TWI439313B - 矮式表面安裝過濾器 - Google Patents

矮式表面安裝過濾器 Download PDF

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Publication number
TWI439313B
TWI439313B TW96104638A TW96104638A TWI439313B TW I439313 B TWI439313 B TW I439313B TW 96104638 A TW96104638 A TW 96104638A TW 96104638 A TW96104638 A TW 96104638A TW I439313 B TWI439313 B TW I439313B
Authority
TW
Taiwan
Prior art keywords
filter
chamber
housing
gas
flow passage
Prior art date
Application number
TW96104638A
Other languages
English (en)
Chinese (zh)
Other versions
TW200735948A (en
Inventor
Anthony Diprizio
Nathan Abbott
Christopher Vroman
Rajnikant B Patel
Eric Mcnamara
Original Assignee
Entegris Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=38366987&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=TWI439313(B) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Entegris Inc filed Critical Entegris Inc
Publication of TW200735948A publication Critical patent/TW200735948A/zh
Application granted granted Critical
Publication of TWI439313B publication Critical patent/TWI439313B/zh

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
    • B01D46/24—Particle separators, e.g. dust precipitators, using rigid hollow filter bodies
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
    • B01D46/0002—Casings; Housings; Frame constructions
    • B01D46/0013—Modules
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/02—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
    • B01D53/04—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography with stationary adsorbents
    • B01D53/0407—Constructional details of adsorbing systems
    • B01D53/0446—Means for feeding or distributing gases
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2258/00—Sources of waste gases
    • B01D2258/02—Other waste gases
    • B01D2258/0216—Other waste gases from CVD treatment or semi-conductor manufacturing
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8593—Systems
    • Y10T137/877—With flow control means for branched passages
    • Y10T137/87885—Sectional block structure
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49826—Assembling or joining

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Analytical Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Filtering Of Dispersed Particles In Gases (AREA)
  • Separation Using Semi-Permeable Membranes (AREA)
  • Control Of Motors That Do Not Use Commutators (AREA)
  • Filtering Materials (AREA)
TW96104638A 2006-02-10 2007-02-08 矮式表面安裝過濾器 TWI439313B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US11/353,294 US7575616B2 (en) 2006-02-10 2006-02-10 Low-profile surface mount filter

Publications (2)

Publication Number Publication Date
TW200735948A TW200735948A (en) 2007-10-01
TWI439313B true TWI439313B (zh) 2014-06-01

Family

ID=38366987

Family Applications (1)

Application Number Title Priority Date Filing Date
TW96104638A TWI439313B (zh) 2006-02-10 2007-02-08 矮式表面安裝過濾器

Country Status (7)

Country Link
US (3) US7575616B2 (https=)
EP (1) EP1989036B1 (https=)
JP (1) JP5328372B2 (https=)
KR (1) KR101357415B1 (https=)
CN (1) CN101370639B (https=)
TW (1) TWI439313B (https=)
WO (1) WO2007095145A2 (https=)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7575616B2 (en) * 2006-02-10 2009-08-18 Entegris, Inc. Low-profile surface mount filter
KR101423586B1 (ko) * 2006-08-25 2014-07-25 폴 코포레이션 정화 요소를 포함하는 유체 조립체
US7806143B2 (en) * 2007-06-11 2010-10-05 Lam Research Corporation Flexible manifold for integrated gas system gas panels
US8322380B2 (en) * 2007-10-12 2012-12-04 Lam Research Corporation Universal fluid flow adaptor
US9147188B2 (en) 2010-10-26 2015-09-29 Tectonics Electronic currency and authentication system and method
US8950433B2 (en) * 2011-05-02 2015-02-10 Advantage Group International Inc. Manifold system for gas and fluid delivery
EP2740528B1 (en) * 2012-12-10 2015-11-04 Gometrics S.L. Gas mixer
CN103192516B (zh) * 2013-04-02 2015-02-25 上海正乾生物技术有限公司 脂质体制备高压挤出过滤系统
SG11201808182UA (en) * 2016-04-07 2018-10-30 Entegris Inc Gas filter
US10363503B1 (en) 2018-10-19 2019-07-30 Marvin Salganov Foldable multi-stage water filter system
KR102602359B1 (ko) * 2018-11-22 2023-11-16 에이치엘만도 주식회사 체크밸브 및 이를 포함하는 모듈레이터블록
CN113994460B (zh) * 2019-04-15 2025-05-20 朗姆研究公司 用于气体输送的模块部件系统

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Also Published As

Publication number Publication date
KR20080092349A (ko) 2008-10-15
CN101370639A (zh) 2009-02-18
JP5328372B2 (ja) 2013-10-30
CN101370639B (zh) 2013-01-23
KR101357415B9 (ko) 2025-02-05
KR101357415B1 (ko) 2014-02-03
US7806949B2 (en) 2010-10-05
EP1989036B1 (en) 2016-05-04
US7967882B2 (en) 2011-06-28
EP1989036A2 (en) 2008-11-12
US20110078886A1 (en) 2011-04-07
US7575616B2 (en) 2009-08-18
TW200735948A (en) 2007-10-01
EP1989036A4 (en) 2010-06-02
US20090282979A1 (en) 2009-11-19
JP2009525870A (ja) 2009-07-16
WO2007095145A3 (en) 2008-04-24
US20070186775A1 (en) 2007-08-16
WO2007095145A2 (en) 2007-08-23

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