USD735427S1 - Roller shaft for substrate cleaning - Google Patents

Roller shaft for substrate cleaning Download PDF

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Publication number
USD735427S1
USD735427S1 US29/461,044 US201329461044F USD735427S US D735427 S1 USD735427 S1 US D735427S1 US 201329461044 F US201329461044 F US 201329461044F US D735427 S USD735427 S US D735427S
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US
United States
Prior art keywords
roller shaft
substrate cleaning
view
cross
enlarged
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
US29/461,044
Inventor
Tomoatsu Ishibashi
Hiroshi Kojima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ebara Corp
Original Assignee
Ebara Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ebara Corp filed Critical Ebara Corp
Assigned to EBARA CORPORATION reassignment EBARA CORPORATION ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: ISHIBASHI, TOMOATSU, KOJIMA, HIROSHI
Application granted granted Critical
Publication of USD735427S1 publication Critical patent/USD735427S1/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Description

FIG. 1 is a front view of a roller shaft for substrate cleaning showing our new design;
FIG. 2 is a rear view thereof;
FIG. 3 is a plane view thereof;
FIG. 4 is a bottom view thereof;
FIG. 5 is a right side view thereof;
FIG. 6 is an enlarged front view thereof;
FIG. 7 is an enlarged perspective view thereof;
FIG. 8 is another front view, showing the cross-sectional cut line thereof;
FIG. 9 is a cross-section view taken along the line 9-9 of FIG. 1 thereof;
FIG. 10 is an enlarged plane view of portion 10 of FIG. 3 thereof;
FIG. 11 is an enlarged bottom view of portion 11 of FIG. 4 thereof;
FIG. 12 is an enlarged right side view of portion 12 of FIG. 5 thereof; and,
FIG. 13 is a cross-section view taken along the line 13-13 of FIG. 8 of thereof.
The internal material revealed by the cross-sectional slice, illustrated in FIGS. 9 and 13, forms no part of the claimed design.
The particular cross-hatching patterns in FIGS. 9 and 13 do not represent any particular materials.
The broken lines in the drawings illustrate portions of the roller shaft for substrate cleaning which form no part of the claimed design.

Claims (1)

    CLAIM
  1. The ornamental design for a roller shaft for substrate cleaning, as shown and described.
US29/461,044 2013-02-01 2013-07-18 Roller shaft for substrate cleaning Active USD735427S1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2013002016 2013-02-01
JP2013-002016 2013-02-01

Publications (1)

Publication Number Publication Date
USD735427S1 true USD735427S1 (en) 2015-07-28

Family

ID=53639007

Family Applications (1)

Application Number Title Priority Date Filing Date
US29/461,044 Active USD735427S1 (en) 2013-02-01 2013-07-18 Roller shaft for substrate cleaning

Country Status (2)

Country Link
US (1) USD735427S1 (en)
TW (1) TWD162134S (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD803908S1 (en) * 2016-02-10 2017-11-28 Hitachi Kokusai Electric Inc. Rotary tool for boat of semiconductor manufacturing apparatus
USD822081S1 (en) * 2016-02-10 2018-07-03 Hitachi Kokusai Electric Inc. Rotary tool for boat of semiconductor manufacturing apparatus
USD959374S1 (en) * 2020-11-13 2022-08-02 Electrical Grid Monitoring Ltd. BNC cap assembly
USD961516S1 (en) * 2020-06-26 2022-08-23 Omron Corporation Insulation monitoring device
USD992845S1 (en) * 2020-05-15 2023-07-18 Ebara Corporation Roller shaft for substrate cleaning
USD994604S1 (en) * 2020-09-25 2023-08-08 Easytork Automation Corporation Actuator vane shaft

Citations (36)

* Cited by examiner, † Cited by third party
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US3426365A (en) * 1967-02-15 1969-02-11 Wallace Murray Corp Toilet tank lever assembly
USD269852S (en) * 1981-10-13 1983-07-26 Frieberg Bengt O Lock washer
USD293812S (en) * 1985-07-31 1988-01-19 Holdren Brothers, Inc. Tank cleaning spray head
USD357030S (en) * 1993-12-02 1995-04-04 Ingersoll-Dresser Pump Company Bushing
US5745945A (en) * 1996-06-28 1998-05-05 International Business Machines Corporation Brush conditioner for a semiconductor cleaning brush
US6240588B1 (en) * 1999-12-03 2001-06-05 Lam Research Corporation Wafer scrubbing brush core
US6254167B1 (en) * 1997-11-11 2001-07-03 Nissan Motor Co., Ltd. Wiper device for vehicle
USD447755S1 (en) * 2000-07-19 2001-09-11 Steve R. Howard Sewing machine adapter
US6308369B1 (en) 1998-02-04 2001-10-30 Silikinetic Technology, Inc. Wafer cleaning system
US6330729B1 (en) * 1998-04-06 2001-12-18 Micron Technology, Inc. Brush alignment platform
US6371421B1 (en) * 1997-08-23 2002-04-16 Samhongsa Co., Ltd. Device for controlling the height of a swivel chair
US6467120B1 (en) * 1999-09-08 2002-10-22 International Business Machines Corporation Wafer cleaning brush profile modification
USD468190S1 (en) * 2002-01-14 2003-01-07 Melvin R. Kennedy Spool
US6502273B1 (en) * 1996-11-08 2003-01-07 Kanebo, Ltd. Cleaning sponge roller
US6523210B1 (en) * 2000-04-05 2003-02-25 Nicholas Andros Surface charge controlling apparatus for wafer cleaning
US6598255B1 (en) * 1998-05-22 2003-07-29 Aion Co., Ltd. Cleaning rotary brush
USD481498S1 (en) * 2001-12-06 2003-10-28 Javier Pinedo Dryer tube filter
US6802099B2 (en) * 2000-04-12 2004-10-12 Ebara Corporation Cleaning member and cylindrical cleaning element
USD508750S1 (en) * 2004-06-24 2005-08-23 Hamid Rashidi Donut shaped drop opal lens trim
USD558048S1 (en) * 2005-10-12 2007-12-25 Jerzy Perkitny Spool for bags
US20090026671A1 (en) * 2005-04-12 2009-01-29 Bridgestone Corporation Vibration Isolator
US7735177B1 (en) * 2006-02-10 2010-06-15 Lam Research Corporation Brush core assembly
USD622920S1 (en) 2007-05-02 2010-08-31 Entegris Corporation Cleaning sponge roller
US7955693B2 (en) * 2001-04-20 2011-06-07 Tolland Development Company, Llc Foam composition roller brush with embedded mandrel
US8092730B2 (en) * 2005-12-06 2012-01-10 Entegris, Inc. Molded rotatable base for a porous pad
USD658978S1 (en) * 2011-08-04 2012-05-08 Rodolfo Linares Detent washer
US8372210B2 (en) * 2003-10-27 2013-02-12 Applied Materials, Inc. Post CMP scrubbing of substrates
US8496758B2 (en) * 2006-01-17 2013-07-30 Fujitsu Semiconductor Limited Cleaning apparatus and cleaning method for wafer
US8533895B2 (en) * 2003-08-08 2013-09-17 Entegris, Inc. Methods and materials for making a monolithic porous pad cast onto a rotatable base
US20130312790A1 (en) * 2012-05-23 2013-11-28 Ebara Corporation Substrate cleaning method
USD707408S1 (en) * 2011-04-20 2014-06-17 Ebara Corporation Roller for semiconductor wafer cleaning
USD710062S1 (en) * 2011-06-09 2014-07-29 Ebara Corporation Roller shaft for semiconductor cleaning
USD710191S1 (en) * 2012-12-20 2014-08-05 Kabushiki Kaisha Yamazaki active Washer
US8826778B1 (en) * 2011-07-15 2014-09-09 Randy Minnick Apparatus and method for tightening or loosening toilet seat
US20140295716A1 (en) * 2011-06-20 2014-10-02 Yazaki Corporation Terminal and method of forming cap of terminal
USD718340S1 (en) * 2014-03-21 2014-11-25 F Robotics Acquisitions, Ltd. Self-powered robotic lawn mower

Patent Citations (36)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3426365A (en) * 1967-02-15 1969-02-11 Wallace Murray Corp Toilet tank lever assembly
USD269852S (en) * 1981-10-13 1983-07-26 Frieberg Bengt O Lock washer
USD293812S (en) * 1985-07-31 1988-01-19 Holdren Brothers, Inc. Tank cleaning spray head
USD357030S (en) * 1993-12-02 1995-04-04 Ingersoll-Dresser Pump Company Bushing
US5745945A (en) * 1996-06-28 1998-05-05 International Business Machines Corporation Brush conditioner for a semiconductor cleaning brush
US6502273B1 (en) * 1996-11-08 2003-01-07 Kanebo, Ltd. Cleaning sponge roller
US6371421B1 (en) * 1997-08-23 2002-04-16 Samhongsa Co., Ltd. Device for controlling the height of a swivel chair
US6254167B1 (en) * 1997-11-11 2001-07-03 Nissan Motor Co., Ltd. Wiper device for vehicle
US6308369B1 (en) 1998-02-04 2001-10-30 Silikinetic Technology, Inc. Wafer cleaning system
US6330729B1 (en) * 1998-04-06 2001-12-18 Micron Technology, Inc. Brush alignment platform
US6598255B1 (en) * 1998-05-22 2003-07-29 Aion Co., Ltd. Cleaning rotary brush
US6467120B1 (en) * 1999-09-08 2002-10-22 International Business Machines Corporation Wafer cleaning brush profile modification
US6240588B1 (en) * 1999-12-03 2001-06-05 Lam Research Corporation Wafer scrubbing brush core
US6523210B1 (en) * 2000-04-05 2003-02-25 Nicholas Andros Surface charge controlling apparatus for wafer cleaning
US6802099B2 (en) * 2000-04-12 2004-10-12 Ebara Corporation Cleaning member and cylindrical cleaning element
USD447755S1 (en) * 2000-07-19 2001-09-11 Steve R. Howard Sewing machine adapter
US7955693B2 (en) * 2001-04-20 2011-06-07 Tolland Development Company, Llc Foam composition roller brush with embedded mandrel
USD481498S1 (en) * 2001-12-06 2003-10-28 Javier Pinedo Dryer tube filter
USD468190S1 (en) * 2002-01-14 2003-01-07 Melvin R. Kennedy Spool
US8533895B2 (en) * 2003-08-08 2013-09-17 Entegris, Inc. Methods and materials for making a monolithic porous pad cast onto a rotatable base
US8372210B2 (en) * 2003-10-27 2013-02-12 Applied Materials, Inc. Post CMP scrubbing of substrates
USD508750S1 (en) * 2004-06-24 2005-08-23 Hamid Rashidi Donut shaped drop opal lens trim
US20090026671A1 (en) * 2005-04-12 2009-01-29 Bridgestone Corporation Vibration Isolator
USD558048S1 (en) * 2005-10-12 2007-12-25 Jerzy Perkitny Spool for bags
US8092730B2 (en) * 2005-12-06 2012-01-10 Entegris, Inc. Molded rotatable base for a porous pad
US8496758B2 (en) * 2006-01-17 2013-07-30 Fujitsu Semiconductor Limited Cleaning apparatus and cleaning method for wafer
US7735177B1 (en) * 2006-02-10 2010-06-15 Lam Research Corporation Brush core assembly
USD622920S1 (en) 2007-05-02 2010-08-31 Entegris Corporation Cleaning sponge roller
USD707408S1 (en) * 2011-04-20 2014-06-17 Ebara Corporation Roller for semiconductor wafer cleaning
USD710062S1 (en) * 2011-06-09 2014-07-29 Ebara Corporation Roller shaft for semiconductor cleaning
US20140295716A1 (en) * 2011-06-20 2014-10-02 Yazaki Corporation Terminal and method of forming cap of terminal
US8826778B1 (en) * 2011-07-15 2014-09-09 Randy Minnick Apparatus and method for tightening or loosening toilet seat
USD658978S1 (en) * 2011-08-04 2012-05-08 Rodolfo Linares Detent washer
US20130312790A1 (en) * 2012-05-23 2013-11-28 Ebara Corporation Substrate cleaning method
USD710191S1 (en) * 2012-12-20 2014-08-05 Kabushiki Kaisha Yamazaki active Washer
USD718340S1 (en) * 2014-03-21 2014-11-25 F Robotics Acquisitions, Ltd. Self-powered robotic lawn mower

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD803908S1 (en) * 2016-02-10 2017-11-28 Hitachi Kokusai Electric Inc. Rotary tool for boat of semiconductor manufacturing apparatus
USD822081S1 (en) * 2016-02-10 2018-07-03 Hitachi Kokusai Electric Inc. Rotary tool for boat of semiconductor manufacturing apparatus
USD992845S1 (en) * 2020-05-15 2023-07-18 Ebara Corporation Roller shaft for substrate cleaning
USD961516S1 (en) * 2020-06-26 2022-08-23 Omron Corporation Insulation monitoring device
USD994604S1 (en) * 2020-09-25 2023-08-08 Easytork Automation Corporation Actuator vane shaft
USD959374S1 (en) * 2020-11-13 2022-08-02 Electrical Grid Monitoring Ltd. BNC cap assembly

Also Published As

Publication number Publication date
TWD162134S (en) 2014-08-01

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