TWD192485S - Rotator for substrate processing apparatus - Google Patents

Rotator for substrate processing apparatus

Info

Publication number
TWD192485S
TWD192485S TW106306961F TW106306961F TWD192485S TW D192485 S TWD192485 S TW D192485S TW 106306961 F TW106306961 F TW 106306961F TW 106306961 F TW106306961 F TW 106306961F TW D192485 S TWD192485 S TW D192485S
Authority
TW
Taiwan
Prior art keywords
substrate processing
rotator
processing apparatus
article
processing device
Prior art date
Application number
TW106306961F
Other languages
English (en)
Chinese (zh)
Inventor
藤井悟史
Original Assignee
日商日立國際電氣股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日商日立國際電氣股份有限公司 filed Critical 日商日立國際電氣股份有限公司
Publication of TWD192485S publication Critical patent/TWD192485S/zh

Links

TW106306961F 2017-07-25 2017-11-28 Rotator for substrate processing apparatus TWD192485S (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JPD2017-16038F JP1596897S (enrdf_load_stackoverflow) 2017-07-25 2017-07-25
JP2017-016038 2017-07-25

Publications (1)

Publication Number Publication Date
TWD192485S true TWD192485S (zh) 2018-08-21

Family

ID=61066136

Family Applications (1)

Application Number Title Priority Date Filing Date
TW106306961F TWD192485S (zh) 2017-07-25 2017-11-28 Rotator for substrate processing apparatus

Country Status (3)

Country Link
US (1) USD884757S1 (enrdf_load_stackoverflow)
JP (1) JP1596897S (enrdf_load_stackoverflow)
TW (1) TWD192485S (enrdf_load_stackoverflow)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11536029B2 (en) 2019-11-20 2022-12-27 Hubbell Incorporated Adjustable electrical fixture mounting assembly
USD927963S1 (en) 2019-11-20 2021-08-17 Hubbell Incorporated Adjustable fixture mounting assembly
USD980299S1 (en) * 2020-04-30 2023-03-07 Lamiflex Group Ab Industrial robot tool
SE545823C2 (en) 2020-04-30 2024-02-13 Lamiflex Group Ab Robot Tool, Robot System and Method for Coil Packaging
SE547304C2 (en) 2020-12-23 2025-06-24 Lamiflex Group Ab Robot System and Method for Coil Packaging
CA203911S (en) * 2021-06-03 2023-05-31 Macdonald Dettwiler & Associates Inc Robotic end effector and end of arm tool
CA203910S (en) * 2021-06-03 2023-05-30 Macdonald Dettwiler & Associates Inc Robotic end effector and end of arm tool

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI270435B (en) 2004-10-15 2007-01-11 Sankyo Seisakusho Kk Rotary table apparatus

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD349710S (en) * 1989-04-28 1994-08-16 Kazuo Moro Gear pump
USD384674S (en) * 1995-02-13 1997-10-07 Applied Power Inc. Hydraulic pump unit
USD654092S1 (en) * 2010-03-16 2012-02-14 Motovario S.P.A. Gear casing
USD654524S1 (en) * 2011-01-26 2012-02-21 Linak A/S Linear actuator
USD665433S1 (en) * 2011-10-09 2012-08-14 Columbus Mckinnon Corporation Linear actuator
AU348271S (en) * 2012-12-20 2013-05-02 Bitzer Kuehlmaschinenbau Gmbh Compressor
USD817569S1 (en) * 2015-03-23 2018-05-08 Tennant Company Interchangeable scrub brush or scrub pad for a floor maintenance vehicle
USD792474S1 (en) * 2016-02-02 2017-07-18 Ge Oil & Gas Compression Systems, Llc Dual compressor nozzle
JP1563270S (enrdf_load_stackoverflow) * 2016-04-05 2016-11-14
USD828402S1 (en) * 2016-08-09 2018-09-11 Gea Refrigeration Germany Gmbh Compressor
USD836412S1 (en) * 2017-06-28 2018-12-25 Tecomec S.R.L. Head trimmer
JP1596898S (enrdf_load_stackoverflow) * 2017-07-25 2018-02-05

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI270435B (en) 2004-10-15 2007-01-11 Sankyo Seisakusho Kk Rotary table apparatus

Also Published As

Publication number Publication date
JP1596897S (enrdf_load_stackoverflow) 2018-02-05
USD884757S1 (en) 2020-05-19

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