CN302373035S - 上下料机(管式pecvd) - Google Patents
上下料机(管式pecvd)Info
- Publication number
- CN302373035S CN302373035S CN201230515873.8 CN302373035S CN 302373035 S CN302373035 S CN 302373035S CN 302373035 S CN302373035 S CN 302373035S
- Authority
- CN
- China
- Prior art keywords
- design
- loading
- unloading machine
- product
- tubular pecvd
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Abstract
1.本外观设计产品的名称:上下料机(管式PECVD)。2.本外观设计产品的用途:本设备属于太阳能硅片加工自动化设备领域,实现将承载盒中的未经PECVD处理的硅片装入石墨舟中,同时实现将石墨舟中的经PECVD处理过的硅片装入承载盒。3.本外观设计的设计要点:在于产品各视图的形状。4.最能表明设计要点的图片或者照片:主视图。
Publications (1)
Publication Number | Publication Date |
---|---|
CN302373035S true CN302373035S (zh) | 2013-03-27 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
GR01 | Patent grant | ||
CP03 | Change of name, title or address |
Main classification number: 15-99 Address after: National hi tech Industrial Development Zone, Wuxi City, Jiangsu province 214028 new Xi Road No. 20 Patentee after: WUXI LEAD INTELLIGENT EQUIPMENT Co.,Ltd. Address before: 214028 Jiangsu New District of Wuxi, national technology development zone Xi Road No. 20 Patentee before: WUXI LEAD AUTO EQUIPMENT Co.,Ltd. |
|
CX01 | Expiry of patent term |
Granted publication date: 20130327 Main classification number: 15-99 |