TWD183007S - 半導體製造裝置之晶舟用旋轉具 - Google Patents

半導體製造裝置之晶舟用旋轉具

Info

Publication number
TWD183007S
TWD183007S TW105304433F TW105304433F TWD183007S TW D183007 S TWD183007 S TW D183007S TW 105304433 F TW105304433 F TW 105304433F TW 105304433 F TW105304433 F TW 105304433F TW D183007 S TWD183007 S TW D183007S
Authority
TW
Taiwan
Prior art keywords
wafer boat
semiconductor manufacturing
manufacturing equipment
rotating tool
boat rotating
Prior art date
Application number
TW105304433F
Other languages
English (en)
Inventor
Takatomo Yamaguchi
Takashi Nogami
Original Assignee
日立國際電氣股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日立國際電氣股份有限公司 filed Critical 日立國際電氣股份有限公司
Publication of TWD183007S publication Critical patent/TWD183007S/zh

Links

Abstract

【物品用途】;本物品是使得用來保持半導體晶圓等之基板的晶舟旋轉的旋轉具，在上面搭載晶舟，藉由與設置在外部的旋轉機構連結而使用。再者，在本體中央部，形成貫通的中空軸，在中空軸的前端部螺固著真空用接頭。;【設計說明】;(無)
TW105304433F 2016-02-10 2016-08-02 半導體製造裝置之晶舟用旋轉具 TWD183007S (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JPD2016-2833F JP1564808S (zh) 2016-02-10 2016-02-10

Publications (1)

Publication Number Publication Date
TWD183007S true TWD183007S (zh) 2017-05-11

Family

ID=57406428

Family Applications (1)

Application Number Title Priority Date Filing Date
TW105304433F TWD183007S (zh) 2016-02-10 2016-08-02 半導體製造裝置之晶舟用旋轉具

Country Status (3)

Country Link
US (1) USD803908S1 (zh)
JP (1) JP1564808S (zh)
TW (1) TWD183007S (zh)

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Also Published As

Publication number Publication date
USD803908S1 (en) 2017-11-28
JP1564808S (zh) 2016-12-05

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