TWI283631B - Method and device for demolding - Google Patents

Method and device for demolding Download PDF

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Publication number
TWI283631B
TWI283631B TW094137286A TW94137286A TWI283631B TW I283631 B TWI283631 B TW I283631B TW 094137286 A TW094137286 A TW 094137286A TW 94137286 A TW94137286 A TW 94137286A TW I283631 B TWI283631 B TW I283631B
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Taiwan
Prior art keywords
mold
substrate
thimble
demolding
molding
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TW094137286A
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TW200716341A (en
Inventor
Yu-Lun Ho
Jen-Hua Wu
Wei-Han Wang
Shou-Ren Chen
Lai-Sheng Chen
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Ind Tech Res Inst
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Priority to TW094137286A priority Critical patent/TWI283631B/zh
Priority to JP2005338095A priority patent/JP4308190B2/ja
Priority to US11/291,853 priority patent/US7462320B2/en
Priority to DE102005061763A priority patent/DE102005061763B4/de
Publication of TW200716341A publication Critical patent/TW200716341A/zh
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C37/00—Component parts, details, accessories or auxiliary operations, not covered by group B29C33/00 or B29C35/00
    • B29C37/0003—Discharging moulded articles from the mould
    • B29C37/0007—Discharging moulded articles from the mould using means operable from outside the mould for moving between mould parts, e.g. robots
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C33/00—Moulds or cores; Details thereof or accessories therefor
    • B29C33/44—Moulds or cores; Details thereof or accessories therefor with means for, or specially constructed to facilitate, the removal of articles, e.g. of undercut articles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C43/00—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
    • B29C43/003—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor characterised by the choice of material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C43/00—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
    • B29C43/02—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles
    • B29C43/021—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles characterised by the shape of the surface
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C43/00—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
    • B29C43/32—Component parts, details or accessories; Auxiliary operations
    • B29C43/36—Moulds for making articles of definite length, i.e. discrete articles
    • B29C43/40—Moulds for making articles of definite length, i.e. discrete articles with means for cutting the article
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C43/00—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
    • B29C43/32—Component parts, details or accessories; Auxiliary operations
    • B29C43/50—Removing moulded articles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C43/00—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
    • B29C43/02—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles
    • B29C43/021—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles characterised by the shape of the surface
    • B29C2043/023—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles characterised by the shape of the surface having a plurality of grooves
    • B29C2043/025—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles characterised by the shape of the surface having a plurality of grooves forming a microstructure, i.e. fine patterning
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C43/00—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
    • B29C43/32—Component parts, details or accessories; Auxiliary operations
    • B29C43/50—Removing moulded articles
    • B29C2043/503—Removing moulded articles using ejector pins, rods
    • B29C2043/5038—Removing moulded articles using ejector pins, rods having an annular or tubular shape
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C43/00—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
    • B29C43/32—Component parts, details or accessories; Auxiliary operations
    • B29C43/50—Removing moulded articles
    • B29C2043/5061—Removing moulded articles using means movable from outside the mould between mould parts
    • B29C2043/5069—Removing moulded articles using means movable from outside the mould between mould parts take-off members or carriers for the moulded articles, e.g. grippers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C59/00—Surface shaping of articles, e.g. embossing; Apparatus therefor
    • B29C59/02—Surface shaping of articles, e.g. embossing; Apparatus therefor by mechanical means, e.g. pressing
    • B29C59/022—Surface shaping of articles, e.g. embossing; Apparatus therefor by mechanical means, e.g. pressing characterised by the disposition or the configuration, e.g. dimensions, of the embossments or the shaping tools therefor
    • B29C2059/023—Microembossing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C59/00—Surface shaping of articles, e.g. embossing; Apparatus therefor
    • B29C59/02—Surface shaping of articles, e.g. embossing; Apparatus therefor by mechanical means, e.g. pressing
    • B29C59/022—Surface shaping of articles, e.g. embossing; Apparatus therefor by mechanical means, e.g. pressing characterised by the disposition or the configuration, e.g. dimensions, of the embossments or the shaping tools therefor

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Robotics (AREA)
  • Moulds For Moulding Plastics Or The Like (AREA)
  • Shaping Of Tube Ends By Bending Or Straightening (AREA)

Description

1283631 九、發明說明： 【發明所屬之技術領域】 本發明係有關於一種脫模裝置與方法，尤指一種結構簡單、 ‘ 以輕微力量即可使模具與基板順利脫離之脫模裝置與方法。 【先前技術】 為因應產品朝向輕、薄、短、小之發展趨勢，許多精密化、 _微小化之製造技術亦相繼湧出，端看整體製造技術之演進，由上 而下（Top-down)及由下而上（B〇ttom-up)之製造技術到了奈米 尺度（100/zra以下）產生了交集，而奈米製造技術之種類繁多， 但大部分皆為加工速率太慢且所需設備成本昂貴，相當不利於量 產。 以奈米轉印技術（Nanoimprint)而言，主要係利用機械力將 模具上之微奈米結構相同比例地轉印至成型材料上，其具有加工 解析度=、速度快、以及成本低廉等特色，可廣泛應用於奈米電 子不米光學、超南密度儲存裝置、生物檢測晶片、顯示器關鍵 零組件等各類奈米元件；然而目前奈米轉印技術尚無法大量製造 產πα ’其主要原因在於進行模具壓印時由於轉印結構深寬比、成 型材縮、成型結構與模具間之真空、摩擦無鱗因素導致 ^模不易’而不當脫模；^將造成已完成壓印之微結構遭變形破 壞，或高分子黏附於模具上，致使產品良率不高。 依據上述造成模具與成型材料於轉印後不易脫模之原因可 知’除了微結構之間的雜力減材料被之卿親和力之外， 另重要的因素是模具與高分子成型材料間形成之真空效應，且 5 1283631 真空產生之吸附力遠大於材料間之摩擦力及介面親和力，據此可 -知，若要順利完成脫模必先克服模具與成型材料間之真空效應。 . 目前已知有多件針對克服上述真空效應之專利前案，如美國 ‘ 專利第6416311 B1號所述之一種脫模裝置及方法，其係利用外加 氣源穿透模具並灌入模具與成型材料之間破除真空以進行脫模， 此法須先於模具上形成穿透孔供外加氣體灌入，並且配合裝置上 氣體灌入之位置，因此模具微結構圖案設計受限以及影響成品之 有效面積。 θ 鲁 壯美國專利第5358672號所述之脫模方法，其係於成型製 程中，於模具邊緣外置一延伸膠帶並與成型材料一同受壓成型， 脫模時直接拉起延伸膠帶及模具，使模具與成型材料脫離，此法 採用延伸#帶會降低有效之成型面積，甚至影響延伸冑帶及盆周 圍之成型品質。 八 另，如日本專利第2004066671號所述之裝置，其係利用氣壓 红配合多組不同魏之彈簧承靠於成型基板之外緣肩部，脫模時 利驗微之彈簧力即可將成型後之模具與成赌料分離，然此機 響構較為繁雜幻；適驗奈米轉印製程帽具與基板為_ 寸之製程。 再如日本專利第〇627〇170號所述之方法，其係利用一形狀記 隐s金元件裝置於模具邊緣處，成型後利用溫度變化使形狀記憶 口金元件恢復縣狀態並賴具與成型材料部分麟，隨後再藉 用-播塊抵絲板令模具上升使其完全_，誠法需要特製之 =狀記憶合金元件並配合溫度變化差異以域塊設計，過程較為 由上述各專猶案之内容可知，為破壞模具與成型材料間因 1283631 真二=應產生之吸附力之技術手段，大多係由模具或成型基板之 邊緣著手，然其使用之技術手段均必須配合繁雜之設計或特殊之 :材料方能達到目的，或因雌裝置之設置而影響轉印面積或成型 品質。 【發明内容】 有鑑於習知裝置及方法之缺失，本發明之主要目的在於提出 φ *種簡單之脫模機制，利用簡單之裝置且僅需輕微力量即可破除 模具與成型材料間之真空效應，使模具與基板在轉印成型後順利 脫離。 、 為達到上述目的，本發明提出一種脫模裝置與方法，係利用 至少一頂針模組插入已完成轉印成型之模具與基板之間，使模具 與基板之間局部分離並形成一縫隙，此時外界之空氣可藉此縫隙 通入模具與基板之間，破除真空效應，再藉由頂針模組以輕微的 力量將模具與基板完全脫離。 春 較佳地，該裝置包括一微奈米結構，特徵尺寸在1〇〇//m以下。 較佳地，該裝置包括一基板，為一成型材料層，或可在該基 板上可塗佈一成型材料層，以供該模具進行轉印成型。 較佳地，該裝置包括一頂針模組，包含至少一頂針及至少一 致動器，用以使模具至少一部分脫離並形成一縫隙，使空氣進入。 較佳地，該裝置至少包括一致動器，用以驅動該頂針往任意 自由度方向運動。 較佳地，該頂針模組包含至少一頂針及至少一震動致動器， 用以產生震幅量，使空氣易於通過，致使模具至少一部分或完全 1283631 所實施之範圍。即大凡依本發明申請專利範圍所 修飾，皆應仍屬於本發明專利涵蓋之範圍内，謹浐叉j等變化與 明鑑，並祈惠准，是所至禱。 %貴審查委員 【圖式簡單說明】 圖-Α及Β係本發明脫模t置之第—較佳實施例圖。 圖二A及B係本發明之模具邊緣結構之示意圖。 圖三Λ及B係不同外型頂針之示意圖。“ 圖四Α及Β本發明之頂針模組之安排示意圖。 圖五A及B係本發明脫模裝置之第二較佳實施例圖。 圖六係本發明脫模裝置之第三較佳實施姻。 【主要元件符號說明】 1- 模具 11- 轉印圖案 12- 圓角 13- 楔角 2- 基板 21-成型圖案 3- 承板 4- 頂針模組 41、41a、41b-頂針 411、411a、41 lb-尖部 42-致動器

Claims (1)

1283631 修jf ‘充本^年 .(織第_37286號專利案之說明娜正） 十、申請專利範圍： 1.—種脫模裝置，其包含有： 一模具； —基板’係供模具壓印於其上以成型圖案之基板；以及 至少一頂針模組，置於該模具與該基板之外側，其包含： 至少一頂針； 震動致動器，係用以驅動該頂針往任意自由度方向運 動，並可產生震動； 其中該頂針模組至少一部份可插入該模具與該基板之間，使該 模具與該基板至少一部份脫離。 2·如申請專利範圍第1項所述之脫模裝置，其中，該模具表面至 少具有一微奈米結構。 3·如申清專利範圍第2項所述之脫模裝置，其中，該微奈米結構 之特徵尺寸在1〇〇 以下。 4·如申請專利範圍第1項所述之脫模裝置，其中，該基板可為一 成型材料層，以供該模具進行轉印成型。 5·如申請專利範圍第1項所述之脫模裝置，其中，該基板上可塗 佈一成型材料層，以供該模具進行轉印成型。 6· —種脫模方法，其包含下列步驟： 模具與基板完成轉印步驟後，利用一震動致動器驅動一頂針 模組之頂針插入該模具與基板間； 、 由震動致動器驅動該頂針震動，使該模具與基板至少一部份 脫離。 7·如申請專利範圍第6項所述之脫模方法，其中，該模具之一面 至少具有一微奈米結構，其特徵尺寸在1〇〇//m以下。 修正 補充柄年^ 1283631 ^ (案號第094丨奶86號專利案之說明書修正) 8·如申請專利範圍第6項所述之脫模方法，其中，該 成型材料層，以供該模具進行轉印成型。 " 9·如申請專概_6項所述之雌方法，其巾，絲板上可塗 有成型材料層’以供該模具進行轉印成型。 〇·如申明專利範圍第6項所述之脫模方法，其中，該震動致 動器可驅動該頂針往任意自由度方向運動。 1283631 修正 補充样年"月了曰 • (案號第094137286號專利案之說明書修正） 七、指定代表圖·· (一） 本案指定代表圖為：第（六）圖。 (二) 本代表圖之元件符號簡單說明： 1- 模具 11-轉印圖案 2- 基板 3- 承板 0 4-頂針模組 41-頂針 411-尖部 43-震動致動器 431-非特定頻率的訊號 5- 床台 6- 成型材料層 61-成型圖案 • At-震動 八、本案若有化學式時，請揭示最能顯示發明特徵的化學式：
TW094137286A 2005-10-25 2005-10-25 Method and device for demolding TWI283631B (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
TW094137286A TWI283631B (en) 2005-10-25 2005-10-25 Method and device for demolding
JP2005338095A JP4308190B2 (ja) 2005-10-25 2005-11-24 離型装置と方法
US11/291,853 US7462320B2 (en) 2005-10-25 2005-12-02 Method and device for demolding
DE102005061763A DE102005061763B4 (de) 2005-10-25 2005-12-23 Verfahren und Vorrichtung zum Entformen

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TW094137286A TWI283631B (en) 2005-10-25 2005-10-25 Method and device for demolding

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TW200716341A TW200716341A (en) 2007-05-01
TWI283631B true TWI283631B (en) 2007-07-11

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JP (1) JP4308190B2 (zh)
DE (1) DE102005061763B4 (zh)
TW (1) TWI283631B (zh)

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JP4939134B2 (ja) * 2006-07-07 2012-05-23 株式会社日立ハイテクノロジーズ インプリント装置およびインプリント方法
CN101528434B (zh) * 2006-11-08 2013-12-18 米其林集团总公司 扁平橡胶胎面的自动脱模装置
JP4478164B2 (ja) * 2007-03-12 2010-06-09 株式会社日立ハイテクノロジーズ 微細構造転写装置、スタンパおよび微細構造の製造方法
US20100166906A1 (en) * 2007-05-23 2010-07-01 Pioneer Corporation Inprint equipment
JP4930296B2 (ja) * 2007-09-06 2012-05-16 豊田合成株式会社 金型の開閉装置
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