WO2011039812A1 - Pompe à vide volumétrique sèche - Google Patents

Pompe à vide volumétrique sèche Download PDF

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Publication number
WO2011039812A1
WO2011039812A1 PCT/JP2009/005055 JP2009005055W WO2011039812A1 WO 2011039812 A1 WO2011039812 A1 WO 2011039812A1 JP 2009005055 W JP2009005055 W JP 2009005055W WO 2011039812 A1 WO2011039812 A1 WO 2011039812A1
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WO
WIPO (PCT)
Prior art keywords
pump
communication path
chamber
dry vacuum
type dry
Prior art date
Application number
PCT/JP2009/005055
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English (en)
Japanese (ja)
Inventor
小沢修
花岡隆
岩根松美
Original Assignee
樫山工業株式会社
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Filing date
Publication date
Application filed by 樫山工業株式会社 filed Critical 樫山工業株式会社
Priority to PCT/JP2009/005055 priority Critical patent/WO2011039812A1/fr
Priority to TW098136158A priority patent/TW201111634A/zh
Publication of WO2011039812A1 publication Critical patent/WO2011039812A1/fr

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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
    • F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
    • F04B37/16—Means for nullifying unswept space
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/001—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/02—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids specially adapted for several pumps connected in series or in parallel
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/06—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids specially adapted for stopping, starting, idling or no-load operation
    • F04C28/065—Capacity control using a multiplicity of units or pumping capacities, e.g. multiple chambers, individually switchable or controllable
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/123—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially or approximately radially from the rotor body extending tooth-like elements, co-operating with recesses in the other rotor, e.g. one tooth

Definitions

  • the present invention relates to a single-stage or multi-stage positive displacement dry vacuum pump, and more particularly to an improved technique for reducing the power consumption without using an auxiliary pump.
  • Root-type, screw-type and claw-type types are known as volume transfer type dry vacuum pumps.
  • these positive displacement vacuum pumps the following three methods are mainly employed in order to reduce power consumption.
  • the pump elements are multistaged, and the exhaust volume of the pump elements is sequentially reduced according to the compression performance of each stage from the intake port side to the exhaust port side. Since the pump element in the final stage placed in the pressure environment on the atmospheric pressure side (exhaust port side) has a smaller power consumption as the exhaust volume of the pump rotor is smaller, the power consumption can be reduced as a whole.
  • Patent Document 1 Japanese Patent No. 4045362.
  • the second method is to reduce the power consumption of the entire pump by reducing the pressure on the rear stage side (exhaust port side, atmosphere port side) of the pump with a separately prepared auxiliary pump.
  • a method using a mechanical vacuum pump as an auxiliary pump is disclosed in FIGS.
  • a method of reducing the power consumption of the entire pump by reducing the exhaust space in the final stage of the pump by using an ejector pump which is an injection pump instead of the mechanical vacuum pump has been proposed. This method is disclosed in Patent Document 2 (Japanese Patent Laid-Open No. 2007-100562).
  • the former method using a mechanical vacuum pump is advantageous in reducing the power consumption compared to other methods, but it is necessary to prepare another pump, which increases the cost of the vacuum system, and the pump There is a drawback that the necessity of maintenance of itself occurs. Also, in the method of reducing the power consumption of the entire pump by depressurizing the exhaust space in the final stage of the pump using the latter ejector pump, in order to drive the ejector pump separately from the pump system, a predetermined flow rate is required. It is necessary to prepare a compressed driving gas (for example, nitrogen gas).
  • a compressed driving gas for example, nitrogen gas
  • the third method is to reduce power consumption by controlling the motor current, voltage, and rotation speed in a complex manner corresponding to the load using a pump drive source.
  • This method has a drawback that the control power supply (device) becomes expensive.
  • An object of the present invention is to provide a positive displacement dry vacuum pump capable of reducing power consumption during operation at low cost and effectively without using an auxiliary pump or a complicated drive control method, and drive control thereof. To propose a method.
  • the present invention provides: The gas sucked from the intake port is transferred to the exhaust port while being compressed via the pump chamber, and is discharged from the exhaust port to the atmosphere side through the exhaust path.
  • a vacuum chamber In a single-stage positive displacement dry vacuum pump to which a check valve is attached in order to prevent backflow of gas toward the mouth, A vacuum chamber; A first communication path having one end communicating with the decompression chamber and the other end communicating with a portion on the exhaust side of the pump chamber; A second communication path having one end communicating with the decompression chamber and the other end communicating with a portion on the intake side of the pump chamber; And a switching mechanism that switches each of the first communication path and the second communication path between a communication state and a cutoff state.
  • the suction port side is brought into a predetermined reduced pressure state.
  • the decompression chamber is evacuated by the pump chamber through the second communication path, and the decompression chamber becomes a predetermined decompression state.
  • the exhaust side portion of the pump chamber communicating with the decompression chamber is evacuated by the decompression chamber.
  • the multistage type volume transfer type dry vacuum pump to which the present invention is applied,
  • the gas sucked from the intake port is transferred toward the exhaust port while being sequentially compressed through a plurality of pump chambers connected in series, and is discharged from the exhaust port to the atmosphere side through the exhaust path.
  • a check valve is attached to prevent a back flow of gas from the atmosphere side toward the exhaust port.
  • a first communication path having one end communicating with the decompression chamber and the other end communicating with a portion on the exhaust side of the first pump chamber that is one of the plurality of pump chambers;
  • One end communicates with the decompression chamber, and the other end is one of the pump chambers disposed on the intake side of the first pump chamber or on the inlet side of the first pump chamber.
  • a second communication passage communicating with the suction side portion of the second pump chamber, And a switching mechanism that switches each of the first communication path and the second communication path between a communication state and a cutoff state.
  • the suction port side is brought into a predetermined reduced pressure state.
  • the decompression chamber is evacuated by the second pump chamber via the second communication path, and the decompression chamber becomes a predetermined decompression state.
  • the exhaust side portion of the first pump chamber communicating with the decompression chamber is evacuated by the decompression chamber.
  • a first on-off valve inserted in the first communication path and a second on-off valve inserted in the second communication path can be used.
  • the switching mechanism When the first communication path and the second communication path are selectively opened, the switching mechanism includes a first position that opens only the first communication path, a second position that opens only the second communication path, A three-way switching valve that can be switched to a third position that blocks both the first communication path and the second communication path can be used.
  • the second communication passage is prevented from flowing back to the decompression chamber via the second communication passage. It is desirable that a check valve is attached.
  • the first pump chamber to which the first communication path is connected can be the final pump chamber communicating with the exhaust port.
  • the first communication passage can be connected to a portion upstream of the check valve in the exhaust passage communicating with the exhaust side of the first pump chamber.
  • the first communication path can be connected to the upstream side of the check valve in the exhaust path.
  • the present invention is a drive control method for a single-stage or multi-stage volumetric transfer type dry vacuum pump configured as described above, A first step of driving the volume transfer type dry vacuum pump in a state where the first and second communication passages are held in a shut-off state; After the predetermined decompression state is formed at the intake port, only the second communication path is switched to the communication state, and the decompression chamber is continued for a predetermined time or until the decompression chamber is in the predetermined decompression state.
  • a process, The second step, the third step, and the fourth step are repeatedly performed.
  • a decompression chamber that can be evacuated by a pump body comprising a single-stage or multi-stage pump chamber is attached. After the vacuum chamber is evacuated, the pump body side is evacuated using the vacuum of the vacuum chamber to reduce the driving load. Therefore, power consumption can be reduced with a simple configuration as compared with the case where an auxiliary pump such as a mechanical vacuum pump or an ejector pump is provided. In addition, since it is only necessary to repeatedly switch the decompression chamber and the pump chamber on the pump body side between the communication state and the shut-off state, power consumption can be reduced without requiring complicated drive control.
  • FIG. 1 It is a schematic diagram which shows the structure of the multistage type volume transfer type dry vacuum pump which concerns on embodiment of this invention.
  • (A) is a partial cross-sectional side view showing a partial cross section of the pump body of the multi-stage Roots type dry vacuum pump of FIG. 1, and (b) is a schematic cross-sectional view of a portion cut along the line AA. .
  • FIG. 1 is a schematic diagram showing the configuration of a multi-stage roots type dry vacuum pump to which the present invention is applied.
  • 2A and 2B are a partial cross-sectional side view showing the pump body in a partial cross section and a schematic cross-sectional view taken along the line AA.
  • the Roots type dry vacuum pump 1 includes a pump body 2, a decompression chamber 3 attached to the pump body 2, and an airtight connection between the pump body 2 and the decompression chamber 3.
  • the first hose 4 (first communication path) and the second hose 5 (second communication path), the first vacuum valve 6 (first open / close valve) inserted in the first hose 4, and the second hose 5 It has the inserted 2nd vacuum valve 7 (2nd on-off valve).
  • a check valve 8 is also inserted in the second hose 5.
  • the pump main body 2 includes a cylindrical case 11 having a substantially elliptical cross section.
  • the cylindrical case 11 has one intake side end in the direction of the central axis 2a.
  • An intake port 12 is formed on the outer peripheral surface of 11a, and an exhaust port 13 is formed on the outer peripheral surface of the other exhaust side end portion 11b.
  • the pump chambers 14 to 18 of each stage constitute an energy-saving pump main body 2 that is arranged so that the exhaust volume gradually decreases from the intake port 12 side to the exhaust port 13 side.
  • a pair of root rotors R1, R2, R3, R4 and R5 are arranged in each pump chamber 14-18. These roots rotors R1 to R5 are rotationally driven by a motor 19 attached to the end surface of the cylindrical case 11 on the exhaust port side.
  • an exhaust side portion 18b defined by a roots rotor R5 disposed therein communicates with the exhaust port 13.
  • the main exhaust pipe 20 (exhaust passage) is connected to the exhaust port 13, and the front end of the main exhaust pipe 20 is opened to the atmosphere side via a check valve 21.
  • the check valve 21 prevents the backflow of gas flowing from the atmosphere side to the exhaust port 13 side. In other words, the check valve 21 is attached so that the direction toward the atmosphere side is the forward direction.
  • the decompression chamber 3 is a sealed container having a fixed volume, and one ends 4a and 5a of the first hose 4 and the second hose 5 are connected to the decompression chamber 3, respectively.
  • the other end 4b of the first hose 4 communicates with a portion 18b on the exhaust side of the fifth-stage pump chamber 18 (first pump chamber).
  • the main exhaust pipe 20 communicates with a portion upstream of the check valve 21.
  • the other end 5b of the other second hose 5 is connected to a portion 18a on the intake side of the fifth-stage pump chamber 18 or a pump chamber 14 to a front-stage side (intake port side) of the fifth-stage pump chamber 18. 17 communicates with a portion on the intake side. In this example, it communicates with the portion 16a on the intake side in the third-stage pump chamber 16 (second pump chamber) which is the middle stage.
  • the second vacuum valve 7 inserted in the second hose 5 is opened, the decompression chamber 3 and the suction side portion 16a of the third-stage pump chamber 16 are in communication with each other, and the second vacuum valve 7 is closed. And between these, it will be in the state interrupted
  • the second vacuum valve 7 can also be a fluid pressure drive type or an electromagnetic type. Further, the check valve 8 inserted in the second hose 5 is located between the end 5b and the second vacuum valve 7, and enters the decompression chamber 3 from the third-stage pump chamber 16 side. The flow of the gas which goes is blocked.
  • the first and second vacuum valves 6 and 7 are two-way valves, but a three-way valve can be used instead of these. In this case, only the first hose 6 is opened at the first switching position in the three-way valve, only the second hose 7 is opened at the second switching position, and the first and second hoses 6 are opened at the third switching position. , 7 can be blocked.
  • the exhaust port 22 a of the vacuum vessel 22 is connected to the intake port 12 of the multi-stage roots type dry vacuum pump 1 through the main intake pipe 23.
  • a main vacuum valve 24 is inserted in the main intake pipe 23.
  • the second vacuum valve 7 By opening the second vacuum valve 7 for a predetermined time (for example, about 30 seconds), the pressure in the decompression chamber 3 is reduced from 101.08 kPa which is atmospheric pressure. When the pressure in the decompression chamber 3 reaches a predetermined decompressed state (for example, when the pressure is reduced to 13.30 kPa), the second vacuum valve 7 is closed.
  • a predetermined decompressed state for example, when the pressure is reduced to 13.30 kPa
  • the first vacuum valve 6 inserted in the first hose 4 (for example, an inner diameter of 10 mm and a length of 60 cm) connecting the exhaust-side portion 18b of the pump final stage and the decompression chamber 3 is opened.
  • the inside of the decompression chamber 3 communicates with the portion 18b on the exhaust side.
  • the exhaust-side portion 18b is depressurized by the differential pressure between them.
  • FIG. 3 is a graph showing an example of the results of experiments conducted by the present inventors using the multi-stage roots type dry vacuum pump 1 having the above-described configuration, and shows the elapsed time and power consumption during energy-saving operation performed during steady operation. It shows a change.
  • the power consumption during steady operation with the standard roots-type dry vacuum pump 1 was 5.78 kW (time points t1 to t2 in FIG. 3).
  • the second vacuum valve is opened for approximately 30 seconds (time t2 in FIG. 3), the decompression chamber 3 in the atmospheric pressure state is decompressed to 13.30 kPa, and the second vacuum valve 7 is closed (in FIG. 3). Time t3).
  • the first vacuum valve 6 is opened, and the exhaust side portion 18b of the fifth pump chamber 18 of the first final stage is communicated with the decompression chamber 3 (internal pressure: 13.30 kPa) to decompress the exhaust side portion 18b. did.
  • the electric power immediately after depressurization when the first vacuum valve 6 was opened was 1.83 kW, which is about 32% of the electric power in the steady state (time point t4).
  • the gas on the exhaust side of the pump chamber 18 at the final stage flows into the decompression chamber 3, so that the pressure in the decompression chamber 3 increases with time.
  • the power consumption after 4.4 hours (time t5) was 4.42 kW. This is 77% of the steady state power, and it was confirmed that the energy saving operation is still maintained. That is, the average energy saving effect in one hour was about 50%.
  • the amount of power required to depressurize the 21 L decompression chamber 3 from atmospheric pressure (101.80 kPa) to 13.30 kPa was about 0.125 kW.
  • S0 indicates the amount of power during steady operation
  • the hatched portion S1 indicates the power saving amount
  • the vertical line portion S2 indicates the amount of increase in power for decompression of the decompression chamber 3.
  • the amount of power consumption that can be reduced depending on the amount of gas flowing in from the inlet of the pump may differ from the above-mentioned values.
  • FIG. 4 is a graph showing another example of the experimental results performed by the present inventors using the multi-stage roots type dry vacuum pump 1 having the above-described configuration, and the decompression operation of the decompression chamber 3 is constant after steady operation. It shows changes in elapsed time and power consumption when repeated at intervals of.
  • the decompression operation of the decompression chamber 3 was performed by switching between opening and closing of the second vacuum valve 7 and the first vacuum valve 6 every 23 minutes.
  • the decompression time of the decompression chamber 3 was 0.25 minutes (15 seconds).
  • S0 indicates the amount of power during steady operation
  • S2 (1) indicates the initial pressure of the decompression chamber 3.
  • the electric power increase amount at the time of exhaust is shown, and S2 (2), S2 (3), S2 (4).
  • FIG. 4 it was confirmed that the energy saving operation of 50% or more can be continued intermittently when the operating power of the standard pump is 100%.
  • FIG. 5 is a schematic diagram showing a modification of the multi-stage roots type dry vacuum pump 1.
  • the basic configuration of the multi-stage roots type dry vacuum pump 1A is the same as that of the multi-stage roots type dry vacuum pump 1. Accordingly, the corresponding parts are denoted by the same reference numerals, and description of those parts is omitted.
  • the decompression chamber 3 can communicate with a portion 17a on the intake side of the fourth-stage pump chamber 17 via the second hose 5 and the second vacuum valve 7. Also in this case, the effect of reducing power consumption can be obtained as in the case of the multi-stage roots type dry vacuum pump 1 described above.
  • a portion 14a on the intake side of the first-stage pump chamber 14 or the second stage It may be a portion 15 a on the intake side of the pump chamber 15. Further, in some cases, it may be the intake side portion 18a of the fifth-stage pump chamber 18.
  • the pump chamber (the connection destination of the first hose 4) to be evacuated by the decompression chamber 3 is not limited to the exhaust-side portion 18b of the fifth-stage pump chamber 18 in the final stage.
  • the exhaust-side portion 17b of the fourth-stage pump chamber 17 can be used.
  • the second hose 5 is connected to the intake side portion 17a of the fourth-stage pump chamber 17 or the intake-side portions 14a to 16a of the pump chambers 14 to 16 before the fourth stage. That's fine.
  • the connection destination of the first hose 4 is the exhaust-side portion 16b of the third-stage pump chamber 16
  • the connection destination of the second hose 5 is the intake-side portion of the third-stage pump chamber 16.
  • 16a or the portions 14a and 15a on the intake side of the pump chambers 14 and 15 in the preceding stage may be used.
  • the embodiment of the present invention has been described by taking the multi-stage root type dry vacuum pump as an example.
  • the method of the present invention for reducing the power consumption of the pump by reducing the pressure in the exhaust side space of the pump using the pressure difference with the decompression chamber is a screw type that is a volume transfer type dry vacuum pump of another type.
  • the present invention can be similarly applied to a claw-type dry vacuum pump, and the same effect can be obtained.
  • FIG. 6 is an explanatory view showing an example of a single-stage roots type dry vacuum pump to which the present invention is applied.
  • the single-stage roots-type dry vacuum pump 1B has the same configuration as that of the multi-stage roots-type dry vacuum pump 1 shown in FIG. 1 except that the pump body 2A includes a single-stage pump chamber 30. Accordingly, in FIG. 6, the corresponding parts are denoted by the same reference numerals.
  • the roots type dry vacuum pump 1B includes a pump body 2A having a single-stage pump chamber 30, a decompression chamber 3 attached to the pump body 2A, and an airtight first connecting the pump body 2A and the decompression chamber 3.
  • a second vacuum valve 7 (second on-off valve).
  • a check valve 8 is inserted in the second hose 5.
  • a pair of roots rotor R is disposed in the pump chamber 30. The roots rotor R is rotationally driven by a motor 19.
  • an intake side portion 30 a defined by a roots rotor R disposed therein communicates with the intake port 12, and an exhaust side portion 30 b communicates with the exhaust port 13.
  • a main exhaust pipe 20 exhaust passage
  • the check valve 21 prevents the backflow of gas flowing from the atmosphere side to the exhaust port 13 side.
  • the decompression chamber 3 is connected to one ends 4a and 5a of the first hose 4 and the second hose 5, respectively.
  • the other end 4 b of the first hose 4 communicates with a portion 30 b on the exhaust side of the pump chamber 30.
  • the main exhaust pipe 20 communicates with a portion upstream of the check valve 21.
  • the other end 5 b of the other second hose 5 communicates with a portion 30 a on the intake side of the pump chamber 30.
  • the decompression chamber 3 and the portion 30a on the intake side of the pump chamber 30 are in communication with each other, and when the second vacuum valve 7 is closed, these The space is shut off in an airtight state.
  • the check valve 8 inserted in the second hose 5 is located between the end 5b and the second vacuum valve 7, and prevents the flow of gas from the pump chamber 30 toward the decompression chamber 3. To do.
  • the single-stage roots-type dry vacuum pump 1B having this configuration also alternately performs vacuuming of the decompression chamber 3 and vacuuming of the site on the exhaust side of the pump chamber 30 by the decompression chamber 3.
  • power consumption can be reduced.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)

Abstract

L'invention concerne une pompe à vide volumétrique sèche (1) dotée d'une chambre (3) à dépression susceptible d'être mise en communication avec un site (16a) du côté aspiration d'un compartiment (16) de pompe de troisième étage d'un corps (2) de pompe par l'intermédiaire d'un deuxième tuyau flexible (5) et d'une deuxième soupape (7) de vide, et d'être mise en communication avec un site (18b) du côté refoulement d'un compartiment (18) de pompe du dernier étage par l'intermédiaire d'un premier tuyau flexible (4) et d'une première soupape (6) de vide. En cours d'entraînement, la deuxième soupape (7) de vide n'est ouverte que pendant une durée prédéterminée pour évacuer la chambre (3) à dépression, et la première soupape (6) de vide est ensuite ouverte afin d'évacuer le côté corps (2) de pompe en utilisant la dépression de la chambre (3) à dépression, ce qui entraîne une réduction de la charge d'entraînement. La consommation énergétique de la pompe peut être réduite sans devoir recourir à une pompe auxiliaire, en répétant l'évacuation de la chambre (3) à dépression et l'évacuation du côté corps (2) de pompe à l'aide de la chambre (3) à dépression.
PCT/JP2009/005055 2009-09-30 2009-09-30 Pompe à vide volumétrique sèche WO2011039812A1 (fr)

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PCT/JP2009/005055 WO2011039812A1 (fr) 2009-09-30 2009-09-30 Pompe à vide volumétrique sèche
TW098136158A TW201111634A (en) 2009-09-30 2009-10-26 Positive displacement dry vacuum pump

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PCT/JP2009/005055 WO2011039812A1 (fr) 2009-09-30 2009-09-30 Pompe à vide volumétrique sèche

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Cited By (4)

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GB2499217A (en) * 2012-02-08 2013-08-14 Edwards Ltd Vacuum pump with recirculation valve
JP2018173026A (ja) * 2017-03-31 2018-11-08 株式会社荏原製作所 ルーツ型真空ポンプ及びルーツ型真空ポンプの運転方法
CN110506163A (zh) * 2017-04-07 2019-11-26 普发真空公司 泵送单元及其用途
WO2021130117A1 (fr) * 2019-12-23 2021-07-01 Edwards, S.R.O. Pompe à vide à étages multiples

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JP6173939B2 (ja) * 2014-02-07 2017-08-02 株式会社東芝 ジェットポンプの振動抑制装置およびジェットポンプ

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