KR102343160B1 - 프로브 카드를 검사 장치로 측정하고 평가하는 방법 - Google Patents

프로브 카드를 검사 장치로 측정하고 평가하는 방법 Download PDF

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Publication number
KR102343160B1
KR102343160B1 KR1020177000253A KR20177000253A KR102343160B1 KR 102343160 B1 KR102343160 B1 KR 102343160B1 KR 1020177000253 A KR1020177000253 A KR 1020177000253A KR 20177000253 A KR20177000253 A KR 20177000253A KR 102343160 B1 KR102343160 B1 KR 102343160B1
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KR
South Korea
Prior art keywords
probe card
probes
probe
sensor head
analyzer
Prior art date
Application number
KR1020177000253A
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English (en)
Korean (ko)
Other versions
KR20170016444A (ko
Inventor
그레그 올름스테드
Original Assignee
루돌프 테크놀로지스 인코퍼레이티드
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US14/298,539 external-priority patent/US9684052B2/en
Application filed by 루돌프 테크놀로지스 인코퍼레이티드 filed Critical 루돌프 테크놀로지스 인코퍼레이티드
Publication of KR20170016444A publication Critical patent/KR20170016444A/ko
Application granted granted Critical
Publication of KR102343160B1 publication Critical patent/KR102343160B1/ko

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R3/00—Apparatus or processes specially adapted for the manufacture or maintenance of measuring instruments, e.g. of probe tips
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R35/00—Testing or calibrating of apparatus covered by the other groups of this subclass

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Engineering & Computer Science (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Measuring Leads Or Probes (AREA)
KR1020177000253A 2014-06-06 2015-06-05 프로브 카드를 검사 장치로 측정하고 평가하는 방법 KR102343160B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US14/298,539 2014-06-06
US14/298,539 US9684052B2 (en) 2010-04-23 2014-06-06 Method of measuring and assessing a probe card with an inspection device
PCT/US2015/034470 WO2015188093A1 (en) 2014-06-06 2015-06-05 Method of measuring and assessing a probe card with an inspection device

Publications (2)

Publication Number Publication Date
KR20170016444A KR20170016444A (ko) 2017-02-13
KR102343160B1 true KR102343160B1 (ko) 2021-12-23

Family

ID=54767443

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020177000253A KR102343160B1 (ko) 2014-06-06 2015-06-05 프로브 카드를 검사 장치로 측정하고 평가하는 방법

Country Status (4)

Country Link
JP (1) JP6680695B2 (ja)
KR (1) KR102343160B1 (ja)
TW (1) TWI655439B (ja)
WO (1) WO2015188093A1 (ja)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7175171B2 (ja) * 2018-12-12 2022-11-18 東京エレクトロン株式会社 プローブカード管理システムおよびプローブカード管理方法
KR102037198B1 (ko) * 2019-06-16 2019-10-28 심민섭 프로브 카드 검사 장치
CN113295890A (zh) * 2020-02-24 2021-08-24 京元电子股份有限公司 测试系统及其测试载具

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20100321056A1 (en) * 2003-03-14 2010-12-23 Rudolph Technologies, Inc. System and method of measuring probe float
JP2011220702A (ja) * 2010-04-05 2011-11-04 Micronics Japan Co Ltd プローブカードの検査装置

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5623478U (ja) * 1979-07-30 1981-03-03
US5657394A (en) * 1993-06-04 1997-08-12 Integrated Technology Corporation Integrated circuit probe card inspection system
US6023172A (en) * 1997-12-17 2000-02-08 Micron Technology, Inc. Light-based method and apparatus for maintaining probe cards
US6710798B1 (en) * 1999-03-09 2004-03-23 Applied Precision Llc Methods and apparatus for determining the relative positions of probe tips on a printed circuit board probe card
WO2003058158A2 (en) * 2001-12-28 2003-07-17 Applied Precision, Llc Stereoscopic three-dimensional metrology system and method
TWI272392B (en) * 2002-03-22 2007-02-01 Electro Scient Ind Inc Test probe alignment apparatus
TW569017B (en) * 2002-09-13 2004-01-01 Chien Hui Chuan Vertical probe card with feedback contact force sensor
US8466703B2 (en) * 2003-03-14 2013-06-18 Rudolph Technologies, Inc. Probe card analysis system and method
JP5089166B2 (ja) * 2003-03-14 2012-12-05 ルドルフテクノロジーズ インコーポレイテッド プローブカードアナライザにおける部品のたわみの影響を軽減する方法
JP4908138B2 (ja) * 2005-12-09 2012-04-04 ルネサスエレクトロニクス株式会社 プローブ検査装置
JP2010182874A (ja) * 2009-02-05 2010-08-19 Oki Semiconductor Co Ltd プローブカードのメンテナンス方法
TWI507692B (zh) * 2010-04-23 2015-11-11 Rudolph Technologies Inc 具有可垂直移動總成之檢查裝置
JP5926954B2 (ja) * 2011-12-28 2016-05-25 株式会社日本マイクロニクス プローブカードの平行確認方法及び平行確認装置並びにプローブカード及びテストヘッド
JP2015105950A (ja) * 2013-11-29 2015-06-08 軍生 木本 プローブカード検査修正装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20100321056A1 (en) * 2003-03-14 2010-12-23 Rudolph Technologies, Inc. System and method of measuring probe float
JP2011220702A (ja) * 2010-04-05 2011-11-04 Micronics Japan Co Ltd プローブカードの検査装置

Also Published As

Publication number Publication date
WO2015188093A1 (en) 2015-12-10
JP6680695B2 (ja) 2020-04-15
TWI655439B (zh) 2019-04-01
TW201617625A (zh) 2016-05-16
KR20170016444A (ko) 2017-02-13
JP2017518493A (ja) 2017-07-06

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