WO2010029750A1 - Dispositif d'évacuation de vide - Google Patents

Dispositif d'évacuation de vide Download PDF

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Publication number
WO2010029750A1
WO2010029750A1 PCT/JP2009/004496 JP2009004496W WO2010029750A1 WO 2010029750 A1 WO2010029750 A1 WO 2010029750A1 JP 2009004496 W JP2009004496 W JP 2009004496W WO 2010029750 A1 WO2010029750 A1 WO 2010029750A1
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WO
WIPO (PCT)
Prior art keywords
pump
exhaust
vacuum
main pump
pipe
Prior art date
Application number
PCT/JP2009/004496
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English (en)
Japanese (ja)
Inventor
柴山浩司
鈴木敏生
Original Assignee
株式会社アルバック
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社アルバック filed Critical 株式会社アルバック
Priority to KR1020117005262A priority Critical patent/KR101193479B1/ko
Priority to EP09812899.4A priority patent/EP2330299A4/fr
Priority to US13/063,040 priority patent/US20110164992A1/en
Priority to CN2009801321755A priority patent/CN102124225A/zh
Priority to JP2010528647A priority patent/JPWO2010029750A1/ja
Publication of WO2010029750A1 publication Critical patent/WO2010029750A1/fr

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
    • F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
    • F04B37/16—Means for nullifying unswept space
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
    • F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B39/00—Component parts, details, or accessories, of pumps or pumping systems specially adapted for elastic fluids, not otherwise provided for in, or of interest apart from, groups F04B25/00 - F04B37/00
    • F04B39/10—Adaptations or arrangements of distribution members
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B41/00—Pumping installations or systems specially adapted for elastic fluids
    • F04B41/06—Combinations of two or more pumps

Definitions

  • the present invention relates to a vacuum exhaust apparatus in which an auxiliary pump is connected in series to a main pump, and more particularly to a vacuum exhaust apparatus capable of improving the exhaust speed.
  • a mechanical booster pump that functions as a main pump
  • a dry pump hereinafter referred to as an auxiliary pump
  • the exhaust amount of the first stage MBP is made larger than the exhaust amount of the second stage DRP.
  • the displacement of the main pump is set to 5 to 10 times the displacement of the auxiliary pump.
  • a tank for releasing the impact pressure such as a buffer tank is arranged in the middle of the pipe between MBP and DRP, There is a configuration that mitigates transient pressure changes (see, for example, Patent Document 1).
  • bypass pipe for returning from the exhaust side of the main pump to the intake side of the main pump, or a gas having a predetermined pressure or higher.
  • a bypass pipe for sending the gas from the exhaust side of the main pump to the exhaust side of the auxiliary pump (see, for example, Patent Document 1).
  • a vacuum evacuation device to repeatedly evacuate from atmospheric pressure to medium vacuum, such as the loading chamber (hereinafter LC) of liquid crystal manufacturing equipment, the time to reach the target vacuum level to improve productivity Is one indicator of its performance. For this reason, such a vacuum evacuation apparatus is required to have high evacuation characteristics in a low vacuum region and a reduced pressure region near atmospheric pressure as well as in a medium vacuum region.
  • the present invention has been made to solve such a conventional problem, and is a vacuum evacuation apparatus capable of shortening the evacuation time to a target vacuum degree without significantly changing the structure of the main pump and the auxiliary pump. For the purpose of provision.
  • an evacuation apparatus includes a main pump; an auxiliary pump connected in series to the main pump; and a pump connecting between an exhaust port of the main pump and an intake port of the auxiliary pump.
  • the main pump includes a mechanical booster pump; between pipe and there the ratio of the maximum power of the motor of the main pump to the maximum pumping speed of the main pump is 5W / (m 3 / h) or more; the The inter-pump pipe is provided with a branch pipe branched from the middle; and a check valve is provided in the middle of the branch pipe to release the gas in the inter-pump pipe and prevent the backflow.
  • the main pump may include a plurality of the mechanical booster pumps arranged in parallel.
  • branch pipe may terminate at the exhaust pipe of the auxiliary pump.
  • the pressure loss of the gas flow rate of the check valve is 10000 Pa or less.
  • the main pump motor has a large output, and a check valve and a branch pipe are provided, so that the exhaust speed of the main pump is regulated to the exhaust speed of the auxiliary pump even near atmospheric pressure.
  • the exhaust speed near atmospheric pressure and in the low vacuum region can be improved. As a result, it is possible to shorten the exhaust time until the target vacuum degree is reached without significantly changing the structures of the main pump and the auxiliary pump.
  • FIG. 1 It is a schematic diagram explaining the structure of the vacuum exhaust apparatus which concerns on Embodiment 1 of this invention. It is a schematic diagram explaining the structure of the vacuum exhaust apparatus which concerns on the comparative example 1.
  • FIG. It is a schematic diagram explaining the structure of the vacuum exhaust apparatus which concerns on the comparative example 2.
  • FIG. It is a figure explaining the exhaust speed characteristic (exhaust performance) of the vacuum exhaust apparatus which concerns on Embodiment 1 and Comparative Examples 1 and 2 of this invention.
  • FIG. It is a schematic diagram explaining the structure of the vacuum exhaust apparatus which concerns on Embodiment 2 of this invention.
  • FIG. 1 is a schematic diagram for explaining the configuration of a vacuum exhaust apparatus according to Embodiment 1 of the present invention.
  • the vacuum exhaust apparatus 100 according to the first embodiment includes a main pump 1, an auxiliary pump 2, and a check valve 3.
  • the chamber 20 is, for example, a processing chamber or a transfer chamber constituting a semiconductor manufacturing apparatus or the like, and is evacuated by the evacuation apparatus 100.
  • the chamber 20 is a loading chamber (hereinafter, LC) of the liquid crystal manufacturing apparatus.
  • the gate valve 30 is provided in the middle of a pipe (intake pipe) 40 that connects the exhaust port of the LC 20 and the intake port of the MBP 1.
  • the gate valve 30 is opened when evacuation of the LC 20 released to the atmospheric pressure is started by the vacuum evacuation apparatus 100, and closed when the evacuated LC 20 is opened to the atmospheric pressure.
  • the main pump 1 and the auxiliary pump 2 are connected in series by a pipe (inter-pump pipe) 50 that connects the exhaust port of the main pump 1 and the intake port of the auxiliary pump 2.
  • the exhaust port of the auxiliary pump 2 is connected to a pipe (exhaust pipe) 60.
  • the main pump 1 and the auxiliary pump 2 are connected in series.
  • the first-stage pump directly connected to the exhaust port of the LC 20 via the gate valve 30 is a main pump
  • the second-stage pump disposed on the exhaust port side of the main pump is an auxiliary pump.
  • the main pump 1 is a mechanical booster pump (hereinafter referred to as MBP).
  • the auxiliary pump 2 is a dry pump (hereinafter referred to as DRP).
  • the main pump 1 is not limited to one configured by one (one stage) MBP, but is configured by a two-stage MBP called a multi-booster pump or a plurality of stages of MBP. The thing etc. may be sufficient.
  • MBP1 is an MBP that constitutes a conventional evacuation apparatus, in which the output of the motor is increased without changing the pump section.
  • the exhaust speed of MBP becomes maximum in the medium vacuum region (for example, when the suction pressure is 13 Pa).
  • the vacuum exhaust device 100 is provided with a pipe (branch pipe) 70 that is branched from the inter-pump pipe 50 and whose end is connected to the exhaust pipe 60 of the DRP 2.
  • a check valve 3 is provided in the middle of the pipe 70.
  • the check valve 3 When the pressure in the inter-pump pipe 50 becomes higher than the pressure in the exhaust pipe 60, the check valve 3 allows the gas in the inter-pump pipe 50 to escape to the exhaust pipe 60 and the gas in the exhaust pipe 60 Backflow to the inter-pump piping 50 is prevented.
  • the check valve 3 desirably has a sufficient capacity such that no pressure loss occurs even when the MBP 1 is operated at atmospheric pressure.
  • the pressure loss of the gas flow rate at the atmospheric pressure of the check valve 3 is desirably 10000 Pa or less.
  • the evacuation performance mainly in the low vacuum region can be improved by adopting the MBP1 having a high output motor.
  • the exhaust speed of MBP alone is larger than the exhaust speed of DRP alone.
  • the exhaust pressure of MBP is higher than the suction pressure in the vicinity of atmospheric pressure and in a low vacuum region, so the exhaust speed of MBP is governed by the exhaust speed of DRP.
  • MBP speed decreases.
  • the check valve 3 and the branch pipe 70 are provided in the vacuum exhaust apparatus according to the present embodiment, exhaust characteristics near atmospheric pressure can be improved.
  • the check valve 3 By disposing the check valve 3 with little pressure loss, when the exhaust pressure of MBP1 (pressure in the inter-pump piping 50) rises in the low vacuum region and in the vicinity of atmospheric pressure, the gas in the inter-pump piping 50 is changed. It can escape to the exhaust piping 60 and the exhaust pressure of MBP1 can be suppressed.
  • MBP1 can be used effectively as a blower, and as a result, it is not restricted by the exhaust performance of DRP2.
  • the MBP1 having a high output motor is employed, and the check valve 3 and the branch pipe 70 are provided, so that the exhaust speed in the low vacuum region and in the vicinity of the atmospheric pressure. As a result, the exhaust time of the LC 20 can be shortened.
  • FIG. 2 is a schematic diagram for explaining the configuration of the vacuum evacuation apparatus according to Comparative Example 1, and the same components as those in FIG.
  • the MBP 11 and the DRP 2 are arranged in series.
  • the MBP 11 includes a pump unit similar to the MBP 1 according to the first embodiment and a motor having a lower output than the MBP 1. That is, the ratio of the maximum power (unit: W) of the motor to the maximum exhaust speed of the MBP 11 is less than 5 W / (m 3 / h).
  • FIG. 3 is a schematic diagram for explaining the configuration of the vacuum evacuation apparatus according to Comparative Example 2, and the same components as those in FIG. 1 are denoted by the same reference numerals.
  • MBP1 and DRP2 are arranged in series. That is, the evacuation apparatus 102 according to Comparative Example 2 has a configuration in which the check valve 3 and the branch pipe 70 are not provided in the evacuation apparatus 100 according to Embodiment 1 (see FIG. 1).
  • MBP11 is changed to MBP1.
  • FIG. 4A and 4B are diagrams illustrating the exhaust characteristics of the vacuum exhaust apparatus according to Embodiment 1 and Comparative Examples 1 and 2 of the present invention.
  • FIG. 4A shows the exhaust velocity characteristics (exhaust performance) of the DRP 2 alone and the vacuum exhaust apparatus according to Embodiment 1 and Comparative Examples 1 and 2
  • FIG. 4B shows the pressure of the LC 20 in Embodiment 1 and Comparative Examples 1 and 2. It is a characteristic (LC20 pressure transition).
  • A is the atmospheric pressure A1 and a reduced pressure region near the atmospheric pressure (region near the atmospheric pressure)
  • B is a low vacuum region
  • C is a high vacuum region.
  • a1 is a characteristic of DRP2 alone
  • b1 and b2 are characteristics of the vacuum exhaust apparatus 101 according to Comparative Example 1
  • c1 and c2 are characteristics of the vacuum exhaust apparatus 102 according to Comparative Example 2
  • d1 and d2 are the first embodiment.
  • the characteristic of the vacuum exhaust apparatus 100 which concerns on is represented.
  • the region A has a range from 101300 Pa (atmospheric pressure A1) to 30000 Pa
  • the low vacuum region B has a range from 30000 Pa to 1330 Pa
  • the medium vacuum region C has a range of 1330 Pa or less.
  • the exhaust speed of the DRP2 alone is substantially constant in the atmospheric pressure vicinity region A and the low vacuum region B, and further remains constant even when entering the medium vacuum region C. It gradually decreases as the target vacuum is approached.
  • the evacuation speed of the evacuation apparatus 101 according to the comparative example 1 increases from the atmospheric pressure region A through the low vacuum region B and enters the medium vacuum region C. Go. Thereafter, the exhaust speed of the vacuum exhaust device 101 becomes maximum near the middle between the boundary between the low vacuum region B and the target ultimate degree of vacuum in the medium vacuum region C, and decreases as the target ultimate degree of vacuum is approached.
  • the exhaust speed of the comparative example 2 in the low vacuum region B is the case of the comparative example 1 (characteristic curve) by adopting MBP1 having a higher output than the MBP11 of the comparative example 1. It is improved over b1).
  • the exhaust performance of MBP1 is governed by the exhaust performance of DRP2, and therefore the exhaust speed of Comparative Example 2 is higher than that of Comparative Example 1, but the exhaust capability of MBP1 is sufficient. It cannot be said that it can be demonstrated.
  • the pumping speed characteristic of Comparative Example 2 in the medium vacuum region C is the same as that of Comparative Example 1 because the pump portion is the same.
  • the vacuum exhaust apparatus 100 according to the first embodiment employs the MBP1 having a higher output than the MBP11 of the comparative example 1, thereby evacuating in the low vacuum region B.
  • the speed is improved as compared with Comparative Example 1 (characteristic curve b1), which is the same as that of Comparative Example 2 (characteristic curve c2).
  • the check valve 3 and the branch pipe 70 are provided in the vacuum exhaust apparatus 100 according to the first embodiment, the exhaust performance of MBP1 is not restricted by the exhaust performance of DRP2. Therefore, the exhaust performance in the atmospheric pressure vicinity region A in this embodiment is improved as compared with the case of the comparative example 2 (characteristic curve c1).
  • the evacuation speed characteristics of the evacuation apparatus 100 according to the first embodiment in the low vacuum region B and the medium vacuum region C are the same as those in the comparative example 2 because MBP is the same.
  • the pressure transition of the LC 20 corresponds to the exhaust performance of the vacuum exhaust device.
  • the characteristic curve c2 of the comparative example 2 and the characteristic curve d2 of the vacuum exhaust apparatus 100 according to the first embodiment are parallel.
  • the characteristic curve b2 of Comparative Example 1 the characteristic curve c2 of Comparative Example 2, and the characteristic curve d2 of the vacuum exhaust apparatus 100 according to Embodiment 1 are parallel.
  • the vacuum evacuation device 102 according to Comparative Example 2 is superior to the vacuum evacuation device 101 according to Comparative Example 1 in terms of exhaust performance in the atmospheric pressure, the atmospheric pressure vicinity region A, and the low vacuum region B. Therefore, the low vacuum region B The time to reach and the time to reach the middle vacuum region C are short.
  • the vacuum exhaust apparatus 100 according to the first embodiment is superior in the exhaust performance in the region A near atmospheric pressure than the vacuum exhaust apparatus 102 according to the comparative example 2, the time required to reach the low vacuum region B Is short.
  • the vacuum exhaust apparatus 100 according to the first embodiment is set in the middle vacuum region C.
  • the target vacuum can be reached in the shortest time.
  • the said target vacuum degree can be reached
  • the MBP1 having a higher output than the MBP11 of the comparative example 1 is employed in the low vacuum region B and the atmospheric pressure vicinity region A. Therefore, in the low vacuum region B and the atmospheric pressure vicinity region A, the case of the comparative example 1 Higher exhaust speed can be realized. Furthermore, by providing the check valve 3 and the branch pipe 70, it is possible to realize a higher exhaust speed than the vacuum exhaust apparatus 102 according to the comparative example 2 in the region A near atmospheric pressure.
  • the evacuation apparatus 100 according to the first embodiment can sufficiently exhibit the evacuation capability of the MBP 1 in the low vacuum region B and the atmospheric pressure vicinity region A.
  • the motor of the MBP 1 has a high output, and the check valve 3 and the branch pipe 70 are provided.
  • the pumping speed of the auxiliary pump is not restricted, and the pumping speed in the atmospheric pressure and low vacuum region can be improved.
  • the exhaust performance in the atmospheric pressure region A and the low vacuum region B is improved while minimizing the change in the configuration of the MBP1 and DRP2, and as a result, the LC 20 can reach the target vacuum level in a short time. Can do.
  • the branch pipe 70 may not be terminated at the exhaust pipe 60 of the DRP 2, and the branch pipe 70 may be an individual exhaust pipe.
  • FIG. 5 is a schematic diagram for explaining the configuration of the vacuum exhaust apparatus according to the second embodiment of the present invention, and the same components as those in FIG. 1 are denoted by the same reference numerals.
  • the vacuum exhaust apparatus 200 according to the second embodiment includes a main pump 21 in which two pumps (MBP) 21 a and 21 b are arranged in parallel, an auxiliary pump 2, and a check valve 3. That is, the evacuation apparatus 200 according to the second embodiment is the same as the evacuation apparatus 100 according to the first embodiment (see FIG. 1).
  • the main pump 1 composed of one MBP is composed of two MBPs 21a and 21b arranged in parallel. It is composed.
  • the main pump since the main pump is configured by arranging a plurality of pumps in parallel, the capacity of the entire main pump can be increased without increasing the motors of the individual pumps constituting the main pump. can do.
  • the ratio of the maximum power (unit: W) of the motor to the maximum exhaust speed is less than 5 W / (m 3 / h), but the total is 2 W or more (m 3 / h) 2
  • a high-power main pump 21 is realized by arranging two MBPs in parallel.
  • the vacuum exhaust apparatus 200 by adopting the high-power main pump 21 in which a plurality of MBPs are arranged in parallel, similarly to the first embodiment, the region near the atmospheric pressure.
  • the exhaust performance in A and the low vacuum region B is improved, and as a result, the LC 20 can reach the target degree of vacuum in a short time.
  • the main pump can be constituted by three or more pumps arranged in parallel, a plurality of auxiliary pumps can be arranged in parallel, or a plurality of main pumps and auxiliary pumps can be arranged in parallel. is there.
  • a check valve and a branch pipe can be provided for each pump constituting the main pump.
  • an evacuation apparatus capable of shortening the evacuation time to the target vacuum degree while minimizing the configuration change of the main pump and the auxiliary pump.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Compressor (AREA)

Abstract

Dispositif d'évacuation de vide doté d'une pompe principale, d'une pompe auxiliaire reliée en série à la pompe principale et d'une tuyauterie entre les pompes, destinée à relier un orifice de refoulement de la pompe principale et un orifice d'aspiration de la pompe auxiliaire. La pompe principale comprend une pompe de gavage mécanique. Le rapport entre la puissance maximale d'un moteur de la pompe principale et la vitesse de refoulement de gaz maximum de la pompe principale n'est pas inférieur à 5 W/(m3/h). La tuyauterie entre les pompes est dotée d'un tuyau de dérivation raccordé à partir du milieu de la tuyauterie entre les pompes. Un clapet anti-retour permettant le dégazage dans la tuyauterie entre les pompes et empêchant le reflux du gaz est prévu au milieu du tuyau de dérivation.
PCT/JP2009/004496 2008-09-10 2009-09-10 Dispositif d'évacuation de vide WO2010029750A1 (fr)

Priority Applications (5)

Application Number Priority Date Filing Date Title
KR1020117005262A KR101193479B1 (ko) 2008-09-10 2009-09-10 진공 배기 장치
EP09812899.4A EP2330299A4 (fr) 2008-09-10 2009-09-10 Dispositif d'évacuation de vide
US13/063,040 US20110164992A1 (en) 2008-09-10 2009-09-10 Vacuum evacuation device
CN2009801321755A CN102124225A (zh) 2008-09-10 2009-09-10 真空排气装置
JP2010528647A JPWO2010029750A1 (ja) 2008-09-10 2009-09-10 真空排気装置

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2008232324 2008-09-10
JP2008-232324 2008-09-10

Publications (1)

Publication Number Publication Date
WO2010029750A1 true WO2010029750A1 (fr) 2010-03-18

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Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2009/004496 WO2010029750A1 (fr) 2008-09-10 2009-09-10 Dispositif d'évacuation de vide

Country Status (7)

Country Link
US (1) US20110164992A1 (fr)
EP (1) EP2330299A4 (fr)
JP (1) JPWO2010029750A1 (fr)
KR (1) KR101193479B1 (fr)
CN (1) CN102124225A (fr)
TW (1) TWI467092B (fr)
WO (1) WO2010029750A1 (fr)

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CN104302922B (zh) * 2012-06-28 2017-08-08 斯特林工业咨询有限公司 用于排空腔室的泵装置和方法
GB2508396B (en) * 2012-11-30 2015-10-07 Edwards Ltd Improvements in and relating to vacuum conduits
GB2510829B (en) * 2013-02-13 2015-09-02 Edwards Ltd Pumping system
DE102013108090A1 (de) * 2013-07-29 2015-01-29 Hella Kgaa Hueck & Co. Pumpenanordnung
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WO2015197138A1 (fr) 2014-06-27 2015-12-30 Ateliers Busch Sa Méthode de pompage dans un système de pompes à vide et système de pompes à vide
WO2016045753A1 (fr) * 2014-09-26 2016-03-31 Ateliers Busch Sa Système de pompage pour générer un vide et procédé de pompage au moyen de ce système de pompage
KR102330815B1 (ko) * 2014-10-02 2021-11-24 아뜰리에 부쉬 에스.아. 진공을 발생시키기 위한 펌핑 시스템 및 이 펌핑 시스템에 의한 펌핑 방법
JP2018178846A (ja) * 2017-04-12 2018-11-15 株式会社荏原製作所 真空ポンプ装置の運転制御装置、及び運転制御方法
CN108533494B (zh) * 2018-06-19 2024-02-20 浙江维朋制冷设备有限公司 一种真空泵
KR20220124343A (ko) * 2021-03-03 2022-09-14 주식회사 엘지에너지솔루션 롤투롤 상태 전극의 진공건조장치 및 그 진공건조방법
GB2626561A (en) * 2023-01-26 2024-07-31 Edwards Ltd Connector for use in a vacuum pumping system

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EP2330299A1 (fr) 2011-06-08
TWI467092B (zh) 2015-01-01
TW201018790A (en) 2010-05-16
KR20110040980A (ko) 2011-04-20
KR101193479B1 (ko) 2012-10-22
JPWO2010029750A1 (ja) 2012-02-02
US20110164992A1 (en) 2011-07-07
CN102124225A (zh) 2011-07-13
EP2330299A4 (fr) 2016-06-15

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