TWD184278S - 基板洗淨用海綿之部分 - Google Patents

基板洗淨用海綿之部分

Info

Publication number
TWD184278S
TWD184278S TW105306153F TW105306153F TWD184278S TW D184278 S TWD184278 S TW D184278S TW 105306153 F TW105306153 F TW 105306153F TW 105306153 F TW105306153 F TW 105306153F TW D184278 S TWD184278 S TW D184278S
Authority
TW
Taiwan
Prior art keywords
substrate
design
cleaning
case
wafer
Prior art date
Application number
TW105306153F
Other languages
English (en)
Inventor
Tomoatsu Ishibashi
Original Assignee
荏原製作所股份有限公司
Ebara Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 荏原製作所股份有限公司, Ebara Corp filed Critical 荏原製作所股份有限公司
Publication of TWD184278S publication Critical patent/TWD184278S/zh

Links

Abstract

【物品用途】;本設計的物品是基板洗淨用海綿，是例如：晶圓等的基板表面洗淨用的海綿。;【設計說明】;如「使用狀態參考圖」所示，在晶圓等的基板洗淨機中，設置在一邊迴轉一邊左右擺動的臂部的前端使用。本物品的底面洗淨面按壓貼於旋轉的晶圓等的基板表面，可對於晶圓等的基板進行表面洗淨。;圖式所揭露之實線部分，為本案主張設計之部分，虛線部分為本案不主張設計之部分。;圖式所揭露之一點鏈線，係界定本案所欲主張之範圍，該一點鏈線本身為本案不主張設計之部分。;後視圖與前視圖對稱，後視圖省略。
TW105306153F 2016-04-13 2016-10-13 基板洗淨用海綿之部分 TWD184278S (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JPD2016-8171F JP1569705S (zh) 2016-04-13 2016-04-13

Publications (1)

Publication Number Publication Date
TWD184278S true TWD184278S (zh) 2017-07-11

Family

ID=58043080

Family Applications (1)

Application Number Title Priority Date Filing Date
TW105306153F TWD184278S (zh) 2016-04-13 2016-10-13 基板洗淨用海綿之部分

Country Status (3)

Country Link
US (1) USD805268S1 (zh)
JP (1) JP1569705S (zh)
TW (1) TWD184278S (zh)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD799129S1 (en) * 2015-10-28 2017-10-03 Ebara Corporation Sponge for substrate cleaning
JP1581087S (zh) * 2016-12-16 2017-07-10
USD838422S1 (en) * 2017-12-28 2019-01-15 Jacob Zimmerman Sponge with suction cup
USD896457S1 (en) * 2018-06-22 2020-09-15 Ellis N. Shamoon Hand held scrubbing device
USD935291S1 (en) * 2019-12-11 2021-11-09 Brad A. English Filter cleaner

Family Cites Families (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2090814A (en) * 1936-04-30 1937-08-24 Herman Seybert Buffing wheel
US2833168A (en) * 1955-08-16 1958-05-06 Lloyd I Nelson Drill depth gauge
US3381251A (en) * 1966-07-05 1968-04-30 Robert A. Fuller Miniature transformer
US3490183A (en) * 1968-08-05 1970-01-20 Melvin J Briggs Sanding device
USD267783S (en) * 1980-01-17 1983-02-01 Lang William J Cleaner can
US5286573A (en) * 1990-12-03 1994-02-15 Fritz Prinz Method and support structures for creation of objects by layer deposition
USD346627S (en) * 1992-11-24 1994-05-03 Interlego A.G. Element for a toy building set
USD367743S (en) * 1995-02-10 1996-03-05 Krause Aaron C Foam polishing pad
KR0158750B1 (ko) * 1995-06-09 1999-01-15 김수광 연마용 시트
US5939672A (en) * 1997-03-10 1999-08-17 Antronix, Inc. Hermetically sealed electrical connection to a junction box
USD413636S (en) * 1997-11-25 1999-09-07 Santiago Laserna Fernandez Toy block
JP4091187B2 (ja) 1998-12-08 2008-05-28 株式会社荏原製作所 洗浄具、基板洗浄装置及び基板洗浄方法
USD434812S (en) * 1999-12-22 2000-12-05 Interlego Ag Toy element
DK174659B1 (da) * 2000-01-11 2003-08-18 Lego As Legetøjsbyggeelement med tværgående åbninger
USD486839S1 (en) * 2003-02-01 2004-02-17 Sanwa Kenma, Ltd. Grinding disc
USD532945S1 (en) * 2004-09-28 2006-11-28 3M Innovative Properties Company Floor cleaning pad
USD585466S1 (en) * 2006-11-23 2009-01-27 Rin Soon Park Abrasive segment
USD581236S1 (en) * 2007-06-07 2008-11-25 Buff And Shine Manufacturing, Inc. Foam buffing pad
USD626976S1 (en) * 2008-02-05 2010-11-09 Rin-Soon Park Abrasive segment
USD688753S1 (en) * 2011-07-11 2013-08-27 Lego A/S Building block from a toy building set
US20150017388A1 (en) * 2013-07-15 2015-01-15 Hea-Nuh Chu Material for surface treatment
USD765328S1 (en) * 2014-06-20 2016-08-30 Griot's Garage, Inc. Tire dressing applicator pad
JP1556818S (zh) * 2015-10-28 2016-08-22

Also Published As

Publication number Publication date
JP1569705S (zh) 2017-02-20
USD805268S1 (en) 2017-12-12

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