TWI414049B - 半導體裝置之製造方法 - Google Patents
半導體裝置之製造方法 Download PDFInfo
- Publication number
- TWI414049B TWI414049B TW099116411A TW99116411A TWI414049B TW I414049 B TWI414049 B TW I414049B TW 099116411 A TW099116411 A TW 099116411A TW 99116411 A TW99116411 A TW 99116411A TW I414049 B TWI414049 B TW I414049B
- Authority
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- Taiwan
- Prior art keywords
- solder
- semiconductor wafer
- connection
- electrodes
- semiconductor
- Prior art date
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- H01L24/10—Bump connectors ; Manufacturing methods related thereto
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- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Wire Bonding (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2009167716A JP5465942B2 (ja) | 2009-07-16 | 2009-07-16 | 半導体装置およびその製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW201104817A TW201104817A (en) | 2011-02-01 |
| TWI414049B true TWI414049B (zh) | 2013-11-01 |
Family
ID=43464697
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW099116411A TWI414049B (zh) | 2009-07-16 | 2010-05-21 | 半導體裝置之製造方法 |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US8633103B2 (enExample) |
| JP (1) | JP5465942B2 (enExample) |
| CN (2) | CN101958298A (enExample) |
| TW (1) | TWI414049B (enExample) |
Families Citing this family (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP2631934A4 (en) * | 2010-10-22 | 2018-02-07 | Panasonic Intellectual Property Management Co., Ltd. | Semiconductor junction structure and method for manufacturing semiconductor junction structure |
| US9324905B2 (en) | 2011-03-15 | 2016-04-26 | Micron Technology, Inc. | Solid state optoelectronic device with preformed metal support substrate |
| JP5613100B2 (ja) * | 2011-04-21 | 2014-10-22 | パナソニック株式会社 | 半導体装置の製造方法 |
| JP5638144B2 (ja) | 2011-09-16 | 2014-12-10 | パナソニック株式会社 | 実装構造およびその製造方法 |
| US8497579B1 (en) * | 2012-02-16 | 2013-07-30 | Chipbond Technology Corporation | Semiconductor packaging method and structure thereof |
| CN102637747A (zh) * | 2012-04-05 | 2012-08-15 | 祁门县硅鼎电子元件厂 | 镀涂环保材料的双铜质电极整流管芯片及镀涂工艺 |
| DE102013103081A1 (de) * | 2013-03-26 | 2014-10-02 | Osram Opto Semiconductors Gmbh | Verfahren zum Verbinden von Fügepartnern und Anordnung von Fügepartnern |
| JP2015122445A (ja) * | 2013-12-24 | 2015-07-02 | ルネサスエレクトロニクス株式会社 | 半導体装置およびその製造方法 |
| CN104282582B (zh) * | 2014-09-17 | 2017-02-01 | 中南大学 | 一种Ni‑P基板的封装方法 |
| US10886250B2 (en) | 2015-07-10 | 2021-01-05 | Invensas Corporation | Structures and methods for low temperature bonding using nanoparticles |
| TWI822659B (zh) | 2016-10-27 | 2023-11-21 | 美商艾德亞半導體科技有限責任公司 | 用於低溫接合的結構和方法 |
| JP6621068B2 (ja) * | 2016-12-08 | 2019-12-18 | パナソニックIpマネジメント株式会社 | 実装構造体 |
| KR20230126736A (ko) | 2020-12-30 | 2023-08-30 | 아데이아 세미컨덕터 본딩 테크놀로지스 인코포레이티드 | 전도성 특징부를 갖는 구조 및 그 형성방법 |
| KR20230058949A (ko) * | 2021-10-25 | 2023-05-03 | 삼성전자주식회사 | 반도체 패키지 및 반도체 패키지의 제조 방법 |
| CN116313834B (zh) * | 2023-05-24 | 2023-09-12 | 江西兆驰半导体有限公司 | 晶圆级封装方法及晶圆级封装结构 |
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| US20040188503A1 (en) * | 2003-03-31 | 2004-09-30 | Fay Hua | Solders with surfactant-refined grain sizes, solder bumps made thereof, and methods of making same |
| TWI243082B (en) * | 2001-04-18 | 2005-11-11 | Hitachi Ltd | Electronic device |
| JP2007019360A (ja) * | 2005-07-11 | 2007-01-25 | Fuji Electric Holdings Co Ltd | 電子部品の実装方法 |
| JP2007152418A (ja) * | 2005-12-08 | 2007-06-21 | Mitsui Mining & Smelting Co Ltd | 高温はんだおよびその製造方法 |
| TW200828548A (en) * | 2006-10-05 | 2008-07-01 | Flipchip Int Llc | Wafer-level interconnect for high mechanical reliability applications |
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| US5038996A (en) * | 1988-10-12 | 1991-08-13 | International Business Machines Corporation | Bonding of metallic surfaces |
| CA2030865C (en) * | 1989-11-30 | 1993-01-12 | Kenichi Fuse | Method of forming a solder layer on pads of a circuit board and method of mounting an electronic part on a circuit board |
| US5296649A (en) * | 1991-03-26 | 1994-03-22 | The Furukawa Electric Co., Ltd. | Solder-coated printed circuit board and method of manufacturing the same |
| US5428249A (en) * | 1992-07-15 | 1995-06-27 | Canon Kabushiki Kaisha | Photovoltaic device with improved collector electrode |
| JP4897133B2 (ja) * | 1999-12-09 | 2012-03-14 | ソニー株式会社 | 半導体発光素子、その製造方法および配設基板 |
| JP3414388B2 (ja) * | 2000-06-12 | 2003-06-09 | 株式会社日立製作所 | 電子機器 |
| CN100578778C (zh) * | 2000-12-21 | 2010-01-06 | 株式会社日立制作所 | 电子器件 |
| TW508987B (en) * | 2001-07-27 | 2002-11-01 | Phoenix Prec Technology Corp | Method of forming electroplated solder on organic printed circuit board |
| JP3597810B2 (ja) * | 2001-10-10 | 2004-12-08 | 富士通株式会社 | はんだペーストおよび接続構造 |
| TW558821B (en) * | 2002-05-29 | 2003-10-21 | Via Tech Inc | Under bump buffer metallurgy structure |
| US6744142B2 (en) * | 2002-06-19 | 2004-06-01 | National Central University | Flip chip interconnection structure and process of making the same |
| JP2005051150A (ja) | 2003-07-31 | 2005-02-24 | Seiko Epson Corp | 半導体装置及びその製造方法、回路基板並びに電子機器 |
| JP4882229B2 (ja) * | 2004-09-08 | 2012-02-22 | 株式会社デンソー | 半導体装置およびその製造方法 |
| JP4254757B2 (ja) * | 2005-07-22 | 2009-04-15 | 富士通株式会社 | 導電材料及び導電性ペースト及び基板 |
| US7749336B2 (en) * | 2005-08-30 | 2010-07-06 | Indium Corporation Of America | Technique for increasing the compliance of tin-indium solders |
| JP2007234841A (ja) | 2006-02-28 | 2007-09-13 | Kyocera Corp | 配線基板、実装部品、電子装置、配線基板の製造方法および電子装置の製造方法 |
| DE112007001029B4 (de) * | 2006-04-28 | 2014-07-17 | Denso Corporation | Lötformteil, dessen Herstellung und Elektronikbauteil |
| US8143722B2 (en) | 2006-10-05 | 2012-03-27 | Flipchip International, Llc | Wafer-level interconnect for high mechanical reliability applications |
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2009
- 2009-07-16 JP JP2009167716A patent/JP5465942B2/ja not_active Expired - Fee Related
-
2010
- 2010-05-21 TW TW099116411A patent/TWI414049B/zh not_active IP Right Cessation
- 2010-06-13 US US12/814,472 patent/US8633103B2/en active Active
- 2010-06-13 CN CN2010102060615A patent/CN101958298A/zh active Pending
- 2010-06-13 CN CN201410264924.2A patent/CN104022092A/zh active Pending
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| TWI243082B (en) * | 2001-04-18 | 2005-11-11 | Hitachi Ltd | Electronic device |
| US20040188503A1 (en) * | 2003-03-31 | 2004-09-30 | Fay Hua | Solders with surfactant-refined grain sizes, solder bumps made thereof, and methods of making same |
| JP2007019360A (ja) * | 2005-07-11 | 2007-01-25 | Fuji Electric Holdings Co Ltd | 電子部品の実装方法 |
| JP2007152418A (ja) * | 2005-12-08 | 2007-06-21 | Mitsui Mining & Smelting Co Ltd | 高温はんだおよびその製造方法 |
| TW200828548A (en) * | 2006-10-05 | 2008-07-01 | Flipchip Int Llc | Wafer-level interconnect for high mechanical reliability applications |
Also Published As
| Publication number | Publication date |
|---|---|
| US20110012263A1 (en) | 2011-01-20 |
| TW201104817A (en) | 2011-02-01 |
| JP5465942B2 (ja) | 2014-04-09 |
| CN104022092A (zh) | 2014-09-03 |
| JP2011023574A (ja) | 2011-02-03 |
| US8633103B2 (en) | 2014-01-21 |
| CN101958298A (zh) | 2011-01-26 |
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