TWI726118B - Glass substrate and manufacturing method of glass substrate - Google Patents

Abstract

The subject of the present invention is to provide a glass substrate that can meaningfully suppress the occurrence of cracks on the end surface or the generation of glass chips from the end surface during positioning operation. The solution is a glass substrate having an end surface connecting two surfaces. The glass substrate is characterized in that a smooth area is arranged on at least a part of the end surface, and the smooth area has a smoother surface than the other areas of the end surface. The aforementioned other areas of the aforementioned end surface are called general areas, and when the arithmetic average roughness of the aforementioned general area is Ra(1), and the arithmetic average roughness of the aforementioned smooth area is Ra(2), Ra(2)/ The ratio of Ra(1) is 0.8 or less.

Description

Glass substrate and manufacturing method of glass substrate Invention field

The invention relates to a glass substrate and a manufacturing method of the glass substrate.

Background of the invention

During the processing of the glass substrate such as the processing of the glass substrate, it may be necessary to fix the glass substrate in a predetermined position and/or direction. In the case of positioning the glass substrate of this kind, a positioning jig such as a rod-shaped metal member can be used. For example, in the case of using a plurality of positioning jigs configured to be slidable, the glass substrate can be sandwiched by the positioning jig to fix the position of the glass substrate.

Summary of the invention

During the positioning operation of the glass substrate by the positioning jig, the end surface of the glass substrate can be abutted against the positioning jig. Therefore, it is often confirmed that cracks are generated on the end surface of the glass substrate, glass cullet (glass cullet) is generated from the end surface, or glass cullet adheres to the glass substrate. condition. This kind of glass substrate with cracks will have quality problems. In addition, if glass chips adhere to the glass substrate, the glass substrate is more likely to be damaged during transportation of the glass substrate.

Therefore, what is desired is a glass substrate that hardly generates cracks and glass chips during positioning operations.

The present invention was made in view of such a background. The object of the present invention is to provide a glass substrate that can meaningfully suppress the occurrence of cracks on the end surface or the generation of glass chips from the end surface during positioning operations. Furthermore, in the present invention, an object is to provide a method for manufacturing a glass substrate that can meaningfully suppress the occurrence of cracks on the end surface or the generation of glass chips from the end surface during positioning operations.

In the present invention, there can be provided a glass substrate having an end surface connecting two surfaces, the glass substrate is characterized in that at least a part of the end surface is provided with a smooth area, and the smooth area has a smoother surface than the other areas of the end surface. On the surface, when the other areas of the end face are called general areas, the arithmetic average roughness of the general area is Ra(1), and the arithmetic average roughness of the smooth area is Ra(2), Ra( 2)/Ra(1) ratio is 0.8 or less.

In addition, the present invention can provide a method of manufacturing a glass substrate, the method of manufacturing the glass substrate has the following steps: (1) a step of preparing a glass material, the glass material having first and second surfaces, and connecting two surfaces (2) The step of grinding and polishing the end surface of the glass material using a processing device, the end surface being visually confirmed as the starting point S to the end point E in the top view of the glass material For the processing surface, the processing device has a first grinding wheel and a first grinding wheel, and a second grinding wheel and a second grinding wheel. The first and second grinding wheels can be moved in the direction of movement. The start point S moves in the direction of the end point E along the processed surface to grind the end surface of the glass material. The first grinding wheel can move along the processed surface in the moving direction, To grind the area of the end surface of the glass material that has been ground by the first grinding wheel, the second grinding wheel can move along the processed surface in the moving direction to grind the end surface of the glass material The area that has been ground by the second grinding wheel, in the step (2), (2-1) the first grinding wheel is from the first grinding starting point M ₁ except for the aforementioned Positions other than the start point S and the end point E of the surface to be processed are moved along the direction of movement on the surface to be processed, thereby forming an area called the first grinding area on the end surface, (2- 2) The first grinding wheel is from _{any position in the first grinding area called the first grinding start point P 1} except for the first grinding start point M ₁ , along the moving direction in the aforementioned grinding area. moving the working surface, whereby, in the end region is formed that is referred to as first polishing region, (2-3) the second grinding wheel is referred to as the second position from the start of the grinding point of M _2, along the direction of movement of the working surface is moved to be referred to as first moving position of the point N ₁ is completed, whereby the second end surface from the grinding start point M ₂ to the movement completion point of the first N ₁ is referred to as the second area of the grinding region is grinding, the second grinding start point M ₂ S is present between the first to the start of the grinding point M ₁ of the preceding starting point, and the first movement The completion point N ₁ is: (i) exists between the first grinding start point M _{1 except the first grinding start point P 1} and the first grinding start point P ₁ , or (ii) exists in the aforementioned first grinding start point P 1 Between the first grinding start point P ₁ and the end point E, (2-4) The second grinding wheel _{moves from the position called the second grinding start point P 2} along the movement direction to the processed surface referred to the position of the first point Q ₁ of the completion of polishing, whereby the second end surface from the polishing start point P ₂ to the point Q is completed in the first polishing _region is referred to as the second polishing region is polished, The second grinding start point P ₂ exists between the second grinding start point M ₂ and the first grinding start point M ₁ , and the first grinding completion point Q _{1 is} in front In the case of (i), it exists in the _{first polishing area other than the first polishing start point P 1} ; in the case of (ii), it exists in the first polishing area other than the first polishing start point P ₁ to move the first completed in the first polishing region other than said point N _1, in the case of the aforementioned (i), will the end faces from said first grinding start points P ₁ to the first polishing completion point Q ₁ of the are formed between (1) the repeated use of the polishing region has first and second grinding wheel grinding, in the case of (ii), will be completed to the point N ₁ from the first in the first moving end surface finish-ground point between Q _1, is formed (1) was repeated using the polishing region has first and second grinding wheel grinding.

In the present invention, it is possible to provide a glass substrate which can meaningfully suppress the generation of cracks on the end surface or the generation of glass chips from the end surface during the positioning operation. In addition, in the present invention, it is possible to provide a method of manufacturing a glass substrate that can meaningfully suppress the occurrence of cracks on the end surface or the generation of glass chips from the end surface during the positioning operation.

110: The first glass substrate

112, 252: first surface

114, 254: second surface

116A, 256A: 1st end face (end face)

116B, 256B: 2nd end face (end face)

116C, 256C: 3rd end face (end face)

116D, 256D: 4th end face (end face)

120: general area

122: smooth area

250: Glass material

260A: side 1 (processed surface)

260B: Second side (processed surface)

260C: 3rd side (processed surface)

260D: 4th side (processed surface)

300: processing device

302, 502: Workbench

380A, 580A: 1st grinding wheel

382A, 582A: 2nd grinding wheel

385B, 585B: 1st grinding wheel

387B, 587B: 2nd grinding wheel

491, 691: 1st grinding area

492, 692: 1st grinding area

493, 693: 2nd grinding area

494, 694: 2nd grinding area

495: Repeated grinding area

500: 2nd processing device

584A: 3rd grinding wheel

589B: 3rd grinding wheel

695: The first repeated grinding area

696: 3rd grinding area

697: 3rd grinding area

698: 2nd repeated grinding area

A ₁ ~A ₆ : Moving direction

E: End point

F ₁ ~F ₆ : Movement track

L ₁ : The first length

L ₂ : The second length

L _s : the full length of the smooth area

M ₁ : The first grinding start point

M ₂ : 2nd grinding start point

N ₁ : The first move completion point

N ₂ : Point of completion of the second move

P ₁ : The first polishing start point

P ₂ : The second polishing start point

Q ₁ : The first polishing completion point

Q ₂ : The second polishing completion point

S: starting point

X, Y, Z: direction

Fig. 1 is a perspective view schematically showing a glass substrate according to an embodiment of the present invention.

Fig. 2 is a diagram schematically showing one end surface of the glass substrate shown in Fig. 1.

Fig. 3 is a diagram schematically showing a flow of a method of manufacturing a glass substrate according to an embodiment of the present invention.

Fig. 4 is a perspective view schematically showing the form of the glass material.

Fig. 5 is a diagram schematically showing an example of the configuration of a processing device that can be used in a method of manufacturing a glass substrate according to an embodiment of the present invention.

Fig. 6 is a diagram schematically showing an example of the operation of the processing device shown in Fig. 5.

Figure 7 (a) ~ (d) is a schematic diagram showing the respective movement of the first grinding wheel, the first grinding wheel, the second grinding wheel and the second grinding wheel of the processing device shown in FIG. 5 Diagram of the trajectory.

Fig. 8 is a diagram schematically showing the flow of another method of manufacturing a glass substrate according to an embodiment of the present invention.

Fig. 9 is a diagram schematically showing an example of the configuration of another processing device that can be used in the method of manufacturing a glass substrate according to an embodiment of the present invention.

Fig. 10 is a diagram schematically showing an example of the operation of the processing device shown in Fig. 9.

Figure 11 (a) ~ (f) is a schematic diagram showing the first grinding wheel, the first grinding wheel, the second grinding wheel, the second grinding wheel, the third grinding wheel and the first grinding wheel of the processing device shown in FIG. 9 3 Diagram of the respective movement trajectories of the grinding wheels.

The form used to implement the invention

Hereinafter, an embodiment of the present invention will be described with reference to the drawings.

(Glass substrate of one embodiment of the present invention)

The structure of a glass substrate according to an embodiment of the present invention will be described with reference to FIGS. 1 and 2. FIG. 1 shows a perspective view of the outline of a glass substrate (hereinafter simply referred to as a "first glass substrate") according to an embodiment of the present invention.

As shown in FIG. 1, the first glass substrate 110 has a first surface 112 and a second surface 114 facing each other, and four end surfaces 116A to 116D connecting the two surfaces.

In addition, in the example of FIG. 1, since the 1st glass substrate 110 is substantially rectangular shape, it has four end surfaces 116A-116D. However, this is only an example, and the first glass substrate 110 may have any shape. As a result, the number of end faces can be any value. For example, when the first glass substrate 110 is substantially disk-shaped, the number of end faces is one. In addition, when the first glass substrate 110 is substantially triangular, the number of end faces is three. When the first glass substrate 110 has a pentagonal shape or a polygonal shape greater than that, the same is assumed.

Here, the first glass substrate 110 has the following feature: at least one end surface has a "smooth area". Here, the so-called "smooth area" refers to an area where the arithmetic mean roughness Ra is small compared to other areas on the target end surface. In addition, on the target end surface, the area other than the "smooth area" is called the "general area".

Hereinafter, a case where the first end surface 116A of the first glass substrate 110 has such a "smooth area" is taken as an example to illustrate the effect of the present invention.

In FIG. 2, the form of the first end surface 116A having a "smooth area" is schematically shown.

As shown in FIG. 2, the surface of the first end surface 116A is divided into a general area 120 and a smooth area 122. The smooth region 122 is sandwiched by the general region 120 and is present in the approximate center of the first end surface 116A.

However, this is only an example, and the location of the smooth region 122 is not particularly limited. In addition, the number of smooth regions 122 is not particularly limited. For example, the smooth region 122 may exist in two or more places on the 1st end surface 116A. The installation position and the number of the smooth regions 122 are determined by the relationship with the positioning jigs that abut on the first glass substrate 110 at the time of the positioning process.

Also, in FIG. 2, the general area 120 and the smooth area 122 The boundary of is displayed exaggeratedly by dashed lines. However, it must be noted that under normal circumstances, it is difficult to judge the general area 120, the smooth area 122, and the boundary between the two from the appearance.

Here, as mentioned above, the smooth area 122 has a smaller arithmetic average roughness Ra than the general area 120. In particular, the first glass substrate 110 has the following characteristics: the arithmetic average roughness in the general area 120 is Ra(1), and the arithmetic average roughness in the smooth area 122 is Ra(2) When, it satisfies: Ra(2)/Ra(1)≦0.8 formula (1).

As mentioned above, during the positioning operation of the glass substrate by the positioning jig, the end surface of the glass substrate can be abutted against the positioning jig. In addition, at this time, cracks may be generated on the end surface of the glass substrate, or glass scraps (glass scraps) may be generated from the end surface.

On the other hand, in the first glass substrate 110, the smooth region 122 is arranged at a position where the end surface at least abuts against the positioning jig. In addition, the arithmetic average roughness of the smooth area 122 and the general area 120 has the relationship of the aforementioned formula (1). Such a smooth area 122 with less unevenness will show better strength than the normal area 120 for abutting against members such as positioning jigs.

Therefore, in the first glass substrate 110, the positioning jig is in contact with the smooth area 122 of the first end surface 116A. Compared with the positioning jig in contact with the general area 120, the occurrence of occurrence on the first end surface 116A can be suppressed more meaningfully. Cracks, or the occurrence of glass chips from there. In addition, since the positioning jig is in contact with the smooth area 122 with less unevenness, it also becomes meaningful It effectively suppresses the wear and dust of the positioning member.

(General area 120 and smooth area 122)

Next, the general area 120 and the smooth area 122 of the end surface will be described in more detail.

As mentioned above, the ratio Ra(2)/Ra(1) of the arithmetic average roughness Ra(2) in the smooth area 122 to the arithmetic average roughness Ra(1) in the general area 120 is set to 0.8 or less. The ratio Ra(2)/Ra(1) is preferably 0.7 or less.

In addition, the arithmetic average roughness Ra(2) of the smooth region 122 is preferably 0.12 μm or less, more preferably 0.08 μm or less.

On the other hand, the arithmetic average roughness Ra(1) of the general area 120, that is, the area other than the smooth area 122 of the first end surface 116A, is preferably 0.2 μm or less, for example.

_{In addition, the total length L s} of the smooth region 122 of the first end surface 116A is preferably 1 mm or more and 30 mm or less. If the total length L _s of the smooth area 122 is 1 mm or more, it becomes easy to accurately contact the positioning jig to the smooth area 122. Moreover, if the total length L _s of the smooth region 122 is 30 mm or less, it is preferable from the viewpoint of the productivity of the first glass substrate 110. The overall length L _{s of the} smooth region 122 is more preferably 3 mm or more and 10 mm or less.

Here, the "full length (L _s )" of the smooth region 122 is determined as follows.

Let the first length of the target end face be L ₁ , and let the second length be L ₂ . Here, L ₁ ≧L ₂ . For example, in the case of the first end surface 116A shown in FIG. 2, the dimension in the X direction is the length L ₁ , and the dimension in the Z direction (thickness direction) is the length L ₂ . In this case, as shown in FIG. 2, the total length L _s of the smooth region 122 is defined by the width of the smooth region 122 in the direction along the first length L _1.

Furthermore, when the glass substrate is roughly disc-shaped and there is only one curved end surface, the first length L _{1 of} this end surface is the length of the periphery, and the second length L ₂ is equivalent to the glass substrate thickness of. Therefore, the total length L _s of the smooth region becomes the length of the smooth region along the periphery.

As described above, the installation position and the installation number of the smooth regions 122 in the first end surface 116A are not particularly limited. For example, on the first end surface 116A, two or more smooth regions 122 may be arranged at equal intervals or at non-equal intervals.

In addition, in the aforementioned example, the smooth region 122 is arranged on the first end surface 116A of the first glass substrate 110. However, the smooth region 122 may be arranged on any end surface of the first glass substrate 110.

For example, the smooth area 122 may be arranged on any one of the second end surface 116B to the fourth end surface 116D, or may be arranged on two end surfaces such as the first end surface 116A and the second end surface 116B, or may be arranged on the first end surface 116A and the second end surface 116B. Three end surfaces such as the end surface 116A to the third end surface 116C may be arranged on all the end surfaces of the first end surface 116A to the fourth end surface 116D. In addition, at this time, on each of the end faces 116A to 116D, the installation positions and the installation numbers of the smooth regions 122 may be different from each other.

(The manufacturing method of the glass substrate of one embodiment of the present invention)

Next, referring to Figs. 3-7, the glass of an embodiment of the present invention will be described. An example of a manufacturing method of a glass substrate.

FIG. 3 schematically shows the flow of a method of manufacturing a glass substrate according to an embodiment of the present invention (hereinafter, simply referred to as "the first manufacturing method"). In addition, FIGS. 4 to 7 schematically show a state of one step in the first manufacturing method.

As shown in FIG. 3, the first manufacturing method has the following steps: (1) a step of preparing a glass material (step S110), the glass material having first and second surfaces, and end surfaces connecting the two surfaces, and (2) A step of grinding and polishing the end surface of the glass material using a processing device (step S120).

Hereinafter, each step will be described in detail with reference to FIGS. 4 to 7.

(Step S110)

First, prepare the glass material. As shown in FIG. 4, the glass material 250 has the 1st surface 252, the 2nd surface 254, and 4 end surfaces 256A-256D connecting the two surfaces.

Hereinafter, in order to simplify the description, from the top view of the glass material 250, the sides of the first surface 252 corresponding to the four end surfaces 256A to 256D are referred to as the first side 260A, the second side 260B, the third side 260C, and the fourth side, respectively. Side 260D.

The size of the glass material 250 is not particularly limited. For example, in the case of manufacturing glass substrates for liquid crystal displays, the glass material 250 may have, for example, longitudinal sides (the length of the first side 260A and the third side 260C) 1800 mm to 3200 mm × lateral sides (the second side 260B and the fourth side). Length of side 260D) 1500mm~2900mm×thickness 0.10mm~0.70mm.

(Step S120)

Next, the end surface of the glass material 250 is ground and polished using a processing device (hereinafter, these are also collectively referred to as "processing processing").

In addition, the processed end surface of the glass material 250 is not particularly limited. For example, among the four end faces 256A to 256D, only one end face may be processed. Alternatively, among the four end faces 256A to 256D, two or more end faces, for example, all end faces may be processed.

Here, as an example, a case where the first end surface 256A of the glass material 250 is processed will be described as an example.

(Processing device)

In addition, the configuration of a processing device that can be used in the first manufacturing method is schematically shown in FIG. 5.

As shown in FIG. 5, the processing apparatus 300 includes a table 302, first and second grinding wheels 380A and 382A, and first and second grinding wheels 385B and 387B.

The workbench 302 is used for installing the glass material 250 on the upper part. In addition, the first and second grinding wheels 380A, 382A, and the first and second grinding wheels 385B, 387B are used for processing the first end surface 256A of the glass material 250.

The first grinding wheel 380A can grind the first end surface 256A of the glass material 250, and the first grinding wheel 385B can grind the first end surface 256A of the glass material 250. Similarly, the second grinding wheel 382A can grind the first end surface 256A of the glass material 250, and the second grinding wheel 387B can grind the first end surface 256A of the glass material 250.

The first grinding wheel 380A and the first grinding wheel 385B form a set, and the first grinding wheel 385B can follow the grinding stroke of the first grinding wheel 380A. Similarly, the second grinding wheel 382A and the second grinding wheel 387B form a set, and the second grinding wheel 387B can follow the grinding stroke of the second grinding wheel 382A.

The first grinding wheel 380A is made of a grinding stone that is hard to be elastically deformed and has a high grinding force. As this kind of grindstone, for example, a metal bond grindstone formed by fixing abrasive grains of diamond or CBN with a metal bond that is hard to elastically deform. Similarly, a plating grindstone having diamond abrasive grains can also be exemplified.

The same applies to the second grinding wheel 382A.

On the other hand, the first grinding wheel 385B is composed of a grinding stone having elasticity and suitable for grinding. As this kind of grindstone, for example, a resin that is easily elastically deformed, or a binder such as butyl rubber or natural rubber, can be used to combine diamond, CBN, green silicon carbide (GC), alumina (Al ₂ O ₃ ), Grinding stones made of fixed abrasive grains such as pumice or garnet.

The same applies to the second grinding wheel 387B.

Furthermore, in this application, the purpose of "grinding" is to cut the substrate into a predetermined size and a predetermined cross-sectional shape, and the purpose of "grinding" is to remove chipping, chipping, etc. caused by grinding. Cracks, etc., and reduce the roughness of the ground surface.

(Specific processing steps)

In step S120, the glass material 250 is set in the processing device 300, and the glass material 250 is processed.

First, as shown in FIG. 6, the glass material 250 is set so that the first side 260A faces the first and second grinding wheels 380A and 382A, and is set on the table 302 of the processing device 300. Furthermore, the glass material 250 can also be fixed to the workbench 302 by suction.

Next, the first grinding wheel 380A and the first grinding wheel 385B of the processing device 300 are rotated at a predetermined number of rotations. In addition, the second grinding wheel 382A and the second grinding wheel 387B of the processing device 300 are rotated at a predetermined number of rotations.

Subsequently, as shown in FIG 6, the first side of the grinding wheel 380A contacts the end surface of the first glass material 250 256A, the side (processed surface) toward the moving direction of arrow A ₁ 260A along the first side. Hereinafter, the direction of this arrow A ₁ is referred to as "moving direction". The first end surface 256A of the glass material 250 is ground by the movement of the first grinding wheel 380A.

Furthermore, after a while after the grinding of the first end surface 256A by the first grinding wheel 380A starts, the first grinding wheel 385B is brought into contact with the first end surface 256A of the glass material 250 while facing along the first side 260A. Move in the direction of arrow A _2. The arrow A ₂ is the _{same direction as the arrow A 1} (the X direction in FIG. 6), that is, the "moving direction".

By the movement of the first grinding wheel 385B, the first end surface 256A of the glass material 250 can be ground in the area ground by the first grinding wheel 380A.

In addition, almost simultaneously with the grinding of the first end surface 256A by the first grinding wheel 380A, or after a short period of time, the second grinding wheel 382A is brought into contact with the first end surface 256A of the glass material 250, while moving in the direction of the first side 260A of the arrow a _3. A ₃ is the same arrow direction A ₁ (X direction in FIG. 6) of the arrow, i.e., a "moving direction." By the movement of the second grinding wheel 382A, the first end surface 256A of the glass material 250 is ground.

In addition, after a while after the grinding of the first end surface 256A by the second grinding wheel 382A starts, the second grinding wheel 387B is brought into contact with the first end surface 256A of the glass material 250 while facing along the first side 260A. Move in the direction of arrow A _4. The arrow A ₄ is the _{same direction as the arrow A 1} (the X direction in FIG. 6), that is, the "moving direction".

By the movement of the second grinding wheel 387B, the area ground by the second grinding wheel 382A of the first end surface 256A of the glass material 250 can be ground.

Here, the first grinding wheel 380A is operated to start grinding from a midway portion, for example, a substantially central portion, of the first side 260A of the glass material 250. In addition, the grinding is continued until the end point E of the first side 260A.

In addition, the first grinding wheel 385B is operated to start grinding from an arbitrary position on the first side 260A where the grinding by the first grinding wheel 380A has been completed. In addition, polishing is continued until the end point E of the first side 260A.

On the other hand, the second grinding wheel 382A is operated to start grinding from the starting point S of the first side 260A of the glass material 250. Then, the grinding is stopped at a time point in the middle of the movement direction to the first side 260A.

The grinding by this second grinding wheel 382A is stopped The position may be any position in the area of the first side 260A that has been ground by the first grinding wheel 380A. However, the stop position of the grinding by the second grinding wheel 382A should be in the area that has been ground by the first grinding wheel 380A, and the grinding by the first grinding wheel 385B is not performed. Anywhere in the area. In this case, it is possible to avoid the situation where the area that has been ground by the first grinding wheel 385B is ground by the second grinding wheel 382A.

In addition, the second grinding wheel 387B is operated to start grinding from the starting point S of the first side 260A of the glass material 250. In addition, the grinding is continued to an arbitrary position where the grinding by the first grinding wheel 385B has been completed.

However, when the stop position of the grinding by the aforementioned second grinding wheel 382A exceeds the start position of the grinding by the first grinding wheel 385B, the second grinding wheel 387B will continue to grind until it exceeds the second grinding wheel 385B. The grinding wheel 382A is at the stop position of grinding.

Thereby, the grinding and polishing treatment of the entire first side 260A of the glass material 250 can be completed, and a glass substrate in which the first end surface 256A of the glass material 250 has been processed can be manufactured.

In such a first manufacturing method, a region polished by both the first grinding wheel 385B and the second grinding wheel 387B (hereinafter referred to as "repetitive grinding area") is generated in the first end surface 256A of the glass material 250 . In this type of repeated polishing area, by polishing twice, a smoother surface than other areas of the first end surface 256A can be obtained. Furthermore, it is more desirable that the first grinding wheel 385B and the second grinding wheel 387B carry out the repetitive grinding area. When performing polishing treatment, the moving speed of the polishing wheel or the number of rotations is lowered than when performing polishing treatment on other areas, so that a smooth surface can be easily obtained.

As mentioned above, a smooth surface with few projections and depressions will have better strength for the abutment of members such as positioning jigs. Therefore, in the glass substrate manufactured by the first manufacturing method, this type of repeated polishing area on the end surface is used as a contact place with a member such as a positioning jig, thereby making it possible to effectively suppress the occurrence of occurrence on the end surface. Cracks, or the occurrence of glass chips from there.

(Repeat the formation steps of the grinding area)

Here, the step of forming the above-mentioned repeated polishing area will be described in more detail with reference to FIG. 7.

In FIG. 7, the respective movement trajectories of the first grinding wheel 380A, the first grinding wheel 385B, the second grinding wheel 382A, and the second grinding wheel 387B are schematically shown. In FIG. 7(a), the schematic movement path F ₁ of the first grinding wheel 380A is shown, and in FIG. 7(b), the schematic movement path F _{2 of the first grinding wheel 385B is shown.} . In Fig. 7(c), shown is a schematic movement locus F ₃ of the second grinding wheel 382A. In addition, in FIG. 7(d), what is shown is a schematic movement trajectory F ₄ of the second grinding wheel 387B.

In addition, in FIG. 7, the first grinding wheel 380A, the first grinding wheel 385B, the second grinding wheel 382A, and the second grinding wheel 387B are moved along the X direction (moving direction), whereby the glass material 250 The first end face 256A of 256A is ground and polished in the Y direction (that is, the thickness is reduced).

Therefore, in Figure 7, in the case of relatively comparing two positions Below, the position in the direction in which the X value becomes larger (on the right) is called "(located) in front", and conversely, the position in the direction in which the X value becomes smaller (on the left) is called "(located) rear". In addition, stopping the movement means stopping the movement in the state of being in contact with the glass material 250 and allowing movement in a direction away from the glass material 250.

As shown in FIG. 7, the first side 260A of the glass material 250 extends from the start point S to the end point E.

FIG. 7 (a), the first grinding wheel 380A is in the middle of the first side 260A, i.e. in contact with the first grinding start point M ₁ and the first end surface 256A, and starting from here to the first end surface 256A grinding. In addition, the first grinding wheel 380A continues to grind in the moving direction until the end point E of the first side 260A.

As a result, corresponding to the glass material 256A from the first grinding area M ₁ start point to the end point E of the first side 250 of the first end face 260A may be ground. Hereinafter, this area is referred to as the "first grinding area (491)".

In the first grinding area 491, the grinding amount (thickness reduction amount in the Y direction) of the first end surface 256A by the first grinding wheel 380A is in the range of, for example, 0.05 mm to 0.50 mm.

On the other hand, 7 (b), 385B is in the middle of the first side 260A of the grinding wheel shown in FIG. 1, i.e. the contact 256A ₁ and the first end surface at a first polishing start point P, and from here for the first 1 Polishing of end face 256A. In addition, the first grinding wheel 385B continues to grind along the moving direction until the end point E of the first side 260A.

As a result, the glass material 250 is a first end surface region 256A is polished polishing starts from the first points P ₁ to the end point E. Hereinafter, this area is referred to as the "first polishing area (492)".

Here, the first polishing as long as the start points P ₁ is within the range except for the first grinding start point and the end point E M ₁ of a first grinding region 491, can be made at an arbitrary position.

In the first polishing area 492, the polishing amount of the first end surface 256A by the first polishing wheel 385B is, for example, in the range of 1 μm to 30 μm.

7(c), the second grinding wheel 382A is in contact with the first end surface 256A at the starting point S of the first side 260A, and moves from there to the first side of the first side 260A in the moving direction. The movement is completed at the point N ₁ . And, the second grinding wheel 382A to reach the mobile will complete the movement of the first stop point of time of ₁ N.

First moving completion point N ₁ may be positioned at the first start of the grinding point M ₁ and the position which is more than any of the front. In particular the grinding ratio of the first forward starting point for the more preferred M _1. However, FIG. 7 (c), the ideal is to move the completion point of the first region N ₁ is set between the first grinding start point M ₁ ~ 1 start polishing the points P _1.

Whereby, by the second grinding wheel 382A, the glass material 250 of the first side region 260A is done from the point N ₁ is moved to the start point S 1 is ground. Hereinafter, this area is referred to as the "second grinding area (493)".

In the second grinding area 493, the grinding amount of the first end face 256A (thickness reduction amount in the Y direction) by the second grinding wheel 382A is substantially the same as that performed by the first grinding wheel 380A. In the first grinding area 491 The grinding amount is equal.

However, generally, the grinding amount in the area from the first grinding start point M ₁ to the first movement completion point N ₁ does not become twice the grinding amount in the other areas. This is because, as described above, the second grinding wheel 382A is made of a grindstone that is hard to deform. That is, in the region from the first grinding start point M ₁ to the first movement completion point N ₁ , the thickness of the first end surface 256A has been reduced in the Y direction by the first grinding wheel 380A. Therefore, even if the second grinding wheel 382A composed of a member that is not easily deformed passes through this area, it becomes difficult to perform grinding of the same amount as the first grinding wheel 380A again. Under normal circumstances, the grinding amount in the area from the first grinding start point M ₁ to the first movement completion point N ₁ after the second grinding wheel 382A passes is only slightly increased than the grinding amount in other areas degree.

Furthermore, as shown in FIG. 7(d), the second grinding wheel 387B is in contact with the first end surface 256A at the starting point S of the first side 260A, and moves from there to the first grinding completion point Q ₁ along the movement direction. And, the second grinding wheel 387B will be completed in the first polishing time point ₁ point Q reaches the stops moving.

As a result, by the second grinding wheel 387B, the glass material is a first side 260A are from the region of the polishing start point S to the point of completion of the first polishing Q ₁ '250. Hereinafter, this area is referred to as the "second polishing area (494)".

Here, as shown in FIG. 7(c), when the first movement completion point N _{1 is} set in the area between the first grinding start point M ₁ and the first grinding start point P ₁ , the first grinding The completion point Q _{1 may be any position} as long as it is within the range of the first polishing region 492 other than the first _{polishing start point P 1.}

On the other hand, the movement of the first completed more forward position than the first point N located at _a polishing start point P at _a further forward, the first polishing completion point Q is set to ₁ at completion of the first movement than the point N _1.

In the second polishing region 494, the polishing amount of the first end surface 256A by the second polishing wheel 387B is substantially equal to the polishing amount in the first polishing region 492 performed by the first polishing wheel 385B.

As a result of the above steps, when the first movement completion point N _{1 is} set in the area between the first grinding start point M ₁ and the first grinding start point P ₁ , as shown in Figure 7(d), In the second polishing area 494, the area overlapping with the first polishing area 492, that is, in the area from the first polishing start point P ₁ to the first polishing completion point Q ₁ , will be implemented by the first polishing wheel 385B And the second grinding wheel 387B performs the second grinding process. Therefore, a repeated polishing area 495 can be formed here.

On the other hand, when the first movement completion point N ₁ is located forward of the first polishing start point P ₁ , repeated polishing is formed in the region from the first movement completion point N ₁ to the first polishing completion point Q ₁ Area 495.

As described above, in the repeated polishing area 495, a smoother surface than other areas of the first end surface 256A can be obtained.

For example, when the arithmetic average roughness in other regions of the first end surface 256A is set to Ra(3), and the arithmetic average roughness in the repeated polishing area 495 is set to Ra(4), it can also be obtained: Ra(4 )/Ra(3)≦0.8 Formula (2).

(Additional steps)

Through the above step S110~step S120, the glass material can be 250 manufactures a glass substrate having a repeated polishing area 495 on the first end surface 256A.

However, the first manufacturing method may implement at least one of the following steps in an additional manner as needed.

(a) The processing step of the second end surface 256B of the glass material 250, (b) the processing step of the third end surface 256C of the glass material 250, and (c) the processing step of the fourth end surface 256D of the glass material 250.

Among them, when implementing the processing step of (a), it is only necessary to rotate the glass material 250 counterclockwise by 90° in the processing device 300 shown in FIGS. 5 and 6 described above. By performing the aforementioned steps in this state, a repetitive polishing area can be formed on the second end surface 256B.

In addition, when performing the processing step (b), it is only necessary to rotate the glass material 250 in the (counter/clockwise) direction by 180° in the processing device 300 shown in FIGS. 5 and 6 described above. By performing the aforementioned steps in this state, the repetitive polishing area can be formed on the third end surface 256C.

Alternatively, the processing device 300 may be provided with the same processing mechanism as the first grinding wheel 380A and the first grinding wheel 385B, and the second grinding wheel 382A and the second grinding wheel 387B (for example, the third grinding wheel and the The combination of the third grinding wheel, and the combination of the fourth grinding wheel and the fourth grinding wheel). These are arranged to face the third side 260C of the glass material 250.

When the processing device 300 has such a configuration, it becomes possible to process the first end surface 256A and the third end surface 256C of the glass material 250 at a time. Therefore, the processing speed can be increased.

In addition, when implementing the processing step (c), as long as the above-mentioned In the processing device 300 shown in FIGS. 5 and 6, the glass material 250 can be rotated 90° in the clockwise direction. By performing the aforementioned steps in this state, a repetitive polishing area can be formed on the fourth end surface 256D.

In addition, in the processing steps (a) and (c), when the processing device 300 has the third grinding wheel and the third grinding wheel, and the fourth grinding wheel and the fourth grinding wheel, it is only necessary to make the glass The material 250 can be rotated 90° clockwise or counterclockwise.

In this case, it becomes possible to process the 2nd end surface 256B and the 4th end surface 256D of the glass material 250 at once. Therefore, the processing speed can be increased.

Above, the first manufacturing method using the processing device 300 has been described. However, the above description is only an example, and various changes can be made in the first manufacturing method.

For example, in the aforementioned FIG. 7 (a) as shown in step, the grinding wheel 1 side 260A ₁ 380A is moved from the first grinding start point to end point M along the sides 260A of E. As a result, the first grinding area 491 can be formed in the area from the first _{grinding start point M 1 to the end point E.}

However, the first grinding wheel 380A may stop the grinding of the first end surface 256A at any position between the _{first grinding start point M 1 and the end point E.}

In the step shown in FIG. 7(c), the second grinding wheel 382A moves from the starting point S to the first movement completion point N ₁ along the side 260A. As a result, the second grinding region 493 is formed between _a point N can be completed in the first moving start point S ~ 1.

However, the second grinding wheel grinding 382A may start from the first end face 256A - an arbitrary position between the start point S ₁ of the first grinding start point M (but the first one will start of the grinding point ₁ except M) cut.

Similarly, in the aforementioned FIG. 7 (b) as shown in step, the first grinding wheel 385B along the edges 260A, the end point of the polishing starts from the first points P ₁ moves to the edge 260A E. As a result, the first polishing region 492 can be formed in the region from the first _{polishing start point P 1 to the end point E.}

However, the first grinding wheel 385B may stop the grinding of the first end surface 256A at any position between the first grinding start point P1 and the end point E.

Similarly, in the step shown in FIG. 7(d) described above, the second grinding wheel 387B moves from the starting point S to the first grinding completion point Q ₁ along the side 260A. As a result, 494 may be formed in the region of the second polishing region S ~ polishing start point of the first point Q ₁ 'are completed.

However, the second grinding wheel 387B may start the grinding of the first end surface 256A from any position in the range from the start point S to the first grinding start point P ₁ (except for the first grinding start point P _{1 ).} Further, as long as the second grinding wheel 387B is moved forward to completion at _a point more than N 1 and within the moving range of the polishing region 492, the position may be arbitrary.

In addition, as long as the second grinding wheel does not exceed the first grinding wheel, the grinding by the second grinding wheel 382A (second grinding) may be started at any point in time. Similarly, as long as the second grinding wheel does not exceed the first grinding wheel, the grinding by the second grinding wheel 387B (second grinding) may be started at any point in time. Ideally, for example, the start of the second grinding It is at the same time as the grinding (first grinding) performed by the first grinding wheel 380A, or before the completion of the implementation or the like. Similarly, it is preferable that the start of the second grinding be performed at the same time as the grinding by the first grinding wheel 385B (first grinding), or before the completion of the implementation or the like. In addition, it is preferable that the second grinding by the second grinding wheel 382A is before the start of the first grinding by the first grinding wheel 385B, at the same time, or before the completion of the first grinding.

In other words, although the steps shown in Figs. 7(b) and (d) can be implemented after the steps shown in Figs. 7(a) and (c) are completed, it is more desirable from the viewpoint of productivity However, the steps of Fig. 7(a) and (c) start at the same time or close to the same time, and before the steps of Fig. 7(a) and (c) are completed, start Fig. 7(b) and (d) )A step of.

Alternatively, one grinding wheel and two grinding wheels can be set as a set, and the area ground by the grinding wheel can be ground by the first grinding wheel, and the grinding can be performed by the second grinding wheel in a repeated manner. At least a part of the area that has been ground with the first grinding wheel.

In addition, the second polishing step may be performed between the first polishing start point P ₁ and the first polishing completion point Q _1.

Those with ordinary knowledge in the technical field to which the present invention pertains should be easily understood, and various other changes can be made besides this.

(Method for manufacturing glass substrate of another embodiment of the present invention)

Next, a method of manufacturing a glass substrate according to another embodiment of the present invention (hereinafter referred to as a "second manufacturing method") will be described.

In the first manufacturing method mentioned above, the glass material 250 At least one end surface (for example, the first end surface 256A) of the at least one end surface is formed with a repeated grinding area 495. In contrast, in the second manufacturing method, a plurality of repeated polishing regions are formed on one end surface of the glass material.

Hereinafter, the second manufacturing method will be described with reference to FIGS. 8 to 11.

Fig. 8 schematically shows the flow of the second manufacturing method. In addition, FIGS. 9 to 11 schematically show a state of one step in the second manufacturing method.

As shown in FIG. 8, the second manufacturing method has the following steps: (1) a step of preparing a glass material (step S210), the glass material having first and second surfaces and end surfaces connecting the two surfaces; and (2) The step of grinding and polishing the end surface of the glass material using the second processing device (step S220).

Hereinafter, each step will be described in detail with reference to FIGS. 9 to 11.

(Step S210)

This step S210 is the same as step S110 in the aforementioned first manufacturing method. Therefore, the details of this step are omitted. In addition, in the following description, in order to clarify, when each part of a glass material is shown, the reference symbol shown in FIG. 4 is used.

(Step S220)

Next, the end surface of the glass material 250 is processed by the second processing device. Here, as an example, a case where the first end surface 256A of the glass material 250 is processed will be described as an example.

(Second processing device)

In FIG. 9, the second manufacturing method that can be used in the second manufacturing method is schematically shown. The composition of the processing device.

As shown in FIG. 9, the second processing device 500 includes a table 502, first to third grinding wheels 580A to 584A, and first to third grinding wheels 585B to 589B.

Among them, the structure and function of the table 502, the first and second grinding wheels 580A, 582A, and the first and second grinding wheels 585B, 587B are the same as the aforementioned processing device 300. Therefore, detailed description is omitted here.

The third grinding wheel 584A can grind the first end surface 256A of the glass material 250. In addition, the third grinding wheel 589B can grind the first end surface 256A of the glass material 250.

The first grinding wheel 580A and the first grinding wheel 585B form a set, and the first grinding wheel 585B can follow the grinding stroke of the first grinding wheel 580A. Similarly, the second grinding wheel 582A and the second grinding wheel 587B form a set, and the second grinding wheel 587B can follow the grinding stroke of the second grinding wheel 582A. Furthermore, the third grinding wheel 584A and the third grinding wheel 589B form a set, and the third grinding wheel 589B can follow the grinding stroke of the third grinding wheel 584A.

The third grinding wheel 584A is made of a grinding stone that is hard to be elastically deformed and has a high grinding force. On the other hand, the third grinding wheel 589B is composed of a grinding stone having elasticity and suitable for grinding.

When the first end surface 256A of the glass material 250 is processed by the second processing device 500, as shown in FIG. 10, the glass material 250 is set on the table 502 of the second processing device 500. At this time, the glass material 250 is set so that the first side 260A faces the first to third grinding wheels 580A to 584A, and is set on the table 502.

Next, the first grinding wheel 580A and the first grinding wheel 585B of the second processing device 500 are rotated at a predetermined number of rotations. In addition, the second grinding wheel 582A and the second grinding wheel 587B are rotated at a predetermined number of rotations. In addition, the third grinding wheel 584A and the third grinding wheel 589B are rotated at a predetermined number of rotations.

Next, as shown in FIG 10, the first side of the grinding wheel in contact with the first end face 580A to 256A of the glass material 250, while moving along the first direction side (processed surface) 260A of the arrow A _1. Hereinafter, the direction of this arrow A ₁ is referred to as "moving direction". The first end surface 256A of the glass material 250 is ground by the movement of the first grinding wheel 580A.

In addition, after a while after the grinding of the first end surface 256A by the first grinding wheel 580A starts, the first grinding wheel 585B is brought into contact with the first end surface 256A of the glass material 250 while facing along the first side 260A. Move in the direction of arrow A _2. Here, the arrow A ₂ is the _{same direction as the arrow A 1} , that is, the "moving direction".

By the movement of the first grinding wheel 585B, the first end surface 256A of the glass material 250 can be ground in the area ground by the first grinding wheel 580A.

In addition, almost simultaneously with the grinding of the first end surface 256A by the first grinding wheel 580A, or after a short period of time, the second grinding wheel 582A is brought into contact with the first end surface 256A of the glass material 250, one while moving in the direction of the first side 260A of the arrow a _3. A ₃ is the same arrow direction A ₁ (X direction in FIG. 6) of the arrow, i.e., a "moving direction." By the movement of the second grinding wheel 582A, the first end surface 256A of the glass material 250 is ground.

In addition, after a while after the grinding of the first end surface 256A by the second grinding wheel 582A starts, the second grinding wheel 587B is brought into contact with the first end surface 256A of the glass material 250 while facing along the first side 260A. Move in the direction of arrow A _4. The arrow A ₄ is the _{same direction as the arrow A 1} (the X direction in FIG. 6), that is, the "moving direction".

By the movement of the second grinding wheel 587B, the area ground by the second grinding wheel 582A of the first end surface 256A of the glass material 250 can be ground.

In addition, almost simultaneously with the grinding of the first end surface 256A by the second grinding wheel 582A, or after a short period of time, the third grinding wheel 584A is brought into contact with the first end surface 256A of the glass material 250, one while moving in the direction of the first side 260A of the arrow a _5. A ₅ is the same arrow direction A ₁ (X direction in FIG. 6) of the arrow, i.e., a "moving direction." By the movement of the third grinding wheel 584A, the first end surface 256A of the glass material 250 is ground.

Furthermore, after a while after the grinding of the first end surface 256A by the third grinding wheel 584A starts, the third grinding wheel 589B is brought into contact with the first end surface 256A of the glass material 250 while facing along the first side 260A. Move in the direction of arrow A _6. The arrow A ₆ is the _{same direction as the arrow A 1} (the X direction in FIG. 6), that is, the "moving direction".

With the movement of the third grinding wheel 589B, vitreous can be ground The area where the first end surface 256A of the material 250 is ground by the third grinding wheel 584A.

Thereby, the grinding and polishing treatment of the entire first side 260A of the glass material 250 can be completed, and a glass substrate in which the first end surface 256A of the glass material 250 has been processed can be manufactured.

In FIG. 11, the respective movements of the first grinding wheel 580A, the first grinding wheel 585B, the second grinding wheel 582A, the second grinding wheel 587B, the third grinding wheel 584A, and the third grinding wheel 589B are schematically shown Trajectory.

In FIG. 11(a), shown is a schematic movement trajectory F ₁ of the first grinding wheel 580A, and in Fig. 11(b), shown is a schematic movement trajectory F _{2 of the first grinding wheel 585B} 11(c), what is shown is a schematic movement trajectory F ₃ of the second grinding wheel 582A, and in Fig. 11(d), what is shown is a schematic movement trajectory F of the second grinding wheel 587B _4, in FIG. 11 (e), shown is a schematic movement locus 584A of the grinding wheel 3 F _5, in FIG. 11 (f), the movement locus is shown a schematic 589B of the grinding wheel 3 F ₆ .

In FIG. 11, the first grinding wheel 580A and the first grinding wheel 585B, the second grinding wheel 582A and the second grinding wheel 587B, and the third grinding wheel 584A and the third grinding wheel 589B are all along X By moving in the direction (moving direction), the first end surface 260A of the glass material 250 is ground and polished in the Y direction (that is, the thickness is reduced).

As shown in FIG 11 (a), the first grinding wheel 580A is in the middle of the first side 260A, i.e. in contact with the first grinding start point M ₁ and the first end surface 256A, and starting from here to the first end surface 256A grinding. In addition, the first grinding wheel 580A continues to grind in the moving direction until the end point E of the first side 260A.

As a result, corresponding to the glass material 256A from the first grinding area M ₁ start point to the end point E of the first side 250 of the first end face 260A may be ground. Hereinafter, this area is referred to as the "first grinding area (691)".

On the other hand, FIG. 11 (b), the first grinding wheel 585B is in the middle of the first side 260A and 256A that is in contact with the first end surface at _a first polishing start point P, and from here to the start of 1 Polishing of end face 256A. In addition, the first grinding wheel 585B continues to grind along the moving direction until the end point E of the first side 260A.

As a result, the glass material 250 is a first end surface region 256A is polished polishing starts from the first points P ₁ to the end point E. Hereinafter, this area is referred to as the "first polishing area (692)".

Here, the first polishing as long as the start points P ₁ is within the range of the first grinding region 691 except for the first grinding start point and the end point E M _1, and can be made at an arbitrary position.

And, FIG. 11 (c), the second grinding wheel 582A is in the middle of the first side 260A, i.e. in contact with the second grinding start point M ₂ and the first end surface 256A, and from there along the movement The direction moves to the halfway of the first side 260A, that is, the first movement completion point N ₁ . And, the second grinding wheel 582A will reach the mobile movement is stopped to complete the first time point of ₁ N.

Here, the second start of the grinding point M ₂ is in the range of ₁ as long as the start point of edge 260A except for the start point S and the first grinding start point M ₁ S ~ M first grinding start point, any Any location is available. Further, the first movement may be _a completion point of the first N 1 M ₁ and the grinding start point position which is more than any of the front. In particular the grinding ratio of the first forward starting point for the more preferred M _1. However, FIG. 11 (c), the ideal is to move the completion point of the first N ₁ is set in _a region between the first grinding start point M ₁ ~ 1 of the polishing start point P.

Whereby, by the second grinding wheel 582A, the glass material is the edge 260A of the first region to complete the point N ₁ is ground from the start of the grinding point M 2 ₂ move to the first 250. Hereinafter, this area is referred to as the "second grinding area (693)".

And, FIG. 11 (d), the second grinding wheel 587B is in the middle of the first side 260A and 256A that is in contact with the first end surface ₂ in the second polishing start point P, and is moved from there along the moving direction Halfway to the first side 260A, that is, the first polishing completion point Q ₁ . And, the second grinding wheel 587B will be completed in the first polishing time point ₁ point Q reaches the stops moving.

As a result, by the second grinding wheel 587B, the first side 260A of the glass material 250 is ground from the second grinding start point P ₂ to the first grinding completion point Q ₁ . Hereinafter, this area is referred to as the "second polishing area (694)".

As long as the second grinding start point P ₂ is within the range from the second grinding start point M _{2 to the} first grinding start point M ₁ except for the second grinding start point M ₂ and the first grinding start point M ₁ , In any position.

Here, as shown in FIG. 11(c), when the first movement completion point N _{1 is} set in the area between the first grinding start point M ₁ and the first grinding start point P ₁ , the first grinding The completion point Q _{1 may be any position} as long as it is within the range of the first polishing region 692 other than the first _{polishing start point P 1.}

On the other hand, the movement of the first completed more forward position than the first point N located at _a polishing start point P at _a further forward, the first polishing completion point Q is set to ₁ at completion of the first movement than the point N _1.

When the first movement completion point N _{1 is} set in the area between the first grinding start point M ₁ and the first grinding start point P ₁ , as shown in FIG. 11(d), in the second grinding area 694 Among them, the area overlapping with the first polishing area 692, that is, in the area from the first polishing start point P ₁ to the first polishing completion point Q ₁ , will be implemented by the first polishing wheel 585B and the second polishing wheel 587B. Perform the second grinding treatment. Therefore, the first repeated polishing area 695 can be formed here.

On the other hand, the movement completion point of the first N ₁ is located at _a more forward than the case where the first polishing start point P, is done in the first moving region N ₁ ~ 1 point polishing completion point Q ₁ 'is formed in a first Repeat the grinding area.

Also, as shown in FIG. 11(e), the third grinding wheel 584A is in contact with the first end surface 256A at the starting point S of the first side 260A, and moves from there to the second side of the first side 260A in the moving direction. The movement is completed at N ₂ . In addition, the third grinding wheel 584A stops moving when it reaches the second movement completion point N _2.

The second movement completion point N ₂ may be an arbitrary position located in front of the second grinding start point M _2. In particular, it is preferable to be ahead of the second grinding start point M _2. However, as shown in FIG. 11(e), it is preferable to set the second movement completion point N ₂ in the region between the second grinding start point M ₂ and the second grinding start point P _2.

Whereby, with the third grinding wheel 584A, 260A side of the glass material of the first region to complete the point N ₂ is ground from the start point S to the second movement 250. Hereinafter, this area is referred to as the "third grinding area (696)".

Furthermore, as shown in FIG. 11(f), the third grinding wheel 589B is in contact with the first end surface 256A at the starting point S of the first side 260A, and moves from there to the second grinding completion point Q ₂ along the movement direction. In addition, the third grinding wheel 589B stops moving when it reaches the second grinding completion point Q _2.

As a result, by a third grinding wheel 589B, the edge of the first glass material 250 260A from the polishing region will be the start point S to the second point Q ₂ of the completion of polishing. Hereinafter, this area is referred to as the "third polishing area (697)".

Here, as shown in FIG. 11(e), when the second movement completion point N _{2 is} set in the area between the second grinding start point M ₂ and the second grinding start point P ₂ , the second grinding The completion point Q _{2 may be any position} as long as it is within the range of the second polishing region 694 excluding the second polishing start point P _2.

On the other hand, in a case where the second movement completion point N ₂ is located forward of the second polishing start point P ₂ , the second polishing completion point Q ₂ is set to a position further forward than the second movement completion point N _2.

When the second movement completion point N _{2 is} set in the area between the second grinding start point M ₂ and the second grinding start point P ₂ , as shown in Fig. 11(f), in the third grinding area 697 Among them, the area overlapping with the second polishing area 694, that is, in the area from the second polishing start point P ₂ to the second polishing completion point Q ₂ , will be implemented by the second polishing wheel 587B and the third polishing wheel 589B. Perform the second grinding treatment. Therefore, the second repeated polishing area 698 can be formed here.

On the other hand, in the case where the first movement completion point N ₂ is located ahead of the second polishing start point P ₂ , the second movement completion point N ₂ to the second polishing completion point Q ₂ is formed. Repeat the grinding area.

As a result of the above steps, two repeated polishing regions 695 and 698 can be formed on the first end surface 256A.

Above, the second manufacturing method using the second processing device 500 has been described. However, the above description is only an example, and various changes can be made in the second manufacturing method.

For example, in the aforementioned FIG. 11 (a) as shown in step, the first grinding wheel 580A along the edge 260A from the first grinding start point to end point M ₁ moves the edge 260A of E. As a result, the first grinding area 691 can be formed in the area from the first _{grinding start point M 1 to the end point E.}

However, the first grinding wheel 580A may stop the grinding of the first end surface 256A at any position between the _{first grinding start point M 1 and the end point E.}

Further, in the aforementioned FIG. 11 (b) as shown in step, the first grinding wheel along the sides 260A 585B is the end point of the polishing starts from the first points P ₁ moves to the edge 260A E. As a result, the first polishing region 692 can be formed in the region from the first _{polishing start point P 1 to the end point E.}

However, the first grinding wheel 585B may stop the grinding of the first end surface 256A at any position between the _{first grinding start point P 1 and the end point E.}

In the step shown in FIG. 11(e), the third grinding wheel 584A moves from the start point S to the second movement completion point N ₂ along the side 260A. As a result, the third grinding area 696 can be formed between the start point S and the second grinding start point N _2.

However, the third grinding wheel 584A may start the grinding of the first end surface 256A from an arbitrary position in the range of the _{start point S to the second grinding start point M 2.}

In addition, in the step shown in FIG. 11(f) described above, the third grinding wheel 589B moves from the starting point S to the second grinding completion point Q ₂ along the side 260A. As a result, the third polishing region 697 is formed in the region of the start point of the second polishing S ~ Q ₂ in the completion point.

However, the third grinding wheel 589B may start the grinding of the first end surface 256A from any position in the range from the start point S to the second grinding start point P ₂ (except for the second grinding start point P _{2 ).}

In addition, in the aforementioned second manufacturing method, as long as the second grinding wheel 582A does not exceed the first grinding wheel 580A, the grinding (second grinding) performed by the second grinding wheel 582A is performed at any point in time. It can be started from above. Moreover, as long as the third grinding wheel 584A does not exceed the second grinding wheel 582A, the grinding (third grinding) by the third grinding wheel 584A may be started at any point in time.

Similarly, as long as the second grinding wheel 587B does not exceed the first grinding wheel 585B, the grinding (second grinding) by the second grinding wheel 587B may be started at any point in time. In addition, as long as the third grinding wheel 589B does not exceed the second grinding wheel 587B, the grinding by the third grinding wheel 589B (third grinding) may be started at any point in time.

In particular, it is preferable to start the second grinding at the same time as the first grinding, or before the completion of its implementation or the like. In addition, the start of the third grinding is preferably at the same time as the second grinding, or before the completion of the implementation or the like.

Similarly, the start of the second polishing is preferably at the same time as the first polishing, or before the completion of its implementation or the like. In addition, the start of the third polishing is preferably at the same time as the second polishing, or before the completion of its implementation or the like.

In addition, it is preferable that the second grinding by the second grinding wheel 582A is before the start of the first grinding by the first grinding wheel 585B, at the same time, or before completion. Furthermore, it is preferable that the third grinding by the third grinding wheel 584A is before the start of the second grinding by the second grinding wheel 587B, at the same time, or before the completion of the second grinding.

In other words, although the steps shown in Figs. 11(b), (d) and (f) can also be implemented after the steps shown in Fig. 11(a), (c) and (e) are completed, but from the production From a sexual point of view, it is ideal that the steps in Figure 11 (a), (c) and (e) are started at the same time or close to the same time, and in Figure 11 (a), (c) and Before the step (e) is completed, start the steps of Figure 11 (b), (d) and (f).

In addition, various other changes can be made.

Above, the method of forming two repetitive polishing regions on one end surface 256A of the glass material 250 using the second processing device 500 has been described.

Furthermore, those with ordinary knowledge in the technical field to which the present invention pertains can easily grasp the method of forming three or more repetitive polishing regions on one end surface from the above description. For example, more grinding wheels and grinding wheels can also be arranged on the processing device to form 3 more grinding wheels on one end surface. Repeated grinding area on the top.

In the foregoing, an embodiment of the present invention has been described. However, the aspect of the present invention is not limited to the above-mentioned aspect.

For example, in the above description, a case where the glass material has a substantially rectangular shape is used as an example to describe the manufacturing method of the glass substrate. However, the glass material may also have other shapes, such as a disc shape.

When the glass material is a disc shape, in the description of the first manufacturing method and the second manufacturing method described above, the term "peripheral" may be used instead of "side". In addition, the end point E is grasped as the point coincident with the start point S among the start point S and the end point E in the aforementioned side. When the end surface is a "peripheral" shape, it can also be the same as the end surface. The case of "edge" is handled the same way.

For example, the processing device 300 used in the first manufacturing method has a plurality of grinding wheels and a plurality of grinding wheels arranged along the periphery of the glass material. In addition, the respective grinding wheels and the respective grinding wheels move along the "moving direction" corresponding to the peripheral direction of the glass material.

Those with ordinary knowledge in the technical field to which the present invention pertains should be easily understood, and various other changes can be made besides this.

250: Glass material

260A: Side 1

491: 1st grinding area

492: The 1st Grinding Area

493: 2nd grinding area

494: 2nd grinding area

495: Repeated grinding area

E: End point

F ₁ ~F ₄ : Movement track

S: starting point

M ₁ : The first grinding start point

N ₁ : The first move completion point

P ₁ : The first polishing start point

Q ₁ : The first polishing completion point

X, Y: direction

Claims (14)

A glass substrate having an end surface connecting two surfaces, the glass substrate is characterized in that a smooth area is arranged on at least a part of the end surface, the smooth area has a smoother surface than the other areas of the end surface, and the end surface of the end surface Other areas are called general areas. When the arithmetic average roughness of the aforementioned general area is set to Ra(1), and the arithmetic average roughness of the aforementioned smooth area is set to Ra(2), Ra(2)/Ra(1) The ratio is 0.8 or less, the aforementioned end surface has a first length L ₁ and a second length L ₂ , and L ₁ ≧L ₂ , and the aforementioned smooth region has a total length of 1 mm to 10 mm in the direction of the _{first length L 1} . The glass substrate of claim 1, wherein there are a plurality of the aforementioned smooth regions on the aforementioned end surface. The glass substrate of claim 1 or 2, wherein the glass substrate has a rectangular shape and has first to fourth end surfaces, and the aforementioned end surface is at least one of the aforementioned first to fourth end surfaces. The glass substrate of claim 1 or 2, wherein the aforementioned Ra(1) is 0.2 μm or less. The glass substrate of claim 1 or 2, wherein the aforementioned Ra(2) is 0.12 μm or less. A method of manufacturing a glass substrate has the following steps: (1) a step of preparing a glass material having first and second surfaces and end faces connecting the two surfaces; and (2) using a processing device, grinding and In the step of grinding the end surface of the glass material, the end surface is visually confirmed as a processed surface from the start point S to the end point E under the glass material in a plan view, and the processing device has a first grinding wheel and a first grinding wheel Wheel, and the second grinding wheel and the second grinding wheel, the first and second grinding wheels can be moved along the direction from the start point S to the end point E, which is called the moving direction. The processing surface is moved to grind the end surface of the glass material, and the first grinding wheel can be moved along the processed surface in the moving direction to grind the end surface of the glass material by the first grinding wheel In the ground area, the second grinding wheel can move along the processed surface in the moving direction to grind the end surface of the glass material in the area ground by the second grinding wheel. (2) step, (2-1) the first grinding wheel from the grinding position is referred to as a first start point of the M ₁ being other than addition to the aforementioned start point S and end point of the working plane E, along Moving in the direction of movement on the surface to be processed, an area called the first grinding area is formed on the end surface. (2-2) The first grinding wheel starts from what is called the first grinding At any position within the first grinding area at point P _{1 other than the first grinding start point M 1} , moves along the movement direction on the surface to be processed, thereby forming a surface called The area of the first grinding area, (2-3) The second grinding wheel _{moves from the position called the second grinding start point M 2} along the movement direction to the processed surface to be called the first a movement completion position of the point N _1, whereby, starting from the end face of the second grinding point M ₂ to the completion of the movement is referred to as a first region of the second grinding region of the point N ₁ is ground, grinding the second starting point M ₂ is present in the start point S to the first start of the grinding point between ₁ M and the movement completion point of the first N ₁ is: (i) are present in addition to the first grinding the first start of the grinding point than _a start point P ₁ to the M first polishing start point P between _1, or (ii) is present between the first polishing start point P ₁ to the end point E, (2 -4) the second grinding wheel from the grinding position is referred to as the second start point P _2, the working surface is moved to a position referred to as the first polishing is completed at the point Q ₁ 'along the moving direction, whereby , The end face is polished from the second polishing start point P ₂ to the first polishing completion point Q _{1 and} the area called the second polishing area will be polished, and the second polishing start point P ₂ is present in the second polishing Between the grinding start point M ₂ and the aforementioned first grinding start point M ₁ , the aforementioned first grinding completion point Q ₁ exists in addition to the aforementioned first grinding opening in the case of (i). In the first _{polishing area other than the starting point P 1} , in the case of (ii), it exists in the first polishing area except the first polishing start point P ₁ to the first movement completion point N ₁ Inside, in the case of (i), the first grinding wheel that has been ground by the first and second grinding wheels will be formed between the _{first grinding start point P 1} and the first grinding completion point Q _{1 of the end surface.} 1 Repeated grinding area, in the case of (ii) above, the first and second grinding wheels will be formed between the _{first movement completion point N 1} and the first grinding completion point Q _{1 of the end surface.} The first repetitive polishing area for polishing. The method for manufacturing a glass substrate according to claim 6, wherein the step (2-3) is started before the step (2-1) is completed. The method for manufacturing a glass substrate according to claim 6 or 7, wherein the step (2-3) is started before the step (2-2) is completed. The method of producing a glass substrate of the requested item 6 or 7, wherein in the (2-1), the first grinding wheel from a grinding start point of the first M ₁ is moved to the end point E, in the ( 2-2), the first grinding wheel is grinding said first points P ₁ moves from the start to the end point E. The method for manufacturing a glass substrate according to claim 6 or 7, wherein the second grinding start point M ₂ in the foregoing (2-3) is the start point S of the processed surface, and the foregoing in (2-4) The second polishing start point P ₂ is the start point S of the surface to be processed. The method for manufacturing a glass substrate according to claim 6 or 7, wherein the first grinding wheel and/or the second grinding wheel include a metal bond grindstone or electroplated grindstone having diamond abrasive grains. The method for manufacturing a glass substrate according to claim 6 or 7, wherein the first grinding wheel and/or the second grinding wheel are made of rubber, non-woven fabric or resin Grindstone. The method for manufacturing a glass substrate according to claim 6 or 7, wherein the processing device further has a third grinding wheel and a third grinding wheel, and the third grinding wheel can move along the processed surface in the moving direction To grind the end surface of the glass material, the third grinding wheel can move along the processed surface in the moving direction to grind the end surface of the glass material that has been ground by the third grinding wheel region, in the step (2), the (2-5) of the grinding wheel 3 is referred to as the third position from the start of the grinding point M _3, and is moved along the working surface in the direction of movement It referred to the moved position of the point to complete the second N _2, whereby the end surface M ₃ is moved to the second region to complete the N ₂ points 3 are referred to as the third grinding region from the start point of the grinding will be ground, the grinding start point 3 M ₃ is present in the start point S to the start of the grinding point between the second M _2, the completion point of movement of the second N ₂ is: (iii) are present in addition to Between the second grinding start point M ₂ and the second grinding start point P ₂ other than the second grinding start point P ₂ or (iv) exist between the second grinding start point P ₂ and the end point E Room, (2-6) of the grinding wheel 3 is referred to as the third position from the polishing start point P ₃ along the movement direction of the workpiece surface is moved to the second polishing called completion point Q ₂ ' position, whereby the end face of the third polishing is the start point P ₃ to the completion of the second polishing point Q ₂ is referred to as the region of the third polishing region is polished, the polishing section 3 is the start point P ₃ in the present Between the aforementioned third grinding start point M ₃ and the aforementioned second grinding start point M ₂ , the aforementioned second grinding completion point Q ₂ exists in addition to the aforementioned second grinding start point P in the case of (iii). _In the second polishing area other than 2, and in the case of (iv), it exists in the second polishing area excluding the second polishing start point P ₂ to the second movement completion point N ₂ , In the case of (iii) above, a second repetition that has been ground by the second and third grinding wheels will be formed between _{the second grinding start point P 2} and the second grinding completion point Q _{2 of the end surface.} The polishing area, in the case of (iv) above, will be formed between the second movement completion point N _{2 of the} end surface and the second polishing completion point Q _{2 to} be polished by the second and third grinding wheels. Repeat the second polishing area. The method for manufacturing a glass substrate according to claim 13, wherein the third grinding start point M ₃ in the foregoing (2-5) is the start point S of the processed surface, and the third grinding start point in the foregoing (2-6) P ₃ is the polishing start point is the starting point of the processed surface S.

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