large glass substrate 4 which can not be detected by the swinging of the substrate holder 5 in the rising direction (direction of arrow A). It is possible to detect and identify these defects.
• the substrate holder 5 is operated at all angles by simultaneously operating the swing in the rising direction and the swinging direction in the swing direction of the substrate holder 5 at the same time. It is possible to inspect the mask mouth by setting it in the opposite direction or swinging it in any angle direction continuously.
• the present invention is not limited to the above first and second embodiments, and can be variously modified at the implementation stage without departing from the scope of the invention.
• the substrate holder 5 when raising the substrate holder 5, first, the substrate holder 5 is moved forward from the edge portion 1 1 of the base 3, and then the substrate holder 5 is rotated about the rotation axis 1 0 of the hinge 10. It may be rotated around 3 and lowered from the edge portion 1 1 of the base 3.
• the lower edge of the substrate holder 5 is smaller than the edge portion 1 1 of the base 3. swinging movement of the substrate holder 5 Do you may c this Yo that it caused to swing in the Hare by lowering are possible Ri by the configuration of the swing mechanism and this and various modifications.
• Each of the links 18 and 18 ' may be replaced, for example, with a jack (when the substrate holder 5 is raised and contracted and the jack is extended or contracted by replacing the jack, for example).
• the substrate holder 5 can be moved in the vertical direction, whereby the region on the large glass substrate which is desired to be visually observed can be disposed at a height position at which the observer's eye can easily inspect.
• the rocking mechanism consisted of a hinge 10 as a rocking fulcrum, a linear guide 15 as a pulling out mechanism, a link mechanism 1 7 etc.
• the hinges 10 and 10 'serving as the fulcrums of the substrate holder 5 may be configured to have both the swaying and the sliding function, or the substrate holder 5 may be a circular arc. It is also possible to use a rocking mechanism to move the
• the present invention is applied to a substrate inspection apparatus used in FPD production processes such as large LCDs and PDPs, and is not limited to a combination of a mask inspection and a microphone inspection, and may be used alone as a macro inspection.
• a substrate inspection apparatus used in FPD production processes such as large LCDs and PDPs
• inspection equipment for various substrates such as film thickness measurement and pattern inspection on large glass substrates, and mounting and removal of large glass substrates on large glass substrates. It can be used for delivery.

Landscapes

• Physics & Mathematics (AREA)
• General Physics & Mathematics (AREA)
• Chemical & Material Sciences (AREA)
• Analytical Chemistry (AREA)
• Immunology (AREA)
• Biochemistry (AREA)
• General Health & Medical Sciences (AREA)
• Life Sciences & Earth Sciences (AREA)
• Health & Medical Sciences (AREA)
• Pathology (AREA)
• Nonlinear Science (AREA)
• Crystallography & Structural Chemistry (AREA)
• Optics & Photonics (AREA)
• Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
• Liquid Crystal (AREA)
• Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
• Testing Of Optical Devices Or Fibers (AREA)

Priority Applications (1)

Applications Claiming Priority (2)

Publications (1)

Family

ID=29706474

Family Applications (1)

Country Status (5)

Families Citing this family (12)

Citations (12)

• 2002
  • 2002-05-30 JP JP2002157941A patent/JP3931111B2/ja not_active Expired - Fee Related
• 2003
  • 2003-05-27 CN CNB038007347A patent/CN100483115C/zh not_active Expired - Fee Related
  • 2003-05-27 WO PCT/JP2003/006611 patent/WO2003102561A1/ja active Application Filing
  • 2003-05-27 KR KR10-2004-7001004A patent/KR20050005390A/ko not_active Application Discontinuation
  • 2003-05-28 TW TW092114436A patent/TWI313039B/zh not_active IP Right Cessation

Patent Citations (12)

Also Published As

Similar Documents

Legal Events