TWD197468S - 基板處理裝置用晶舟之部分 - Google Patents

基板處理裝置用晶舟之部分

Info

Publication number
TWD197468S
TWD197468S TW107306772F TW107306772F TWD197468S TW D197468 S TWD197468 S TW D197468S TW 107306772 F TW107306772 F TW 107306772F TW 107306772 F TW107306772 F TW 107306772F TW D197468 S TWD197468 S TW D197468S
Authority
TW
Taiwan
Prior art keywords
design
substrate processing
wafer boat
case
wafer
Prior art date
Application number
TW107306772F
Other languages
English (en)
Chinese (zh)
Inventor
Makoto Sambu
Makoto Tsuti
Original Assignee
日商國際電氣股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日商國際電氣股份有限公司 filed Critical 日商國際電氣股份有限公司
Publication of TWD197468S publication Critical patent/TWD197468S/zh

Links

TW107306772F 2018-09-20 2018-11-19 基板處理裝置用晶舟之部分 TWD197468S (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JPD2018-20434F JP1638282S (enrdf_load_stackoverflow) 2018-09-20 2018-09-20

Publications (1)

Publication Number Publication Date
TWD197468S true TWD197468S (zh) 2019-05-11

Family

ID=67474810

Family Applications (1)

Application Number Title Priority Date Filing Date
TW107306772F TWD197468S (zh) 2018-09-20 2018-11-19 基板處理裝置用晶舟之部分

Country Status (3)

Country Link
US (1) USD920935S1 (enrdf_load_stackoverflow)
JP (1) JP1638282S (enrdf_load_stackoverflow)
TW (1) TWD197468S (enrdf_load_stackoverflow)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102677319B1 (ko) * 2017-02-27 2024-06-24 미라이얼 가부시키가이샤 기판 수납 용기
USD937791S1 (en) * 2018-12-26 2021-12-07 Lg Chem, Ltd. Flexible printed circuit board for battery module
USD936025S1 (en) * 2018-12-26 2021-11-16 Lg Chem, Ltd. Flexible printed circuit board for battery module
TWD202895S (zh) * 2019-03-27 2020-02-21 家登精密工業股份有限公司 光罩盒組裝件
USD954666S1 (en) * 2019-05-03 2022-06-14 Lumileds Holding B.V. Flexible circuit board
JP1678278S (ja) * 2020-03-19 2021-02-01 基板処理装置用ボート
JP1731670S (enrdf_load_stackoverflow) * 2022-03-04 2022-12-08
JP1731674S (enrdf_load_stackoverflow) * 2022-05-30 2022-12-08
JP1731675S (enrdf_load_stackoverflow) * 2022-05-30 2022-12-08
JP1731673S (enrdf_load_stackoverflow) * 2022-05-30 2022-12-08
JP1741513S (enrdf_load_stackoverflow) 2022-09-14 2023-04-11
JP1741512S (enrdf_load_stackoverflow) * 2022-09-14 2023-04-11

Family Cites Families (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD655682S1 (en) * 2010-06-18 2012-03-13 Hitachi Kokusai Electric Inc. Boat of wafer processing apparatus
USD655255S1 (en) * 2010-06-18 2012-03-06 Hitachi Kokusai Electric Inc. Boat of wafer processing apparatus
US9153466B2 (en) * 2012-04-26 2015-10-06 Asm Ip Holding B.V. Wafer boat
USD734730S1 (en) * 2012-12-27 2015-07-21 Hitachi Kokusai Electric Inc. Boat of substrate processing apparatus
TWD163542S (zh) * 2013-03-22 2014-10-11 日立國際電氣股份有限公司 基板處理裝置用晶舟
TWD166332S (zh) * 2013-03-22 2015-03-01 日立國際電氣股份有限公司 基板處理裝置用晶舟之部分
TWD167988S (zh) * 2013-07-29 2015-05-21 日立國際電氣股份有限公司 半導體製造裝置用晶舟
TWD165429S (zh) * 2013-07-29 2015-01-11 日立國際電氣股份有限公司 半導體製造裝置用晶舟
TWD168827S (zh) * 2013-07-29 2015-07-01 日立國際電氣股份有限公司 半導體製造裝置用晶舟
US9343304B2 (en) * 2014-09-26 2016-05-17 Asm Ip Holding B.V. Method for depositing films on semiconductor wafers
JP1537312S (enrdf_load_stackoverflow) * 2014-11-20 2015-11-09
JP1537630S (enrdf_load_stackoverflow) * 2014-11-20 2015-11-09
JP1537629S (enrdf_load_stackoverflow) 2014-11-20 2015-11-09
JP1537313S (enrdf_load_stackoverflow) * 2014-11-20 2015-11-09
JP1563649S (enrdf_load_stackoverflow) * 2016-02-12 2016-11-21
USD873782S1 (en) * 2016-05-17 2020-01-28 Electro Scientific Industries, Inc Component carrier plate
USD836572S1 (en) * 2016-09-30 2018-12-25 Applied Materials, Inc. Target profile for a physical vapor deposition chamber target
JP1584784S (enrdf_load_stackoverflow) * 2017-01-31 2017-08-28
JP1584241S (enrdf_load_stackoverflow) * 2017-01-31 2017-08-21
JP1605462S (enrdf_load_stackoverflow) * 2017-08-10 2021-05-31
JP1597807S (enrdf_load_stackoverflow) * 2017-08-21 2018-02-19
USD847105S1 (en) * 2018-05-03 2019-04-30 Kokusai Electric Corporation Boat of substrate processing apparatus
USD846514S1 (en) * 2018-05-03 2019-04-23 Kokusai Electric Corporation Boat of substrate processing apparatus

Also Published As

Publication number Publication date
JP1638282S (enrdf_load_stackoverflow) 2019-08-05
USD920935S1 (en) 2021-06-01

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