KR101357415B1 - 로우 프로파일 표면 장착 필터 - Google Patents

로우 프로파일 표면 장착 필터 Download PDF

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Publication number
KR101357415B1
KR101357415B1 KR1020087016018A KR20087016018A KR101357415B1 KR 101357415 B1 KR101357415 B1 KR 101357415B1 KR 1020087016018 A KR1020087016018 A KR 1020087016018A KR 20087016018 A KR20087016018 A KR 20087016018A KR 101357415 B1 KR101357415 B1 KR 101357415B1
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South Korea
Prior art keywords
filter
cavity
gas
housing
low profile
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KR1020087016018A
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Korean (ko)
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KR20080092349A (ko
KR101357415B9 (ko
Inventor
앤소니 디프리지오
나탄 애보트
크리스토퍼 보르만
라이니칸트 비 파텔
에릭 멕나마라
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엔테그리스, 아이엔씨.
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Application filed by 엔테그리스, 아이엔씨. filed Critical 엔테그리스, 아이엔씨.
Publication of KR20080092349A publication Critical patent/KR20080092349A/ko
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Publication of KR101357415B1 publication Critical patent/KR101357415B1/ko
Publication of KR101357415B9 publication Critical patent/KR101357415B9/ko
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
    • B01D46/24—Particle separators, e.g. dust precipitators, using rigid hollow filter bodies
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
    • B01D46/0002—Casings; Housings; Frame constructions
    • B01D46/0013—Modules
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/02—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
    • B01D53/04—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography with stationary adsorbents
    • B01D53/0407—Constructional details of adsorbing systems
    • B01D53/0446—Means for feeding or distributing gases
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2258/00—Sources of waste gases
    • B01D2258/02—Other waste gases
    • B01D2258/0216—Other waste gases from CVD treatment or semi-conductor manufacturing
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8593—Systems
    • Y10T137/877—With flow control means for branched passages
    • Y10T137/87885—Sectional block structure
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49826—Assembling or joining

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Analytical Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Filtering Of Dispersed Particles In Gases (AREA)
  • Separation Using Semi-Permeable Membranes (AREA)
  • Control Of Motors That Do Not Use Commutators (AREA)
  • Filtering Materials (AREA)
KR1020087016018A 2006-02-10 2007-02-09 로우 프로파일 표면 장착 필터 Active KR101357415B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US11/353,294 2006-02-10
US11/353,294 US7575616B2 (en) 2006-02-10 2006-02-10 Low-profile surface mount filter
PCT/US2007/003628 WO2007095145A2 (en) 2006-02-10 2007-02-09 Low-profile surface mount filter

Publications (3)

Publication Number Publication Date
KR20080092349A KR20080092349A (ko) 2008-10-15
KR101357415B1 true KR101357415B1 (ko) 2014-02-03
KR101357415B9 KR101357415B9 (ko) 2025-02-05

Family

ID=38366987

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020087016018A Active KR101357415B1 (ko) 2006-02-10 2007-02-09 로우 프로파일 표면 장착 필터

Country Status (7)

Country Link
US (3) US7575616B2 (https=)
EP (1) EP1989036B1 (https=)
JP (1) JP5328372B2 (https=)
KR (1) KR101357415B1 (https=)
CN (1) CN101370639B (https=)
TW (1) TWI439313B (https=)
WO (1) WO2007095145A2 (https=)

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Publication number Priority date Publication date Assignee Title
US7575616B2 (en) * 2006-02-10 2009-08-18 Entegris, Inc. Low-profile surface mount filter
KR101423586B1 (ko) * 2006-08-25 2014-07-25 폴 코포레이션 정화 요소를 포함하는 유체 조립체
US7806143B2 (en) * 2007-06-11 2010-10-05 Lam Research Corporation Flexible manifold for integrated gas system gas panels
US8322380B2 (en) * 2007-10-12 2012-12-04 Lam Research Corporation Universal fluid flow adaptor
US9147188B2 (en) 2010-10-26 2015-09-29 Tectonics Electronic currency and authentication system and method
US8950433B2 (en) * 2011-05-02 2015-02-10 Advantage Group International Inc. Manifold system for gas and fluid delivery
EP2740528B1 (en) * 2012-12-10 2015-11-04 Gometrics S.L. Gas mixer
CN103192516B (zh) * 2013-04-02 2015-02-25 上海正乾生物技术有限公司 脂质体制备高压挤出过滤系统
SG11201808182UA (en) * 2016-04-07 2018-10-30 Entegris Inc Gas filter
US10363503B1 (en) 2018-10-19 2019-07-30 Marvin Salganov Foldable multi-stage water filter system
KR102602359B1 (ko) * 2018-11-22 2023-11-16 에이치엘만도 주식회사 체크밸브 및 이를 포함하는 모듈레이터블록
CN113994460B (zh) * 2019-04-15 2025-05-20 朗姆研究公司 用于气体输送的模块部件系统

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WO2007095145A3 (en) 2006-02-10 2008-04-24 Entegris Inc Low-profile surface mount filter

Also Published As

Publication number Publication date
KR20080092349A (ko) 2008-10-15
CN101370639A (zh) 2009-02-18
JP5328372B2 (ja) 2013-10-30
CN101370639B (zh) 2013-01-23
KR101357415B9 (ko) 2025-02-05
US7806949B2 (en) 2010-10-05
EP1989036B1 (en) 2016-05-04
US7967882B2 (en) 2011-06-28
EP1989036A2 (en) 2008-11-12
US20110078886A1 (en) 2011-04-07
US7575616B2 (en) 2009-08-18
TW200735948A (en) 2007-10-01
EP1989036A4 (en) 2010-06-02
TWI439313B (zh) 2014-06-01
US20090282979A1 (en) 2009-11-19
JP2009525870A (ja) 2009-07-16
WO2007095145A3 (en) 2008-04-24
US20070186775A1 (en) 2007-08-16
WO2007095145A2 (en) 2007-08-23

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