JP6288184B2 - ガラス基板およびガラス基板の製造方法 - Google Patents
ガラス基板およびガラス基板の製造方法 Download PDFInfo
- Publication number
- JP6288184B2 JP6288184B2 JP2016158971A JP2016158971A JP6288184B2 JP 6288184 B2 JP6288184 B2 JP 6288184B2 JP 2016158971 A JP2016158971 A JP 2016158971A JP 2016158971 A JP2016158971 A JP 2016158971A JP 6288184 B2 JP6288184 B2 JP 6288184B2
- Authority
- JP
- Japan
- Prior art keywords
- polishing
- grinding
- point
- region
- start point
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Links
- 239000011521 glass Substances 0.000 title claims description 194
- 239000000758 substrate Substances 0.000 title claims description 87
- 238000004519 manufacturing process Methods 0.000 title claims description 50
- 238000000034 method Methods 0.000 title claims description 16
- 238000005498 polishing Methods 0.000 claims description 303
- 239000000463 material Substances 0.000 claims description 107
- 239000006061 abrasive grain Substances 0.000 claims description 4
- 229910003460 diamond Inorganic materials 0.000 claims description 4
- 239000010432 diamond Substances 0.000 claims description 4
- 239000002184 metal Substances 0.000 claims description 4
- 238000004070 electrodeposition Methods 0.000 claims description 2
- 239000004745 nonwoven fabric Substances 0.000 claims 1
- 239000011347 resin Substances 0.000 claims 1
- 229920005989 resin Polymers 0.000 claims 1
- 239000005060 rubber Substances 0.000 claims 1
- 239000006063 cullet Substances 0.000 description 10
- 238000009434 installation Methods 0.000 description 5
- 230000005489 elastic deformation Effects 0.000 description 4
- 238000012986 modification Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 238000007517 polishing process Methods 0.000 description 3
- 239000010922 glass waste Substances 0.000 description 2
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- 244000043261 Hevea brasiliensis Species 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 229920005549 butyl rubber Polymers 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000002223 garnet Substances 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 229920003052 natural elastomer Polymers 0.000 description 1
- 229920001194 natural rubber Polymers 0.000 description 1
- 230000002250 progressing effect Effects 0.000 description 1
- 239000008262 pumice Substances 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C15/00—Surface treatment of glass, not in the form of fibres or filaments, by etching
- C03C15/02—Surface treatment of glass, not in the form of fibres or filaments, by etching for making a smooth surface
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B1/00—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B27/00—Other grinding machines or devices
- B24B27/0076—Other grinding machines or devices grinding machines comprising two or more grinding tools
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B27/00—Other grinding machines or devices
- B24B27/0092—Grinding attachments for lathes or the like
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B41/00—Component parts such as frames, beds, carriages, headstocks
- B24B41/06—Work supports, e.g. adjustable steadies
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B7/00—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor
- B24B7/20—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground
- B24B7/22—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain
- B24B7/24—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain for grinding or polishing glass
- B24B7/241—Methods
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B7/00—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor
- B24B7/20—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground
- B24B7/22—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain
- B24B7/24—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain for grinding or polishing glass
- B24B7/242—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain for grinding or polishing glass for plate glass
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
- B24D3/02—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent
- B24D3/04—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially inorganic
- B24D3/06—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially inorganic metallic or mixture of metals with ceramic materials, e.g. hard metals, "cermets", cements
- B24D3/10—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially inorganic metallic or mixture of metals with ceramic materials, e.g. hard metals, "cermets", cements for porous or cellular structure, e.g. for use with diamonds as abrasives
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B35/00—Transporting of glass products during their manufacture, e.g. hot glass lenses, prisms
- C03B35/14—Transporting hot glass sheets or ribbons, e.g. by heat-resistant conveyor belts or bands
- C03B35/20—Transporting hot glass sheets or ribbons, e.g. by heat-resistant conveyor belts or bands by gripping tongs or supporting frames
- C03B35/202—Transporting hot glass sheets or ribbons, e.g. by heat-resistant conveyor belts or bands by gripping tongs or supporting frames by supporting frames
- C03B35/207—Construction or design of supporting frames
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P40/00—Technologies relating to the processing of minerals
- Y02P40/50—Glass production, e.g. reusing waste heat during processing or shaping
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Mechanical Engineering (AREA)
- Ceramic Engineering (AREA)
- Inorganic Chemistry (AREA)
- Organic Chemistry (AREA)
- Materials Engineering (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
- Surface Treatment Of Glass (AREA)
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2016158971A JP6288184B2 (ja) | 2016-08-12 | 2016-08-12 | ガラス基板およびガラス基板の製造方法 |
TW106120702A TWI726118B (zh) | 2016-08-12 | 2017-06-21 | 玻璃基板及玻璃基板的製造方法 |
KR1020170096019A KR102289541B1 (ko) | 2016-08-12 | 2017-07-28 | 유리 기판 및 유리 기판의 제조 방법 |
CN201811625636.XA CN109590817B (zh) | 2016-08-12 | 2017-08-09 | 玻璃基板 |
CN201710676478.XA CN107363693B (zh) | 2016-08-12 | 2017-08-09 | 玻璃基板和玻璃基板的制造方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2016158971A JP6288184B2 (ja) | 2016-08-12 | 2016-08-12 | ガラス基板およびガラス基板の製造方法 |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2018010442A Division JP2018076230A (ja) | 2018-01-25 | 2018-01-25 | ガラス基板およびガラス基板の製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2018024072A JP2018024072A (ja) | 2018-02-15 |
JP6288184B2 true JP6288184B2 (ja) | 2018-03-07 |
Family
ID=60309483
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2016158971A Active JP6288184B2 (ja) | 2016-08-12 | 2016-08-12 | ガラス基板およびガラス基板の製造方法 |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP6288184B2 (ko) |
KR (1) | KR102289541B1 (ko) |
CN (2) | CN107363693B (ko) |
TW (1) | TWI726118B (ko) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2018076230A (ja) * | 2018-01-25 | 2018-05-17 | 旭硝子株式会社 | ガラス基板およびガラス基板の製造方法 |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2019176382A1 (ja) * | 2018-03-14 | 2019-09-19 | 富士フイルム株式会社 | カバーガラス、紫外線照射システム、及び光学フィルムの製造方法 |
JP6597858B1 (ja) * | 2018-09-04 | 2019-10-30 | Agc株式会社 | ディスプレイ用ガラス |
WO2021024501A1 (ja) * | 2019-08-04 | 2021-02-11 | 坂東機工株式会社 | ガラス板加工装置 |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6325704B1 (en) * | 1999-06-14 | 2001-12-04 | Corning Incorporated | Method for finishing edges of glass sheets |
JP4588863B2 (ja) * | 2000-11-21 | 2010-12-01 | 旭硝子株式会社 | 板ガラスの端縁部研磨方法 |
DE10061366A1 (de) * | 2000-12-09 | 2002-07-04 | Schott Glas | Schleifscheibe und Verfahren zum Schleifen von Flachfacetten an Glasscheiben, insbesondere an Glaskeramikscheiben |
US7323276B2 (en) * | 2003-03-26 | 2008-01-29 | Hoya Corporation | Substrate for photomask, photomask blank and photomask |
US7435161B2 (en) * | 2003-06-17 | 2008-10-14 | Cabot Microelectronics Corporation | Multi-layer polishing pad material for CMP |
US8895165B2 (en) * | 2008-09-10 | 2014-11-25 | Hoya Corporation | Method of manufacturing a glass substrate for a magnetic disk, glass substrate for a magnetic disk, method of manufacturing a magnetic disk, and magnetic disk |
WO2010092937A1 (ja) * | 2009-02-13 | 2010-08-19 | Hoya株式会社 | マスクブランク用基板、マスクブランクおよびフォトマスク |
CN102194626B (zh) * | 2010-03-08 | 2015-11-25 | 旭硝子株式会社 | 玻璃基板 |
JP5534222B2 (ja) * | 2010-03-08 | 2014-06-25 | 旭硝子株式会社 | ガラス基板 |
KR102223005B1 (ko) * | 2014-10-20 | 2021-03-03 | 동우 화인켐 주식회사 | 유리 면취 방법 |
JPWO2016067926A1 (ja) * | 2014-10-28 | 2017-10-12 | 旭硝子株式会社 | ガラス板及びガラス板の製造方法 |
JP5915718B1 (ja) * | 2014-11-07 | 2016-05-11 | 旭硝子株式会社 | 磁気ディスク用ガラス基板及び磁気ディスク |
-
2016
- 2016-08-12 JP JP2016158971A patent/JP6288184B2/ja active Active
-
2017
- 2017-06-21 TW TW106120702A patent/TWI726118B/zh active
- 2017-07-28 KR KR1020170096019A patent/KR102289541B1/ko active IP Right Grant
- 2017-08-09 CN CN201710676478.XA patent/CN107363693B/zh active Active
- 2017-08-09 CN CN201811625636.XA patent/CN109590817B/zh active Active
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2018076230A (ja) * | 2018-01-25 | 2018-05-17 | 旭硝子株式会社 | ガラス基板およびガラス基板の製造方法 |
Also Published As
Publication number | Publication date |
---|---|
CN107363693B (zh) | 2019-01-11 |
CN109590817B (zh) | 2020-12-18 |
TW201805107A (zh) | 2018-02-16 |
CN107363693A (zh) | 2017-11-21 |
KR102289541B1 (ko) | 2021-08-12 |
JP2018024072A (ja) | 2018-02-15 |
TWI726118B (zh) | 2021-05-01 |
KR20180018332A (ko) | 2018-02-21 |
CN109590817A (zh) | 2019-04-09 |
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