TWI655439B - 用檢測裝置來測量及評估探針卡的方法 - Google Patents

用檢測裝置來測量及評估探針卡的方法 Download PDF

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Publication number
TWI655439B
TWI655439B TW104118319A TW104118319A TWI655439B TW I655439 B TWI655439 B TW I655439B TW 104118319 A TW104118319 A TW 104118319A TW 104118319 A TW104118319 A TW 104118319A TW I655439 B TWI655439 B TW I655439B
Authority
TW
Taiwan
Prior art keywords
probe card
probe
item
evaluating
patent application
Prior art date
Application number
TW104118319A
Other languages
English (en)
Chinese (zh)
Other versions
TW201617625A (zh
Inventor
葛瑞格 歐斯塔德
Original Assignee
美商魯道夫科技股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US14/298,539 external-priority patent/US9684052B2/en
Application filed by 美商魯道夫科技股份有限公司 filed Critical 美商魯道夫科技股份有限公司
Publication of TW201617625A publication Critical patent/TW201617625A/zh
Application granted granted Critical
Publication of TWI655439B publication Critical patent/TWI655439B/zh

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R3/00—Apparatus or processes specially adapted for the manufacture or maintenance of measuring instruments, e.g. of probe tips
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R35/00—Testing or calibrating of apparatus covered by the other groups of this subclass

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Engineering & Computer Science (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Measuring Leads Or Probes (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
TW104118319A 2014-06-06 2015-06-05 用檢測裝置來測量及評估探針卡的方法 TWI655439B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US14/298,539 2014-06-06
US14/298,539 US9684052B2 (en) 2010-04-23 2014-06-06 Method of measuring and assessing a probe card with an inspection device

Publications (2)

Publication Number Publication Date
TW201617625A TW201617625A (zh) 2016-05-16
TWI655439B true TWI655439B (zh) 2019-04-01

Family

ID=54767443

Family Applications (1)

Application Number Title Priority Date Filing Date
TW104118319A TWI655439B (zh) 2014-06-06 2015-06-05 用檢測裝置來測量及評估探針卡的方法

Country Status (4)

Country Link
JP (1) JP6680695B2 (ja)
KR (1) KR102343160B1 (ja)
TW (1) TWI655439B (ja)
WO (1) WO2015188093A1 (ja)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7175171B2 (ja) * 2018-12-12 2022-11-18 東京エレクトロン株式会社 プローブカード管理システムおよびプローブカード管理方法
KR102037198B1 (ko) * 2019-06-16 2019-10-28 심민섭 프로브 카드 검사 장치
CN113295890A (zh) * 2020-02-24 2021-08-24 京元电子股份有限公司 测试系统及其测试载具

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6023172A (en) * 1997-12-17 2000-02-08 Micron Technology, Inc. Light-based method and apparatus for maintaining probe cards
US6118894A (en) * 1993-06-04 2000-09-12 Schwartz; Rodney E. Integrated circuit probe card inspection system
US20030178988A1 (en) * 2002-03-22 2003-09-25 Electro Scientific Industries, Inc. Test probe alignment apparatus
TW569017B (en) * 2002-09-13 2004-01-01 Chien Hui Chuan Vertical probe card with feedback contact force sensor
US20100321056A1 (en) * 2003-03-14 2010-12-23 Rudolph Technologies, Inc. System and method of measuring probe float

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5623478U (ja) * 1979-07-30 1981-03-03
US6710798B1 (en) * 1999-03-09 2004-03-23 Applied Precision Llc Methods and apparatus for determining the relative positions of probe tips on a printed circuit board probe card
WO2003058158A2 (en) * 2001-12-28 2003-07-17 Applied Precision, Llc Stereoscopic three-dimensional metrology system and method
US8466703B2 (en) * 2003-03-14 2013-06-18 Rudolph Technologies, Inc. Probe card analysis system and method
JP5089166B2 (ja) * 2003-03-14 2012-12-05 ルドルフテクノロジーズ インコーポレイテッド プローブカードアナライザにおける部品のたわみの影響を軽減する方法
JP4908138B2 (ja) * 2005-12-09 2012-04-04 ルネサスエレクトロニクス株式会社 プローブ検査装置
JP2010182874A (ja) * 2009-02-05 2010-08-19 Oki Semiconductor Co Ltd プローブカードのメンテナンス方法
JP5391130B2 (ja) * 2010-04-05 2014-01-15 株式会社日本マイクロニクス プローブカードの検査装置
TWI507692B (zh) * 2010-04-23 2015-11-11 Rudolph Technologies Inc 具有可垂直移動總成之檢查裝置
JP5926954B2 (ja) * 2011-12-28 2016-05-25 株式会社日本マイクロニクス プローブカードの平行確認方法及び平行確認装置並びにプローブカード及びテストヘッド
JP2015105950A (ja) * 2013-11-29 2015-06-08 軍生 木本 プローブカード検査修正装置

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6118894A (en) * 1993-06-04 2000-09-12 Schwartz; Rodney E. Integrated circuit probe card inspection system
US6023172A (en) * 1997-12-17 2000-02-08 Micron Technology, Inc. Light-based method and apparatus for maintaining probe cards
US20030178988A1 (en) * 2002-03-22 2003-09-25 Electro Scientific Industries, Inc. Test probe alignment apparatus
TW569017B (en) * 2002-09-13 2004-01-01 Chien Hui Chuan Vertical probe card with feedback contact force sensor
US20100321056A1 (en) * 2003-03-14 2010-12-23 Rudolph Technologies, Inc. System and method of measuring probe float

Also Published As

Publication number Publication date
WO2015188093A1 (en) 2015-12-10
JP6680695B2 (ja) 2020-04-15
KR102343160B1 (ko) 2021-12-23
TW201617625A (zh) 2016-05-16
KR20170016444A (ko) 2017-02-13
JP2017518493A (ja) 2017-07-06

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