TWI487049B - 流路切換裝置、處理裝置、流路切換方法、處理方法及記憶媒體 - Google Patents

流路切換裝置、處理裝置、流路切換方法、處理方法及記憶媒體 Download PDF

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Publication number
TWI487049B
TWI487049B TW100121818A TW100121818A TWI487049B TW I487049 B TWI487049 B TW I487049B TW 100121818 A TW100121818 A TW 100121818A TW 100121818 A TW100121818 A TW 100121818A TW I487049 B TWI487049 B TW I487049B
Authority
TW
Taiwan
Prior art keywords
flow path
processing
outer cylinder
opening
cylinder
Prior art date
Application number
TW100121818A
Other languages
English (en)
Chinese (zh)
Other versions
TW201214601A (en
Inventor
緒方信博
長峰秀一
清田健司
Original Assignee
東京威力科創股份有限公司
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Filing date
Publication date
Application filed by 東京威力科創股份有限公司 filed Critical 東京威力科創股份有限公司
Publication of TW201214601A publication Critical patent/TW201214601A/zh
Application granted granted Critical
Publication of TWI487049B publication Critical patent/TWI487049B/zh

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Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P50/00—Etching of wafers, substrates or parts of devices
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0402—Apparatus for fluid treatment
    • H10P72/0406—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0451—Apparatus for manufacturing or treating in a plurality of work-stations
    • H10P72/0452—Apparatus for manufacturing or treating in a plurality of work-stations characterised by the layout of the process chambers
    • H10P72/0456—Apparatus for manufacturing or treating in a plurality of work-stations characterised by the layout of the process chambers in-line arrangement
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/0318—Processes
    • Y10T137/0324—With control of flow by a condition or characteristic of a fluid
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8593—Systems
    • Y10T137/87571—Multiple inlet with single outlet
    • Y10T137/87676—With flow control
    • Y10T137/87684—Valve in each inlet
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8593—Systems
    • Y10T137/877—With flow control means for branched passages
    • Y10T137/87877—Single inlet with multiple distinctly valved outlets

Landscapes

  • Cleaning Or Drying Semiconductors (AREA)
  • Multiple-Way Valves (AREA)
TW100121818A 2010-06-22 2011-06-22 流路切換裝置、處理裝置、流路切換方法、處理方法及記憶媒體 TWI487049B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2010141921A JP5240245B2 (ja) 2010-06-22 2010-06-22 流路切替え装置、処理装置、流路切替え方法及び処理方法並びに記憶媒体

Publications (2)

Publication Number Publication Date
TW201214601A TW201214601A (en) 2012-04-01
TWI487049B true TWI487049B (zh) 2015-06-01

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
TW100121818A TWI487049B (zh) 2010-06-22 2011-06-22 流路切換裝置、處理裝置、流路切換方法、處理方法及記憶媒體

Country Status (5)

Country Link
US (1) US8840752B2 (https=)
JP (1) JP5240245B2 (https=)
KR (1) KR101417208B1 (https=)
CN (1) CN102315142B (https=)
TW (1) TWI487049B (https=)

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JP5240245B2 (ja) * 2010-06-22 2013-07-17 東京エレクトロン株式会社 流路切替え装置、処理装置、流路切替え方法及び処理方法並びに記憶媒体
JP2013011289A (ja) * 2011-06-28 2013-01-17 Tokyo Electron Ltd ゲートバルブ及びそれを用いた基板処理システム
JP6003716B2 (ja) * 2012-04-17 2016-10-05 株式会社デンソー 流路切替装置
CN103453215B (zh) * 2012-05-31 2016-04-27 英属开曼群岛商精曜有限公司 阀门总成以及阀门
JP6219848B2 (ja) * 2012-12-28 2017-10-25 株式会社Ｓｃｒｅｅｎホールディングス 処理装置とその排気切換装置並びに排気切換ユニットと切換弁ボックス
US9698029B2 (en) * 2014-02-19 2017-07-04 Lam Research Ag Method and apparatus for processing wafer-shaped articles
JP6482979B2 (ja) * 2015-07-29 2019-03-13 東京エレクトロン株式会社 液処理装置
TWI629116B (zh) * 2016-06-28 2018-07-11 荏原製作所股份有限公司 清洗裝置、具備該清洗裝置之鍍覆裝置、以及清洗方法
CA2976081C (en) 2016-08-10 2025-01-14 Pat Technology Systems Inc. Fume extraction device with movable extraction opening
JP6990602B2 (ja) * 2018-02-27 2022-01-12 東京エレクトロン株式会社 基板処理装置、基板処理方法及びコンピュータ読み取り可能な記録媒体
JP7019184B2 (ja) * 2018-07-17 2022-02-15 スピードファム株式会社 処理液切換装置
JP7203545B2 (ja) 2018-09-21 2023-01-13 株式会社Ｓｃｒｅｅｎホールディングス 基板処理装置
JP6611893B2 (ja) * 2018-11-01 2019-11-27 東京エレクトロン株式会社 基板液処理装置
CN209540113U (zh) * 2019-01-05 2019-10-25 宁波大叶园林工业股份有限公司 一种新型四通通水结构
JP7370277B2 (ja) * 2020-02-26 2023-10-27 株式会社Ｓｃｒｅｅｎホールディングス 基板処理装置
US12512342B2 (en) * 2020-02-26 2025-12-30 SCREEN Holdings Co., Ltd. Substrate treating apparatus
CN113494680B (zh) * 2020-04-07 2023-05-12 添可智能科技有限公司 通路切换装置、液体供给系统和通路切换方法
JP7807275B2 (ja) * 2022-03-23 2026-01-27 株式会社Ｓｃｒｅｅｎホールディングス 基板処理装置
JP2026004903A (ja) * 2024-06-26 2026-01-15 株式会社Ｓｃｒｅｅｎホールディングス 基板処理方法

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JP2009252884A (ja) * 2008-04-03 2009-10-29 Tokyo Electron Ltd 圧力制御機構、基板処理装置、基板処理方法及び記憶媒体
US20100058841A1 (en) * 2007-05-15 2010-03-11 Ge Healthcare Bio-Sciences Ab Flow distributing valve

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DD206687A3 (de) * 1981-07-28 1984-02-01 Mikroelektronik Zt Forsch Tech Verfahren und vorrichtung zur gasfuehrung fuer lp cvd prozesse in einem rohrreaktor
JPH1012523A (ja) * 1996-06-21 1998-01-16 Dainippon Screen Mfg Co Ltd 基板処理装置
JP3669897B2 (ja) * 1999-06-09 2005-07-13 東京エレクトロン株式会社 基板処理装置および基板処理方法
JP3584185B2 (ja) * 1999-09-21 2004-11-04 エア・ウォーター株式会社 冷凍機およびこれに用いるロータリー弁
CN2541112Y (zh) 2002-05-29 2003-03-26 苏州精机机械工业有限公司 旋转式油位闸门
JP4767783B2 (ja) * 2006-07-26 2011-09-07 東京エレクトロン株式会社 液処理装置
US8298338B2 (en) * 2007-12-26 2012-10-30 Samsung Electronics Co., Ltd. Chemical vapor deposition apparatus
JP5012651B2 (ja) * 2008-05-14 2012-08-29 東京エレクトロン株式会社 塗布装置、塗布方法、塗布、現像装置及び記憶媒体
JP5240245B2 (ja) * 2010-06-22 2013-07-17 東京エレクトロン株式会社 流路切替え装置、処理装置、流路切替え方法及び処理方法並びに記憶媒体

Patent Citations (2)

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Publication number Priority date Publication date Assignee Title
US20100058841A1 (en) * 2007-05-15 2010-03-11 Ge Healthcare Bio-Sciences Ab Flow distributing valve
JP2009252884A (ja) * 2008-04-03 2009-10-29 Tokyo Electron Ltd 圧力制御機構、基板処理装置、基板処理方法及び記憶媒体

Also Published As

Publication number Publication date
JP5240245B2 (ja) 2013-07-17
JP2012009511A (ja) 2012-01-12
CN102315142B (zh) 2015-03-18
US20110308626A1 (en) 2011-12-22
KR101417208B1 (ko) 2014-07-08
TW201214601A (en) 2012-04-01
KR20110139096A (ko) 2011-12-28
US8840752B2 (en) 2014-09-23
CN102315142A (zh) 2012-01-11

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