TWI561913B - Resist composition and method of forming resist pattern - Google Patents

Resist composition and method of forming resist pattern

Info

Publication number
TWI561913B
TWI561913B TW102100415A TW102100415A TWI561913B TW I561913 B TWI561913 B TW I561913B TW 102100415 A TW102100415 A TW 102100415A TW 102100415 A TW102100415 A TW 102100415A TW I561913 B TWI561913 B TW I561913B
Authority
TW
Taiwan
Prior art keywords
resist
forming
resist pattern
composition
resist composition
Prior art date
Application number
TW102100415A
Other languages
English (en)
Other versions
TW201348859A (zh
Inventor
Hiroaki Shimizu
Jiro Yokoya
Tsuyoshi Nakamura
Hideto Nito
Original Assignee
Tokyo Ohka Kogyo Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Ohka Kogyo Co Ltd filed Critical Tokyo Ohka Kogyo Co Ltd
Publication of TW201348859A publication Critical patent/TW201348859A/zh
Application granted granted Critical
Publication of TWI561913B publication Critical patent/TWI561913B/zh

Links

Classifications

    • A—HUMAN NECESSITIES
    • A46—BRUSHWARE
    • A46B—BRUSHES
    • A46B15/00—Other brushes; Brushes with additional arrangements
    • A46B15/0055—Brushes combined with other articles normally separate from the brushing process, e.g. combs, razors, mirrors
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
    • A—HUMAN NECESSITIES
    • A46—BRUSHWARE
    • A46B—BRUSHES
    • A46B7/00—Bristle carriers arranged in the brush body
    • A46B7/04—Bristle carriers arranged in the brush body interchangeably removable bristle carriers
    • A46B7/042—Clip or snap connection for bristle carriers
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/0045—Photosensitive materials with organic non-macromolecular light-sensitive compounds not otherwise provided for, e.g. dissolution inhibitors
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/039—Macromolecular compounds which are photodegradable, e.g. positive electron resists
    • G03F7/0392—Macromolecular compounds which are photodegradable, e.g. positive electron resists the macromolecular compound being present in a chemically amplified positive photoresist composition
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/26—Processing photosensitive materials; Apparatus therefor
    • G03F7/40—Treatment after imagewise removal, e.g. baking
    • A—HUMAN NECESSITIES
    • A46—BRUSHWARE
    • A46B—BRUSHES
    • A46B2200/00—Brushes characterized by their functions, uses or applications
    • A46B2200/10—For human or animal care
    • A46B2200/1066—Toothbrush for cleaning the teeth or dentures

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Materials For Photolithography (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
TW102100415A 2012-01-11 2013-01-07 Resist composition and method of forming resist pattern TWI561913B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2012003412A JP5898962B2 (ja) 2012-01-11 2012-01-11 レジスト組成物及びレジストパターン形成方法

Publications (2)

Publication Number Publication Date
TW201348859A TW201348859A (zh) 2013-12-01
TWI561913B true TWI561913B (en) 2016-12-11

Family

ID=48744133

Family Applications (1)

Application Number Title Priority Date Filing Date
TW102100415A TWI561913B (en) 2012-01-11 2013-01-07 Resist composition and method of forming resist pattern

Country Status (4)

Country Link
US (1) US8956800B2 (zh)
JP (1) JP5898962B2 (zh)
KR (1) KR101925154B1 (zh)
TW (1) TWI561913B (zh)

Families Citing this family (12)

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Publication number Priority date Publication date Assignee Title
JP6132554B2 (ja) * 2013-01-08 2017-05-24 アイバイツ株式会社 光塩基発生剤組成物
WO2015093323A1 (ja) * 2013-12-19 2015-06-25 日産化学工業株式会社 ラクトン構造含有ポリマーを含む電子線レジスト下層膜形成組成物
US9519218B2 (en) * 2014-09-16 2016-12-13 Sumitomo Chemical Company, Limited Resin, resist composition and method for producing resist pattern
CN106094431B (zh) 2015-04-30 2020-06-26 罗门哈斯电子材料韩国有限公司 光致抗蚀剂组合物和方法
KR101848656B1 (ko) 2015-04-30 2018-04-13 롬엔드하스전자재료코리아유한회사 오버코트 조성물 및 포토리소그래피 방법
TWI636326B (zh) 2015-05-15 2018-09-21 南韓商羅門哈斯電子材料韓國公司 光鹼產生劑及包括其的光致抗蝕劑組成物
CN106556972B (zh) 2015-09-30 2021-07-27 罗门哈斯电子材料韩国有限公司 用于光刻的罩面层组合物和方法
TWI672562B (zh) 2015-09-30 2019-09-21 南韓商羅門哈斯電子材料韓國公司 光致抗蝕劑組合物及方法
TWI743143B (zh) * 2016-08-10 2021-10-21 日商Ｊｓｒ股份有限公司 半導體用抗蝕劑底層膜形成組成物、抗蝕劑底層膜、抗蝕劑底層膜的形成方法及圖案化基板的製造方法
JP7010195B2 (ja) * 2017-11-29 2022-01-26 信越化学工業株式会社 パターン形成方法
KR102177417B1 (ko) 2017-12-31 2020-11-11 롬 앤드 하스 일렉트로닉 머트어리얼즈 엘엘씨 포토레지스트 조성물 및 방법
AR126215A1 (es) * 2021-06-23 2023-09-27 Hoffmann La Roche Proceso novedoso

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EP2003501A1 (en) * 2007-06-13 2008-12-17 Xerox Corporation Inkless reimageable printing paper and method
US20110233048A1 (en) * 2008-12-02 2011-09-29 Wako Pure Chemical Industries, Ltd. Photobase generator
TW201341959A (zh) * 2011-12-21 2013-10-16 Tokyo Ohka Kogyo Co Ltd 光阻圖型之形成方法

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Patent Citations (4)

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Publication number Priority date Publication date Assignee Title
US20020187436A1 (en) * 2001-04-27 2002-12-12 Ernst Christian Richter Method for structuring a photoresist layer
EP2003501A1 (en) * 2007-06-13 2008-12-17 Xerox Corporation Inkless reimageable printing paper and method
US20110233048A1 (en) * 2008-12-02 2011-09-29 Wako Pure Chemical Industries, Ltd. Photobase generator
TW201341959A (zh) * 2011-12-21 2013-10-16 Tokyo Ohka Kogyo Co Ltd 光阻圖型之形成方法

Also Published As

Publication number Publication date
KR101925154B1 (ko) 2018-12-04
US20130177853A1 (en) 2013-07-11
KR20130082461A (ko) 2013-07-19
JP2013142810A (ja) 2013-07-22
JP5898962B2 (ja) 2016-04-06
TW201348859A (zh) 2013-12-01
US8956800B2 (en) 2015-02-17

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