USD822081S1 - Rotary tool for boat of semiconductor manufacturing apparatus - Google Patents

Rotary tool for boat of semiconductor manufacturing apparatus Download PDF

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Publication number
USD822081S1
USD822081S1 US29/572,541 US201629572541F USD822081S US D822081 S1 USD822081 S1 US D822081S1 US 201629572541 F US201629572541 F US 201629572541F US D822081 S USD822081 S US D822081S
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US
United States
Prior art keywords
boat
manufacturing apparatus
semiconductor manufacturing
rotary tool
view
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
US29/572,541
Inventor
Takatomo Yamaguchi
Takashi Nogami
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kokusai Electric Corp
Original Assignee
Hitachi Kokusai Electric Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Kokusai Electric Inc filed Critical Hitachi Kokusai Electric Inc
Assigned to HITACHI KOKUSAI ELECTRIC INC. reassignment HITACHI KOKUSAI ELECTRIC INC. ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: NOGAMI, TAKASHI, YAMAGUCHI, TAKATOMO
Application granted granted Critical
Publication of USD822081S1 publication Critical patent/USD822081S1/en
Assigned to Kokusai Electric Corporation reassignment Kokusai Electric Corporation ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: HITACHI KOKUSAI ELECTRIC INC.
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Description

FIG. 1 is a perspective view of a rotary tool for boat of semiconductor manufacturing apparatus showing my new design;
FIG. 2 is a front elevational view thereof;
FIG. 3 is a rear elevational view thereof;
FIG. 4 is a left side elevational view thereof;
FIG. 5 is a right side elevational view thereof;
FIG. 6 is a top plan view thereof;
FIG. 7 is a bottom plan view thereof; and,
FIG. 8 is a cross-sectional view taken along line 8-8 in FIG. 6 thereof.
The broken lines show portions of a rotary tool for boat of semiconductor manufacturing apparatus which form no part of the claimed design.
The “dash-dot” broken lines define the bounds of the claim and form no part thereof.

Claims (1)

    CLAIM
  1. We claim the ornamental design for a rotary tool for boat of semiconductor manufacturing apparatus, as shown (and described).
US29/572,541 2016-02-10 2016-07-28 Rotary tool for boat of semiconductor manufacturing apparatus Active USD822081S1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2016-002832 2016-01-08
JPD2016-2832F JP1564807S (en) 2016-02-10 2016-02-10

Publications (1)

Publication Number Publication Date
USD822081S1 true USD822081S1 (en) 2018-07-03

Family

ID=57406432

Family Applications (1)

Application Number Title Priority Date Filing Date
US29/572,541 Active USD822081S1 (en) 2016-02-10 2016-07-28 Rotary tool for boat of semiconductor manufacturing apparatus

Country Status (3)

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US (1) USD822081S1 (en)
JP (1) JP1564807S (en)
TW (1) TWD183006S (en)

Cited By (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD861758S1 (en) * 2017-07-10 2019-10-01 Lincoln Global, Inc. Vented plasma cutting electrode
USD871466S1 (en) * 2017-07-25 2019-12-31 Kokusai Electric Corporation Rotary tool for boat of semiconductor manufacturing apparatus
USD885867S1 (en) 2018-12-28 2020-06-02 Topcon Positioning Systems, Inc. Adaptor
USD885866S1 (en) * 2018-12-28 2020-06-02 Topcon Positioning Systems, Inc. Mount base
USD896114S1 (en) 2018-12-28 2020-09-15 Topcon Positioning Systems, Inc. Sensor housing
USD896662S1 (en) 2018-12-28 2020-09-22 Topcon Positioning Systems, Inc. Sensor housing
USD896668S1 (en) 2018-12-28 2020-09-22 Topcon Positioning Systems, Inc. Sensor housing
USD896670S1 (en) 2018-12-28 2020-09-22 Topcon Positioning Systems, Inc. Sensor housing
US10781573B2 (en) 2018-12-28 2020-09-22 Topcon Positioning Systems, Inc. Construction machine sensor system
USD896667S1 (en) 2018-12-28 2020-09-22 Topcon Positioning Systems, Inc. Sensor housing
USD896669S1 (en) 2018-12-28 2020-09-22 Topcon Positioning Systems, Inc. Sensor housing
USD896663S1 (en) 2018-12-28 2020-09-22 Topcon Positioning Systems, Inc. Sensor housing
USD896664S1 (en) 2018-12-28 2020-09-22 Topcon Positioning Systems, Inc. Sensor housing
USD896666S1 (en) 2018-12-28 2020-09-22 Topcon Positioning Systems, Inc. Sensor housing
USD896665S1 (en) 2018-12-28 2020-09-22 Topcon Positioning Systems, Inc. Sensor housing
USD897225S1 (en) 2018-12-28 2020-09-29 Topcon Positioning Systems, Inc. Sensor housing
USD910396S1 (en) * 2018-09-24 2021-02-16 3M Innovative Properties Company Attachment for a sanding device
USD935424S1 (en) * 2019-05-06 2021-11-09 Lam Research Corporation Semiconductor wafer processing tool
USD981973S1 (en) * 2021-05-11 2023-03-28 Asm Ip Holding B.V. Reactor wall for substrate processing apparatus

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11887878B2 (en) 2019-06-28 2024-01-30 Applied Materials, Inc. Detachable biasable electrostatic chuck for high temperature applications
USD947914S1 (en) 2020-11-23 2022-04-05 Applied Materials, Inc. Base plate for a processing chamber substrate support

Citations (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD293798S (en) * 1985-01-18 1988-01-19 Herbert Johnson Tool for holding round thread dies
USD342957S (en) * 1991-08-07 1994-01-04 George thomas f Rotating dryer siphon
USD471563S1 (en) * 2001-11-09 2003-03-11 Nordson Corporation In line pump throat
USD507280S1 (en) * 2004-09-27 2005-07-12 Henry C. Chu End cap for air compressor
USD555174S1 (en) * 2006-09-20 2007-11-13 Y.K. Co., Ltd. Compressor cover for automobiles
USD560109S1 (en) * 2005-11-28 2008-01-22 Mobiletron Electronics Co., Ltd. Adapter for impact rotary tool
US7569186B2 (en) * 2001-12-28 2009-08-04 3M Innovative Properties Company Systems for using sample processing devices
USD617346S1 (en) * 2009-06-02 2010-06-08 Chu Henry C Air compressor
CA2769926A1 (en) * 2009-08-03 2011-02-10 Frelk Industries Pty Ltd Cutting device
USD652845S1 (en) * 2011-01-21 2012-01-24 GCS, Inc., Ltd. Cylinder housing for air compressor
USD656161S1 (en) * 2011-05-06 2012-03-20 GCS Inc., Ltd Compressor cover for automobiles
USD673584S1 (en) * 2011-08-16 2013-01-01 GCS. Inc., Ltd. Compressor cover for automobiles
USD678344S1 (en) * 2012-03-02 2013-03-19 Henry C. Chu Cap for air compressor
USD690336S1 (en) * 2011-06-30 2013-09-24 Adp Distributors, Inc. Hydraulic turbocharger pedestal seal
USD700628S1 (en) * 2013-07-16 2014-03-04 Henry C. Chu Cap for air compressor
USD724624S1 (en) * 2013-03-18 2015-03-17 Tbg Technische Beteiligungsgesellschaft Ag Pump part
USD735427S1 (en) * 2013-02-01 2015-07-28 Ebara Corporation Roller shaft for substrate cleaning
USD738935S1 (en) * 2014-07-15 2015-09-15 Henry C. Chu Cap for air compressor
US20160243671A1 (en) * 2015-02-19 2016-08-25 GM Global Technology Operations LLC Quick change adapter for grinding wheels
USD775248S1 (en) * 2015-10-06 2016-12-27 Roly Llc Pipe chuck teeth
USD784101S1 (en) * 2015-08-12 2017-04-18 Sonnax Industries, Inc. Seal installation tool
USD786875S1 (en) * 2016-03-31 2017-05-16 Microscope Network Co., Ltd. Adapter for mounting optical equipment to mobile computer

Patent Citations (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD293798S (en) * 1985-01-18 1988-01-19 Herbert Johnson Tool for holding round thread dies
USD342957S (en) * 1991-08-07 1994-01-04 George thomas f Rotating dryer siphon
USD471563S1 (en) * 2001-11-09 2003-03-11 Nordson Corporation In line pump throat
USD506210S1 (en) * 2001-11-09 2005-06-14 Nordson Corporation In line pump throat
US7569186B2 (en) * 2001-12-28 2009-08-04 3M Innovative Properties Company Systems for using sample processing devices
USD507280S1 (en) * 2004-09-27 2005-07-12 Henry C. Chu End cap for air compressor
USD560109S1 (en) * 2005-11-28 2008-01-22 Mobiletron Electronics Co., Ltd. Adapter for impact rotary tool
USD555174S1 (en) * 2006-09-20 2007-11-13 Y.K. Co., Ltd. Compressor cover for automobiles
USD617346S1 (en) * 2009-06-02 2010-06-08 Chu Henry C Air compressor
CA2769926A1 (en) * 2009-08-03 2011-02-10 Frelk Industries Pty Ltd Cutting device
USD652845S1 (en) * 2011-01-21 2012-01-24 GCS, Inc., Ltd. Cylinder housing for air compressor
USD656161S1 (en) * 2011-05-06 2012-03-20 GCS Inc., Ltd Compressor cover for automobiles
USD690336S1 (en) * 2011-06-30 2013-09-24 Adp Distributors, Inc. Hydraulic turbocharger pedestal seal
USD673584S1 (en) * 2011-08-16 2013-01-01 GCS. Inc., Ltd. Compressor cover for automobiles
USD678344S1 (en) * 2012-03-02 2013-03-19 Henry C. Chu Cap for air compressor
USD735427S1 (en) * 2013-02-01 2015-07-28 Ebara Corporation Roller shaft for substrate cleaning
USD724624S1 (en) * 2013-03-18 2015-03-17 Tbg Technische Beteiligungsgesellschaft Ag Pump part
USD700628S1 (en) * 2013-07-16 2014-03-04 Henry C. Chu Cap for air compressor
USD738935S1 (en) * 2014-07-15 2015-09-15 Henry C. Chu Cap for air compressor
US20160243671A1 (en) * 2015-02-19 2016-08-25 GM Global Technology Operations LLC Quick change adapter for grinding wheels
USD784101S1 (en) * 2015-08-12 2017-04-18 Sonnax Industries, Inc. Seal installation tool
USD775248S1 (en) * 2015-10-06 2016-12-27 Roly Llc Pipe chuck teeth
USD786875S1 (en) * 2016-03-31 2017-05-16 Microscope Network Co., Ltd. Adapter for mounting optical equipment to mobile computer

Cited By (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD861758S1 (en) * 2017-07-10 2019-10-01 Lincoln Global, Inc. Vented plasma cutting electrode
USD871466S1 (en) * 2017-07-25 2019-12-31 Kokusai Electric Corporation Rotary tool for boat of semiconductor manufacturing apparatus
USD910396S1 (en) * 2018-09-24 2021-02-16 3M Innovative Properties Company Attachment for a sanding device
US10781573B2 (en) 2018-12-28 2020-09-22 Topcon Positioning Systems, Inc. Construction machine sensor system
USD896669S1 (en) 2018-12-28 2020-09-22 Topcon Positioning Systems, Inc. Sensor housing
USD896662S1 (en) 2018-12-28 2020-09-22 Topcon Positioning Systems, Inc. Sensor housing
USD896668S1 (en) 2018-12-28 2020-09-22 Topcon Positioning Systems, Inc. Sensor housing
USD896670S1 (en) 2018-12-28 2020-09-22 Topcon Positioning Systems, Inc. Sensor housing
USD885866S1 (en) * 2018-12-28 2020-06-02 Topcon Positioning Systems, Inc. Mount base
USD896667S1 (en) 2018-12-28 2020-09-22 Topcon Positioning Systems, Inc. Sensor housing
USD896114S1 (en) 2018-12-28 2020-09-15 Topcon Positioning Systems, Inc. Sensor housing
USD896663S1 (en) 2018-12-28 2020-09-22 Topcon Positioning Systems, Inc. Sensor housing
USD896664S1 (en) 2018-12-28 2020-09-22 Topcon Positioning Systems, Inc. Sensor housing
USD896666S1 (en) 2018-12-28 2020-09-22 Topcon Positioning Systems, Inc. Sensor housing
USD896665S1 (en) 2018-12-28 2020-09-22 Topcon Positioning Systems, Inc. Sensor housing
USD897225S1 (en) 2018-12-28 2020-09-29 Topcon Positioning Systems, Inc. Sensor housing
USD885867S1 (en) 2018-12-28 2020-06-02 Topcon Positioning Systems, Inc. Adaptor
USD935424S1 (en) * 2019-05-06 2021-11-09 Lam Research Corporation Semiconductor wafer processing tool
USD981973S1 (en) * 2021-05-11 2023-03-28 Asm Ip Holding B.V. Reactor wall for substrate processing apparatus

Also Published As

Publication number Publication date
JP1564807S (en) 2016-12-05
TWD183006S (en) 2017-05-11

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