JP4216801B2 - サブプレッシャー生成用の真空ポンプ及び方法 - Google Patents
サブプレッシャー生成用の真空ポンプ及び方法 Download PDFInfo
- Publication number
- JP4216801B2 JP4216801B2 JP2004501802A JP2004501802A JP4216801B2 JP 4216801 B2 JP4216801 B2 JP 4216801B2 JP 2004501802 A JP2004501802 A JP 2004501802A JP 2004501802 A JP2004501802 A JP 2004501802A JP 4216801 B2 JP4216801 B2 JP 4216801B2
- Authority
- JP
- Japan
- Prior art keywords
- ejector
- screw rotor
- pump
- vacuum pump
- valve
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
- F04C23/005—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of dissimilar working principle
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
- F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
- F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
- F04C18/14—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons
- F04C18/16—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons with helical teeth, e.g. chevron-shaped, screw type
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
- F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04F—PUMPING OF FLUID BY DIRECT CONTACT OF ANOTHER FLUID OR BY USING INERTIA OF FLUID TO BE PUMPED; SIPHONS
- F04F5/00—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow
- F04F5/14—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow the inducing fluid being elastic fluid
- F04F5/16—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow the inducing fluid being elastic fluid displacing elastic fluids
- F04F5/20—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow the inducing fluid being elastic fluid displacing elastic fluids for evacuating
- F04F5/22—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow the inducing fluid being elastic fluid displacing elastic fluids for evacuating of multi-stage type
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04F—PUMPING OF FLUID BY DIRECT CONTACT OF ANOTHER FLUID OR BY USING INERTIA OF FLUID TO BE PUMPED; SIPHONS
- F04F5/00—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow
- F04F5/54—Installations characterised by use of jet pumps, e.g. combinations of two or more jet pumps of different type
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- Applications Or Details Of Rotary Compressors (AREA)
- Jet Pumps And Other Pumps (AREA)
Description
簡単に言えば、本発明は、圧縮部と膨張部とを有するスクリュー・ロータ・ポンプを備えた真空ポンプであって、圧縮部からの排出部が、少なくとも一つのイジェクターと、イジェクターを介して圧縮ガスを排出するように連通しており、膨張部が、スクリュー・ロータ・ポンプ及びイジェクターを同時に作動させるように第1の弁手段を介して駆動ガス源に接続可能である真空ポンプを予見している。
Claims (10)
- 圧縮部(8,111)と膨張部(7,110)とを有するスクリュー・ロータ・ポンプを備えた真空ポンプであって、前記圧縮部からの排出部(10,118)が、少なくとも一つのイジェクター(1,103)と、イジェクターを介して圧縮ガスを排出するように連通し、前記膨張部(7,110)が、前記スクリュー・ロータ・ポンプ及び前記イジェクターを同時に作動させるように第1の弁手段(5,114)を介して駆動ガス源(P)に接続可能である、ことを特徴とする真空ポンプ。
- 前記弁(5,114)は、前記スクリュー・ロータ・ポンプ(7,8,110,111)を、前記イジェクター(1,103)を作動させるのと同じ駆動ガス源に接続するように配置され、前記弁は、前記イジェクターによって生成されたサブプレッシャーに応じて前記スクリュー・ロータ・ポンプを駆動するように開かれる、ことを特徴とする請求項1に記載の真空ポンプ。
- 第2の弁手段が、前記第1の弁手段が前記スクリュー・ロータ・ポンプを駆動するために開いているときに前記イジェクターへの排気路(4,106)を閉じるように配置されている、ことを特徴とする請求項1又は2に記載の真空ポンプ。
- 前記スクリュー・ロータ・ポンプの膨張部(7,110)は、前記イジェクターからの排出ガスを前記スクリュー・ロータ・ポンプを通って膨張した駆動ガスと混合するように、前記イジェクターの排出部(102)と連通している、ことを特徴とする請求項1に記載の真空ポンプ。
- 前記イジェクターは多段イジェクターである、ことを特徴とする請求項1から4のいずれか1項に記載の真空ポンプ。
- 前記スクリュー・ロータ・ポンプと前記イジェクターは、共通のポンプ・ボディに一体に形成されている、ことを特徴とする請求項1から4のいずれか1項に記載の真空ポンプ。
- 駆動ガスを前記スクリュー・ロータ・ポンプに誘導するための第1の弁(5,114)は、NCタイプの電気制御式弁であり、前記イジェクターへの排気路(4,106)を閉じるための第2の弁は、NOタイプの電気制御式弁である、ことを特徴とする請求項1から4のいずれか1項に記載の真空ポンプ。
- 請求項1に記載の真空ポンプを用いて工業プロセスにサブプレッシャーを提供する方法であって、前記少なくとも1つのイジェクター(1,103)を最初に使用して真空ポンプの排気室(V)内の圧力を予め定められた低レベルまで下げ、前記イジェクターによって、前記イジェクターと同時に作動するように構成された前記スクリュー・ロータ・ポンプ(7,8,110,111)を用いて前記排気室(V)内の圧力を前記低レベルからさらに下げる、ことを特徴とする方法。
- 前記スクリュー・ロータ・ポンプ用の駆動ガスを前記イジェクターからの排出ガスと混合して前記排出ガスの温度を下げる、ことを特徴とする請求項8に記載の方法。
- 前記スクリュー・ロータ・ポンプ及び前記イジェクターは、前記駆動ガス源(P)により駆動され、前記駆動ガスは、前記イジェクターによって生成されるサブプレッシャーに応じて前記弁(5,114)を通して前記スクリュー・ロータ・ポンプへ誘導される、ことを特徴とする請求項8に記載の方法。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
SE0201335A SE0201335L (sv) | 2002-05-03 | 2002-05-03 | Vakuumpump och sätt att tillhandahålla undertryck |
PCT/SE2003/000679 WO2003093678A1 (en) | 2002-05-03 | 2003-04-29 | Vacuum pump and method for generating sub-pressure |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2005524796A JP2005524796A (ja) | 2005-08-18 |
JP4216801B2 true JP4216801B2 (ja) | 2009-01-28 |
Family
ID=20287754
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2004501802A Expired - Fee Related JP4216801B2 (ja) | 2002-05-03 | 2003-04-29 | サブプレッシャー生成用の真空ポンプ及び方法 |
Country Status (10)
Country | Link |
---|---|
US (1) | US7452191B2 (ja) |
EP (1) | EP1502029B1 (ja) |
JP (1) | JP4216801B2 (ja) |
KR (1) | KR20040106459A (ja) |
AU (1) | AU2003230499A1 (ja) |
BR (1) | BR0309677A (ja) |
DE (1) | DE60317659T2 (ja) |
ES (1) | ES2294278T3 (ja) |
SE (1) | SE0201335L (ja) |
WO (1) | WO2003093678A1 (ja) |
Families Citing this family (33)
Publication number | Priority date | Publication date | Assignee | Title |
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KR100624563B1 (ko) | 2004-11-18 | 2006-09-18 | 오토르 주식회사 | 이젝터 펌프 |
KR100629994B1 (ko) * | 2005-12-30 | 2006-10-02 | 한국뉴매틱(주) | 진공 이젝터 펌프 |
KR100730323B1 (ko) * | 2007-03-15 | 2007-06-19 | 한국뉴매틱(주) | 필터 카트리지를 이용한 진공 시스템 |
ATE548268T1 (de) * | 2008-11-06 | 2012-03-15 | 4F4Fresh Ab | Vorrichtung für das verpacken von lebensmitteln |
DE102009047083C5 (de) * | 2009-11-24 | 2013-09-12 | J. Schmalz Gmbh | Druckluftbetriebener Unterdruckerzeuger oder Unterdruckgreifer |
IL215426A (en) * | 2011-09-27 | 2017-10-31 | Dan Geva | Complex vacuum pump |
DE102012220442A1 (de) | 2012-11-09 | 2014-05-15 | Oerlikon Leybold Vacuum Gmbh | Vakuumpumpensystem zur Evakuierung einer Kammer sowie Verfahren zur Steuerung eines Vakuumpumpensystems |
GB2509182A (en) | 2012-12-21 | 2014-06-25 | Xerex Ab | Vacuum ejector with multi-nozzle drive stage and booster |
GB2509183A (en) * | 2012-12-21 | 2014-06-25 | Xerex Ab | Vacuum ejector with tripped diverging exit flow nozzle |
GB2509184A (en) | 2012-12-21 | 2014-06-25 | Xerex Ab | Multi-stage vacuum ejector with moulded nozzle having integral valve elements |
EP2935899B1 (en) | 2012-12-21 | 2021-12-08 | Piab Aktiebolag | Vacuum ejector nozzle with elliptical diverging section |
FR3008145B1 (fr) * | 2013-07-04 | 2015-08-07 | Pfeiffer Vacuum Sas | Pompe a vide primaire seche |
DE102013107537B4 (de) * | 2013-07-16 | 2015-02-19 | J. Schmalz Gmbh | Mehrstufiger Ejektor |
US20150167697A1 (en) * | 2013-12-18 | 2015-06-18 | General Electric Company | Annular flow jet pump for solid liquid gas media |
KR102190221B1 (ko) * | 2014-03-24 | 2020-12-14 | 아뜰리에 부쉬 에스.아. | 진공 펌프 시스템 및 진공 펌프 시스템에서의 펌핑 방법 |
DK3137771T3 (da) * | 2014-05-01 | 2020-06-08 | Ateliers Busch S A | Fremgangsmåde til pumpning i et pumpesystem og et system af vakuumpumper |
DK3201469T3 (da) * | 2014-10-02 | 2020-04-27 | Ateliers Busch S A | Pumpesystem til frembringelse af et vakuum samt fremgangsmåde til pumpning med dette pumpesystem |
GB201418117D0 (en) | 2014-10-13 | 2014-11-26 | Xerex Ab | Handling device for foodstuff |
KR101685998B1 (ko) | 2016-09-21 | 2016-12-13 | (주)브이텍 | 프로파일을 이용한 진공 펌프 |
US11041456B2 (en) | 2017-03-30 | 2021-06-22 | Quest Engines, LLC | Internal combustion engine |
US10989138B2 (en) | 2017-03-30 | 2021-04-27 | Quest Engines, LLC | Internal combustion engine |
US10465629B2 (en) | 2017-03-30 | 2019-11-05 | Quest Engines, LLC | Internal combustion engine having piston with deflector channels and complementary cylinder head |
US10526953B2 (en) | 2017-03-30 | 2020-01-07 | Quest Engines, LLC | Internal combustion engine |
US10753308B2 (en) | 2017-03-30 | 2020-08-25 | Quest Engines, LLC | Internal combustion engine |
US10590834B2 (en) | 2017-03-30 | 2020-03-17 | Quest Engines, LLC | Internal combustion engine |
US10590813B2 (en) | 2017-03-30 | 2020-03-17 | Quest Engines, LLC | Internal combustion engine |
US10598285B2 (en) | 2017-03-30 | 2020-03-24 | Quest Engines, LLC | Piston sealing system |
JP6894981B2 (ja) | 2017-04-28 | 2021-06-30 | クエスト エンジンズ,エルエルシー | 可変容積室デバイス |
US10883498B2 (en) | 2017-05-04 | 2021-01-05 | Quest Engines, LLC | Variable volume chamber for interaction with a fluid |
US10808866B2 (en) | 2017-09-29 | 2020-10-20 | Quest Engines, LLC | Apparatus and methods for controlling the movement of matter |
US11134335B2 (en) | 2018-01-26 | 2021-09-28 | Quest Engines, LLC | Audio source waveguide |
WO2019147963A1 (en) | 2018-01-26 | 2019-08-01 | Quest Engines, LLC | Method and apparatus for producing stratified streams |
KR102344214B1 (ko) * | 2021-05-18 | 2021-12-28 | (주)브이텍 | 진공 이젝터 펌프 |
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DE3025525A1 (de) * | 1980-07-05 | 1982-01-28 | Jürgen 4477 Welver Volkmann | Ejektorvorrichtung |
GB2208411B (en) * | 1987-06-25 | 1990-10-31 | Plessey Co Plc | Rotary pump system |
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KR100190310B1 (ko) * | 1992-09-03 | 1999-06-01 | 모리시따 요오이찌 | 진공배기장치 |
DE19524609A1 (de) | 1995-07-06 | 1997-01-09 | Leybold Ag | Vorrichtung zum raschen Evakuieren einer Vakuumkammer |
SE511716E5 (sv) * | 1998-03-20 | 2009-01-28 | Piab Ab | Ejektorpump |
IL125791A (en) * | 1998-08-13 | 2004-05-12 | Dan Greenberg | Vacuum pump |
SE9903287L (sv) * | 1999-09-15 | 2000-11-20 | Piab Ab | Koppling vid ejektor, samt moduluppbyggt aggregat för alstrande av undertryck med hjälp av åtminstone en tryckluftdriven ejektor |
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EP1234982B1 (en) * | 2001-02-22 | 2003-12-03 | VARIAN S.p.A. | Vacuum pump |
US7061763B2 (en) * | 2002-01-29 | 2006-06-13 | Telefonaktiebolaget Lm Ericsson (Publ) | Cabinet cooling |
-
2002
- 2002-05-03 SE SE0201335A patent/SE0201335L/ not_active IP Right Cessation
-
2003
- 2003-04-29 AU AU2003230499A patent/AU2003230499A1/en not_active Abandoned
- 2003-04-29 KR KR10-2004-7017718A patent/KR20040106459A/ko not_active Application Discontinuation
- 2003-04-29 JP JP2004501802A patent/JP4216801B2/ja not_active Expired - Fee Related
- 2003-04-29 WO PCT/SE2003/000679 patent/WO2003093678A1/en active IP Right Grant
- 2003-04-29 US US10/513,296 patent/US7452191B2/en not_active Expired - Fee Related
- 2003-04-29 ES ES03723569T patent/ES2294278T3/es not_active Expired - Lifetime
- 2003-04-29 EP EP03723569A patent/EP1502029B1/en not_active Expired - Lifetime
- 2003-04-29 DE DE60317659T patent/DE60317659T2/de not_active Expired - Fee Related
- 2003-04-29 BR BR0309677-7A patent/BR0309677A/pt not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
ES2294278T3 (es) | 2008-04-01 |
SE519647C2 (sv) | 2003-03-25 |
SE0201335D0 (sv) | 2002-05-03 |
BR0309677A (pt) | 2005-02-22 |
DE60317659T2 (de) | 2008-10-30 |
SE0201335L (sv) | 2003-03-25 |
EP1502029B1 (en) | 2007-11-21 |
US20050232783A1 (en) | 2005-10-20 |
AU2003230499A1 (en) | 2003-11-17 |
DE60317659D1 (de) | 2008-01-03 |
JP2005524796A (ja) | 2005-08-18 |
WO2003093678A1 (en) | 2003-11-13 |
KR20040106459A (ko) | 2004-12-17 |
EP1502029A1 (en) | 2005-02-02 |
US7452191B2 (en) | 2008-11-18 |
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