KR100945178B1 - 이송장치용 부싱 - Google Patents
이송장치용 부싱 Download PDFInfo
- Publication number
- KR100945178B1 KR100945178B1 KR1020080038384A KR20080038384A KR100945178B1 KR 100945178 B1 KR100945178 B1 KR 100945178B1 KR 1020080038384 A KR1020080038384 A KR 1020080038384A KR 20080038384 A KR20080038384 A KR 20080038384A KR 100945178 B1 KR100945178 B1 KR 100945178B1
- Authority
- KR
- South Korea
- Prior art keywords
- lift
- housing
- hole
- bushing
- fixing
- Prior art date
Links
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Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67706—Mechanical details, e.g. roller, belt
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B66—HOISTING; LIFTING; HAULING
- B66F—HOISTING, LIFTING, HAULING OR PUSHING, NOT OTHERWISE PROVIDED FOR, e.g. DEVICES WHICH APPLY A LIFTING OR PUSHING FORCE DIRECTLY TO THE SURFACE OF A LOAD
- B66F7/00—Lifting frames, e.g. for lifting vehicles; Platform lifts
- B66F7/28—Constructional details, e.g. end stops, pivoting supporting members, sliding runners adjustable to load dimensions
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67733—Overhead conveying
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/68742—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by a lifting arrangement, e.g. lift pins
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- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- Power Engineering (AREA)
- Life Sciences & Earth Sciences (AREA)
- Geology (AREA)
- Mechanical Engineering (AREA)
- Structural Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
Description
Claims (8)
- 리프트가 삽입되는 원통형상의 하우징; 및상기 하우징에 설치되어 상기 리프트의 이동을 가이드하는 안내부를 포함하고,상기 안내부는,상기 하우징에 구비되는 작동홀에 설치되고, 상기 리프트와 접촉되어 회전되는 롤러; 및상기 작동홀과 연통되게 형성되는 설치홀에 설치되어 상기 롤러를 지지하는 작동핀을 포함하며,상기 하우징에는 상기 설치홀과 연통되며, 상기 작동핀이 삽입되는 삽입홀이 형성되는 것을 특징으로 하는 이송장치용 부싱.
- 삭제
- 삭제
- 삭제
- 제 1항에 있어서,상기 작동핀은 그 끝단이 상기 삽입홀에서 서로 맞물리게 형성되는 것을 특징으로 하는 이송장치용 부싱.
- 제 1항 또는 제 5항에 있어서,상기 하우징에는 상기 작동핀이 상기 삽입홀에서 이탈되는 것을 방지하는 고정부가 더 구비되는 것을 특징으로 하는 이송장치용 부싱.
- 제 6항에 있어서, 상기 고정부는상기 삽입홀과 연통되도록 상기 하우징에 형성되는 고정홀; 및상기 고정홀에 장착되어 상기 작동핀의 이탈을 방지하는 고정체를 포함하는 것을 특징으로 하는 이송장치용 부싱.
- 제 7항에 있어서,상기 고정체는 스크류인 것을 특징으로 하는 이송장치용 부싱.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020080038384A KR100945178B1 (ko) | 2008-04-24 | 2008-04-24 | 이송장치용 부싱 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020080038384A KR100945178B1 (ko) | 2008-04-24 | 2008-04-24 | 이송장치용 부싱 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR20090112470A KR20090112470A (ko) | 2009-10-28 |
KR100945178B1 true KR100945178B1 (ko) | 2010-03-03 |
Family
ID=41553639
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020080038384A KR100945178B1 (ko) | 2008-04-24 | 2008-04-24 | 이송장치용 부싱 |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR100945178B1 (ko) |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH10247682A (ja) | 1996-12-04 | 1998-09-14 | Applied Materials Inc | リフトピン案内装置 |
JP2003124297A (ja) | 2001-10-19 | 2003-04-25 | Applied Materials Inc | ウエハリフト機構 |
KR20070032960A (ko) * | 2004-05-28 | 2007-03-23 | 오씨 외를리콘 발처스 악티엔게젤샤프트 | 마찰 저감용 롤러 글라이드를 포함한 리프트 핀 |
-
2008
- 2008-04-24 KR KR1020080038384A patent/KR100945178B1/ko active IP Right Grant
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH10247682A (ja) | 1996-12-04 | 1998-09-14 | Applied Materials Inc | リフトピン案内装置 |
JP2003124297A (ja) | 2001-10-19 | 2003-04-25 | Applied Materials Inc | ウエハリフト機構 |
KR20070032960A (ko) * | 2004-05-28 | 2007-03-23 | 오씨 외를리콘 발처스 악티엔게젤샤프트 | 마찰 저감용 롤러 글라이드를 포함한 리프트 핀 |
Also Published As
Publication number | Publication date |
---|---|
KR20090112470A (ko) | 2009-10-28 |
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