TWI652789B - 與陶瓷基板上之射頻元件之封裝相關的元件及方法 - Google Patents
與陶瓷基板上之射頻元件之封裝相關的元件及方法 Download PDFInfo
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- TWI652789B TWI652789B TW103138412A TW103138412A TWI652789B TW I652789 B TWI652789 B TW I652789B TW 103138412 A TW103138412 A TW 103138412A TW 103138412 A TW103138412 A TW 103138412A TW I652789 B TWI652789 B TW I652789B
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- H04—ELECTRIC COMMUNICATION TECHNIQUE
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- H04B1/38—Transceivers, i.e. devices in which transmitter and receiver form a structural unit and in which at least one part is used for functions of transmitting and receiving
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- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
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- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/49117—Conductor or circuit manufacturing
- Y10T29/49124—On flat or curved insulated base, e.g., printed circuit, etc.
- Y10T29/49128—Assembling formed circuit to base
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- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Computer Hardware Design (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Signal Processing (AREA)
- Computer Networks & Wireless Communication (AREA)
- Chemical & Material Sciences (AREA)
- Ceramic Engineering (AREA)
- Electromagnetism (AREA)
- Geometry (AREA)
- Toxicology (AREA)
- Health & Medical Sciences (AREA)
- Shielding Devices Or Components To Electric Or Magnetic Fields (AREA)
- Transceivers (AREA)
- Non-Metallic Protective Coatings For Printed Circuits (AREA)
- Variable-Direction Aerials And Aerial Arrays (AREA)
- Parts Printed On Printed Circuit Boards (AREA)
- Production Of Multi-Layered Print Wiring Board (AREA)
- Inorganic Chemistry (AREA)
- Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)
Applications Claiming Priority (4)
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| US201361900394P | 2013-11-05 | 2013-11-05 | |
| US61/900,394 | 2013-11-05 | ||
| US14/528,447 | 2014-10-30 | ||
| US14/528,447 US9564937B2 (en) | 2013-11-05 | 2014-10-30 | Devices and methods related to packaging of radio-frequency devices on ceramic substrates |
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| TW201530731A TW201530731A (zh) | 2015-08-01 |
| TWI652789B true TWI652789B (zh) | 2019-03-01 |
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| CN (1) | CN104617053B (enExample) |
| TW (1) | TWI652789B (enExample) |
Families Citing this family (19)
| Publication number | Priority date | Publication date | Assignee | Title |
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| US10236622B2 (en) * | 2014-07-16 | 2019-03-19 | Siemens Aktiengesellschaft | Subsea electrical connector component |
| US10729001B2 (en) * | 2014-08-31 | 2020-07-28 | Skyworks Solutions, Inc. | Devices and methods related to metallization of ceramic substrates for shielding applications |
| CN206976318U (zh) * | 2014-11-21 | 2018-02-06 | 株式会社村田制作所 | 模块 |
| US10594355B2 (en) * | 2015-06-30 | 2020-03-17 | Skyworks Solutions, Inc. | Devices and methods related to radio-frequency filters on silicon-on-insulator substrate |
| TWI656543B (zh) * | 2015-10-16 | 2019-04-11 | 日商村田製作所股份有限公司 | Electronic parts |
| WO2017179325A1 (ja) | 2016-04-11 | 2017-10-19 | 株式会社村田製作所 | 高周波部品 |
| TWI632662B (zh) * | 2016-04-22 | 2018-08-11 | 矽品精密工業股份有限公司 | 電子封裝件及其製法 |
| JP2017200183A (ja) * | 2016-04-29 | 2017-11-02 | スカイワークス ソリューションズ, インコーポレイテッドSkyworks Solutions, Inc. | 遮蔽されたダイバーシティ受信モジュール |
| KR102711053B1 (ko) * | 2016-10-04 | 2024-09-30 | 스카이워크스 솔루션즈, 인코포레이티드 | 오버몰드 구조체를 갖는 양면 라디오-주파수 패키지 |
| CN108022886A (zh) * | 2017-11-30 | 2018-05-11 | 深圳华远微电科技有限公司 | 一种倒装芯片式滤波器的封装结构 |
| US11503704B2 (en) * | 2019-12-30 | 2022-11-15 | General Electric Company | Systems and methods for hybrid glass and organic packaging for radio frequency electronics |
| US11804435B2 (en) | 2020-01-03 | 2023-10-31 | Skyworks Solutions, Inc. | Semiconductor-on-insulator transistor layout for radio frequency power amplifiers |
| US11291106B2 (en) * | 2020-01-29 | 2022-03-29 | Dell Products L.P. | System and method for enhanced cooling |
| US11342277B2 (en) * | 2020-06-10 | 2022-05-24 | Micron Technology, Inc. | Semiconductor device assemblies with conductive underfill dams for grounding EMI shields and methods for making the same |
| CN219269209U (zh) | 2020-06-22 | 2023-06-27 | 株式会社村田制作所 | 电子部件 |
| CN219395186U (zh) * | 2020-06-22 | 2023-07-21 | 株式会社村田制作所 | 电子部件 |
| CN220086023U (zh) | 2020-08-26 | 2023-11-24 | 株式会社村田制作所 | 高频电子部件和模块 |
| CN113327899A (zh) * | 2021-04-22 | 2021-08-31 | 成都芯源系统有限公司 | 倒装芯片封装单元及封装方法 |
| JP2023058393A (ja) | 2021-10-13 | 2023-04-25 | 株式会社村田製作所 | 高周波モジュール及び通信装置 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TW201316483A (zh) | 2011-06-09 | 2013-04-16 | 蘋果公司 | 用於選擇性地屏蔽一基板上之元件的電磁屏蔽結構 |
Family Cites Families (27)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH08213755A (ja) * | 1995-01-31 | 1996-08-20 | Kyocera Corp | コンデンサ内蔵型積層セラミック回路基板及びその製造方法 |
| US20010033478A1 (en) * | 2000-04-21 | 2001-10-25 | Shielding For Electronics, Inc. | EMI and RFI shielding for printed circuit boards |
| JP2002026178A (ja) * | 2000-07-04 | 2002-01-25 | Hitachi Ltd | 半導体装置及びその製造方法並びに電子装置 |
| JP3724450B2 (ja) | 2002-04-23 | 2005-12-07 | 株式会社村田製作所 | 無線通信用高周波回路およびそれを備えた通信機 |
| JP4178880B2 (ja) * | 2002-08-29 | 2008-11-12 | 松下電器産業株式会社 | モジュール部品 |
| US7167688B2 (en) * | 2003-07-30 | 2007-01-23 | Chi Mei Communication Systems, Inc. | RF transceiver module formed in multi-layered ceramic |
| JP2006210629A (ja) | 2005-01-28 | 2006-08-10 | Matsushita Electric Ind Co Ltd | 半導体装置 |
| US7342303B1 (en) * | 2006-02-28 | 2008-03-11 | Amkor Technology, Inc. | Semiconductor device having RF shielding and method therefor |
| JP2007306172A (ja) * | 2006-05-10 | 2007-11-22 | Tdk Corp | バンドパスフィルタ素子および高周波モジュール |
| TWI332275B (en) * | 2006-07-04 | 2010-10-21 | Advanced Semiconductor Eng | Semiconductor package having electromagnetic interference shielding and fabricating method thereof |
| US7701040B2 (en) * | 2007-09-24 | 2010-04-20 | Stats Chippac, Ltd. | Semiconductor package and method of reducing electromagnetic interference between devices |
| US7906371B2 (en) * | 2008-05-28 | 2011-03-15 | Stats Chippac, Ltd. | Semiconductor device and method of forming holes in substrate to interconnect top shield and ground shield |
| TW201013881A (en) | 2008-09-10 | 2010-04-01 | Renesas Tech Corp | Semiconductor device and method for manufacturing same |
| JP5402482B2 (ja) * | 2009-10-01 | 2014-01-29 | パナソニック株式会社 | モジュールとモジュールの製造方法 |
| CN102054821B (zh) * | 2009-10-30 | 2013-09-11 | 日月光半导体制造股份有限公司 | 具有内屏蔽体的封装结构及其制造方法 |
| US8378466B2 (en) * | 2009-11-19 | 2013-02-19 | Advanced Semiconductor Engineering, Inc. | Wafer-level semiconductor device packages with electromagnetic interference shielding |
| JP2011193191A (ja) * | 2010-03-15 | 2011-09-29 | Renesas Electronics Corp | 半導体集積回路およびそれを内蔵した高周波モジュール |
| KR101171512B1 (ko) * | 2010-06-08 | 2012-08-06 | 삼성전기주식회사 | 반도체 패키지의 제조 방법 |
| KR20120053332A (ko) * | 2010-11-17 | 2012-05-25 | 삼성전자주식회사 | 반도체 패키지 및 이의 제조 방법 |
| CN102610595B (zh) * | 2011-01-24 | 2015-02-18 | 国民技术股份有限公司 | 射频功率放大器及其封装方法 |
| TWI438885B (zh) * | 2011-03-18 | 2014-05-21 | 矽品精密工業股份有限公司 | 半導體封裝件及其製法 |
| US9190340B2 (en) * | 2011-06-17 | 2015-11-17 | Stats Chippac, Ltd. | Semiconductor device and method of forming RF FEM and RF transceiver in semiconductor package |
| WO2013035819A1 (ja) * | 2011-09-08 | 2013-03-14 | 株式会社村田製作所 | 電子部品モジュール及び該電子部品モジュールの製造方法 |
| US8637963B2 (en) * | 2011-10-05 | 2014-01-28 | Sandisk Technologies Inc. | Radiation-shielded semiconductor device |
| JP2013207213A (ja) * | 2012-03-29 | 2013-10-07 | Tdk Corp | 電子部品モジュール及びその製造方法 |
| TW201351599A (zh) * | 2012-06-04 | 2013-12-16 | 矽品精密工業股份有限公司 | 半導體封裝件及其製法 |
| CN202888168U (zh) * | 2012-09-05 | 2013-04-17 | 欣兴电子股份有限公司 | 电子元件 |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TW201316483A (zh) | 2011-06-09 | 2013-04-16 | 蘋果公司 | 用於選擇性地屏蔽一基板上之元件的電磁屏蔽結構 |
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| CN104617053A (zh) | 2015-05-13 |
| JP6537807B2 (ja) | 2019-07-03 |
| JP2022109908A (ja) | 2022-07-28 |
| KR20150051924A (ko) | 2015-05-13 |
| US20170149466A1 (en) | 2017-05-25 |
| US10771101B2 (en) | 2020-09-08 |
| JP2015091135A (ja) | 2015-05-11 |
| KR102371332B1 (ko) | 2022-03-04 |
| TW201530731A (zh) | 2015-08-01 |
| HK1206148A1 (en) | 2015-12-31 |
| US20150126134A1 (en) | 2015-05-07 |
| CN104617053B (zh) | 2020-09-11 |
| US9564937B2 (en) | 2017-02-07 |
| JP7214574B2 (ja) | 2023-01-30 |
| JP2019176172A (ja) | 2019-10-10 |
| JP7242938B2 (ja) | 2023-03-20 |
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