TWI734588B - 真空幫浦系統中的抽泵方法及真空幫浦系統 - Google Patents
真空幫浦系統中的抽泵方法及真空幫浦系統 Download PDFInfo
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- F04C18/30—Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members
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- F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
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- F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
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Abstract
本發明係關於一種幫浦系統(SP,SPP)中的抽泵方法,其包含:一主要潤滑式旋轉葉片真空幫浦(3),其具有一連接至一真空室(1)的氣體入口埠(2)及一氣體出口埠(4),其在離開該幫浦系統(SP,SPP)的氣體出口(8)之前導入到一導管(5)內、一單向閥(6)其被設置在該導管(5)內介於該氣體出口埠(4)和該氣體出口(8)之間、及一輔助的潤滑式旋轉葉片真空幫浦(7),其並聯地連接至該單向閥(6)。依據此方法,該主要潤滑式旋轉葉片真空幫浦(3)被啟動,用以將容納在該真空室(1)內的氣體抽泵通過該氣體出口埠(4),在該主要潤滑式旋轉葉片真空幫浦(3)抽泵該真空室(1)內的氣體時及/或在該主要潤滑式旋轉葉片真空幫浦(3)保持一預定的壓力於該真空室(1)內時,該輔助的潤滑式旋轉葉片真空幫浦(7)被啟動並一直持續地操作。本發明亦關於一種能夠被用來實施此方法的幫浦系統(SP,SPP)。
Description
本發明係有關於一種能夠降低電力消耗以及在流率及幫浦系統內的最終真空度方面提高效能的抽泵方法,在該幫浦系統中主要幫浦是潤滑式旋轉葉片真空幫浦。本發明亦關於一種真空幫浦的系統,其可被用來實施依據本發明的方法。
在業界,提高真空幫浦的效能、降低安裝成本以及能量消耗的一般趨勢已在效能、能量節約、體積大小、傳動裝置等方面帶來顯著的改善。
現有技術顯示,為了要改善最終真空度及降低能量消耗,輔助級必須被添加在多級魯氏型(multi-stage Root)或多級爪型的真空幫浦內。對於螺旋真空幫浦而言,必須有額外的螺旋匝數及/或內壓縮比被提高。對於潤滑式旋轉葉片真空幫浦而言,典型地一或多個輔助級亦必須被串聯地添加,用以提高內壓縮比。
關於用來改良最終真空度及提高流率的真空幫浦系統,現有技術顯示魯氏型的增壓幫浦(booster pump)被設置在主要潤滑式旋轉葉片真空幫浦的上游處。此類型的系統體積大、用會產生可靠性問題的旁通閥來操作或使用測量、控制、調整或伺服控制的手段來操作。然而,這些控制、調整或伺服控制手段必須用主動方式來控制,而這必會造成該系統的構件數目、複雜度及成本的增加。
本發明的目的是要提出一種用於一真空幫浦系統中的抽泵方法,其可以降低將一室置於真空下或將該室保持在真空所需的電能,以及可以降低排出氣體的溫度。
本發明的目的亦是要提出一種用於一真空幫浦系統中的抽泵方法,和單一潤滑式旋轉葉片真空幫浦的幫助下在一真空室的抽泵期間所獲得的流率相比,本發明的方法可以在低壓下獲得一較高的流率。
本發明的目的亦是要提出一種用於一真空幫浦系統中的抽泵方法,和單一潤滑式旋轉葉片真空幫浦的幫助下在一真空室的抽泵期間所獲得的真空度相比,本發明的方法可以獲得更好的真空度。
本發明的這些目的可在一種抽泵方法的幫助下達成,該抽泵方法是在一真空幫浦系統的架構內達成的,該真空幫浦系統的構造主要包含一主要潤滑式旋轉葉
片真空幫浦,其具有一連接至一真空室的氣體入口埠及一在離開進入到大氣中或進入到其它設備之前導入到一配備有一單向閥的導管內的氣體出口埠。一輔助的潤滑式旋轉葉片真空幫浦被並聯地連接至該單向閥,它的出口進入到大氣中或在該單向閥之後重新接回至該主要幫浦的該導管。
此一抽泵方法是本案獨立請求項1所請的發明主體。該發明的不同的較佳實施例則是附屬請求項的發明主體。
依據本發明的方法因而主要包含在該主要潤滑式旋轉葉片真空幫浦經由該氣體入口埠抽泵在該真空室內的氣體的時候讓一輔助的潤滑式旋轉葉片真空幫浦一直持續地操作,而且該主要潤滑式旋轉葉片真空幫浦藉由將氣體經由它的出口排出氣體來將該真空室保持在一被界定的壓力(例如,最終真空度)。
依據一第一態樣,本發明係關於該主要潤滑式旋轉葉片真空幫浦和該輔助的潤滑式旋轉葉片真空幫浦的耦合不需要測量和特殊的裝置(例如,用於壓力、溫度、電流等等的感測器)、伺服控制(servo-control)或資料管理及計算。因此,適合實施依據本發明的抽泵方法的該幫浦系統包含最少的構件數量、具有最大的簡單性且比現有系統便宜很多。
依據本發明的方法的第二變化型,為了要符合特殊的要求,該輔助的潤滑式旋轉葉片真空幫浦的啟動
係以一種“全有或全無(all or nothing)”的方式來控制。該控制包含檢查一或多種參數且在放入到該輔助的潤滑式旋轉葉片真空幫浦的操作中或停止它時依循某些規則,這取決於某些預定的規則。該等由適當的感測器所提供的參數例如是該主要潤滑式旋轉葉片真空幫浦的馬達電流、在該主要潤滑式旋轉葉片真空幫浦的出口導管的空間內被該單向閥侷限的氣體的溫度或壓力、或這些參數的組合。
該輔助的潤滑式旋轉葉片真空幫浦的尺寸是由它的馬達的最小能量消耗所決定。它通常是單級式。它的標稱(nominal)流率被選擇為該主要潤滑式旋轉葉片真空幫浦的流率的函數,但亦將該主要潤滑式旋轉葉片真空幫浦的出口導管內被該單向閥侷限的空間的尺寸列入考量。該流率可以是該主要潤滑式旋轉葉片真空幫浦的標稱流率的1/500至1/5,但亦可以小或大於這些數值。
被設置在該導管內在該主要潤滑式旋轉葉片真空幫浦的出口的該單向閥可以是市面上可取得的標準元件。它的尺寸係依據該主要潤滑式旋轉葉片真空幫浦的標稱流率來決定。更具體地,可預見的是,該單向閥在該主要潤滑式旋轉葉片真空幫浦的抽吸端的壓力介於500mbar絕對值和最終真空度(例如,400mbar)之間時會關閉。
依據另一變化型,該主要潤滑式旋轉葉片真空幫浦是多級式。
依據另一變化型,該輔助的潤滑式旋轉葉片真空幫浦是多級式。
該輔助的潤滑式旋轉葉片真空幫浦較佳地是小尺寸。
依據另一變化型,該輔助的潤滑式旋轉葉片真空幫浦將氣體排放至該主要潤滑式旋轉葉片真空幫浦的該油分離器內。
依據又另一變化型,該輔助的潤滑式旋轉葉片真空幫浦被整合至該主要潤滑式旋轉葉片真空幫浦的該油分離器內。
由該真空室的一排空循環開始,該真空室內的壓力是高的,例如等於大氣壓力。當該主要潤滑式旋轉葉片真空幫浦壓縮時,在其出口處被排放的氣體的壓力係高於該大氣壓力,(如果在該主要幫浦的出口處的氣體是被直接排放至大氣中的話)或高於連接在其下游側的另一設備的壓力。這造成該單向閥打開。
當此單向閥打開時,該輔助的潤滑式旋轉葉片真空幫浦在該主要潤滑式旋轉葉片真空幫浦的操作參數下的動作被很輕微地感覺。相反地,當該單向閥在一特定的壓力下關閉時(因為在該真空室內的壓力於此時被下降),該輔助的潤滑式旋轉葉片真空幫浦的動作引起該真空室和該單向閥之後的該導管之間的壓力差逐漸減小。在該主要潤滑式旋轉葉片真空幫浦的出口處的壓力變成在該輔助的潤滑式旋轉葉片真空幫浦的入口處的壓力,在該出口處的壓力永遠都是該導管內在該單向閥之後的壓力。該輔助的潤滑式旋轉葉片真空幫浦抽泵的愈多,在該主要潤
滑式旋轉葉片真空幫浦的出口處被該單向閥侷限之封閉的空間內的壓降就愈大,因此介於該真空室和該主要潤滑式旋轉葉片真空幫浦的出口之間的壓力差會下降。
此壓力差讓該主要潤滑式旋轉葉片真空幫浦內的內滲漏更小並造成該真空室內壓力的下降更大,這可改善最終真空度。此外,該主要潤滑式旋轉葉片真空幫浦用於壓縮所消耗的能量愈來愈少且產生愈來愈少的壓縮熱。
在控制該輔助的潤滑式旋轉葉片真空幫浦方面,當該等感測器處在被界定的狀態或給定的初始值時,有一用於該幫浦系統的啟動的初始位置。當該主要潤滑式旋轉葉片真空幫浦抽泵該真空室的氣體時,該等參數(譬如,它的馬達的電流、在該出口導管的空間內的溫度及壓力)開始改變並到達被該等感測器偵測到的門檻值。當這些參數在一段時間之後回到初始範圍(在設定值之外)時,該輔助的潤滑式旋轉葉片真空幫浦被停止。
另一方面,亦很明顯的是,機械概念的研究企圖要減小介於該主要潤滑式旋轉葉片真空幫浦的氣體出口埠和該單向閥之間的空間,其目的是要能夠更快速地降低在該空間內的壓力。
SP:真空幫浦系統
1:真空室
2:抽吸埠
3:主要潤滑式旋轉葉片真空幫浦
4:空間
5:導管
6:單向閥
7:輔助的潤滑式旋轉葉片真空幫浦
8:氣體出口導管
9:抽吸埠
10:排放埠
11:感測器
12:感測器
13:感測器
SPP:真空幫浦系統
本發明的特徵及好處在將在下面伴隨著示範性實施例的描述內容中更詳細地出現,這些實施例是以舉
例的方式及非限制性的方式參照附圖被提出:
圖1以示意的方式代表一適合實施依據本發明的第一實施例的抽泵方法的真空幫浦系統;
圖2以示意的方式代表一適合實施依據本發明的第二實施例的抽泵方法的真空幫浦系統。
圖1顯示一適合實施依據本發明的第一實施例的抽泵方法的幫浦系統SP。
此真空幫浦系統SP包含一室1,其被連接至一主要潤滑式旋轉葉片真空幫浦3的抽吸埠2。該主要潤滑式旋轉葉片真空幫浦3的該氣體出口埠被連接至一導管5。一單向排放閥6被設置在該導管5內,該導管在該單向閥之後繼續進入到一氣體出口導管8內。當該單向閥6被關閉時形成一被侷限在該主要真空幫浦3的該氣體出口埠和該單向閥6之間的空間4。
該真空幫浦系統SP亦包含一輔助的潤滑式旋轉葉片真空幫浦7,其被並聯地連接至該單向閥6。該輔助的潤滑式旋轉葉片真空幫浦7的抽吸埠9被連接至該導管5的該空間4,且其排放埠10被連接至氣體出口導管8。
從該主要潤滑式旋轉葉片真空幫浦3的開始,該輔助的潤滑式旋轉葉片真空幫浦7亦被啟動。該主要潤滑式旋轉葉片真空幫浦3經由連接至其入口的抽吸埠
2抽吸在該室1內的氣體並壓縮該氣體,用以將壓縮氣體在其出口排入到該導管5內,然後通過該單向閥6。當到達該單向閥6的關閉壓力時,該單向閥關閉。從此刻開始,該輔助的潤滑式旋轉葉片真空幫浦7的抽泵讓空間4內的壓力逐漸地降低至其極限值壓力。同時,該主要潤滑式旋轉葉片真空幫浦3所消耗的電力逐漸減少。這發生在一很短的時間內,例如一個循環是在5至10秒內。
藉由較聰明地將該輔助的潤滑式旋轉葉片真空幫浦7的流率該單向閥6的關閉壓力如該主要潤滑式旋轉葉片真空幫浦3的流率及該室1的空間的一個函數般地調整,可以相對於該排空循環的持續時間減少在該單向閥6關閉之前的時間並因而減少該輔助的潤滑式旋轉葉片真空幫浦7的馬達在該單向閥6關閉之前這段期間的電力消耗。另一方面,構造簡單的好處給予該系統絕佳的可靠度以及比配備有可程式的自動化控制及/或速動控制器、受控制的閥、感測器等等的類似幫浦更低的價格。
圖2顯示一適合實施依據本發明的第二實施例的抽泵方法的真空幫浦系統SP。
相對於圖1所示的系統,示於圖2中的系統顯示一“受控制的”幫浦系統SPP,其進一步包含適合的感測器11,12,13,其控制該主要潤滑式旋轉葉片真空幫浦3的馬達電流(感測器11)、或在該主要潤滑式旋轉葉片真空幫浦的出口導管內受該單向閥6侷限的該空間內的氣體的壓力(感測器13)、或在該主要潤滑式旋轉葉片真空
幫浦的出口導管內受該單向閥6侷限的該空間內的氣體的溫度(感測器12)、或這些參數的組合。
實際上,當該主要潤滑式旋轉葉片真空幫浦3開始抽泵該真空室1的氣體時,該等參數(譬如,馬達的電流、在該出口導管的空間4內的氣體的溫度及壓力)開始改變並達到該等感測器測得的門檻值。對於馬達的電流而言,該門檻值可以是在一排空期間在沒有啟動該輔助真空幫浦下被測得的最大值的一百分比(例如,75%)。對於該氣體的溫度(其係在該出口導管的該被明確地界定的空間4內一位置被測得)而言,該門檻值可以是在一沒有啟動該輔助真空幫浦的排空循環期間測得的最大值的一百分比(例如,80%)。對於該氣體的壓力而言,該門檻值(例如,100mbar)被界定為兩個幫浦(即,該主要真空幫浦及該輔助真空幫浦)的流率的函數。在對於每一參數而言的一段特定的適當的時間長度之後,該輔助的潤滑式旋轉葉片真空幫浦7被啟動。當這些參數在對於每一參數而言的一段特定的適當的時間長度之後回到初始範圍(在設定數值之外)時,該輔助的潤滑式旋轉葉片真空幫浦7被停止。
當然,關於本發明的實施,本發明具有許多變化例。雖然不同的實施例已被描述,但應被瞭解的是,這些描述並不是要以耗盡的方式來指出所有可能的實施例。當然,用一等效手段來取代一被描述的手段是可在沒有偏離本發明的範圍下被預見到的。所有這些修改形成在
真空幫浦技術領域中熟習此技藝者的一般知識的一部分。
SP:真空幫浦系統
1:真空室
2:抽吸埠
3:主要潤滑式旋轉葉片真空幫浦
4:空間
5:導管
6:單向閥
7:輔助的潤滑式旋轉葉片真空幫浦
8:氣體出口導管
9:抽吸埠
10:排放埠
Claims (18)
- 一種真空幫浦系統(SP,SPP)中的抽泵方法,該真空幫浦系統包含:一主要潤滑式旋轉葉片真空幫浦(3),其具有一第一馬達及一連接至一真空室(1)的氣體入口埠(2),及一氣體出口埠(4),其在離開該真空幫浦系統(SP,SPP)的氣體出口(8)之前導入到一導管(5)內;一單向閥(6),其被設置在該導管(5)內介於該氣體出口埠(4)和該氣體出口(8)之間;及一輔助的潤滑式旋轉葉片真空幫浦(7),其具有一第二馬達且被並聯地連接至該單向閥(6),該方法的特徵在於:該主要潤滑式旋轉葉片真空幫浦(3)被啟動,用以將容納在該真空室(1)內的氣體抽泵通過該氣體出口埠(4);該輔助的潤滑式旋轉葉片真空幫浦(7)同時被啟動;且在該主要潤滑式旋轉葉片真空幫浦(3)抽泵該真空室(1)內的氣體時及/或在該主要潤滑式旋轉葉片真空幫浦(3)保持一預定的壓力於該真空室(1)內時,該輔助的潤滑式旋轉葉片真空幫浦(7)一直持續操作。
- 如請求項1之真空幫浦系統(SP,SPP)中的抽泵方法,其中該輔助的潤滑式旋轉葉片真空幫浦(7)的該出口重新接回在該單向閥(6)之後的該氣體出口(8)。
- 如請求項1或2之真空幫浦系統(SP,SPP)中的抽泵方法,其中該輔助的潤滑式旋轉葉片直空幫浦 (7)被作成能夠讓該第二馬達有最小能量消耗的大小。
- 如請求項1之真空幫浦系統(SP,SPP)中的抽泵方法,其中該輔助的潤滑式旋轉葉片真空幫浦(7)的標稱(nominal)流率被選擇為該主要潤滑式旋轉葉片真空幫浦(3)的出口導管(5)的由該單向閥(6)所界定的體積的函數。
- 如請求項4之真空幫浦系統(SP,SPP)中的抽泵方法,其中該輔助的潤滑式旋轉葉片真空幫浦的流率是該主要潤滑式旋轉葉片真空幫浦(3)的標稱流率的1/500至1/5。
- 如請求項1之真空幫浦系統(SP,SPP)中的抽泵方法,其中該輔助的潤滑式旋轉葉片真空幫浦(7)是單級式或多級式。
- 如請求項1之真空幫浦系統(SP,SPP)中的抽泵方法,其中該單向閥(6)係在該主要潤滑式旋轉葉片真空幫浦(3)的抽吸端的壓力介於500mbar絕對值和最終真空度之間時關閉。
- 如請求項1之真空幫浦系統(SP,SPP)中的抽泵方法,其中該輔助的潤滑式旋轉葉片真空幫浦(7)將氣體排放至該主要潤滑式旋轉葉片真空幫浦(3)的該油分離器內。
- 如請求項1之真空幫浦系統(SP,SPP)中的抽泵方法,其中該輔助的潤滑式旋轉葉片真空幫浦(7)被整合至該主要潤滑式旋轉葉片真空幫浦(3)的該油分離 器內。
- 一種真空幫浦系統(SP,SPP),包含:一主要潤滑式旋轉葉片真空幫浦(3),其具有一第一馬達及一連接至一真空室(1)的氣體入口埠(2),及一氣體出口埠(4),其在離開該真空幫浦系統(SP,SPP)的氣體出口(8)之前導入到一導管(5)內;一單向閥(6),其被設置在該導管(5)內介於該氣體出口埠(4)和該氣體出口(8)之間;及一輔助的潤滑式旋轉葉片真空幫浦(7),其具有一第二馬達且被並聯地連接至該單向閥(6),該真空幫浦系統(SP,SPP)的特徵在於:該輔助的潤滑式旋轉葉片真空幫浦(7)被配置成與該主要潤滑式旋轉葉片真空幫浦(3)被同時啟動,以及該輔助的潤滑式旋轉葉片真空幫浦(7)被配置成能夠在該主要潤滑式旋轉葉片真空幫浦(3)抽泵該真空室(1)內的氣體時及/或在該主要潤滑式旋轉葉片真空幫浦(3)保持一預定的壓力於該真空室(1)內時一直被活動。
- 如請求項10之真空幫浦系統,其中該輔助的潤滑式旋轉葉片真空幫浦(7)的該出口重新接回在該單向閥(6)之後的該氣體出口(8)。
- 如請求項10或11之真空幫浦系統,其中該輔助的潤滑式旋轉葉片真空幫浦(7)被作成能夠讓該第二馬達有最小能量消耗的大小。
- 如請求項10之真空幫浦系統,其中該輔 助的潤滑式旋轉葉片真空幫浦(7)的標稱(nominal)流率被選擇為該主要潤滑式旋轉葉片真空幫浦(3)的出口導管(5)的由該單向閥(6)所界定的體積的函數。
- 如請求項13之真空幫浦系統,其中該輔助的潤滑式旋轉葉片真空幫浦的流率是該主要潤滑式旋轉葉片真空幫浦(3)的標稱流率的1/500至1/5。
- 如請求項10之真空幫浦系統,其中該輔助的潤滑式旋轉葉片真空幫浦(7)是單級式或多級式。
- 如請求項10之真空幫浦系統,其中該單向閥(6)係在該主要潤滑式旋轉葉片真空幫浦(3)的抽吸端的壓力介於500mbar絕對值和最終真空度之間時關閉。
- 如請求項10之真空幫浦系統,其中該輔助的潤滑式旋轉葉片真空幫浦(7)將氣體排放至該主要潤滑式旋轉葉片真空幫浦(3)的該油分離器內。
- 如請求項10之真空幫浦系統,其中該輔助的潤滑式旋轉葉片真空幫浦(7)被整合至該主要潤滑式旋轉葉片真空幫浦(3)的該油分離器內。
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2014
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- 2014-06-27 BR BR112016030498-5A patent/BR112016030498B1/pt active IP Right Grant
- 2014-06-27 PL PL14738765T patent/PL3161318T3/pl unknown
- 2014-06-27 PT PT147387658T patent/PT3161318T/pt unknown
- 2014-06-27 WO PCT/EP2014/063725 patent/WO2015197138A1/fr active Application Filing
- 2014-06-27 US US15/321,839 patent/US10760573B2/en active Active
- 2014-06-27 CN CN201480080173.7A patent/CN106662108A/zh active Pending
- 2014-06-27 ES ES14738765T patent/ES2774438T3/es active Active
- 2014-06-27 DK DK14738765.8T patent/DK3161318T3/da active
- 2014-06-27 AU AU2014398770A patent/AU2014398770A1/en not_active Abandoned
- 2014-06-27 EP EP14738765.8A patent/EP3161318B1/fr not_active Revoked
- 2014-06-27 RU RU2017102492A patent/RU2666720C2/ru active
- 2014-06-27 KR KR1020177002586A patent/KR102223057B1/ko active IP Right Grant
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- 2015-06-25 TW TW104120571A patent/TWI710702B/zh active
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Also Published As
Publication number | Publication date |
---|---|
EP3161318A1 (fr) | 2017-05-03 |
TW201608135A (zh) | 2016-03-01 |
BR112016030498B1 (pt) | 2022-06-28 |
JP6608394B2 (ja) | 2019-11-20 |
RU2017102492A3 (zh) | 2018-07-27 |
US11725662B2 (en) | 2023-08-15 |
WO2015197138A1 (fr) | 2015-12-30 |
RU2017102492A (ru) | 2018-07-27 |
PL3161318T3 (pl) | 2020-08-10 |
TWI710702B (zh) | 2020-11-21 |
CA2953455C (fr) | 2022-03-29 |
US10760573B2 (en) | 2020-09-01 |
AU2019204608A1 (en) | 2019-07-18 |
TW202043623A (zh) | 2020-12-01 |
US20170122321A1 (en) | 2017-05-04 |
AU2017100332A4 (en) | 2017-04-27 |
ES2774438T3 (es) | 2020-07-21 |
DK3161318T3 (da) | 2020-03-09 |
AU2014398770A1 (en) | 2017-01-19 |
AU2019204608B2 (en) | 2021-07-22 |
RU2666720C2 (ru) | 2018-09-11 |
BR112016030498A2 (zh) | 2017-08-22 |
CA2953455A1 (fr) | 2015-12-30 |
PT3161318T (pt) | 2020-03-06 |
US20200318640A1 (en) | 2020-10-08 |
JP2017523339A (ja) | 2017-08-17 |
KR102223057B1 (ko) | 2021-03-05 |
EP3161318B1 (fr) | 2020-02-05 |
KR20170028381A (ko) | 2017-03-13 |
CN106662108A (zh) | 2017-05-10 |
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