CN302511073S - 衬底处理装置用旋转器 - Google Patents

衬底处理装置用旋转器

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Publication number
CN302511073S
CN302511073S CN201330098038.3 CN302511073S CN 302511073 S CN302511073 S CN 302511073S CN 302511073 S CN302511073 S CN 302511073S
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CN
China
Prior art keywords
substrate processing
spinner
design
product
processing equipment
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
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CN201330098038.3
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English (en)
Inventor
加贺谷彻
嶋田宽哲
阿部贤卓
Original Assignee
株式会社日立国际电气
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Publication of CN302511073S publication Critical patent/CN302511073S/zh
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Expired - Lifetime legal-status Critical Current

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Abstract

1.本外观设计产品的名称为衬底处理装置用旋转器。2.本外观设计产品安装在对晶片进行处理的衬底处理装置上使用,将保持晶片的舟皿载置于其旋转部上来使舟皿旋转。3.本外观设计产品的设计要点在于产品的形状。4.指定立体图1为最能表明设计要点的视图。
CN201330098038.3 2012-11-30 2013-03-25 衬底处理装置用旋转器 Expired - Lifetime CN302511073S (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2012-029398 2012-11-30

Publications (1)

Publication Number Publication Date
CN302511073S true CN302511073S (zh) 2013-07-24

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Legal Events

Date Code Title Description
GR01 Patent grant
TR01 Transfer of patent right

Effective date of registration: 20181207

Main classification number: 15-99

Address after: Tokyo, Japan

Patentee after: KOKUSAI ELECTRIC Corp.

Address before: Tokyo, Japan

Patentee before: HITACHI KOKUSAI ELECTRIC Inc.

CX01 Expiry of patent term

Granted publication date: 20130724

Main classification number: 15-99