US20040173312A1 - Vacuum exhaust apparatus and drive method of vacuum apparatus - Google Patents

Vacuum exhaust apparatus and drive method of vacuum apparatus Download PDF

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Publication number
US20040173312A1
US20040173312A1 US10/486,189 US48618904A US2004173312A1 US 20040173312 A1 US20040173312 A1 US 20040173312A1 US 48618904 A US48618904 A US 48618904A US 2004173312 A1 US2004173312 A1 US 2004173312A1
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US
United States
Prior art keywords
pump
vacuum
main pump
exhaust apparatus
check valve
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
US10/486,189
Other languages
English (en)
Inventor
Kouji Shibayama
Yuuichi Yamashita
Mitsuru Yahagi
Takahiko Tashima
Junichi Aikawa
Tomonari Tanaka
Yukio Kanke
Yuuji Fukaura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ulvac Inc
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2001327229A external-priority patent/JP4045362B2/ja
Priority claimed from JP2001328674A external-priority patent/JP3992176B2/ja
Priority claimed from JP2001332632A external-priority patent/JP3906973B2/ja
Priority claimed from JP2001333772A external-priority patent/JP3982673B2/ja
Application filed by Individual filed Critical Individual
Assigned to ULVAC, INC. reassignment ULVAC, INC. ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: SHIBAYAMA, KOUJI, YAMASHITA, YUUICHI
Publication of US20040173312A1 publication Critical patent/US20040173312A1/en
Priority to US12/070,265 priority Critical patent/US20080145238A1/en
Abandoned legal-status Critical Current

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/001—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K15/00—Check valves
    • F16K15/02—Check valves with guided rigid valve members
    • F16K15/04—Check valves with guided rigid valve members shaped as balls
    • F16K15/042—Check valves with guided rigid valve members shaped as balls with a plurality of balls
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2220/00—Application
    • F04C2220/10—Vacuum
    • F04C2220/12—Dry running

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
US10/486,189 2001-09-06 2002-09-05 Vacuum exhaust apparatus and drive method of vacuum apparatus Abandoned US20040173312A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
US12/070,265 US20080145238A1 (en) 2001-09-06 2008-02-15 Vacuum exhaust apparatus and drive method of vacuum exhaust apparatus

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
JP2001269742 2001-09-06
JP2001327229A JP4045362B2 (ja) 2001-09-06 2001-10-25 多段式容積移送型ドライ真空ポンプ
JP2001328674A JP3992176B2 (ja) 2001-10-26 2001-10-26 真空排気方法および真空排気装置
JP2001332632A JP3906973B2 (ja) 2001-10-30 2001-10-30 真空排気装置
JP2001333772A JP3982673B2 (ja) 2001-10-31 2001-10-31 真空排気装置の運転方法
PCT/JP2002/009048 WO2003023229A1 (fr) 2001-09-06 2002-09-05 Systeme de pompe a vide et procede de fonctionnement d'un systeme de pompe a vide

Related Child Applications (1)

Application Number Title Priority Date Filing Date
US12/070,265 Division US20080145238A1 (en) 2001-09-06 2008-02-15 Vacuum exhaust apparatus and drive method of vacuum exhaust apparatus

Publications (1)

Publication Number Publication Date
US20040173312A1 true US20040173312A1 (en) 2004-09-09

Family

ID=27531990

Family Applications (2)

Application Number Title Priority Date Filing Date
US10/486,189 Abandoned US20040173312A1 (en) 2001-09-06 2002-09-05 Vacuum exhaust apparatus and drive method of vacuum apparatus
US12/070,265 Abandoned US20080145238A1 (en) 2001-09-06 2008-02-15 Vacuum exhaust apparatus and drive method of vacuum exhaust apparatus

Family Applications After (1)

Application Number Title Priority Date Filing Date
US12/070,265 Abandoned US20080145238A1 (en) 2001-09-06 2008-02-15 Vacuum exhaust apparatus and drive method of vacuum exhaust apparatus

Country Status (5)

Country Link
US (2) US20040173312A1 (fr)
KR (1) KR100876318B1 (fr)
CN (1) CN100348865C (fr)
TW (1) TWI267581B (fr)
WO (1) WO2003023229A1 (fr)

Cited By (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2005038255A2 (fr) * 2003-10-17 2005-04-28 Ebara Corporation Appareil d'evacuation
EP1906022A1 (fr) * 2006-09-29 2008-04-02 Anest Iwata Corporation Appareil d'évacuation
EP1906023A1 (fr) * 2006-09-29 2008-04-02 Anest Iwata Corporation Appareil d'évacuation
EP1979619A1 (fr) * 2006-01-31 2008-10-15 Ebara Densan Ltd. Unité de pompe à vide
US20110164992A1 (en) * 2008-09-10 2011-07-07 Ulvac, Inc. Vacuum evacuation device
US20120219443A1 (en) * 2009-11-18 2012-08-30 Adixen Vacuum Products Method And Device For Pumping With Reduced Power Use
FR3001263A1 (fr) * 2013-01-18 2014-07-25 Adixen Vacuum Products Pompe a vide multi-etagee de type seche
US20150068399A1 (en) * 2011-12-14 2015-03-12 Heiner Kösters Device and Method for Evacuating a Chamber and Purifying the Gas Extracted From Said Chamber
US20160356273A1 (en) * 2015-06-05 2016-12-08 Agilent Technologies, Inc. Vacuum pump system with light gas pumping and leak detection apparatus comprising the same
US20170122321A1 (en) * 2014-06-27 2017-05-04 Ateliers Busch Sa Method of Pumping in a System of Vacuum Pumps and System of Vacuum Pumps
US20170122319A1 (en) * 2014-06-26 2017-05-04 Leybold Gmbh Vacuum pump system
WO2017196295A1 (fr) * 2016-05-09 2017-11-16 Cummins Inc. Piston régulateur de pression à clapet anti-retour intégré
EP3198148B1 (fr) 2014-09-26 2020-02-26 Ateliers Busch S.A. Système de pompage pour générer un vide et procédé de pompage au moyen de ce système de pompage
CN111120261A (zh) * 2020-02-18 2020-05-08 福建华佳彩有限公司 一种真空泵节能装置
CN112045837A (zh) * 2020-09-01 2020-12-08 中国建筑土木建设有限公司 防浆液流入装置及利用该装置进行真空压浆的施工方法
WO2022034324A1 (fr) * 2020-08-13 2022-02-17 Edwards Limited Clapet anti-retour et appareil à clapet anti-retour pour système à vide
US20220299030A1 (en) * 2019-07-17 2022-09-22 Pfeiffer Vacuum Pump unit

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US7189066B2 (en) 2004-05-14 2007-03-13 Varian, Inc. Light gas vacuum pumping system
WO2010055665A1 (fr) * 2008-11-14 2010-05-20 アルバック・クライオ株式会社 Dispositif de pompage à vide, dispositif de traitement sous vide et procédé de traitement sous vide.
CN102713287B (zh) * 2009-12-28 2015-04-15 株式会社爱发科 真空排气装置、真空排气方法及基板处理装置
DE102010033091A1 (de) * 2010-08-02 2012-02-02 Schaeffler Technologies Gmbh & Co. Kg Hydraulisches Spannausgleichselement
WO2012086767A1 (fr) * 2010-12-22 2012-06-28 株式会社アルバック Dispositif d'établissement d'un vide, dispositif de traitement sous vide et procédé d'établissement d'un vide
KR101039875B1 (ko) * 2011-01-21 2011-06-09 솔로몬산업 주식회사 유지보수가 용이한 조립식 방음벽
KR101293653B1 (ko) * 2012-04-09 2013-08-13 조영만 다단식 썩션노즐을 구비한 감압장치
GB2502134B (en) * 2012-05-18 2015-09-09 Edwards Ltd Method and apparatus for adjusting operating parameters of a vacuum pump arrangement
DE102012220442A1 (de) 2012-11-09 2014-05-15 Oerlikon Leybold Vacuum Gmbh Vakuumpumpensystem zur Evakuierung einer Kammer sowie Verfahren zur Steuerung eines Vakuumpumpensystems
KR101385954B1 (ko) * 2012-11-14 2014-04-16 데이비드 김 다단형 건식 진공펌프
DE102013108090A1 (de) * 2013-07-29 2015-01-29 Hella Kgaa Hueck & Co. Pumpenanordnung
EP3505801B1 (fr) 2013-10-08 2020-06-17 Dayco IP Holdings, LLC Atténuation du bruit dans une unité de soupape anti-retour ou un appareil de production de vide
BR112016021852B1 (pt) 2014-04-04 2022-09-27 Dayco Ip Holdings, Llc Válvula de retenção de derivação e dispositivo de venturi apresentando a mesma
US10107240B2 (en) 2014-04-04 2018-10-23 Dayco Ip Holdings, Llc Check valves and Venturi devices having the same
CA2944825C (fr) * 2014-05-01 2021-04-27 Ateliers Busch Sa Methode de pompage dans un systeme de pompage et systeme de pompes a vide
JP6609626B2 (ja) 2014-05-30 2019-11-20 デイコ アイピー ホールディングス，エルエルシー エジェクタ、空圧式制御バルブ及び選択的なアスピレータを有する真空発生システム
JP6665116B2 (ja) 2014-06-06 2020-03-13 デイコ アイピー ホールディングス, エルエルシーDayco Ip Holdings, Llc ベンチュリーデバイスおよび／またはチェックバルブにおけるノイズ減衰
CN105201871A (zh) * 2014-06-16 2015-12-30 上海协微精密机械有限公司 用于大半导体行业的抽真空装置
EP3166826A4 (fr) 2014-07-10 2018-03-28 Dayco IP Holdings, LLC Dispositif venturi double
US10273978B2 (en) 2014-08-27 2019-04-30 Dayco IP, Holdings LLC Low-cost evacuator for an engine having tuned Venturi gaps
DE202014007963U1 (de) * 2014-10-01 2016-01-05 Oerlikon Leybold Vacuum Gmbh Vakuumpumpsystem
PT3201469T (pt) * 2014-10-02 2020-04-23 Ateliers Busch S A Sistema de bombagem para gerar um vácuo e processo de bombagem por meio deste sistema de bombagem
EP3242997B1 (fr) 2015-01-09 2019-09-25 Dayco IP Holdings, LLC Dispositif d'évacuation de ventilation de carter moteur
US9382826B1 (en) 2015-01-09 2016-07-05 Dayco Ip Holdings, Llc Noise attenuating member for noise attenuating units in engines
US10151283B2 (en) 2015-02-25 2018-12-11 Dayco Ip Holdings, Llc Evacuator with motive fin
US10316864B2 (en) 2015-04-13 2019-06-11 Dayco Ip Holdings, Llc Devices for producing vacuum using the venturi effect
US9982666B2 (en) 2015-05-29 2018-05-29 Agilient Technologies, Inc. Vacuum pump system including scroll pump and secondary pumping mechanism
KR102306207B1 (ko) 2015-07-17 2021-09-28 데이코 아이피 홀딩스 엘엘시 원동부 내의 원동 출구 및 복수의 하위 통로를 갖고 벤튜리 효과를 이용하는 진공 생성 장치
WO2017075390A1 (fr) 2015-10-28 2017-05-04 Dayco IP Holding, LLC Dispositifs venturi résistant à la formation de glace pour produire un vide à partir de gaz de carter de vilebrequin
CN106762650A (zh) * 2015-11-25 2017-05-31 中国科学院沈阳科学仪器股份有限公司 一种用于真空获得设备的节能控制系统及方法
CN106321435A (zh) * 2016-09-09 2017-01-11 武汉华星光电技术有限公司 降低干泵功耗的系统及方法
FR3065040B1 (fr) * 2017-04-07 2019-06-21 Pfeiffer Vacuum Groupe de pompage et utilisation
KR101978736B1 (ko) * 2017-09-18 2019-05-15 주식회사 이에스티 대상체 들뜸 방지용 정전척
KR20210096577A (ko) 2020-01-28 2021-08-05 (주)엘오티베큠 진공 시스템
GB2599160A (en) * 2020-09-29 2022-03-30 Leybold Gmbh Method for operating a pump system
CN114962269A (zh) * 2021-02-26 2022-08-30 中国科学院微电子研究所 真空泵及真空泵系统

Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2672266A (en) * 1950-12-19 1954-03-16 Sylvania Electric Prod Vacuum leak check valve
US3190284A (en) * 1961-10-23 1965-06-22 Kaiser Aluminium Chem Corp Container with mixing device
US3919968A (en) * 1973-11-29 1975-11-18 Siemens Ag Reaction device for pyrolytic deposition of semiconductor material
US5564907A (en) * 1992-09-03 1996-10-15 Matsushita Electric Industrial Co., Ltd. Evacuating apparatus
US5575853A (en) * 1994-07-01 1996-11-19 Tokyo Electron Limited Vacuum exhaust system for processing apparatus
US5711813A (en) * 1994-09-29 1998-01-27 Mitsubishi Denki Kabushiki Kaisha Epitaxial crystal growth apparatus
US5849078A (en) * 1996-02-29 1998-12-15 Shin-Etsu Handotai Co., Ltd. Method for growing single-crystalline semiconductor film and apparatus used therefor
US6644931B2 (en) * 2001-03-19 2003-11-11 Alcatel System for pumping low thermal conductivity gases
US6863019B2 (en) * 2000-06-13 2005-03-08 Applied Materials, Inc. Semiconductor device fabrication chamber cleaning method and apparatus with recirculation of cleaning gas

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62233492A (ja) * 1986-03-31 1987-10-13 Shimadzu Corp 油回転真空ポンプ
KR950007378B1 (ko) * 1990-04-06 1995-07-10 가부시끼 가이샤 히다찌 세이사꾸쇼 진공펌프
JP3331749B2 (ja) * 1994-06-27 2002-10-07 松下電器産業株式会社 真空ポンプ

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2672266A (en) * 1950-12-19 1954-03-16 Sylvania Electric Prod Vacuum leak check valve
US3190284A (en) * 1961-10-23 1965-06-22 Kaiser Aluminium Chem Corp Container with mixing device
US3919968A (en) * 1973-11-29 1975-11-18 Siemens Ag Reaction device for pyrolytic deposition of semiconductor material
US5564907A (en) * 1992-09-03 1996-10-15 Matsushita Electric Industrial Co., Ltd. Evacuating apparatus
US5575853A (en) * 1994-07-01 1996-11-19 Tokyo Electron Limited Vacuum exhaust system for processing apparatus
US5711813A (en) * 1994-09-29 1998-01-27 Mitsubishi Denki Kabushiki Kaisha Epitaxial crystal growth apparatus
US5849078A (en) * 1996-02-29 1998-12-15 Shin-Etsu Handotai Co., Ltd. Method for growing single-crystalline semiconductor film and apparatus used therefor
US6863019B2 (en) * 2000-06-13 2005-03-08 Applied Materials, Inc. Semiconductor device fabrication chamber cleaning method and apparatus with recirculation of cleaning gas
US6644931B2 (en) * 2001-03-19 2003-11-11 Alcatel System for pumping low thermal conductivity gases

Cited By (39)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20100209259A1 (en) * 2003-10-17 2010-08-19 Ebara Corporation Evacuation apparatus
WO2005038255A3 (fr) * 2003-10-17 2005-11-03 Ebara Corp Appareil d'evacuation
US20070104587A1 (en) * 2003-10-17 2007-05-10 Takeshi Kawamura Evacuation apparatus
WO2005038255A2 (fr) * 2003-10-17 2005-04-28 Ebara Corporation Appareil d'evacuation
US9541088B2 (en) * 2003-10-17 2017-01-10 Ebara Corporation Evacuation apparatus
EP1979619A4 (fr) * 2006-01-31 2013-07-24 Ebara Corp Unité de pompe à vide
US8251678B2 (en) 2006-01-31 2012-08-28 Ebara Corporation Vacuum pump unit
EP1979619A1 (fr) * 2006-01-31 2008-10-15 Ebara Densan Ltd. Unité de pompe à vide
US20090047142A1 (en) * 2006-01-31 2009-02-19 Ebara Densan Ltd. Vacuum pump unit
EP1906022A1 (fr) * 2006-09-29 2008-04-02 Anest Iwata Corporation Appareil d'évacuation
US20080080984A1 (en) * 2006-09-29 2008-04-03 Anest Iwata Corporation Evacuation apparatus
US20080080982A1 (en) * 2006-09-29 2008-04-03 Anest Iwata Corporation Evacuation apparatus
EP1906023A1 (fr) * 2006-09-29 2008-04-02 Anest Iwata Corporation Appareil d'évacuation
US20110164992A1 (en) * 2008-09-10 2011-07-07 Ulvac, Inc. Vacuum evacuation device
EP2330299A4 (fr) * 2008-09-10 2016-06-15 Ulvac Inc Dispositif d'évacuation de vide
TWI507604B (zh) * 2009-11-18 2015-11-11 Alcatel Lucent 具有低功率消耗之抽取方法及設備
EP2501936B1 (fr) * 2009-11-18 2016-07-27 Pfeiffer Vacuum Procede et dispositif de pompage a consommation d'energie reduite
US9175688B2 (en) * 2009-11-18 2015-11-03 Adixen Vacuum Products Vacuum pumping system having an ejector and check valve
US20120219443A1 (en) * 2009-11-18 2012-08-30 Adixen Vacuum Products Method And Device For Pumping With Reduced Power Use
US11802562B2 (en) 2011-12-14 2023-10-31 Sterling Industry Consult Gmbh Device and method for evacuating a chamber and purifying the gas extracted from said chamber
US20150068399A1 (en) * 2011-12-14 2015-03-12 Heiner Kösters Device and Method for Evacuating a Chamber and Purifying the Gas Extracted From Said Chamber
FR3001263A1 (fr) * 2013-01-18 2014-07-25 Adixen Vacuum Products Pompe a vide multi-etagee de type seche
EP2767717A1 (fr) * 2013-01-18 2014-08-20 Adixen Vacuum Products Pompe à vide multi-étagée de type sèche
US20170122319A1 (en) * 2014-06-26 2017-05-04 Leybold Gmbh Vacuum pump system
US10465686B2 (en) * 2014-06-26 2019-11-05 Leybold Gmbh Vacuum pump system
US20170122321A1 (en) * 2014-06-27 2017-05-04 Ateliers Busch Sa Method of Pumping in a System of Vacuum Pumps and System of Vacuum Pumps
TWI710702B (zh) * 2014-06-27 2020-11-21 瑞士商亞特里爾斯布契股份有限公司 真空幫浦系統中的抽泵方法及真空幫浦系統
TWI734588B (zh) * 2014-06-27 2021-07-21 瑞士商亞特里爾斯布契股份有限公司 真空幫浦系統中的抽泵方法及真空幫浦系統
US10760573B2 (en) * 2014-06-27 2020-09-01 Ateliers Busch Sa Method of pumping in a system of vacuum pumps and system of vacuum pumps
EP3198148B1 (fr) 2014-09-26 2020-02-26 Ateliers Busch S.A. Système de pompage pour générer un vide et procédé de pompage au moyen de ce système de pompage
TWI725943B (zh) * 2014-09-26 2021-05-01 瑞士商亞特里爾斯布契股份有限公司 用於產生真空的泵送系統及利用此泵送系統的泵送方法
US20160356273A1 (en) * 2015-06-05 2016-12-08 Agilent Technologies, Inc. Vacuum pump system with light gas pumping and leak detection apparatus comprising the same
US10094381B2 (en) * 2015-06-05 2018-10-09 Agilent Technologies, Inc. Vacuum pump system with light gas pumping and leak detection apparatus comprising the same
WO2017196295A1 (fr) * 2016-05-09 2017-11-16 Cummins Inc. Piston régulateur de pression à clapet anti-retour intégré
US20220299030A1 (en) * 2019-07-17 2022-09-22 Pfeiffer Vacuum Pump unit
US11815096B2 (en) * 2019-07-17 2023-11-14 Pfeiffer Vacuum Pump unit
CN111120261A (zh) * 2020-02-18 2020-05-08 福建华佳彩有限公司 一种真空泵节能装置
WO2022034324A1 (fr) * 2020-08-13 2022-02-17 Edwards Limited Clapet anti-retour et appareil à clapet anti-retour pour système à vide
CN112045837A (zh) * 2020-09-01 2020-12-08 中国建筑土木建设有限公司 防浆液流入装置及利用该装置进行真空压浆的施工方法

Also Published As

Publication number Publication date
US20080145238A1 (en) 2008-06-19
CN1541307A (zh) 2004-10-27
TWI267581B (en) 2006-12-01
WO2003023229A1 (fr) 2003-03-20
CN100348865C (zh) 2007-11-14
KR100876318B1 (ko) 2008-12-31
KR20040030968A (ko) 2004-04-09

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