TWI240959B - Mechanical enhancement of dense and porous organosilicate materials by UV exposure - Google Patents

Mechanical enhancement of dense and porous organosilicate materials by UV exposure Download PDF

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Publication number
TWI240959B
TWI240959B TW093105331A TW93105331A TWI240959B TW I240959 B TWI240959 B TW I240959B TW 093105331 A TW093105331 A TW 093105331A TW 93105331 A TW93105331 A TW 93105331A TW I240959 B TWI240959 B TW I240959B
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TW
Taiwan
Prior art keywords
film
organic
deposition
exposure
patent application
Prior art date
Application number
TW093105331A
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English (en)
Chinese (zh)
Other versions
TW200428494A (en
Inventor
Aaron Scott Lukas
Mark Leonard O'neill
Jean Louise Vincent
Raymond Nicholas Vrtis
Mark Daniel Bitner
Original Assignee
Air Prod & Chem
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US10/379,466 external-priority patent/US7098149B2/en
Application filed by Air Prod & Chem filed Critical Air Prod & Chem
Publication of TW200428494A publication Critical patent/TW200428494A/zh
Application granted granted Critical
Publication of TWI240959B publication Critical patent/TWI240959B/zh

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Classifications

    • H10P14/6922—
    • E—FIXED CONSTRUCTIONS
    • E21—EARTH OR ROCK DRILLING; MINING
    • E21B—EARTH OR ROCK DRILLING; OBTAINING OIL, GAS, WATER, SOLUBLE OR MELTABLE MATERIALS OR A SLURRY OF MINERALS FROM WELLS
    • E21B4/00—Drives for drilling, used in the borehole
    • E21B4/06—Down-hole impacting means, e.g. hammers
    • E21B4/14—Fluid operated hammers
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/40—Oxides
    • C23C16/401—Oxides containing silicon
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/56—After-treatment
    • H10P14/6336—
    • H10P14/6538—
    • H10P14/665—
    • H10P14/6682—
    • H10P14/6686—
    • H10P95/00—
    • E—FIXED CONSTRUCTIONS
    • E21—EARTH OR ROCK DRILLING; MINING
    • E21B—EARTH OR ROCK DRILLING; OBTAINING OIL, GAS, WATER, SOLUBLE OR MELTABLE MATERIALS OR A SLURRY OF MINERALS FROM WELLS
    • E21B33/00—Sealing or packing boreholes or wells
    • E21B33/10—Sealing or packing boreholes or wells in the borehole
    • E21B33/13—Methods or devices for cementing, for plugging holes, crevices or the like
    • E21B33/138—Plastering the borehole wall; Injecting into the formation

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Organic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Metallurgy (AREA)
  • Geology (AREA)
  • Mining & Mineral Resources (AREA)
  • Materials Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Life Sciences & Earth Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Environmental & Geological Engineering (AREA)
  • Fluid Mechanics (AREA)
  • Physics & Mathematics (AREA)
  • Inorganic Chemistry (AREA)
  • Formation Of Insulating Films (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Chemical Vapour Deposition (AREA)
TW093105331A 2003-03-04 2004-03-01 Mechanical enhancement of dense and porous organosilicate materials by UV exposure TWI240959B (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/379,466 US7098149B2 (en) 2003-03-04 2003-03-04 Mechanical enhancement of dense and porous organosilicate materials by UV exposure
US10/624,357 US7468290B2 (en) 2003-03-04 2003-07-21 Mechanical enhancement of dense and porous organosilicate materials by UV exposure

Publications (2)

Publication Number Publication Date
TW200428494A TW200428494A (en) 2004-12-16
TWI240959B true TWI240959B (en) 2005-10-01

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
TW093105331A TWI240959B (en) 2003-03-04 2004-03-01 Mechanical enhancement of dense and porous organosilicate materials by UV exposure

Country Status (5)

Country Link
EP (2) EP1457583B8 (enExample)
JP (1) JP2004274052A (enExample)
KR (1) KR100637093B1 (enExample)
CN (1) CN100543947C (enExample)
TW (1) TWI240959B (enExample)

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Also Published As

Publication number Publication date
KR20040078603A (ko) 2004-09-10
CN1527366A (zh) 2004-09-08
TW200428494A (en) 2004-12-16
KR100637093B1 (ko) 2006-10-23
EP1457583A3 (en) 2010-02-17
EP1457583A2 (en) 2004-09-15
CN100543947C (zh) 2009-09-23
JP2004274052A (ja) 2004-09-30
EP3231892B1 (en) 2020-08-05
EP1457583B1 (en) 2017-05-31
EP3231892A1 (en) 2017-10-18
EP1457583B8 (en) 2017-10-11

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