TWI726118B - 玻璃基板及玻璃基板的製造方法 - Google Patents

玻璃基板及玻璃基板的製造方法 Download PDF

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Publication number
TWI726118B
TWI726118B TW106120702A TW106120702A TWI726118B TW I726118 B TWI726118 B TW I726118B TW 106120702 A TW106120702 A TW 106120702A TW 106120702 A TW106120702 A TW 106120702A TW I726118 B TWI726118 B TW I726118B
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TW
Taiwan
Prior art keywords
grinding
point
grinding wheel
polishing
start point
Prior art date
Application number
TW106120702A
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English (en)
Chinese (zh)
Other versions
TW201805107A (zh
Inventor
中西正
本村英雄
Original Assignee
日商Agc股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日商Agc股份有限公司 filed Critical 日商Agc股份有限公司
Publication of TW201805107A publication Critical patent/TW201805107A/zh
Application granted granted Critical
Publication of TWI726118B publication Critical patent/TWI726118B/zh

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    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C15/00Surface treatment of glass, not in the form of fibres or filaments, by etching
    • C03C15/02Surface treatment of glass, not in the form of fibres or filaments, by etching for making a smooth surface
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B1/00Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B27/00Other grinding machines or devices
    • B24B27/0076Other grinding machines or devices grinding machines comprising two or more grinding tools
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B27/00Other grinding machines or devices
    • B24B27/0092Grinding attachments for lathes or the like
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B41/00Component parts such as frames, beds, carriages, headstocks
    • B24B41/06Work supports, e.g. adjustable steadies
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B7/00Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor
    • B24B7/20Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground
    • B24B7/22Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain
    • B24B7/24Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain for grinding or polishing glass
    • B24B7/241Methods
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B7/00Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor
    • B24B7/20Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground
    • B24B7/22Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain
    • B24B7/24Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain for grinding or polishing glass
    • B24B7/242Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain for grinding or polishing glass for plate glass
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24DTOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D3/00Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
    • B24D3/02Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent
    • B24D3/04Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially inorganic
    • B24D3/06Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially inorganic metallic or mixture of metals with ceramic materials, e.g. hard metals, "cermets", cements
    • B24D3/10Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially inorganic metallic or mixture of metals with ceramic materials, e.g. hard metals, "cermets", cements for porous or cellular structure, e.g. for use with diamonds as abrasives
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B35/00Transporting of glass products during their manufacture, e.g. hot glass lenses, prisms
    • C03B35/14Transporting hot glass sheets or ribbons, e.g. by heat-resistant conveyor belts or bands
    • C03B35/20Transporting hot glass sheets or ribbons, e.g. by heat-resistant conveyor belts or bands by gripping tongs or supporting frames
    • C03B35/202Transporting hot glass sheets or ribbons, e.g. by heat-resistant conveyor belts or bands by gripping tongs or supporting frames by supporting frames
    • C03B35/207Construction or design of supporting frames
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P40/00Technologies relating to the processing of minerals
    • Y02P40/50Glass production, e.g. reusing waste heat during processing or shaping

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Mechanical Engineering (AREA)
  • Ceramic Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Organic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
  • Surface Treatment Of Glass (AREA)
TW106120702A 2016-08-12 2017-06-21 玻璃基板及玻璃基板的製造方法 TWI726118B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2016-158971 2016-08-12
JP2016158971A JP6288184B2 (ja) 2016-08-12 2016-08-12 ガラス基板およびガラス基板の製造方法

Publications (2)

Publication Number Publication Date
TW201805107A TW201805107A (zh) 2018-02-16
TWI726118B true TWI726118B (zh) 2021-05-01

Family

ID=60309483

Family Applications (1)

Application Number Title Priority Date Filing Date
TW106120702A TWI726118B (zh) 2016-08-12 2017-06-21 玻璃基板及玻璃基板的製造方法

Country Status (4)

Country Link
JP (1) JP6288184B2 (ko)
KR (1) KR102289541B1 (ko)
CN (2) CN107363693B (ko)
TW (1) TWI726118B (ko)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2018076230A (ja) * 2018-01-25 2018-05-17 旭硝子株式会社 ガラス基板およびガラス基板の製造方法
WO2019176382A1 (ja) * 2018-03-14 2019-09-19 富士フイルム株式会社 カバーガラス、紫外線照射システム、及び光学フィルムの製造方法
JP6597858B1 (ja) * 2018-09-04 2019-10-30 Agc株式会社 ディスプレイ用ガラス
US20210205943A1 (en) * 2019-08-04 2021-07-08 Bando Kiko Co., Ltd. Glass-plate working apparatus

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002160147A (ja) * 2000-11-21 2002-06-04 Asahi Glass Co Ltd 板ガラスの端縁部研磨方法
WO2002045909A1 (de) * 2000-12-09 2002-06-13 Schott Glas Schleifscheibe und verfahren zum schleifen von flachfacetten an glasscheiben, insbesondere an glaskeramikscheiben
TW201115264A (en) * 2009-02-13 2011-05-01 Hoya Corp Substrate for a mask blank, mask blank and photomask
TW201136857A (en) * 2010-03-08 2011-11-01 Asahi Glass Co Ltd Glass substrate
WO2016064101A1 (ko) * 2014-10-20 2016-04-28 동우화인켐 주식회사 유리 면취 방법
TW201621367A (zh) * 2014-10-28 2016-06-16 Asahi Glass Co Ltd 玻璃及玻璃之製造方法

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6325704B1 (en) * 1999-06-14 2001-12-04 Corning Incorporated Method for finishing edges of glass sheets
US7323276B2 (en) * 2003-03-26 2008-01-29 Hoya Corporation Substrate for photomask, photomask blank and photomask
US7435161B2 (en) * 2003-06-17 2008-10-14 Cabot Microelectronics Corporation Multi-layer polishing pad material for CMP
WO2010029878A1 (ja) * 2008-09-10 2010-03-18 Hoya株式会社 磁気ディスク用ガラス基板の製造方法、磁気ディスク用ガラス基板、磁気ディスクの製造方法及び磁気ディスク
CN102194626B (zh) * 2010-03-08 2015-11-25 旭硝子株式会社 玻璃基板
JP5915718B1 (ja) * 2014-11-07 2016-05-11 旭硝子株式会社 磁気ディスク用ガラス基板及び磁気ディスク

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002160147A (ja) * 2000-11-21 2002-06-04 Asahi Glass Co Ltd 板ガラスの端縁部研磨方法
WO2002045909A1 (de) * 2000-12-09 2002-06-13 Schott Glas Schleifscheibe und verfahren zum schleifen von flachfacetten an glasscheiben, insbesondere an glaskeramikscheiben
TW201115264A (en) * 2009-02-13 2011-05-01 Hoya Corp Substrate for a mask blank, mask blank and photomask
TW201136857A (en) * 2010-03-08 2011-11-01 Asahi Glass Co Ltd Glass substrate
WO2016064101A1 (ko) * 2014-10-20 2016-04-28 동우화인켐 주식회사 유리 면취 방법
TW201621367A (zh) * 2014-10-28 2016-06-16 Asahi Glass Co Ltd 玻璃及玻璃之製造方法

Also Published As

Publication number Publication date
CN107363693A (zh) 2017-11-21
JP2018024072A (ja) 2018-02-15
JP6288184B2 (ja) 2018-03-07
TW201805107A (zh) 2018-02-16
CN107363693B (zh) 2019-01-11
CN109590817A (zh) 2019-04-09
KR20180018332A (ko) 2018-02-21
CN109590817B (zh) 2020-12-18
KR102289541B1 (ko) 2021-08-12

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