TWI393799B - 用於真空室中之基板的支持及升降裝置 - Google Patents

用於真空室中之基板的支持及升降裝置 Download PDF

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Publication number
TWI393799B
TWI393799B TW094117365A TW94117365A TWI393799B TW I393799 B TWI393799 B TW I393799B TW 094117365 A TW094117365 A TW 094117365A TW 94117365 A TW94117365 A TW 94117365A TW I393799 B TWI393799 B TW I393799B
Authority
TW
Taiwan
Prior art keywords
pin
substrate
pin assembly
roller slider
ball
Prior art date
Application number
TW094117365A
Other languages
English (en)
Chinese (zh)
Other versions
TW200624587A (en
Inventor
洛朗杜波斯特
蘇菲恩荷娜德玆
漢司傑格
凱林連德瑞
伯特連德維內爾
尤金薩波德奴
傑克史密特
雷杜安艾爾包齊其
Original Assignee
歐瑞康太陽能特魯貝屈股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 歐瑞康太陽能特魯貝屈股份有限公司 filed Critical 歐瑞康太陽能特魯貝屈股份有限公司
Publication of TW200624587A publication Critical patent/TW200624587A/zh
Application granted granted Critical
Publication of TWI393799B publication Critical patent/TWI393799B/zh

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Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/50—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for positioning, orientation or alignment
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/70—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping
    • H10P72/76—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using mechanical means, e.g. clamps or pinches
    • H10P72/7604—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using mechanical means, e.g. clamps or pinches the wafers being placed on a susceptor, stage or support
    • H10P72/7612—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for supporting or gripping using mechanical means, e.g. clamps or pinches the wafers being placed on a susceptor, stage or support characterised by lifting arrangements, e.g. lift pins
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/458—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber
    • C23C16/4582—Rigid and flat substrates, e.g. plates or discs
    • C23C16/4583—Rigid and flat substrates, e.g. plates or discs the substrate being supported substantially horizontally
    • C23C16/4586—Elements in the interior of the support, e.g. electrodes, heating or cooling devices

Landscapes

  • Chemical & Material Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Liquid Crystal (AREA)
  • User Interface Of Digital Computer (AREA)
  • Manufacture Of Macromolecular Shaped Articles (AREA)
  • Motorcycle And Bicycle Frame (AREA)
TW094117365A 2004-05-28 2005-05-27 用於真空室中之基板的支持及升降裝置 TWI393799B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US57515804P 2004-05-28 2004-05-28

Publications (2)

Publication Number Publication Date
TW200624587A TW200624587A (en) 2006-07-16
TWI393799B true TWI393799B (zh) 2013-04-21

Family

ID=34968080

Family Applications (1)

Application Number Title Priority Date Filing Date
TW094117365A TWI393799B (zh) 2004-05-28 2005-05-27 用於真空室中之基板的支持及升降裝置

Country Status (9)

Country Link
US (1) US20060016398A1 (enExample)
EP (1) EP1754254B1 (enExample)
JP (1) JP4777345B2 (enExample)
KR (1) KR20070032960A (enExample)
AT (1) ATE397288T1 (enExample)
DE (1) DE602005007217D1 (enExample)
ES (1) ES2304174T3 (enExample)
TW (1) TWI393799B (enExample)
WO (1) WO2005117097A1 (enExample)

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US8033245B2 (en) * 2004-02-12 2011-10-11 Applied Materials, Inc. Substrate support bushing
JP2007207807A (ja) * 2006-01-31 2007-08-16 Hitachi Kokusai Electric Inc 試料位置決め装置
JP4855097B2 (ja) * 2006-02-14 2012-01-18 株式會社塩山製作所 半導体チップ分離装置
KR101404009B1 (ko) * 2007-12-21 2014-06-13 주성엔지니어링(주) 리프트 핀 어셈블리
KR100945178B1 (ko) * 2008-04-24 2010-03-03 이옥기 이송장치용 부싱
US9011602B2 (en) * 2009-01-29 2015-04-21 Lam Research Corporation Pin lifting system
WO2011009007A2 (en) * 2009-07-15 2011-01-20 Applied Materials, Inc. Improved lift pin guides
JP5549441B2 (ja) * 2010-01-14 2014-07-16 東京エレクトロン株式会社 保持体機構、ロードロック装置、処理装置及び搬送機構
KR101053565B1 (ko) * 2010-10-11 2011-08-03 (주) 에스디시 승강 핀 가이드
US9371584B2 (en) * 2011-03-09 2016-06-21 Applied Materials, Inc. Processing chamber and method for centering a substrate therein
WO2012157638A1 (ja) * 2011-05-19 2012-11-22 シャープ株式会社 基板載置台および基板処理装置
KR101549854B1 (ko) 2011-10-20 2015-09-03 어플라이드 머티어리얼스, 인코포레이티드 기판 지지 부싱
KR101432152B1 (ko) * 2012-11-13 2014-08-22 삼성디스플레이 주식회사 기판 지지 모듈
CN105039934A (zh) * 2015-09-15 2015-11-11 京东方科技集团股份有限公司 滚轮套筒
KR101764418B1 (ko) 2016-01-06 2017-08-02 (주)신산이엔지 기판 열처리용 내열 지지유닛
US10998219B2 (en) * 2016-06-13 2021-05-04 Taiwan Semiconductor Manufacturing Co., Ltd. Wafer support device and method for removing lift pin therefrom
KR102492991B1 (ko) * 2018-03-27 2023-01-30 배트 홀딩 아게 지지 핀을 수용하고 해제하기 위한 커플링을 갖는 핀 리프팅 장치
CN111029236A (zh) * 2018-10-09 2020-04-17 北京北方华创微电子装备有限公司 支撑装置及反应腔室
JP7147527B2 (ja) 2018-12-10 2022-10-05 トヨタ自動車株式会社 支援装置、支援方法およびプログラム
WO2021101681A1 (en) * 2019-11-22 2021-05-27 Lam Research Corporation Coin-slot and ball-lock ceramic lift pin holders
CN113764328B (zh) * 2020-06-02 2024-06-21 拓荆科技股份有限公司 用于加工晶圆的装置及方法
DE102020120732A1 (de) * 2020-08-06 2022-02-10 Vat Holding Ag Stifthubvorrichtung
US20240332058A1 (en) * 2023-03-28 2024-10-03 Applied Materials, Inc. Substrate support assembly

Citations (1)

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TW411485B (en) * 1997-05-07 2000-11-11 Tokyo Electron Ltd Substrate treating apparatus

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US3887247A (en) * 1974-02-25 1975-06-03 Us Energy Bearing mounting for telescoping tubes
JP3028462B2 (ja) * 1995-05-12 2000-04-04 東京エレクトロン株式会社 熱処理装置
JP3354367B2 (ja) * 1995-12-19 2002-12-09 大日本スクリーン製造株式会社 基板洗浄装置
JP3940190B2 (ja) * 1996-09-30 2007-07-04 松下電器産業株式会社 真空処理装置
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JP3456890B2 (ja) * 1998-01-16 2003-10-14 東京エレクトロン株式会社 基板処理装置
JPH11351250A (ja) * 1998-06-12 1999-12-24 Sony Corp ベアリング装置
JP3398936B2 (ja) * 1999-04-09 2003-04-21 日本エー・エス・エム株式会社 半導体処理装置
JP4402763B2 (ja) * 1999-05-13 2010-01-20 Ｓｕｍｃｏ Ｔｅｃｈｘｉｖ株式会社 エピタキシャルウェーハ製造装置
JP2001093960A (ja) * 1999-09-22 2001-04-06 Hitachi Techno Eng Co Ltd 処理装置用ウエファ位置決め装置
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US20030072639A1 (en) * 2001-10-17 2003-04-17 Applied Materials, Inc. Substrate support
JP4111703B2 (ja) * 2001-10-19 2008-07-02 アプライド マテリアルズ インコーポレイテッド ウエハリフト機構
JP2003197719A (ja) * 2001-12-21 2003-07-11 Komatsu Electronic Metals Co Ltd 半導体製造装置および基板支持構造
JP2004026365A (ja) * 2002-06-24 2004-01-29 Dainippon Printing Co Ltd 作業台
DE10232478A1 (de) * 2002-07-17 2004-02-12 Infineon Technologies Ag Waferhubvorrichtung
US6887317B2 (en) * 2002-09-10 2005-05-03 Applied Materials, Inc. Reduced friction lift pin
JP4175988B2 (ja) * 2002-10-25 2008-11-05 東京エレクトロン株式会社 基板アライメント装置及び基板処理装置及び基板搬送装置
US8033245B2 (en) * 2004-02-12 2011-10-11 Applied Materials, Inc. Substrate support bushing

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW411485B (en) * 1997-05-07 2000-11-11 Tokyo Electron Ltd Substrate treating apparatus

Also Published As

Publication number Publication date
JP2008500709A (ja) 2008-01-10
KR20070032960A (ko) 2007-03-23
DE602005007217D1 (de) 2008-07-10
EP1754254A1 (en) 2007-02-21
TW200624587A (en) 2006-07-16
EP1754254B1 (en) 2008-05-28
WO2005117097A1 (en) 2005-12-08
US20060016398A1 (en) 2006-01-26
ATE397288T1 (de) 2008-06-15
JP4777345B2 (ja) 2011-09-21
ES2304174T3 (es) 2008-09-16

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