TWI334174B - - Google Patents

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Publication number
TWI334174B
TWI334174B TW095131155A TW95131155A TWI334174B TW I334174 B TWI334174 B TW I334174B TW 095131155 A TW095131155 A TW 095131155A TW 95131155 A TW95131155 A TW 95131155A TW I334174 B TWI334174 B TW I334174B
Authority
TW
Taiwan
Prior art keywords
mask
etched
inorganic film
processing
gas
Prior art date
Application number
TW095131155A
Other languages
English (en)
Chinese (zh)
Other versions
TW200735208A (en
Inventor
Satoshi Une
Masamichi Sakaguchi
Kenichi Kuwabara
Tomoyoshi Ichimaru
Original Assignee
Hitachi High Tech Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi High Tech Corp filed Critical Hitachi High Tech Corp
Publication of TW200735208A publication Critical patent/TW200735208A/zh
Application granted granted Critical
Publication of TWI334174B publication Critical patent/TWI334174B/zh

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P50/00—Etching of wafers, substrates or parts of devices
    • H10P50/20—Dry etching; Plasma etching; Reactive-ion etching
    • H10P50/24—Dry etching; Plasma etching; Reactive-ion etching of semiconductor materials
    • H10P50/242—Dry etching; Plasma etching; Reactive-ion etching of semiconductor materials of Group IV materials
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P50/00—Etching of wafers, substrates or parts of devices
    • H10P50/71—Etching of wafers, substrates or parts of devices using masks for conductive or resistive materials
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D64/00—Electrodes of devices having potential barriers
    • H10D64/01—Manufacture or treatment
    • H10D64/013—Manufacture or treatment of electrodes having a conductor capacitively coupled to a semiconductor by an insulator
    • H10D64/01302—Manufacture or treatment of electrodes having a conductor capacitively coupled to a semiconductor by an insulator the insulator being formed after the semiconductor body, the semiconductor being silicon
    • H10D64/01304—Manufacture or treatment of electrodes having a conductor capacitively coupled to a semiconductor by an insulator the insulator being formed after the semiconductor body, the semiconductor being silicon characterised by the conductor
    • H10D64/01326—Aspects related to lithography, isolation or planarisation of the conductor
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P50/00—Etching of wafers, substrates or parts of devices
    • H10P50/20—Dry etching; Plasma etching; Reactive-ion etching
    • H10P50/26—Dry etching; Plasma etching; Reactive-ion etching of conductive or resistive materials
    • H10P50/264—Dry etching; Plasma etching; Reactive-ion etching of conductive or resistive materials by chemical means
    • H10P50/266—Dry etching; Plasma etching; Reactive-ion etching of conductive or resistive materials by chemical means by vapour etching only
    • H10P50/267—Dry etching; Plasma etching; Reactive-ion etching of conductive or resistive materials by chemical means by vapour etching only using plasmas
    • H10P50/268—Dry etching; Plasma etching; Reactive-ion etching of conductive or resistive materials by chemical means by vapour etching only using plasmas of silicon-containing layers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P50/00—Etching of wafers, substrates or parts of devices
    • H10P50/20—Dry etching; Plasma etching; Reactive-ion etching
    • H10P50/28—Dry etching; Plasma etching; Reactive-ion etching of insulating materials
    • H10P50/282—Dry etching; Plasma etching; Reactive-ion etching of insulating materials of inorganic materials
    • H10P50/283—Dry etching; Plasma etching; Reactive-ion etching of insulating materials of inorganic materials by chemical means
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P76/00—Manufacture or treatment of masks on semiconductor bodies, e.g. by lithography or photolithography
    • H10P76/40—Manufacture or treatment of masks on semiconductor bodies, e.g. by lithography or photolithography of masks comprising inorganic materials
    • H10P76/408—Manufacture or treatment of masks on semiconductor bodies, e.g. by lithography or photolithography of masks comprising inorganic materials characterised by their sizes, orientations, dispositions, behaviours or shapes
    • H10P76/4088—Processes for improving the resolution of the masks

Landscapes

  • Drying Of Semiconductors (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Electrodes Of Semiconductors (AREA)
TW095131155A 2006-03-01 2006-08-24 Dry etching method TW200735208A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006054914A JP4865361B2 (ja) 2006-03-01 2006-03-01 ドライエッチング方法

Publications (2)

Publication Number Publication Date
TW200735208A TW200735208A (en) 2007-09-16
TWI334174B true TWI334174B (https=) 2010-12-01

Family

ID=38471971

Family Applications (1)

Application Number Title Priority Date Filing Date
TW095131155A TW200735208A (en) 2006-03-01 2006-08-24 Dry etching method

Country Status (4)

Country Link
US (2) US20070207618A1 (https=)
JP (1) JP4865361B2 (https=)
KR (1) KR100894300B1 (https=)
TW (1) TW200735208A (https=)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013258244A (ja) 2012-06-12 2013-12-26 Tokyo Electron Ltd エッチング方法及びプラズマ処理装置
JP2014003085A (ja) * 2012-06-15 2014-01-09 Tokyo Electron Ltd プラズマエッチング方法及びプラズマ処理装置
CN104425228B (zh) * 2013-08-28 2017-06-16 中芯国际集成电路制造(上海)有限公司 多晶硅栅极的形成方法
JP7478059B2 (ja) * 2020-08-05 2024-05-02 株式会社アルバック シリコンのドライエッチング方法
WO2025027769A1 (ja) 2023-07-31 2025-02-06 株式会社日立ハイテク プラズマ処理方法

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56100421A (en) * 1980-01-17 1981-08-12 Toshiba Corp Plasma etching method
JPS56144542A (en) * 1980-03-17 1981-11-10 Ibm Method of selectively reactively ion etching polycrystalline silicon for monocrsytalline silicon
EP0338102B1 (de) * 1988-04-19 1993-03-10 International Business Machines Corporation Verfahren zur Herstellung von integrierten Halbleiterstrukturen welche Feldeffekttransistoren mit Kanallängen im Submikrometerbereich enthalten
JPH07263415A (ja) * 1994-03-18 1995-10-13 Fujitsu Ltd 半導体装置の製造方法
JP3438313B2 (ja) * 1994-05-12 2003-08-18 富士通株式会社 パターン形成方法
KR100434133B1 (ko) 1995-07-14 2004-08-09 텍사스 인스트루먼츠 인코포레이티드 중간층리쏘그래피
JP2935346B2 (ja) * 1996-07-30 1999-08-16 日本電気株式会社 半導体装置およびその製造方法
US5818110A (en) * 1996-11-22 1998-10-06 International Business Machines Corporation Integrated circuit chip wiring structure with crossover capability and method of manufacturing the same
KR100291585B1 (ko) * 1997-07-25 2001-11-30 윤종용 반도체장치의금속막식각방법
KR20010003257A (ko) 1999-06-22 2001-01-15 김영환 반도체소자의 제조방법
JP2001035808A (ja) * 1999-07-22 2001-02-09 Semiconductor Energy Lab Co Ltd 配線およびその作製方法、この配線を備えた半導体装置、ドライエッチング方法
TW452971B (en) 1999-12-28 2001-09-01 Promos Technologies Inc Manufacturing method of bottle-shaped deep trench
KR20010083476A (ko) 2000-02-15 2001-09-01 박종섭 미세패턴 형성방법
JP2002151470A (ja) * 2000-11-09 2002-05-24 Mitsubishi Electric Corp ハードマスクの形成方法および半導体装置の製造方法
JP2002343798A (ja) * 2001-05-18 2002-11-29 Mitsubishi Electric Corp 配線層のドライエッチング方法、半導体装置の製造方法および該方法によって得られた半導体装置
JP4257051B2 (ja) * 2001-08-10 2009-04-22 株式会社ルネサステクノロジ 半導体集積回路装置の製造方法
JP2003163349A (ja) * 2001-11-28 2003-06-06 Mitsubishi Electric Corp 半導体装置の製造方法
US6900139B1 (en) * 2002-04-30 2005-05-31 Advanced Micro Devices, Inc. Method for photoresist trim endpoint detection
US6762130B2 (en) 2002-05-31 2004-07-13 Texas Instruments Incorporated Method of photolithographically forming extremely narrow transistor gate elements
KR200291154Y1 (ko) * 2002-07-09 2002-10-11 박성준 전기ㆍ전자기기의 전선 정리용 기구

Also Published As

Publication number Publication date
JP4865361B2 (ja) 2012-02-01
US20090280651A1 (en) 2009-11-12
JP2007234870A (ja) 2007-09-13
KR100894300B1 (ko) 2009-04-24
TW200735208A (en) 2007-09-16
KR20070090063A (ko) 2007-09-05
US20070207618A1 (en) 2007-09-06
US8143175B2 (en) 2012-03-27

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Legal Events

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MM4A Annulment or lapse of patent due to non-payment of fees