CN302527184S - 衬底处理装置用旋转器 - Google Patents
衬底处理装置用旋转器Info
- Publication number
- CN302527184S CN302527184S CN201330098036.4 CN302527184S CN 302527184 S CN302527184 S CN 302527184S CN 302527184 S CN302527184 S CN 302527184S
- Authority
- CN
- China
- Prior art keywords
- substrate processing
- spinner
- design
- product
- processing equipment
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
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Abstract
1.本外观设计产品的名称为衬底处理装置用旋转器。2.本外观设计产品安装在对晶片进行处理的衬底处理装置上使用，将保持晶片的舟皿载置于其旋转部上来使舟皿旋转。3.本外观设计产品的设计要点在于产品的形状。4.指定立体图1为最能表明设计要点的视图。
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2012-029397 | 2012-02-14 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN302527184S true CN302527184S (zh) | 2013-08-07 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20181203 Main classification number: 15-99 Address after: Tokyo, Japan Patentee after: KOKUSAI ELECTRIC Corp. Address before: Tokyo, Japan Patentee before: HITACHI KOKUSAI ELECTRIC Inc. |
|
| CX01 | Expiry of patent term |
Granted publication date: 20130807 Main classification number: 15-99 |