TWI550308B - Coating apparatus and coating method - Google Patents
Coating apparatus and coating method Download PDFInfo
- Publication number
- TWI550308B TWI550308B TW101101393A TW101101393A TWI550308B TW I550308 B TWI550308 B TW I550308B TW 101101393 A TW101101393 A TW 101101393A TW 101101393 A TW101101393 A TW 101101393A TW I550308 B TWI550308 B TW I550308B
- Authority
- TW
- Taiwan
- Prior art keywords
- cleaning
- coating liquid
- wiping
- coating
- platform
- Prior art date
Links
- 238000000576 coating method Methods 0.000 title claims description 141
- 239000011248 coating agent Substances 0.000 title claims description 134
- 238000004140 cleaning Methods 0.000 claims description 210
- 239000007788 liquid Substances 0.000 claims description 85
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims description 16
- 238000007599 discharging Methods 0.000 claims description 8
- 230000002093 peripheral effect Effects 0.000 claims description 5
- 239000000758 substrate Substances 0.000 description 41
- 239000002904 solvent Substances 0.000 description 19
- 238000000034 method Methods 0.000 description 18
- 125000006850 spacer group Chemical group 0.000 description 9
- 238000004519 manufacturing process Methods 0.000 description 5
- 239000000463 material Substances 0.000 description 5
- 239000002952 polymeric resin Substances 0.000 description 5
- 229920003002 synthetic resin Polymers 0.000 description 5
- 230000008859 change Effects 0.000 description 4
- 229920001971 elastomer Polymers 0.000 description 4
- LZCLXQDLBQLTDK-UHFFFAOYSA-N ethyl 2-hydroxypropanoate Chemical compound CCOC(=O)C(C)O LZCLXQDLBQLTDK-UHFFFAOYSA-N 0.000 description 4
- 239000011521 glass Substances 0.000 description 4
- 239000011324 bead Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 230000006698 induction Effects 0.000 description 3
- 239000000843 powder Substances 0.000 description 3
- 238000003825 pressing Methods 0.000 description 3
- 229920005989 resin Polymers 0.000 description 3
- 239000011347 resin Substances 0.000 description 3
- 229920002379 silicone rubber Polymers 0.000 description 3
- 238000001179 sorption measurement Methods 0.000 description 3
- SECXISVLQFMRJM-UHFFFAOYSA-N N-Methylpyrrolidone Chemical compound CN1CCCC1=O SECXISVLQFMRJM-UHFFFAOYSA-N 0.000 description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 239000000806 elastomer Substances 0.000 description 2
- 229940116333 ethyl lactate Drugs 0.000 description 2
- 239000012530 fluid Substances 0.000 description 2
- 239000004973 liquid crystal related substance Substances 0.000 description 2
- 239000011159 matrix material Substances 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- -1 polypropylene Polymers 0.000 description 2
- LLHKCFNBLRBOGN-UHFFFAOYSA-N propylene glycol methyl ether acetate Chemical compound COCC(C)OC(C)=O LLHKCFNBLRBOGN-UHFFFAOYSA-N 0.000 description 2
- 239000005060 rubber Substances 0.000 description 2
- 239000004945 silicone rubber Substances 0.000 description 2
- 230000000087 stabilizing effect Effects 0.000 description 2
- 239000000725 suspension Substances 0.000 description 2
- 238000011144 upstream manufacturing Methods 0.000 description 2
- 239000004925 Acrylic resin Substances 0.000 description 1
- 229920000178 Acrylic resin Polymers 0.000 description 1
- DKPFZGUDAPQIHT-UHFFFAOYSA-N Butyl acetate Natural products CCCCOC(C)=O DKPFZGUDAPQIHT-UHFFFAOYSA-N 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229920000181 Ethylene propylene rubber Polymers 0.000 description 1
- 229920000459 Nitrile rubber Polymers 0.000 description 1
- 239000005062 Polybutadiene Substances 0.000 description 1
- 239000004743 Polypropylene Substances 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 239000004809 Teflon Substances 0.000 description 1
- 229920006362 Teflon® Polymers 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 229920005549 butyl rubber Polymers 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 229910017052 cobalt Inorganic materials 0.000 description 1
- 239000010941 cobalt Substances 0.000 description 1
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 1
- 239000003086 colorant Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 239000005038 ethylene vinyl acetate Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- FUZZWVXGSFPDMH-UHFFFAOYSA-N hexanoic acid Chemical compound CCCCCC(O)=O FUZZWVXGSFPDMH-UHFFFAOYSA-N 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 229910052763 palladium Inorganic materials 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 229920001200 poly(ethylene-vinyl acetate) Polymers 0.000 description 1
- 229920002857 polybutadiene Polymers 0.000 description 1
- 229920001225 polyester resin Polymers 0.000 description 1
- 239000004645 polyester resin Substances 0.000 description 1
- 229920001155 polypropylene Polymers 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 238000007790 scraping Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 229920002803 thermoplastic polyurethane Polymers 0.000 description 1
- 229910052718 tin Inorganic materials 0.000 description 1
- 239000011135 tin Substances 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
- B05C11/10—Storage, supply or control of liquid or other fluent material; Recovery of excess liquid or other fluent material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
- B05C5/02—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D1/00—Processes for applying liquids or other fluent materials
- B05D1/02—Processes for applying liquids or other fluent materials performed by spraying
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D3/00—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials
- B05D3/12—Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials by mechanical means
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
Landscapes
- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- Coating Apparatus (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Details Or Accessories Of Spraying Plant Or Apparatus (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
- Optical Filters (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011064325A JP5766990B2 (ja) | 2011-03-23 | 2011-03-23 | 塗布装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW201243402A TW201243402A (en) | 2012-11-01 |
| TWI550308B true TWI550308B (zh) | 2016-09-21 |
Family
ID=46854661
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW101101393A TWI550308B (zh) | 2011-03-23 | 2012-01-13 | Coating apparatus and coating method |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP5766990B2 (ko) |
| KR (1) | KR101893806B1 (ko) |
| CN (1) | CN102688830B (ko) |
| TW (1) | TWI550308B (ko) |
Families Citing this family (22)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014176812A (ja) * | 2013-03-15 | 2014-09-25 | Dainippon Screen Mfg Co Ltd | ノズル洗浄装置、塗布装置、ノズル洗浄方法、および塗布方法 |
| CN103286090B (zh) * | 2013-05-09 | 2016-01-13 | 深圳市华星光电技术有限公司 | 清洗光阻涂布制程中橡皮擦的装置及光阻涂布机 |
| TWM477382U (zh) * | 2013-12-11 | 2014-05-01 | 三緯國際立體列印科技股份有限公司 | 清潔裝置 |
| JP6251062B2 (ja) * | 2014-01-30 | 2017-12-20 | タツモ株式会社 | スリットノズル洗浄装置及びワーク用塗布装置 |
| JP6426491B2 (ja) * | 2015-02-13 | 2018-11-21 | 中外炉工業株式会社 | 塗布装置及び塗布方法 |
| JP6697324B2 (ja) * | 2016-05-26 | 2020-05-20 | 株式会社Ｓｃｒｅｅｎホールディングス | ノズル清掃装置、塗布装置およびノズル清掃方法 |
| JP6824673B2 (ja) * | 2016-09-13 | 2021-02-03 | 株式会社Ｓｃｒｅｅｎホールディングス | ノズル清掃部材、ノズル清掃装置、塗布装置 |
| KR101877515B1 (ko) * | 2016-10-05 | 2018-07-11 | 한국기계연구원 | 슬롯다이 시스템 및 이를 이용한 슬롯다이 제어방법 |
| CN206425274U (zh) * | 2017-01-05 | 2017-08-22 | 惠科股份有限公司 | 一种喷嘴的清洁装置 |
| JP6337184B2 (ja) * | 2017-06-22 | 2018-06-06 | 株式会社Ｓｃｒｅｅｎホールディングス | ノズル洗浄装置、塗布装置、ノズル洗浄方法、および塗布方法 |
| CN110124952B (zh) * | 2018-02-02 | 2024-02-13 | 深圳市曼恩斯特科技股份有限公司 | 滑台、涂布机及涂胶方法 |
| CN108427223B (zh) * | 2018-03-23 | 2020-11-13 | 京东方科技集团股份有限公司 | 彩膜基板和显示面板及其显示方法 |
| CN108672214A (zh) * | 2018-07-25 | 2018-10-19 | 朱浩东 | 光学胶涂布设备 |
| CN108816660A (zh) * | 2018-08-04 | 2018-11-16 | 伍先春 | 光学胶涂布装置 |
| JP7111565B2 (ja) * | 2018-09-06 | 2022-08-02 | 株式会社Ｓｃｒｅｅｎホールディングス | 基板処理装置および基板処理方法 |
| JP7094635B2 (ja) * | 2018-11-28 | 2022-07-04 | 東レエンジニアリング株式会社 | 清掃装置 |
| JP6904583B2 (ja) * | 2018-12-18 | 2021-07-21 | 株式会社飯沼ゲージ製作所 | スリットコーター |
| JP7344533B2 (ja) * | 2019-05-14 | 2023-09-14 | Ａｉメカテック株式会社 | 塗布装置及び塗布方法 |
| JP7312204B2 (ja) * | 2021-02-22 | 2023-07-20 | 株式会社Ｓｃｒｅｅｎホールディングス | ノズル洗浄装置、ノズル洗浄方法および塗布装置 |
| JP7279096B2 (ja) * | 2021-02-26 | 2023-05-22 | 株式会社Ｓｃｒｅｅｎホールディングス | ノズル洗浄装置、ノズル洗浄方法および塗布装置 |
| CN113070184B (zh) * | 2021-06-07 | 2021-09-07 | 成都拓米电子装备制造有限公司 | 一种狭缝挤出涂布头的清洁装置及清洁方法 |
| CN113649225B (zh) * | 2021-09-07 | 2022-10-04 | 深圳市曼恩斯特科技股份有限公司 | 一种涂布模头及涂布设备 |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH09192566A (ja) * | 1996-01-18 | 1997-07-29 | Toray Ind Inc | 塗布装置および塗布方法並びにカラーフィルタの製造方法および製造装置 |
| US20050068365A1 (en) * | 2003-09-26 | 2005-03-31 | Brother Kogyo Kabushiki Kaisha | Inkjet printer |
| TW200536615A (en) * | 2004-03-25 | 2005-11-16 | Tokyo Ohka Kogyo Co Ltd | Cleaning apparatus for slit nozzle |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2982092B2 (ja) | 1991-08-29 | 1999-11-22 | 富士写真フイルム株式会社 | コーターエッジの洗浄方法及び洗浄装置 |
| JP3306838B2 (ja) * | 1993-12-14 | 2002-07-24 | 東レ株式会社 | カーテンフローコータの口金の清掃方法およびカラーフィルタ用塗膜の製造方法 |
| JPH09187710A (ja) * | 1996-01-09 | 1997-07-22 | Toray Ind Inc | 塗布装置及び塗布方法並びにカラーフィルタの製造装置およびその製造方法 |
| JPH09189910A (ja) * | 1996-10-28 | 1997-07-22 | Seiko Epson Corp | カラー表示装置 |
| JPH10216598A (ja) | 1997-02-04 | 1998-08-18 | Toray Ind Inc | 塗布方法および塗布装置並びにカラーフィルターの製造方法および製造装置 |
| JPH11300261A (ja) * | 1998-04-22 | 1999-11-02 | Toray Ind Inc | 塗布用ダイ清掃装置およびこれを用いた塗布方法並びにカラーフィルターの製造装置および製造方法 |
| JP2002177848A (ja) * | 2000-12-15 | 2002-06-25 | Toray Ind Inc | 塗布用ダイの清掃装置および清掃方法並びにこれを用いたカラーフィルターの製造装置および製造方法 |
| JP5127127B2 (ja) * | 2005-09-15 | 2013-01-23 | 東京応化工業株式会社 | 塗膜形成方法 |
| JP4787040B2 (ja) * | 2006-03-17 | 2011-10-05 | 株式会社リコー | 塗膜形成装置 |
-
2011
- 2011-03-23 JP JP2011064325A patent/JP5766990B2/ja active Active
-
2012
- 2012-01-13 TW TW101101393A patent/TWI550308B/zh active
- 2012-02-27 KR KR1020120019744A patent/KR101893806B1/ko active IP Right Grant
- 2012-02-28 CN CN201210046849.3A patent/CN102688830B/zh active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH09192566A (ja) * | 1996-01-18 | 1997-07-29 | Toray Ind Inc | 塗布装置および塗布方法並びにカラーフィルタの製造方法および製造装置 |
| US20050068365A1 (en) * | 2003-09-26 | 2005-03-31 | Brother Kogyo Kabushiki Kaisha | Inkjet printer |
| TW200536615A (en) * | 2004-03-25 | 2005-11-16 | Tokyo Ohka Kogyo Co Ltd | Cleaning apparatus for slit nozzle |
Also Published As
| Publication number | Publication date |
|---|---|
| JP5766990B2 (ja) | 2015-08-19 |
| TW201243402A (en) | 2012-11-01 |
| KR101893806B1 (ko) | 2018-08-31 |
| CN102688830A (zh) | 2012-09-26 |
| KR20120108933A (ko) | 2012-10-05 |
| JP2012200614A (ja) | 2012-10-22 |
| CN102688830B (zh) | 2016-03-09 |
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