EP1906023A1 - Appareil d'évacuation - Google Patents

Appareil d'évacuation Download PDF

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Publication number
EP1906023A1
EP1906023A1 EP07018944A EP07018944A EP1906023A1 EP 1906023 A1 EP1906023 A1 EP 1906023A1 EP 07018944 A EP07018944 A EP 07018944A EP 07018944 A EP07018944 A EP 07018944A EP 1906023 A1 EP1906023 A1 EP 1906023A1
Authority
EP
European Patent Office
Prior art keywords
gas
pump
discharging
booster pump
discharge opening
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP07018944A
Other languages
German (de)
English (en)
Inventor
Shiro Tanigawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Anest Iwata Corp
Original Assignee
Anest Iwata Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Anest Iwata Corp filed Critical Anest Iwata Corp
Publication of EP1906023A1 publication Critical patent/EP1906023A1/fr
Withdrawn legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/126—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially from the rotor body extending elements, not necessarily co-operating with corresponding recesses in the other rotor, e.g. lobes, Roots type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/005—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of dissimilar working principle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/02—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids specially adapted for several pumps connected in series or in parallel
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/06—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids specially adapted for stopping, starting, idling or no-load operation
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2220/00—Application
    • F04C2220/10—Vacuum
    • F04C2220/12—Dry running
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2250/00—Geometry
    • F04C2250/10—Geometry of the inlet or outlet
    • F04C2250/102—Geometry of the inlet or outlet of the outlet

Definitions

  • the present invention relates to an evacuation apparatus for evacuating a tank, a chamber, and the like, provided with a mechanical vacuum booster pump and an back pump which is placed at a down-stream side of the mechanical vacuum booster pump in series.
  • a mechanical booster pump for vacuums is conventionally utilized at an up-stream side (a vacuum side) of a vacuum pump (a back pump) with a lower pumping speed.
  • a vacuum side a vacuum pump
  • a back pump a vacuum pump
  • Roots type vacuum pumps 021 are generally applied which perform compression/discharge works by rotating pairs of Roots type vanes 020 as shown in Fig.5.
  • the back pump realizes several times of a maximum pumping speed by the use of the mechanical booster pump.
  • Japanese granted utility model No. JP/7-19554 discloses an application; wherein a booster pump like a mechanical booster pump is provided at the up-stream side of a vacuum pump; and wherein gas discharge is performed by the two stage vacuum pumps placed in series.
  • a preliminary discharge line (passage) A and a main discharge line (passage) B start from the inside of a chamber and are connected to each other.
  • the preliminary discharge line A is provided with a stop valve 03a and a butterfly valve 04 in series and connected to a preliminary pump 01.
  • the main discharge line B is provide with stop valves 03b1, 03b2 and a discharge pump 02.
  • a main discharge (evacuating) is performed through the preliminary pump 01 and the discharge pump 02 by closing the stop valve 03a and the butterfly valve 04 and opening the stop valves 03b1, 03b2 and the discharge pump 02.
  • a constitution is disclosed as quoted in Fig. 7 in which a booster pump 012 is connected to an intermediate stage of a dry vacuum pump 10 of a multi-stage type or the last stage of the vacuum pump 10 so that the reduction of power consumption is aimed at (Patent reference 2; JP: 2003-155988,A ).
  • the booster pump 012 in the patent literature 2 aims at the reduction of power consumption necessary for driving the dry vacuum pump 010. Improving the pumping speed is not mentioned in the patent literature 2.
  • a purpose of the present invention is to realize an evacuation apparatus for evacuating a tank, a chamber, and the like, which are provided with a mechanical vacuum booster pump and an back pump placed at the down-stream side of the mechanical booster pump in series, so as to increase the pumping speeds over a pressure range from an ambient pressure to a low vacuum, thereby improving the pumping speed over the whole pressure range from an ambient pressure to a high vacuum.
  • the present invention is proposes an evacuation apparatus for evacuating a tank, a chamber and the like, including a mechanical booster pump, an back pump placed at a down-stream side of the mechanical booster pump in series, and a controller for controlling operation of the apparatus; in which the mechanical booster pump has a discharge opening for discharging a low compression gas, through which lowly-compressed gas with low compression ratio on a part way of compression in the booster pump is emitted, and a discharge opening for discharging a high compression gas, through which highly-compressed gas with high compression ratio is emitted; and the controller controls so that, in a stage where gas-discharging is started, the gas is discharged toward the ambient side through the discharge opening for discharging a high compression gas with the operation of the mechanical booster pump and, in a stage where the discharged gas pressure reaches afterward a medium vacuum, the back pump starts operation and the gas is sent to the back pump through the discharge opening for discharging a low compression gas.
  • the gas in the beginning of discharging gas, the gas is discharged toward the ambient side (outside) through the discharge opening for discharging a high compression gas by operating the mechanical booster pump.
  • the gas of an ambient pressure level in the tank is compressed with a high compression ratio and is discharged directly outside. Since the gas is sent outside without the influence of the back pump, it becomes possible to improve pumping speeds without introducing large back pump of higher discharging capacity so as to secure higher pumping speeds.
  • a pumping speed of the booster pump is higher in comparison with that of the back pump, it is possible to discharge gas, maintaining the pumping speed in the beginning when the pressure is an ambient pressure. In the first place, it becomes possible to improve pumping speeds in a range from an ambient pressure to a low vacuum.
  • the gas of the medium vacuum is fed from the discharge opening(s) for discharging low compression gas to the back pump, while the back pump is started.
  • the gas of vacuum state to some extent is fed to the back pump from the discharge opening(s) for discharging a low compression gas.
  • the controller recognizes the accomplishment of the medium vacuum by means of an elapsed time signal from a timer.
  • the controller automatically controls the operation of the back pump feeds by such construction that the discharged gas is supplied through the discharge opening(s) for discharging a low compression gas to the back pump as well as the back pump is driven.
  • the control since the control is performed based not on a signal from a pressure sensor but on an elapsed time signal from a timer, risks of malfunction and/or deterioration about pressure sensor are eliminated. Thus, highly reliable control realized.
  • the mechanical booster pump is a vacuum pump of a claw type, in which the discharge opening for discharging a high compression gas is located at a wall of the pump casing, the wall being in a plane vertical to the axes of the pump rotors, while the discharge opening for discharging a high compression gas faces the compression space, being located in a plane parallel to the plane containing both rotation axes of the pump rotors.
  • the above embodiment realizes a booster pump provided with the discharge opening for discharging a high compression gas and the discharge opening for discharging a low compression gas, in which the discharge opening for discharging a high compression gas is located at the wall of the pump casing so as to face the compression space, the wall being in a plane vertical to the axes of the pump rotors, and the discharge opening for discharging a low compression gas is located, on a side-wall-surface of the pump casing, in a plane parallel to the plane containing both rotation axes of the pump rotors.
  • the present invention realizes an evacuation apparatus for evacuating a tank, a chamber and the like, comprising a mechanical booster pump and a back pump placed at the down-stream side of the mechanical booster pump in series, which can improve the pumping speeds over a whole range from an ambient pressure to a high vacuum by increasing the pumping speed in the range from an ambient pressure to a low vacuum
  • FIG. 1 shows a whole constitution of the embodiment of the present invention and FIG. 2 shows a view of the A-A cross-section in Fig. 1.
  • an evacuation apparatus 1 is equipped with a back pump 3 and a mechanical vacuum booster pump 5 which is provided at the up-stream side of the back pump 3 so that a vacuum tank 7 is evacuated by running both of the pumps 3 and 5.
  • the mechanical vacuum booster pump 5 is of a claw type vacuum pump 9, comprising of a pair of pump rotors 11a and 11b, a gas suction port 13, and a gas discharge port 15.
  • the mechanical booster pump 5 further comprise a pump casing 17 (a housing) where the pair of pump rotors 11a and 11b are built-in, and a rotating mechanism by which the pump rotors 11a and 11b are rotated around shafts 19 by transferring powers from a motor (not shown) as a power source to the rotors.
  • the type of the back pump 3 is not limited to a Roots-type and can be any other type of vacuum pumps such as a claw type, a screw type, a gear type and so on.
  • the pump rotors 11a and 11b have protrusive parts 21a and 21b like a claw (a nail of raptorial birds) respectively. And the protrusive parts 21a and 21b fit into counter-depressed parts 23b and 23a respectively. Thus, the fitting space forms a compression space 25.
  • the gas discharge port 15 has two openings, namely, a discharge opening for discharging a low compression gas (hereafter, referred to as DOLC) 27 and a discharge opening for discharging a high compression gas (hereafter, referred to as DOHC) 29.
  • DOLC 27 discharges the gas compressed within the mechanical booster pump at a stage of a lower compression ratio
  • DOHC 29 discharges the gas when a stage of a higher compression ratio is realized.
  • the DOLC 27 is placed so that the gas sucked through the gas suction port 13 is discharged before the gas is compressed into a compression space 25 formed by the pump rotors 11a and 11b.
  • the DOLC 27 is comprised of a first discharge opening for discharging a low compression gas 27a corresponding to the pump rotor 11a and a second discharge opening for discharging a low compression gas 27b corresponding to the pump rotor 11b.
  • the cross-sectional area of the first discharge opening for discharging a low compression gas 27a is the same as that of the second discharge opening for discharging a low compression gas 27b, the cross-sectional area of these openings is formed more greatly than the cross-sectional area of the DOHC 29.
  • the DOHC 29 is located at the wall of the pump casing 17, the wall being in a plane vertical to the axes of the pump rotors 11a and 11b, while the DOHC 29 faces the compression space 25 so as to discharge highly compressed gas.
  • the gas suction port 13 is located, on one side-wall-surface of the pump casing 17, in a plane parallel to the plane containing both the rotation axes of the pump rotors 11a and 11b, while the first and second discharge openings for low compression 27a and 27b are located, on another side-wall-surface of the pump casing 17, in a plane parallel to the plane containing both the rotation axes of the pump rotors 11a and 11b.
  • a mechanical booster pump 5 provided with a DOHC 29 and a DOLC 27 can be composed.
  • first low compression discharge passage 30 which communicatively connects the first discharge opening for discharging a low compression gas 27a and the back pump 3, is provided an first open/close valve 34 controlled by the a controller 32.
  • a second low compression discharge passage 36 which feeds the gas through the second discharge opening for discharging a low compression gas 27b, is joined together with the first low compression discharge passage 30 at the up-stream side of the valve 34, so that the gas through the second discharge opening for low compression 27bn flows into the first low compression discharge passage 30.
  • a high compression discharge passage 38 is joined together with the passage 30 at the down-stream side of the valve 34, so that the gas through the discharge opening for discharging a high compression gas 29 flows into the passage 30.
  • a second open/close valve 39 the opening/closing of which is controlled by the controller 32.
  • Pressure signals from the vacuum tank 7 or inlet pressure signals from the mechanical booster pump 5 are inputted into a controller 32 via a pressure sensor 40, and elapsed-time signals are inputted into the controller 32 from a timer 42.
  • the first open/close valve 34 is to be closed, the second open/close valve 39 is to be opened, the back pump 3 is to be stopped so that only the mechanical booster pump 5 is to be run.
  • the discharged gas from the first discharge opening for discharging a low compression gas 27a and the second discharge opening for discharging a low compression gas 27b is shut, and the discharged gas from the DOHC 29 is fed directly outside through the high compression discharge passage 38.
  • the gas of an ambient pressure inside the tank is discharged directly outside after being compressed with a high compression ratio. Since the gas is discharged directly outside without passing through the back pump 3, namely without being influenced by the back pump 3, for example, it becomes possible to discharge gas without choosing an back pump 3 of larger capacity so as to obtain a higher pumping speed.
  • the pumping speed of the mechanical booster pump 5 is adopted so that the pumping speed exceeds that of the back pump 3. Therefore, the gas is discharged without deterioration of the pumping speed of the mechanical booster pump 5, therefore the pumping speed is not lowered substantially from an original pumping speed at the beginning of gas-discharging.
  • the gas discharging is performed with a pumping speed over the pumping speed of the back pump 3, which is indicated as Q, then the gas pressure is lowered from an ambient pressure P0 to a medium vacuum P1.
  • the controller 32 opens the first open/close valve 34, closes the second open/close valve 39, and makes the back pump 3 start, when the controller judges, by an input signal from the pressure sensor 40, that a predetermined medium vacuum P1 is reached.
  • the gas discharged through the first discharge opening for discharging a low compression gas 27a and the second discharge opening for discharging a low compression gas 27b is fed to the back pump 3.
  • Fig. 4(a)-(d) show the on/off timings as to the mechanical booster pump 5, the back pump 3, the first open/close valve 34 and the second open/close valve 39, respectively.
  • the mechanical booster pump 5, the back pump 3, the first open/close valve 34, and the second open/close valve 39 are under a condition of ON, OFF, CLOSE, and OPEN respectively. Under such condition, the gas discharged through the discharge opening for discharging a high compression gas 29 is sent directly outside through the high compression discharge passage 38.
  • the mechanical booster pump 5 the back pump 3, the first open/close valve 34, and the second open/close valve 39 are placed under a condition of ON, ON, OPEN, and CLOSE respectively.
  • the discharged gas from the first discharge opening for discharging a low compression gas 27a and the second discharge opening for discharging a low compression gas 27b is sent to the back pump 3.
  • An above-described embodiment of the present invention makes it possible to improve a pumping speed in a range of a low vacuum around an ambient pressure and to achieve a high vacuum without deterioration of pumping speeds even when the back pump 3 is of small size and of small discharge capacity. Further, it becomes possible to improve pumping speeds over the whole pressure range from an ambient pressure to a high vacuum.
  • an elapsed time signal from a timer 42 instead of a pressure signal from a pressure sensor 40, switches an on/off condition of the pumps 5 and 3 as well as an open/close condition of the open/close valve 34 and 39.
  • a time t1 which is the time required for the pressure P0 to decrease until the pressure P1 (a medium vacuum), is to be predetermined by calculation based on the conditions such as the volume of the vacuum tank 7, the discharging capacity of the compression space 25 of the mechanical booster pump 5, the specific operation factors of the mechanical booster pump 5, ambient temperatures and so on.
  • the controller controls the conditions such that the mechanical booster pump 5 is under ON state, the back pump 3 is under ON state, the first open/close valve 34 is under OPEN state, and the second open/close valve 39 is under CLOSED state.
  • the controller controls the conditions such that the mechanical booster pump 5 is under ON state, the back pump 3 is under ON state, the first open/close valve 34 is under OPEN state, and the second open/close valve 39 is under CLOSED state.
  • the second embodiment makes it possible to increase a pumping speed in a range from an ambient pressure to a low vacuum resulting in that the pumping speed is improved over a whole range from an ambient pressure to a high vacuum.
  • the controller 32 automatically opens and closes the first open/close valve 34 and the second open/close valve 39.
  • operators can manually open and closes the valves 34 and 39, based on their own judgment as to the values detected by the pressure sensor 40.
  • the mechanical booster pump 5 As for the mechanical booster pump 5, the explanation was given in consideration that the mechanical booster pump 5 is of a claw type vacuum pump 9. However, it goes without saying that the mechanical booster pump 5 can be of a Roots type pump or of a screw type pump other than of a claw type pump, so long as the mechanical booster pump 5 is provided with the DOLC 27 which discharges the gas of low compression ratio and the DOHC 29 which discharges the gas of high compression ratio.
  • the present invention makes it possible to increase pumping speeds in a range from an ambient pressure to a low vacuum so as to improve the speed in a whole range from an ambient pressure to a high vacuum
  • the present invention can be usefully applied to evacuation apparatuses for evacuating a tank, a chamber and the like, which is provided with a booster pump and a back pump provided in an ambient side at the down-stream side of the booster pump in series.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
EP07018944A 2006-09-29 2007-09-26 Appareil d'évacuation Withdrawn EP1906023A1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006270048A JP2008088880A (ja) 2006-09-29 2006-09-29 真空排気装置

Publications (1)

Publication Number Publication Date
EP1906023A1 true EP1906023A1 (fr) 2008-04-02

Family

ID=38819504

Family Applications (1)

Application Number Title Priority Date Filing Date
EP07018944A Withdrawn EP1906023A1 (fr) 2006-09-29 2007-09-26 Appareil d'évacuation

Country Status (4)

Country Link
US (1) US20080080982A1 (fr)
EP (1) EP1906023A1 (fr)
JP (1) JP2008088880A (fr)
CN (1) CN101153585A (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2013131911A1 (fr) * 2012-03-05 2013-09-12 Ateliers Busch Sa Installation de pompage amelioree et le procede de controle d'une telle installation de pompage
GB2501735A (en) * 2012-05-02 2013-11-06 Edwards Ltd Warming a vacuum pump arrangement

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5914449B2 (ja) * 2013-11-06 2016-05-11 アネスト岩田株式会社 クローポンプ
US10094381B2 (en) * 2015-06-05 2018-10-09 Agilent Technologies, Inc. Vacuum pump system with light gas pumping and leak detection apparatus comprising the same
DE102016200112A1 (de) * 2016-01-07 2017-07-13 Leybold Gmbh Vakuumpumpenantrieb mit Stern-Dreieck-Umschaltung

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0730093A1 (fr) * 1995-02-28 1996-09-04 Iwata Air Compressor Mfg. Co.,Ltd. Système de contrÔle d'une pompe à vide à deux étages
US20040173312A1 (en) * 2001-09-06 2004-09-09 Kouji Shibayama Vacuum exhaust apparatus and drive method of vacuum apparatus
EP1536140A1 (fr) * 2003-11-27 2005-06-01 Aisin Seiki Kabushiki Kaisha Pompe à vide sèche à étages multiples
EP1596066A1 (fr) * 2004-05-14 2005-11-16 Varian, Inc. Dispositif de pompage à vide pour des gaz légers

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2492075A (en) * 1945-10-30 1949-12-20 Kinney Mfg Company Vacuum pump
US6534940B2 (en) * 2001-06-18 2003-03-18 Smart Marine Systems, Llc Marine macerator pump control module
US7140847B2 (en) * 2004-08-11 2006-11-28 The Boc Group, Inc. Integrated high vacuum pumping system

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0730093A1 (fr) * 1995-02-28 1996-09-04 Iwata Air Compressor Mfg. Co.,Ltd. Système de contrÔle d'une pompe à vide à deux étages
US20040173312A1 (en) * 2001-09-06 2004-09-09 Kouji Shibayama Vacuum exhaust apparatus and drive method of vacuum apparatus
EP1536140A1 (fr) * 2003-11-27 2005-06-01 Aisin Seiki Kabushiki Kaisha Pompe à vide sèche à étages multiples
EP1596066A1 (fr) * 2004-05-14 2005-11-16 Varian, Inc. Dispositif de pompage à vide pour des gaz légers

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2013131911A1 (fr) * 2012-03-05 2013-09-12 Ateliers Busch Sa Installation de pompage amelioree et le procede de controle d'une telle installation de pompage
CH706231A1 (fr) * 2012-03-05 2013-09-13 Busch Sa Atel Installation de pompage et procédé de contrôle d'une telle installation de pompage.
US11204036B2 (en) 2012-03-05 2021-12-21 Ateliers Busch Sa Pumping unit and method for controlling such a pumping unit
GB2501735A (en) * 2012-05-02 2013-11-06 Edwards Ltd Warming a vacuum pump arrangement
GB2501735B (en) * 2012-05-02 2015-07-22 Edwards Ltd Method and apparatus for warming up a vacuum pump arrangement

Also Published As

Publication number Publication date
US20080080982A1 (en) 2008-04-03
JP2008088880A (ja) 2008-04-17
CN101153585A (zh) 2008-04-02

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