TWD192486S - Rotator for substrate processing apparatus - Google Patents

Rotator for substrate processing apparatus

Info

Publication number
TWD192486S
TWD192486S TW106306962F TW106306962F TWD192486S TW D192486 S TWD192486 S TW D192486S TW 106306962 F TW106306962 F TW 106306962F TW 106306962 F TW106306962 F TW 106306962F TW D192486 S TWD192486 S TW D192486S
Authority
TW
Taiwan
Prior art keywords
substrate processing
rotator
processing apparatus
article
processing device
Prior art date
Application number
TW106306962F
Other languages
English (en)
Inventor
岡田裕巳
高島義和
Original Assignee
日商日立國際電氣股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日商日立國際電氣股份有限公司 filed Critical 日商日立國際電氣股份有限公司
Publication of TWD192486S publication Critical patent/TWD192486S/zh

Links

Abstract

【物品用途】;本設計的物品是基板處理裝置用旋轉器，本物品是安裝在用來處理晶圓的基板處理裝置，是經由凸緣來安裝使用的旋轉具，用以將保持晶圓的晶舟載置在旋轉部，並使晶舟旋轉。再者，驅動旋轉部的馬達，係安裝在馬達安裝部來使用。;【設計說明】;(無)

Description

基板處理裝置用旋轉器
本設計的物品是基板處理裝置用旋轉器，本物品是安裝在用來處理晶圓的基板處理裝置，是經由凸緣來安裝使用的旋轉具，用以將保持晶圓的晶舟載置在旋轉部，並使晶舟旋轉。再者，驅動旋轉部的馬達，係安裝在馬達安裝部來使用。
TW106306962F 2017-07-25 2017-11-28 Rotator for substrate processing apparatus TWD192486S (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JPD2017-16039F JP1596898S (zh) 2017-07-25 2017-07-25
JP2017-016039 2017-07-25

Publications (1)

Publication Number Publication Date
TWD192486S true TWD192486S (zh) 2018-08-21

Family

ID=61066493

Family Applications (1)

Application Number Title Priority Date Filing Date
TW106306962F TWD192486S (zh) 2017-07-25 2017-11-28 Rotator for substrate processing apparatus

Country Status (3)

Country Link
US (1) USD871466S1 (zh)
JP (1) JP1596898S (zh)
TW (1) TWD192486S (zh)

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Publication number Priority date Publication date Assignee Title
JP1596897S (zh) * 2017-07-25 2018-02-05
USD935424S1 (en) * 2019-05-06 2021-11-09 Lam Research Corporation Semiconductor wafer processing tool
US11536029B2 (en) 2019-11-20 2022-12-27 Hubbell Incorporated Adjustable electrical fixture mounting assembly
USD927963S1 (en) * 2019-11-20 2021-08-17 Hubbell Incorporated Adjustable fixture mounting assembly
USD997110S1 (en) * 2021-05-19 2023-08-29 Zhejiang Dongyang Dongci Chengji Electronics Co., Ltd. Circulator

Citations (1)

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Publication number Priority date Publication date Assignee Title
TWI270435B (en) 2004-10-15 2007-01-11 Sankyo Seisakusho Kk Rotary table apparatus

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Patent Citations (1)

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Publication number Priority date Publication date Assignee Title
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Also Published As

Publication number Publication date
JP1596898S (zh) 2018-02-05
USD871466S1 (en) 2019-12-31

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