Classifications

• • C—CHEMISTRY; METALLURGY
  • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
  • C09G—POLISHING COMPOSITIONS; SKI WAXES
  • C09G1/00—Polishing compositions
  • C09G1/02—Polishing compositions containing abrasives or grinding agents
• • B—PERFORMING OPERATIONS; TRANSPORTING
  • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
  • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
  • B01J23/00—Catalysts comprising metals or metal oxides or hydroxides, not provided for in group B01J21/00
  • B01J23/70—Catalysts comprising metals or metal oxides or hydroxides, not provided for in group B01J21/00 of the iron group metals or copper
  • B01J23/74—Iron group metals
• • C—CHEMISTRY; METALLURGY
  • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
  • C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
  • C09K3/00—Materials not provided for elsewhere
  • C09K3/14—Anti-slip materials; Abrasives
  • C09K3/1409—Abrasive particles per se
• • C—CHEMISTRY; METALLURGY
  • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
  • C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
  • C09K3/00—Materials not provided for elsewhere
  • C09K3/14—Anti-slip materials; Abrasives
  • C09K3/1436—Composite particles, e.g. coated particles
• • C—CHEMISTRY; METALLURGY
  • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
  • C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
  • C09K3/00—Materials not provided for elsewhere
  • C09K3/14—Anti-slip materials; Abrasives
  • C09K3/1454—Abrasive powders, suspensions and pastes for polishing
  • C09K3/1463—Aqueous liquid suspensions
• • H—ELECTRICITY
  • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
  • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
  • H10P52/00—Grinding, lapping or polishing of wafers, substrates or parts of devices
• • H—ELECTRICITY
  • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
  • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
  • H10P52/00—Grinding, lapping or polishing of wafers, substrates or parts of devices
  • H10P52/40—Chemomechanical polishing [CMP]
  • H10P52/403—Chemomechanical polishing [CMP] of conductive or resistive materials
• • H—ELECTRICITY
  • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
  • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
  • H10P95/00—Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass
  • H10P95/06—Planarisation of inorganic insulating materials
  • H10P95/062—Planarisation of inorganic insulating materials involving a dielectric removal step
• • H01L21/304—

Definitions

• the present invention relates to a polishing slurry composition, particularly to a chemical-mechanical polishing slurry composition.
• the polishing slurry composition of the present invention may prevent change such as pH of the slurry composition over time under an acidic condition and thus may have good storage property for a long time.
• a semiconductor chip to which an integrated circuit technology is applied includes a number of functional elements such as transistors, capacitors, resistors, and the like, and these individual functional elements are connected to each other by a wire patterned in a predetermined shape to form a circuit.
• the size of the integrated semiconductor chip has been reduced and the functionality thereof has been expanded over several generations.
• multilevel interconnection technologies of the electrical elements have been actively studied and developed. For example, for manufacturing the semiconductor device with the multilevel interconnection, the planarization process of metal film should be carried out. Generally, it is not easy to polish the metal film because of the metal film having high strength, therefore for effectively polishing the metal film, the metal film is transformed to metal oxide which has relatively low strength and then is polished.
• silica when used as an abrasive in the slurry composition for polishing a metal film, the longer the storage time of the slurry composition in an acidic condition, the more changes such as an increase in particle size or pH over time, which may lead to problems in its shelf life time.
• the polishing slurry composition may have a long-term storage stability with a little change in chemical and/or physical condition even in long-term storage, while maintaining excellent polishing performance, in an acidic condition.
• the present invention provides a polishing slurry composition (or “chemical-mechanical slurry polishing composition”) that may include an abrasive; an amount of about 0.000006 to 0.01 weight % of an aluminum component based on the total weight of the polishing slurry composition; and a solvent.
• the solvent may suitably include water.
• the abrasive may suitably include one or more selected from the group consisting of fumed silica and colloidal silica.
• the polishing slurry composition may suitably include the abrasive in an amount of about 0.001 to 20 weight % based on the total weight of the polishing slurry composition.
• a number of silanol groups on a surface of the abrasive may be from about 1 to about 10/nm 2 .
• the aluminum component may suitably include one or more selected from the group consisting of an aluminum salt, an aluminum atom and an aluminum ion.
• the aluminum component may be attached or absorbed on the surface of the abrasive.
• the aluminum component may further include one or more selected from the group consisting of chloride (Cl), sulfate (SO 4 ), ammonium (NH 4 ), potassium (K), hydroxide (OH), a methylate (CH 3 ) and phosphorus (P).
• the number of the silanol groups on the surface of the abrasive and the content of the aluminum component may satisfy the requirement of the following Equation 1:
• S is the number of the silanol groups present on 1 nm 2 of the surface of the abrasive (unit: number/nm 2 ), and C is the content of the aluminum component (weight %) in the slurry composition.
• the polishing slurry composition may further include an amount of about 0.005 to 10 weight % of an oxidizing agent based on the total weight of the polishing slurry composition.
• the polishing slurry composition may further include an amount of about 0.0001 to 0.05 weight % of a biocide based on the total weight of the polishing slurry composition.
• the polishing slurry composition may further include an amount of about 0.00001 to 0.5 weight % of a catalyst including nano ferrosilicon or iron salt compound based on the total weight of the polishing slurry composition.
• a polishing slurry composition may include an amount of about 0.001 to 20 weight % of an abrasive; an amount of about 0.000006 to 0.01 weight % of aluminum; an amount of about 0.00001 to 0.5 weight % of a catalyst including nano ferrosilicon or iron salt compound; and a solvent constituting the remaining balance of the polishing slurry composition, all the weight % are based on the total weight of the polishing slurry composition.
• the solvent may include water.
• the polishing slurry composition may further include a pH adjusting agent to adjust the pH to 1 to 6; and an amount of about 0.0001 to 0.05 weight % of a biocide based on the total weight of the polishing slurry composition.
• the pH adjusting agent may suitably include one or more selected from the group consisting of nitric acid, hydrochloric acid, sulfuric acid, potassium hydroxide, sodium hydroxide, tetramethylammonium hydroxide, and tetrabutylammonium hydroxide.
• the polishing slurry composition may further include an amount of about 0.005 to 10 weight % of an oxidizing agent based on the total weight of the polishing slurry composition.
• the number of the silanol groups on the surface of the abrasive and the content of the aluminum component may satisfy the requirement of the above Equation 1.
• a polishing slurry composition may include: an amount of about 0.001 to 20 weight % of an abrasive; an amount of about 0.000006 to 0.01 weight % of an aluminum component; an amount of about 0.00001 to 0.5 weight % of a catalyst including nano ferrosilicon or iron salt compound; an amount of about 0.005 to 10 weight % of an oxidizing agent; and a solvent constituting the remaining balance of the polishing slurry composition, all the weight % are based on the total weight of the polishing slurry composition.
• the solvent may include water.
• the slurry composition according to the present invention may have superior stability having improved shelf life time suitable for long time storage, and increase of scratches or polishing rate change may be prevented when using the polishing slurry composition.
• a conventional slurry composition may have decreased polishing performance and cause scratch and the polishing rate change due to the pH increase in the acidic region during with a long time.
• the term “about” is understood as within a range of normal tolerance in the art, for example within 2 standard deviations of the mean. “About” can be understood as within 10%, 9%, 8%, 7%, 6%, 5%, 4%, 3%, 2%, 1%, 0.5%, 0.1%, 0.05%, or 0.01% of the stated value. Unless otherwise clear from the context, all numerical values provided herein are modified by the term “about.”
• a polishing slurry composition (or “chemical-mechanical polishing slurry composition”) that includes an abrasive, and an aluminum component.
• the polishing slurry composition may include an abrasive containing silanol groups on a surface thereof, an aluminum component and a solvent.
• the slurry composition may provide improvement in polishing speed and cause less scratch formation. Additionally, the slurry composition may also have substantially improved stability and thus, for example, may be stored for a long period of time.
• the “abrasive” as used herein refers to a material used for treating, modifying or improving a surface of an object by means of grinding, polishing, rubbing, sanding, finishing, or the like as applying friction to the surface together with the material.
• the abrasive, or the abrasive composition may include modification or functional chemical groups imparting chemical and/or physical effects. For example, such modification may change or maintain various acid/base properties in the abrasive composition.
• the abrasive may include particles having suitable size or shapes to improve grinding or surface treating efficiency.
• the abrasive may include particles having a diameter in nanometer scale length, for example, less than about 900 nm, less than about 800 nm, less than about 700 nm, less than about 600 nm, less than about 500 nm, less than about 400 nm, less than about 300 nm, or less than about 200 nm.
• the abrasive may be used for polishing a film on an object, for example, an oxide film.
• the abrasive may include a silica-based abrasive such as fumed silica, colloidal silica, or a mixture thereof is used.
• the abrasive may be a silica-based abrasive, as such the abrasive may suitably include silanol groups (—SiOH, or —SiO ⁇ ) on the surface.
• the particle size of the abrasive may range of about 5 to 200 nm, or particularly of about 10 to 150 nm.
• the content of the abrasive in the polishing slurry composition may be of about 0.001 to 20 weight %, of about 0.01 to 10 weight %, or particularly of about 0.1 to 5 weight %, based on the total weight of the polishing slurry composition.
• the particle size of the abrasive is less than the predetermined range, for example, less than about 5 nm, or its content is less than the predetermined amount, for example, less than about 0.001 weight %, the polishing rate of the metal film may be reduced.
• the particle size of the abrasive is greater than the predetermined range, for example, greater than about 200 nm, or its content is greater than the predetermined amount, for example, greater than about 20 weight %, scratches on the metal film and the silicon oxide film may occur excessively.
• the silanol group on the surface of the silica-based abrasive may affect polishing rate of the abrasive. For instance, as the number of the silanol groups is increased on the surface of the abrasive, the polishing rate may be improved.
• the abrasive has suitable amount of silanol groups having chemical activity on the surface of the abrasive, the abrasive may easily bond with the hydroxyl group on the surface of the oxide film and the surface of the oxide film may be easily removed by physical friction, so that the polishing rate may increase.
• the more the silanol groups the lower the Si—O—Si condensation degree and the less the physical friction, so the scratches may be reduced.
• the amount of silanol groups is excessively large on the surface of the abrasive, the dispersion stability in the acidic condition may be lowered and the pH may be changed during storage for a long time.
• a storage stability problem such as a pH change occurs, even if the polishing performance such as a polishing rate is excellent, the product quality may not be maintained for a long period of time (e.g., for at least 3 to 6 months of storage life of a conventional slurry product) and may be reduced the merchantability.
• the slurry composition may suitably include a silica-based abrasive having the number of the silanol groups on the surface of the abrasive of about 1 to 10 number/nm 2 , of about 1 to 8 number/nm 2 , or particularly of about 2 to 5 number/nm 2 , thereby improving the polishing rate of the slurry composition and suppressing the occurrence of scratches.
• the number of the silanol groups is less than about 1 number/nm 2 , the polishing rate may be substantially reduced so that nonuniformity and scratches are increased.
• the synergistic effect of the polishing rate may be reduced, and the activity of the surface of the abrasive may increase substantially so that the dispersion stability may be decreased, and aggregation and precipitation may occur.
• the aluminum component as used in the chemical-mechanical polishing slurry composition of the present invention may be a pH stabilizer, which suppresses changes in pH during long-term storage of the slurry composition, thereby improving the stability of the slurry composition.
• the aluminum component may suitably include one or more aluminum salts (aluminum salt compounds).
• the aluminum component may further include one or more of a halide ion such as bromide (Br), chloride (Cl), or fluoride (F), a sulfate (SO 4 ), an ammonium (NH 4 ), a metal ion such as sodium (Na), or potassium (K), a hydroxide (OH), an alkyl group such as methyl (CH 3 ) or ethyl (CH 2 CH 3 ), and a phosphorus (P).
• the aluminum component may suitably include one or more of a chloride (Cl), a sulfate (SO 4 ), and a potassium (K).
• the aluminum component can include one or more selected from a group of aluminum chloride (e.g., AlCl 3 ), aluminum sulfate (e.g., Al 2 (SO 4 ) 3 ), ammonium aluminum sulfate (e.g., (NH 4 )Al(SO 4 ) 2 ), aluminum potassium sulfate (e.g., KAl(SO 4 ) 2 ), aluminum hydroxide (e.g., Al(OH) 3 ), trimethyl aluminum (e.g., C 6 H 18 Al 2 ), and aluminum phosphide (e.g., AlP).
• aluminum chloride e.g., AlCl 3
• aluminum sulfate e.g., Al 2 (SO 4 ) 3
• ammonium aluminum sulfate e.g., (NH 4 )Al(SO 4 ) 2
• aluminum potassium sulfate e.g., KAl(SO 4 ) 2
• aluminum hydroxide e
• the aluminum component may be aluminum chloride, aluminum sulfate, ammonium aluminum sulfate, aluminum potassium sulfate and mixture thereof; or aluminum chloride, aluminum sulfate, aluminum potassium sulfate and mixture thereof; or particularly aluminum chloride, aluminum sulfate and mixture thereof.
• the aluminum component may be present in the slurry composition in the form of an aluminum salt and/or in combination with an abrasive and/or an aluminum ion.
• the polishing slurry composition of the present invention may include the aluminum component, which may be present in one or more state selected from the group consisting of an aluminum salt, an aluminum atom adsorbed on the abrasive surface, and an aluminum ion (e.g., Al 2+ , or Al 3+ ).
• the aluminum component which may be present in one or more state selected from the group consisting of an aluminum salt, an aluminum atom adsorbed on the abrasive surface, and an aluminum ion (e.g., Al 2+ , or Al 3+ ).
• the chemical-mechanical polishing slurry composition of the present invention may include the content of the aluminum component in an amount of about 0.000006 to 0.01 weight %, or particularly of about 0.0001 to 0.005 weight %, based on the total weight of the slurry composition.
• the content of aluminum component is less than the predetermined amount, for example, less than about 0.000006 weight %, suppressing of the pH change with time may not be sufficient.
• the content of aluminum component is greater than the predetermined amount, for example, greater than about 0.01 weight %, the particle size may be increased.
• the electric double layer is compressed regardless of the number of the silanol groups on the surface of the silica to cause aggregation of the abrasive and increase the particle size.
• the pH may be effectively stabilized without increasing the particle size just by adding the predetermined amount of the aluminum component.
• excessive use of aluminum component may be undesirable because it may contaminate the semiconductor process.
• the pH change during the long-term storage of the slurry composition may be effectively suppressed and the slurry composition may be stabilized.
• S is the number of the silanol groups present on 1 nm 2 on the abrasive surface (unit: number/nm 2 ), and C is the content of the aluminum component (weight %) in the slurry composition.
• the silanol group number may be measured by typically used analysis methods in the related arts, for example, nuclear magnetic resonance (NMR) analysis, thermogravimetric analysis (TGA), Fourier transform infrared spectroscopy (FT-IR), titration using NaOH and the like.
• the content of the aluminum component is greater than the predetermined level, the more the number of the silanol groups(S) on the surface of the abrasive is, the more the thickness of the electric double layer may be compressed and then the dispersibility may be substantially decreased. Therefore, depending on the number of the silanol groups on the surface of the abrasive, when the excessive amount of aluminum component is contained, the dispersion stability may be deteriorated due to the increase in particle size. That is, the pH stabilizing effect may be obtained without increasing the particle size, by containing the predetermined amount of the aluminum components satisfying the requirements of Equation 1 depending on to the number of the silanol groups on the surface of the abrasive.
• the product ((S*C)*100) of the number of the silanol groups (S) and the content of the aluminum component (C) is not greater than 4.5.
• the remaining component constituting the chemical-mechanical polishing slurry composition may be a solvent.
• the solvent may suitably include a polar solvent such as water.
• the solvent may be water such as deionized water and distilled water.
• the content of water may be of about 79.95 to 99 weight %, or particularly, of about 89.95 to 99 weight % based on the total weight of the slurry composition.
• the solvent e.g., water
• the composition of the present invention includes an abrasive, an aluminum component and other additives used as needed, the other component except for the abrasive, the aluminum component and the additives is water.
• the pH of the chemical-mechanical polishing slurry composition may be of about 1 to 6, or particularly of about 1 to 4.
• the pH of the slurry composition is greater than the predetermined value, for example, greater than about 6, an oxide film may not be sufficiently formed, and the polishing rate may be decreased.
• the chemical-mechanical polishing slurry composition according to the present invention may further comprise a pH adjusting agent and/or a biocide, if necessary.
• the biocide as used herein refers to a material, which may be a natural or synthetic material, used to prohibit growth of microorganism.
• the pH adjusting agent as used herein may adjust the pH of the slurry composition to about 1 to 6, or particularly to about 1 to 4, and any pH adjusting agent (acid, base) used in a conventional slurry composition may be used without limitation.
• the pH adjusting agent may suitably include one or more acids, for example, selected from the group consisting of nitric acid, hydrochloric acid, and sulfuric acid, bases such as potassium hydroxide, sodium hydroxide, tetramethylammonium hydroxide, and tetrabutylammonium hydroxide, or particularly, tetramethylammonium hydroxide, and tetrabutylammonium hydroxide.
• the content of the pH adjusting agent may be of about 0.0005 to 5 weight %, or particularly of about 0.001 to 1 weight % based on the total weight of the slurry composition.
• the pH of the slurry composition may become difficult to control, and the pH adjusting agent may act as a metal impurity to cause wafer contamination and defects.
• the biocide as used herein may prevent the chemical-mechanical polishing slurry composition from being contaminated by microorganisms such as bacteria and fungi, and a commonly used product may be used.
• the biocide may suitably include isothiazolinone or a derivative thereof.
• Non-limiting examples of the biocide may include one or more selected from the group consisting of methyl isothiazolinone (MIT, MI), chloromethyl isothiazolinone (CMIT, CMI, MCI), benzisothiazolinone (BIT), octylisothiazolinone (OIT, OI), dichlorooctylisothiazolinone (DCOIT, DCOI), and butylbenzisothiazolinone (BBIT).
• the content of the biocide may be of about 0.0001 to 0.05 weight %, or particularly of about 0.001 to 0.01 weight % by weight, based on the total weight of the slurry composition.
• the content of the biocide is less than the predetermined amount, for example, less than about 0.0001 weight %, the effect of inhibiting microorganisms may not be sufficient, and when the content of the biocide is greater than about 0.05 weight %, the dispersibility of the slurry composition may be deteriorated.
• the slurry composition according to the present invention can be used for polishing a metal film and an insulating film (e.g., oxide film such as SiO 2 ).
• the slurry composition may include an oxidizing agent when the object to be polished is a metal film such as tungsten (W), aluminum (Al), copper (Cu) and the like.
• the oxidizing agent as used herein may rapidly form an oxide film on the surface of the metal film to facilitate the polishing of the metal film, and a conventional oxidizing agents used in the slurry composition for chemical-mechanical polishing may be used without limitation.
• the oxidizing agent may suitably include one or more selected from hydrogen peroxide and potassium iodate.
• the oxidizing agent may oxidize a metal film such as a wafer, a substrate, or the like to a corresponding oxide.
• the content of the oxidizing agent may be of about 0.005 to 10 weight %, or particularly of about 0.2 to 5 weight %, based on the total weight of the slurry composition.
• the polishing rate of the metal film may be decreased, and when is content is greater than about the predetermined amount, for example, greater than about 20 weight %, the polishing efficiency may be decreased.
• the slurry composition may further include a catalyst.
• a catalyst commonly used in a slurry composition for chemical-mechanical polishing may be used without limitation.
• the catalyst may suitably include nano ferrosilicon (e.g., FeSi particles having a size in nanoscale), iron salt compounds (e.g., iron nitrate, iron chloride, iron sulfate, iron acetate, and the like) and the like.
• the content of the catalyst may be of about 0.00001 to 0.5 weight %, or particularly of about 0.001 to 0.05 weight %, based on the total weight of the slurry composition.
• the polishing rate of the metal film may be decreased.
• the reactivity may increase excessively, and the polishing rate may become uneven.
• the chemical-mechanical polishing slurry may include an amount of about 0.001 to 20 weight % of abrasive, an amount of about 0.000006 to 0.01 weight % of aluminum and the remaining balance of water, based on the total weight of the slurry composition.
• the chemical-mechanical polishing slurry may be suitably prepared by mixing and stirring, however the methods thereof are not limited thereto.
• the chemical-mechanical polishing slurry composition may further include an amount of about 0.0005 to 5 weight % of a pH adjusting agent, an amount of about 0.0001 to 0.05 weight % of a biocide, an amount of about 0.005 to 10 weight % of an oxidizing agent and an amount of about 0.00001 to 0.5 weight % of a catalyst, based on the total weight of the polishing slurry composition.
• Example 1 Colloidal 5 Aluminum 0.0001 0.000006 — — 3 silica chloride
• Example 2 Colloidal 5 Aluminum 0.01 0.002 — — 3 silica chloride
• Example 3 Colloidal 5 Aluminum 0.05 0.01 — — 3 silica chloride
• Example 4 Colloidal 5 Aluminum 0.01 0.0016 — — 3 silica sulfate
• Example 5 Colloidal 5 Aluminum 0.01 0.0006 — — 3 silica potassium sulfate
• Example 6 Colloidal 5 Ammonium 0.01 0.001 — — 3 silica aluminum sulfate
• Example 7 Fumed 5 Aluminum 0.01 0.002 Nano ferro 0.003 3 silica chloride silicon
• Example 8 Fumed 5
• Example 9 Fumed 5 Ammonium 0.02 0.002 Iron nitrate 0.015 3
• the slurry compositions prepared in Examples 1 to 11 and Comparative Examples 1 to 4 were stored at room temperature for 6 months, and then changes in pH and particle size with time were measured using a pH analyzer (Metrohm 704, Metrohm) and a particle size analyzer (ELS-Z, Otsuka Electronics).
• the change with time of pH is shown in the following Table 2, and the change with time (unit: nm) of the particle size is shown in Table 3 below.
• Comparative Example 3 included an amount of 0.000004 weight % of the aluminum component, the change in pH over time was reduced as compared with Comparative Example 1, but the effect thereof was insufficient.
• Comparative Example 4 in which the aluminum component content was 0.000006 weight % or greater, there was almost no change in pH over time compared to Comparative Examples 1 to 3.
• Comparative Example 3 included an amount of 0.000004 weight % of the aluminum component, the particle size was hardly changed but the effect of suppressing the pH change was insufficient.
• Examples 1 to 11 included an amount of about 0.000006 to 0.01 weight % of the aluminum component, the particle size hardly changed over time compared with Comparative Examples 1 and 2. However, when the aluminum component content was 0.01 weight % or greater, the particle size was rather increased as compared with Comparative Example 1, as in Comparative Example 4. Therefore, change of pH in the slurry composition with time was prevented by using an appropriate amount of the aluminum component.
• Tungsten (W) film of 8 inches and insulating layer (PE-TEOS) of 8 inches (blanket wafer) were loaded on Mirra 3400 of polisher (Applied Materials, Inc.) on which IC-1010 of polishing pad (Rohm & Haas Co. Ltd.) was mounted.
• the tungsten film and the insulating layer were polished for 60 seconds while supplying the slurry compositions of the Examples 1 to 8 and the Comparative Examples 1 to 4 to the wafer.
• 2 wt % of hydrogen peroxide was further mixed before the slurry composition was injected.
• the polishing conditions were listed on following Table 4.
• IC pressure, RR pressure, EC pressure, UC pressure each represents respectively Inter Chamber Pressure, Retainer Ring Pressure, External Chamber Pressure, Upper Chamber Pressure, which shows pressure condition in respective part of head on which the wafer was mounted.
• Removal rate of tungsten film and insulating layer was measured by using a resistance measuring instrument (CMT-2000, 4-point probe, Chang-min Tech Co., Ltd./Thermawave OP-2600, KLA TENCOR), and the result thereof was shown in following Table 5 (SiO 2 polishing rate) and Table 6 (tungsten(W) polishing rate).
• a slurry composition was prepared including colloidal silica 5 weight % having the number of the silanol groups as shown in Table 7 below, a pH adjusting agent (nitric acid or tetramethylammonium hydroxide) to adjust the pH to 2.5 and the remaining distilled water.
• the measurement of the number of the silanol groups (p[number/nm 2 ]) was carried out as follows using titration. First, an appropriate amount (100 ml or less) of the solution was prepared so that the total area of silica is 90 m 2 , and then a titration sample (X [ml]) was prepared.
• the pH of the slurry composition was adjusted to 3 using 0.1 M HNO 3 aqueous solution and stabilized sufficiently until the pH change amount became 0.01 or less. Thereafter, the pH was titrated to 10 with a 0.1 M NaOH aqueous solution at a rate of 0.5 mV/min or less.
• the required amount of 0.1M NaOH (Y [mol]) for areas without change in the number of H + and OH ⁇ moles of the titrant solution was determined.
• N A [number/mol] represents Avogadro's number
• S BET [m 2 /g] represents specific surface area of silica particles
• Cp[g/L] represents concentration of silica particles.
• the slurry composition was prepared comprising 5 weight % of colloidal silica having the number of the silanol groups as shown in Table 8 below, various contents of aluminum sulfate, a pH adjusting agent (nitric acid or tetramethylammonium hydroxide) to adjust the pH to 2.5, and the remaining distilled water.
• the pH change amount and the particle size change amount of the slurry composition thus prepared were measured and shown in Table 9.

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